DE3740515A1 - Justiereinrichtung fuer deformierbaren spiegel - Google Patents
Justiereinrichtung fuer deformierbaren spiegelInfo
- Publication number
- DE3740515A1 DE3740515A1 DE19873740515 DE3740515A DE3740515A1 DE 3740515 A1 DE3740515 A1 DE 3740515A1 DE 19873740515 DE19873740515 DE 19873740515 DE 3740515 A DE3740515 A DE 3740515A DE 3740515 A1 DE3740515 A1 DE 3740515A1
- Authority
- DE
- Germany
- Prior art keywords
- mirror
- adjustment
- actuators
- actuator
- deformation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 claims 1
- 238000012876 topography Methods 0.000 abstract description 8
- 230000007613 environmental effect Effects 0.000 abstract description 4
- 230000007774 longterm Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000006735 deficit Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000002372 labelling Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
- G05D3/20—Control of position or direction using feedback using a digital comparing device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Lasers (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19873740515 DE3740515A1 (de) | 1987-11-30 | 1987-11-30 | Justiereinrichtung fuer deformierbaren spiegel |
| FR8815680A FR2623917B1 (fr) | 1987-11-30 | 1988-11-30 | Dispositif d'ajustage pour miroir deformable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19873740515 DE3740515A1 (de) | 1987-11-30 | 1987-11-30 | Justiereinrichtung fuer deformierbaren spiegel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3740515A1 true DE3740515A1 (de) | 1989-06-08 |
| DE3740515C2 DE3740515C2 (https=) | 1989-09-21 |
Family
ID=6341559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19873740515 Granted DE3740515A1 (de) | 1987-11-30 | 1987-11-30 | Justiereinrichtung fuer deformierbaren spiegel |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE3740515A1 (https=) |
| FR (1) | FR2623917B1 (https=) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3916264A1 (de) * | 1989-05-18 | 1990-11-22 | Diehl Gmbh & Co | Einrichtung zur strahlfuehrung bei der laser-werkstueckbearbeitung |
| DE4108419A1 (de) * | 1991-03-15 | 1992-09-17 | Diehl Gmbh & Co | Einrichtung zur strahlbeeinflussung bei der werkstueckbearbeitung mit einem hochenergielaserstrahl |
| FR2684191A1 (fr) * | 1991-11-23 | 1993-05-28 | Diehl Gmbh & Co | Miroir deformable. |
| US6870632B2 (en) | 2001-03-30 | 2005-03-22 | Carl Zeiss Smt Ag | Apparatus for mounting an optical element in an optical system |
| US7082693B2 (en) | 2001-03-30 | 2006-08-01 | Carl Zeiss Smt Ag | Adjusting apparatus for devices and for setting adjustments |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5022272A (en) * | 1989-12-14 | 1991-06-11 | Trw Inc. | Locally compensated deformation sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2162713A (en) * | 1984-06-15 | 1986-02-05 | Diehl Gmbh & Co | Target detection and tracking; beam-focussing |
| US4679915A (en) * | 1985-01-23 | 1987-07-14 | Diehl Gmbh & Co. | Deformable mirror |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4601553A (en) * | 1984-10-17 | 1986-07-22 | The United States Of America As Represented By The Secretary Of The Air Force | Fine figuring actuator |
-
1987
- 1987-11-30 DE DE19873740515 patent/DE3740515A1/de active Granted
-
1988
- 1988-11-30 FR FR8815680A patent/FR2623917B1/fr not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2162713A (en) * | 1984-06-15 | 1986-02-05 | Diehl Gmbh & Co | Target detection and tracking; beam-focussing |
| US4679915A (en) * | 1985-01-23 | 1987-07-14 | Diehl Gmbh & Co. | Deformable mirror |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3916264A1 (de) * | 1989-05-18 | 1990-11-22 | Diehl Gmbh & Co | Einrichtung zur strahlfuehrung bei der laser-werkstueckbearbeitung |
| DE4108419A1 (de) * | 1991-03-15 | 1992-09-17 | Diehl Gmbh & Co | Einrichtung zur strahlbeeinflussung bei der werkstueckbearbeitung mit einem hochenergielaserstrahl |
| FR2684191A1 (fr) * | 1991-11-23 | 1993-05-28 | Diehl Gmbh & Co | Miroir deformable. |
| US6870632B2 (en) | 2001-03-30 | 2005-03-22 | Carl Zeiss Smt Ag | Apparatus for mounting an optical element in an optical system |
| US7082693B2 (en) | 2001-03-30 | 2006-08-01 | Carl Zeiss Smt Ag | Adjusting apparatus for devices and for setting adjustments |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3740515C2 (https=) | 1989-09-21 |
| FR2623917A1 (fr) | 1989-06-02 |
| FR2623917B1 (fr) | 1992-08-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: DIEHL STIFTUNG & CO., 90478 NUERNBERG, DE |
|
| 8339 | Ceased/non-payment of the annual fee |