DE3335130A1 - Device for testing the surface of workpieces and application of the device - Google Patents

Device for testing the surface of workpieces and application of the device

Info

Publication number
DE3335130A1
DE3335130A1 DE19833335130 DE3335130A DE3335130A1 DE 3335130 A1 DE3335130 A1 DE 3335130A1 DE 19833335130 DE19833335130 DE 19833335130 DE 3335130 A DE3335130 A DE 3335130A DE 3335130 A1 DE3335130 A1 DE 3335130A1
Authority
DE
Grant status
Application
Patent type
Prior art keywords
device
image
surface
tape
transported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19833335130
Other languages
German (de)
Inventor
Nikolaos Dr Douklias
Josef Dr Grabmaier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501Semiconductor wafers

Abstract

A device for optical testing of the surface of workpieces is described, in which an endless tape of thermoplastic recording material runs over rollers (R1) in a specific circulation direction (LR). An episcope (E) projects the surface (OW) of the workpiece (W) to be tested onto the tape (A). The exposed tape section is transported into an image-developing device (BE), in which the image is developed, and the developed image is transported into an object plane (3) of an optically coherent processing device (BA) for evaluation. The evaluated image is transported into an image erasing device (BL) and subsequently into a sensitising device (SE) in which the erased image section is sensitised for re-use. The device is used, in particular, to test the surface roughness or corrugation of crystals grown in strip form, in particular for the continuous monitoring of a transition from the controlled to the uncontrolled crystallisation of such a crystal grown in strip form. <IMAGE>
DE19833335130 1983-09-28 1983-09-28 Device for testing the surface of workpieces and application of the device Withdrawn DE3335130A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19833335130 DE3335130A1 (en) 1983-09-28 1983-09-28 Device for testing the surface of workpieces and application of the device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19833335130 DE3335130A1 (en) 1983-09-28 1983-09-28 Device for testing the surface of workpieces and application of the device

Publications (1)

Publication Number Publication Date
DE3335130A1 true true DE3335130A1 (en) 1985-04-11

Family

ID=6210304

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19833335130 Withdrawn DE3335130A1 (en) 1983-09-28 1983-09-28 Device for testing the surface of workpieces and application of the device

Country Status (1)

Country Link
DE (1) DE3335130A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5168322A (en) * 1991-08-19 1992-12-01 Diffracto Ltd. Surface inspection using retro-reflective light field
US5206700A (en) * 1985-03-14 1993-04-27 Diffracto, Ltd. Methods and apparatus for retroreflective surface inspection and distortion measurement
EP0216923B1 (en) * 1985-03-14 1993-06-09 Diffracto Ltd. Diffractosight improvements

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5206700A (en) * 1985-03-14 1993-04-27 Diffracto, Ltd. Methods and apparatus for retroreflective surface inspection and distortion measurement
EP0216923B1 (en) * 1985-03-14 1993-06-09 Diffracto Ltd. Diffractosight improvements
US5168322A (en) * 1991-08-19 1992-12-01 Diffracto Ltd. Surface inspection using retro-reflective light field

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee