DE3580740D1 - Vorrichtung und verfahren zum gewinnen einer oberflaechenprofilometrie und von dreidimensionalen oberflaechenkonturen. - Google Patents

Vorrichtung und verfahren zum gewinnen einer oberflaechenprofilometrie und von dreidimensionalen oberflaechenkonturen.

Info

Publication number
DE3580740D1
DE3580740D1 DE8585306523T DE3580740T DE3580740D1 DE 3580740 D1 DE3580740 D1 DE 3580740D1 DE 8585306523 T DE8585306523 T DE 8585306523T DE 3580740 T DE3580740 T DE 3580740T DE 3580740 D1 DE3580740 D1 DE 3580740D1
Authority
DE
Germany
Prior art keywords
obtaining
profilometry
contours
dimensional surface
dimensional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585306523T
Other languages
English (en)
Inventor
Maurice Halioua
Venugopal Srinivasan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New York Institute Of Technology Old Westbury Ny Us
New York Institute of Technology
Original Assignee
New York Institute Of Technology Old Westbury Ny Us
New York Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27095944&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3580740(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from US06/650,824 external-priority patent/US4641972A/en
Application filed by New York Institute Of Technology Old Westbury Ny Us, New York Institute of Technology filed Critical New York Institute Of Technology Old Westbury Ny Us
Application granted granted Critical
Publication of DE3580740D1 publication Critical patent/DE3580740D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
DE8585306523T 1984-09-14 1985-09-13 Vorrichtung und verfahren zum gewinnen einer oberflaechenprofilometrie und von dreidimensionalen oberflaechenkonturen. Expired - Lifetime DE3580740D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/650,824 US4641972A (en) 1984-09-14 1984-09-14 Method and apparatus for surface profilometry
US06/753,722 US4657394A (en) 1984-09-14 1985-07-10 Apparatus and method for obtaining three dimensional surface contours

Publications (1)

Publication Number Publication Date
DE3580740D1 true DE3580740D1 (de) 1991-01-10

Family

ID=27095944

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585306523T Expired - Lifetime DE3580740D1 (de) 1984-09-14 1985-09-13 Vorrichtung und verfahren zum gewinnen einer oberflaechenprofilometrie und von dreidimensionalen oberflaechenkonturen.

Country Status (4)

Country Link
US (1) US4657394A (de)
EP (1) EP0182469B1 (de)
CA (1) CA1261656A (de)
DE (1) DE3580740D1 (de)

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Also Published As

Publication number Publication date
EP0182469B1 (de) 1990-11-28
US4657394A (en) 1987-04-14
EP0182469A1 (de) 1986-05-28
CA1261656A (en) 1989-09-26

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8339 Ceased/non-payment of the annual fee