DE3369002D1 - Method and apparatus for studying the physical characteristics of a semi-conducting plate - Google Patents

Method and apparatus for studying the physical characteristics of a semi-conducting plate

Info

Publication number
DE3369002D1
DE3369002D1 DE8383108764T DE3369002T DE3369002D1 DE 3369002 D1 DE3369002 D1 DE 3369002D1 DE 8383108764 T DE8383108764 T DE 8383108764T DE 3369002 T DE3369002 T DE 3369002T DE 3369002 D1 DE3369002 D1 DE 3369002D1
Authority
DE
Germany
Prior art keywords
studying
semi
physical characteristics
conducting plate
conducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383108764T
Other languages
English (en)
Inventor
Jean-Yves Barraud
Gerard Tourillon
Francois Arnould
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Photowatt International Sa Bourgoin Jallieu Fr
Original Assignee
Compagnie Generale dElectricite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Generale dElectricite SA filed Critical Compagnie Generale dElectricite SA
Application granted granted Critical
Publication of DE3369002D1 publication Critical patent/DE3369002D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Weting (AREA)
DE8383108764T 1982-09-08 1983-09-06 Method and apparatus for studying the physical characteristics of a semi-conducting plate Expired DE3369002D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8215215A FR2532760A1 (fr) 1982-09-08 1982-09-08 Procede et dispositif pour obtenir des caracteristiques physiques d'un materiau semi-conducteur

Publications (1)

Publication Number Publication Date
DE3369002D1 true DE3369002D1 (en) 1987-02-12

Family

ID=9277290

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383108764T Expired DE3369002D1 (en) 1982-09-08 1983-09-06 Method and apparatus for studying the physical characteristics of a semi-conducting plate

Country Status (5)

Country Link
US (1) US4487661A (de)
EP (1) EP0103806B1 (de)
CA (1) CA1187938A (de)
DE (1) DE3369002D1 (de)
FR (1) FR2532760A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
HU199020B (en) * 1987-05-04 1989-12-28 Magyar Tudomanyos Akademia Method and apparatus for measuring the layer thickness of semiconductor layer structures
US5015346A (en) * 1990-04-10 1991-05-14 United States Department Of Energy Electrochemical method for defect delineation in silicon-on-insulator wafers
US5348497A (en) * 1992-08-14 1994-09-20 Applied Materials, Inc. High voltage vaccum feed-through electrical connector
DE4305297C2 (de) * 1993-02-20 1998-09-24 Telefunken Microelectron Strukturbeize für Halbleiter und deren Anwendung
US20080207422A1 (en) * 2002-04-05 2008-08-28 Brunel University Centrifuge

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3379625A (en) * 1964-03-30 1968-04-23 Gen Electric Semiconductor testing
US3530045A (en) * 1966-12-27 1970-09-22 James R Alburger Electrically responsive color-forming method of nondestructive testing
US3660250A (en) * 1967-12-22 1972-05-02 Ibm Method of determining impurity profile of a semiconductor body
CH543098A (de) * 1972-03-30 1973-10-15 Bbc Brown Boveri & Cie Verfahren und Einrichtung zur Untersuchung von dotiertem Halbleitermaterial
FR2344847A1 (fr) * 1976-03-15 1977-10-14 Ibm Procede de detection de defauts electriquement actifs dans un substrat de silicium de type n
US4180439A (en) * 1976-03-15 1979-12-25 International Business Machines Corporation Anodic etching method for the detection of electrically active defects in silicon
US4125440A (en) * 1977-07-25 1978-11-14 International Business Machines Corporation Method for non-destructive testing of semiconductor articles

Also Published As

Publication number Publication date
EP0103806B1 (de) 1987-01-07
EP0103806A1 (de) 1984-03-28
US4487661A (en) 1984-12-11
FR2532760A1 (fr) 1984-03-09
CA1187938A (fr) 1985-05-28
FR2532760B1 (de) 1985-04-05

Similar Documents

Publication Publication Date Title
DE3380744D1 (en) Immunoassay apparatus and method
DE3373841D1 (en) Method and apparatus for performing assays
GB2114160B (en) Film depositing apparatus and method
GB2080631B (en) Method of vapour-cooling a heat-producting member and electrical apparatus utilizing same
ZA83161B (en) Process and apparatus for the manufacture of a toothrack
DE3378570D1 (en) Moulding apparatus and moulding method
GB8307067D0 (en) Electronic apparatus
ZA831189B (en) Novel apparatus and process
DE3379675D1 (en) Weighing method and apparatus therefor
DE3463126D1 (en) Mold masking apparatus and method
DE3369094D1 (en) Molding method and apparatus
GB2119592B (en) Pulse-counting method and apparatus
JPS57180129A (en) Method and device for forming polymerized resist
GB2131001B (en) Currency-dispensing method and apparatus
GB2122121B (en) Plate bending method and apparatus
DE3375238D1 (en) Developing apparatus
ZA836151B (en) Post-exposure process
DE3369013D1 (en) Developing apparatus
GB2128902B (en) Developing apparatus
GB2129356B (en) Billet-shearing method and apparatus
GB8321044D0 (en) Moulding apparatus
EP0105756A3 (en) Combinatorial weighing apparatus and method
DE3369002D1 (en) Method and apparatus for studying the physical characteristics of a semi-conducting plate
DE3370382D1 (en) Electrophotographic method and apparatus
GB2079654B (en) Moulding method and apparatus

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHOTOWATT INTERNATIONAL S.A., BOURGOIN JALLIEU, FR

8339 Ceased/non-payment of the annual fee