DE3426165A1 - Dynamometer - Google Patents

Dynamometer

Info

Publication number
DE3426165A1
DE3426165A1 DE19843426165 DE3426165A DE3426165A1 DE 3426165 A1 DE3426165 A1 DE 3426165A1 DE 19843426165 DE19843426165 DE 19843426165 DE 3426165 A DE3426165 A DE 3426165A DE 3426165 A1 DE3426165 A1 DE 3426165A1
Authority
DE
Germany
Prior art keywords
dynamometer
measuring element
electrode
measuring
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19843426165
Other languages
German (de)
Inventor
Hans-Rudolf Dr Zullinger
Konstantin Dr Anagnostopoulos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mettler-Toledo AG
Original Assignee
Mettler Instrumente AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to CH504883A priority Critical patent/CH662181A5/en
Application filed by Mettler Instrumente AG filed Critical Mettler Instrumente AG
Publication of DE3426165A1 publication Critical patent/DE3426165A1/en
Application status is Withdrawn legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress in general
    • G01L1/14Measuring force or stress in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142Measuring force or stress in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/148Measuring force or stress in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors using semiconductive material, e.g. silicon
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01GWEIGHING
    • G01G3/00Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing

Abstract

A dynamometer is proposed having a measuring element which yields resiliently under load and an arrangement for capacitively detecting the spring deflection, which arrangement comprises a fixed and a movable electrode. In this case, the measuring element (12; 46; 90; 100) consists of silicon and is provided with a thin-film electrode (34'; 56, 58; 86'; 96'), the fixed electrode (34; 54, 60; 86; 96) is arranged on a substrate (14; 42, 52; 84; 94), and the measuring element is connected to the substrate via spacers (24; 48; 90, 92; 109) in a permanent fashion to form a module. The said features permit an extremely compact design for the measuring cell of the dynamometer and thus also of the dynamometer itself. Furthermore, they permit economic series production of the measuring cell with constant quality. Application, for example, for use in scales. <IMAGE>
DE19843426165 1983-09-16 1984-07-16 Dynamometer Withdrawn DE3426165A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CH504883A CH662181A5 (en) 1983-09-16 1983-09-16 Dynamometer.

Publications (1)

Publication Number Publication Date
DE3426165A1 true DE3426165A1 (en) 1985-04-04

Family

ID=4287077

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843426165 Withdrawn DE3426165A1 (en) 1983-09-16 1984-07-16 Dynamometer

Country Status (3)

Country Link
JP (1) JPS6073425A (en)
CH (1) CH662181A5 (en)
DE (1) DE3426165A1 (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0335693A2 (en) * 1988-03-31 1989-10-04 Lynxvale Limited Capacitative weight sensor
EP0342505A2 (en) * 1988-05-17 1989-11-23 Aran Engineering Development Ltd Portable weighing scale
WO1991005231A1 (en) * 1989-09-29 1991-04-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for measuring mechanical forces and their dynamic effects
DE4027753A1 (en) * 1990-09-01 1992-03-05 Karlheinz Dr Ziegler Capacitive force sensor
DE19601077A1 (en) * 1996-01-13 1997-07-24 Bosch Gmbh Robert Force sensor esp. pressure sensor
DE19600888A1 (en) * 1996-01-12 1997-07-24 Sican Gmbh Container with device for determining fullness of containers
DE19716521A1 (en) * 1997-04-19 1998-10-22 Bosch Gmbh Robert Force sensor esp pressure sensor in LTCC technology
WO1999067605A1 (en) * 1998-06-24 1999-12-29 Valtion Teknillinen Tutkimuskeskus Micromechanical precision silicon scale
EP0967468A1 (en) * 1998-06-26 1999-12-29 Bossard AG Capacitive force sensor
EP1077367A1 (en) * 1999-03-04 2001-02-21 Riken Capacitive force gauge
WO2001063645A2 (en) * 2000-02-23 2001-08-30 National Center For Scientific Research 'demokrit Os Institute Of Microelectronics Capacitive pressure-responsive devices and their fabrication
GR20010100079A (en) * 2001-02-13 2002-11-13 Pascal Normand Capacity pressure-responsive devices and their fabrication
EP1794792A2 (en) * 2004-09-29 2007-06-13 Loadstar Sensors, Inc. Gap-change sensing through capacitive techniques

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0718764B2 (en) * 1987-10-07 1995-03-06 松下電器産業株式会社 Weight sensor element
US7343814B2 (en) * 2006-04-03 2008-03-18 Loadstar Sensors, Inc. Multi-zone capacitive force sensing device and methods
CN102004010B (en) * 2009-09-01 2014-02-26 广东乐心医疗电子股份有限公司 Force transducer and weighting device with same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142432A (en) * 1980-04-09 1981-11-06 Hitachi Ltd Electrostatic capacitance type pressure sensor
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer

Cited By (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0335693A3 (en) * 1988-03-31 1990-06-27 David Cebon Capacitative weight sensor
US4984128A (en) * 1988-03-31 1991-01-08 David Cebon Capacitative weight sensor
EP0335693A2 (en) * 1988-03-31 1989-10-04 Lynxvale Limited Capacitative weight sensor
EP0342505A2 (en) * 1988-05-17 1989-11-23 Aran Engineering Development Ltd Portable weighing scale
EP0342505A3 (en) * 1988-05-17 1990-06-20 Aran Engineering Development Ltd Portable weighing scale
DE3932618A1 (en) * 1989-09-29 1991-04-18 Fraunhofer Ges Forschung Means of mechanical forces and dynamic effects for measuring
WO1991005231A1 (en) * 1989-09-29 1991-04-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for measuring mechanical forces and their dynamic effects
DE4027753A1 (en) * 1990-09-01 1992-03-05 Karlheinz Dr Ziegler Capacitive force sensor
WO1992004608A1 (en) * 1990-09-01 1992-03-19 Karlheinz Ziegler Capacitive strain gauge
AU653164B2 (en) * 1990-09-01 1994-09-22 Karlheinz Ziegler Capacitive strain gauge
DE19600888C2 (en) * 1996-01-12 1998-09-24 Heinz Klemp Container with a means for determining the filling capacity of the container
DE19600888A1 (en) * 1996-01-12 1997-07-24 Sican Gmbh Container with device for determining fullness of containers
DE19601077C2 (en) * 1996-01-13 2000-01-05 Bosch Gmbh Robert force sensor
DE19601077A1 (en) * 1996-01-13 1997-07-24 Bosch Gmbh Robert Force sensor esp. pressure sensor
DE19716521A1 (en) * 1997-04-19 1998-10-22 Bosch Gmbh Robert Force sensor esp pressure sensor in LTCC technology
DE19716521C2 (en) * 1997-04-19 2001-03-01 Bosch Gmbh Robert Force sensor in LTCC technology
US6513388B1 (en) 1998-06-24 2003-02-04 Valtion Teknillinen Tutkimuskeskus Micromechanical precision silicon scale
WO1999067605A1 (en) * 1998-06-24 1999-12-29 Valtion Teknillinen Tutkimuskeskus Micromechanical precision silicon scale
EP0967468A1 (en) * 1998-06-26 1999-12-29 Bossard AG Capacitive force sensor
EP1077367A1 (en) * 1999-03-04 2001-02-21 Riken Capacitive force gauge
EP1077367A4 (en) * 1999-03-04 2002-05-22 Riken Capacitive force gauge
US6628124B1 (en) 1999-03-04 2003-09-30 Riken Electrocapacitive force measuring apparatus
WO2001063645A2 (en) * 2000-02-23 2001-08-30 National Center For Scientific Research 'demokrit Os Institute Of Microelectronics Capacitive pressure-responsive devices and their fabrication
WO2001063645A3 (en) * 2000-02-23 2002-01-31 Nat Ct Scient Res Demokritos Capacitive pressure-responsive devices and their fabrication
US6704185B2 (en) 2000-02-23 2004-03-09 National Center For Scientific Research Capacitive pressure-responsive devices and their fabrication
GR20010100079A (en) * 2001-02-13 2002-11-13 Pascal Normand Capacity pressure-responsive devices and their fabrication
EP1794792A2 (en) * 2004-09-29 2007-06-13 Loadstar Sensors, Inc. Gap-change sensing through capacitive techniques
EP1794792A4 (en) * 2004-09-29 2010-02-17 Loadstar Sensors Inc Gap-change sensing through capacitive techniques

Also Published As

Publication number Publication date
JPS6073425A (en) 1985-04-25
CH662181A5 (en) 1987-09-15

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Legal Events

Date Code Title Description
8127 New person/name/address of the applicant

Owner name: METTLER-TOLEDO AG, GREIFENSEE, CH

8139 Disposal/non-payment of the annual fee