DE3215396A1 - Nikro-miniatur-kuehlvorrichtung und verfahren zu ihrer herstellung - Google Patents
Nikro-miniatur-kuehlvorrichtung und verfahren zu ihrer herstellungInfo
- Publication number
- DE3215396A1 DE3215396A1 DE19823215396 DE3215396A DE3215396A1 DE 3215396 A1 DE3215396 A1 DE 3215396A1 DE 19823215396 DE19823215396 DE 19823215396 DE 3215396 A DE3215396 A DE 3215396A DE 3215396 A1 DE3215396 A1 DE 3215396A1
- Authority
- DE
- Germany
- Prior art keywords
- cooling
- cooling device
- channel
- coolant
- heat exchanger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 title claims description 266
- 238000000034 method Methods 0.000 title claims description 32
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- 239000011521 glass Substances 0.000 claims description 73
- 239000002826 coolant Substances 0.000 claims description 64
- 239000000463 material Substances 0.000 claims description 37
- 238000005488 sandblasting Methods 0.000 claims description 16
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 239000010419 fine particle Substances 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 4
- 238000012549 training Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- JOSWYUNQBRPBDN-UHFFFAOYSA-P ammonium dichromate Chemical compound [NH4+].[NH4+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O JOSWYUNQBRPBDN-UHFFFAOYSA-P 0.000 claims description 3
- 229920000159 gelatin Polymers 0.000 claims description 3
- 235000019322 gelatine Nutrition 0.000 claims description 3
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- 108010010803 Gelatin Proteins 0.000 claims 1
- 239000008273 gelatin Substances 0.000 claims 1
- 235000011852 gelatine desserts Nutrition 0.000 claims 1
- 238000007373 indentation Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 62
- 239000010410 layer Substances 0.000 description 35
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 20
- 239000010703 silicon Substances 0.000 description 20
- 229910052710 silicon Inorganic materials 0.000 description 20
- 229910052757 nitrogen Inorganic materials 0.000 description 13
- 239000001257 hydrogen Substances 0.000 description 11
- 229910052739 hydrogen Inorganic materials 0.000 description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 10
- 238000005553 drilling Methods 0.000 description 10
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 238000010276 construction Methods 0.000 description 8
- 229910000679 solder Inorganic materials 0.000 description 8
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- 239000003822 epoxy resin Substances 0.000 description 5
- 239000001307 helium Substances 0.000 description 5
- 229910052734 helium Inorganic materials 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 229920000647 polyepoxide Polymers 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 3
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 239000004568 cement Substances 0.000 description 3
- 238000003486 chemical etching Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 description 2
- 239000001828 Gelatine Substances 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
- 239000002178 crystalline material Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910000833 kovar Inorganic materials 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 239000002887 superconductor Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 230000005668 Josephson effect Effects 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 108091005804 Peptidases Proteins 0.000 description 1
- 102100037486 Reverse transcriptase/ribonuclease H Human genes 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000001015 X-ray lithography Methods 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- 238000002681 cryosurgery Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D53/00—Making other particular articles
- B21D53/02—Making other particular articles heat exchangers or parts thereof, e.g. radiators, condensers fins, headers
- B21D53/04—Making other particular articles heat exchangers or parts thereof, e.g. radiators, condensers fins, headers of sheet metal
- B21D53/045—Making other particular articles heat exchangers or parts thereof, e.g. radiators, condensers fins, headers of sheet metal by inflating partially united plates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
- F02G1/00—Hot gas positive-displacement engine plants
- F02G1/04—Hot gas positive-displacement engine plants of closed-cycle type
- F02G1/043—Hot gas positive-displacement engine plants of closed-cycle type the engine being operated by expansion and contraction of a mass of working gas which is heated and cooled in one of a plurality of constantly communicating expansible chambers, e.g. Stirling cycle type engines
- F02G1/044—Hot gas positive-displacement engine plants of closed-cycle type the engine being operated by expansion and contraction of a mass of working gas which is heated and cooled in one of a plurality of constantly communicating expansible chambers, e.g. Stirling cycle type engines having at least two working members, e.g. pistons, delivering power output
- F02G1/0445—Engine plants with combined cycles, e.g. Vuilleumier
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B39/00—Evaporators; Condensers
- F25B39/02—Evaporators
- F25B39/022—Evaporators with plate-like or laminated elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/02—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point using Joule-Thompson effect; using vortex effect
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
- F28F3/025—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being corrugated, plate-like elements
- F28F3/027—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being corrugated, plate-like elements with openings, e.g. louvered corrugated fins; Assemblies of corrugated strips
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
- F28F3/04—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
- F02G2250/00—Special cycles or special engines
- F02G2250/18—Vuilleumier cycles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
- F02G2258/00—Materials used
- F02G2258/10—Materials used ceramic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/15—Microelectro-mechanical devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2260/00—Heat exchangers or heat exchange elements having special size, e.g. microstructures
- F28F2260/02—Heat exchangers or heat exchange elements having special size, e.g. microstructures having microchannels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
- Separation By Low-Temperature Treatments (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US25968781A | 1981-05-01 | 1981-05-01 | |
| US06/259,688 US4392362A (en) | 1979-03-23 | 1981-05-01 | Micro miniature refrigerators |
| US06/354,616 US4386505A (en) | 1981-05-01 | 1982-03-04 | Refrigerators |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3215396A1 true DE3215396A1 (de) | 1983-01-27 |
| DE3215396C2 DE3215396C2 (enrdf_load_stackoverflow) | 1988-08-25 |
Family
ID=27401251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19823215396 Granted DE3215396A1 (de) | 1981-05-01 | 1982-04-24 | Nikro-miniatur-kuehlvorrichtung und verfahren zu ihrer herstellung |
Country Status (7)
| Country | Link |
|---|---|
| CA (1) | CA1170851A (enrdf_load_stackoverflow) |
| DE (1) | DE3215396A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2505036B1 (enrdf_load_stackoverflow) |
| GB (1) | GB2099565B (enrdf_load_stackoverflow) |
| IL (1) | IL65635A (enrdf_load_stackoverflow) |
| NL (1) | NL8201786A (enrdf_load_stackoverflow) |
| SE (1) | SE446122B (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3613802A1 (de) * | 1986-04-24 | 1987-10-29 | Dornier System Gmbh | Integrierter kapillarverdampfer als waermeaufnehmendes element eines thermalkreislaufs |
| DE3613596A1 (de) * | 1986-04-22 | 1987-11-12 | Christian Dipl Ing Schneider | Waermeaustauscher und verfahren zu seiner herstellung |
| DE3825907A1 (de) * | 1988-07-29 | 1990-02-01 | Messerschmitt Boelkow Blohm | Auf mikromechanischem wege hergestellte kuehlvorrichtung, insbesondere plattenkuehler |
| RU2152697C1 (ru) * | 1993-11-18 | 2000-07-10 | ЭМИ-тек Электронише Материалиен ГмбХ | Устройство для отвода тепла и способ его изготовления |
| DE10239048B4 (de) * | 2001-08-30 | 2006-11-16 | Siemens Ag | Integrierter Schaltkreis |
| DE102013226813A1 (de) * | 2013-12-20 | 2015-06-25 | Bayerische Motoren Werke Aktiengesellschaft | Kühlvorrichtung |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1984002177A1 (en) * | 1982-12-01 | 1984-06-07 | William A Little | Fast cooldown miniature refrigerators |
| DE202009019071U1 (de) * | 2009-02-17 | 2016-03-17 | Gudrun Stemke | Verdampfer und Kühleinrichtung unter Verwendung derartiger Verdampfer |
| US20120023969A1 (en) * | 2010-07-28 | 2012-02-02 | General Electric Company | Cooling system of an electromagnet assembly |
| EP2444769A1 (en) * | 2010-10-18 | 2012-04-25 | Kryoz Technologies B.V. | Micro-cooling device |
| DE102010060346A1 (de) | 2010-11-04 | 2012-05-10 | Institut für Luft- und Kältetechnik gemeinnützige Gesellschaft mbH | Verfahren zur Erzeugung von Kälte und nach dem Verfahren arbeitender Kühler |
| CN106705701A (zh) * | 2015-08-18 | 2017-05-24 | 珠海格力节能环保制冷技术研究中心有限公司 | 散热器及其制造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1439080A (en) * | 1972-11-30 | 1976-06-09 | Ibm | Gas discharge display structure |
| GB2045910A (en) * | 1979-03-23 | 1980-11-05 | Univ Leland Stanford Junior | Miniature cryogenic refrigerator and device and method of making same |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2909908A (en) * | 1956-11-06 | 1959-10-27 | Little Inc A | Miniature refrigeration device |
| DE2117138A1 (de) * | 1971-04-08 | 1972-10-19 | Leybold Heraeus Gmbh & Co Kg | Wärmetauscher, insbesondere für tiefsiedende Flüssigkeiten |
| NL7203268A (enrdf_load_stackoverflow) * | 1972-03-11 | 1973-09-13 | ||
| FR2184536A1 (en) * | 1972-05-19 | 1973-12-28 | Anvar | Very low temperature heat exchangers - partic suitable for helium 3 and helium 4 |
| DE2708270A1 (de) * | 1977-02-25 | 1978-08-31 | Siemens Ag | Waermetransportsystem |
-
1982
- 1982-04-24 DE DE19823215396 patent/DE3215396A1/de active Granted
- 1982-04-27 GB GB8212220A patent/GB2099565B/en not_active Expired
- 1982-04-27 IL IL65635A patent/IL65635A/xx not_active IP Right Cessation
- 1982-04-27 SE SE8202630A patent/SE446122B/sv not_active IP Right Cessation
- 1982-04-29 NL NL8201786A patent/NL8201786A/nl not_active Application Discontinuation
- 1982-04-30 CA CA000402043A patent/CA1170851A/en not_active Expired
- 1982-04-30 FR FR8207576A patent/FR2505036B1/fr not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1439080A (en) * | 1972-11-30 | 1976-06-09 | Ibm | Gas discharge display structure |
| GB2045910A (en) * | 1979-03-23 | 1980-11-05 | Univ Leland Stanford Junior | Miniature cryogenic refrigerator and device and method of making same |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3613596A1 (de) * | 1986-04-22 | 1987-11-12 | Christian Dipl Ing Schneider | Waermeaustauscher und verfahren zu seiner herstellung |
| DE3613802A1 (de) * | 1986-04-24 | 1987-10-29 | Dornier System Gmbh | Integrierter kapillarverdampfer als waermeaufnehmendes element eines thermalkreislaufs |
| DE3825907A1 (de) * | 1988-07-29 | 1990-02-01 | Messerschmitt Boelkow Blohm | Auf mikromechanischem wege hergestellte kuehlvorrichtung, insbesondere plattenkuehler |
| RU2152697C1 (ru) * | 1993-11-18 | 2000-07-10 | ЭМИ-тек Электронише Материалиен ГмбХ | Устройство для отвода тепла и способ его изготовления |
| DE10239048B4 (de) * | 2001-08-30 | 2006-11-16 | Siemens Ag | Integrierter Schaltkreis |
| DE102013226813A1 (de) * | 2013-12-20 | 2015-06-25 | Bayerische Motoren Werke Aktiengesellschaft | Kühlvorrichtung |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2099565B (en) | 1984-11-14 |
| GB2099565A (en) | 1982-12-08 |
| IL65635A (en) | 1985-07-31 |
| FR2505036A1 (fr) | 1982-11-05 |
| CA1170851A (en) | 1984-07-17 |
| FR2505036B1 (fr) | 1986-04-11 |
| SE446122B (sv) | 1986-08-11 |
| NL8201786A (nl) | 1982-12-01 |
| DE3215396C2 (enrdf_load_stackoverflow) | 1988-08-25 |
| IL65635A0 (en) | 1982-07-30 |
| SE8202630L (sv) | 1982-11-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69031651T2 (de) | Verdampfer mit durch geätzte Faser gebildeten Kernbildungsstellen und Verfahren zu dessen Herstellung | |
| US4392362A (en) | Micro miniature refrigerators | |
| DE3215396A1 (de) | Nikro-miniatur-kuehlvorrichtung und verfahren zu ihrer herstellung | |
| DE69003770T2 (de) | Mikromechanischer Stufenverdichter und Methode zur Druckerhöhung bei äusserst niedrigem Betriebsdruck. | |
| DE19506093C2 (de) | Diodenlaserbauelement | |
| EP1406297B1 (de) | Mikrostrukturkühler und dessen Verwendung | |
| DE19626227C2 (de) | Anordnung zur Wärmeableitung bei Chipmodulen auf Mehrschicht-Keramikträgern, insbesondere für Multichipmodule, und Verfahren zu ihrer Herstellung | |
| DE69208638T2 (de) | Baugruppenlayout mit verbesserter Ableitung von Wärme produziert von elektronischen Hochleistungskomponenten | |
| DE69708636T2 (de) | Baugruppenträger für leiterplatten mit sprühkühlung | |
| DE10123456A1 (de) | Wärmetauscher | |
| EP0142678A2 (de) | Halbleiterventil | |
| DE3934784A1 (de) | Kuehlvorrichtung fuer halbleiterbauelemente und verfahren zur herstellung der kuehlvorrichtung | |
| AT402135B (de) | Schaltungsträger | |
| EP1354352A2 (de) | Kühleinrichtung und verfahren zu deren herstellung | |
| DE19815817C2 (de) | Kühlsystem | |
| WO2010022863A1 (de) | Flugzeugsignalrechnersystem mit einer mehrzahl von modularen signalrechnereinheiten | |
| DE19506091B4 (de) | Kühlelement | |
| DE4311839A1 (de) | Mikrokühleinrichtung für eine Elektronik-Komponente | |
| EP1672690B2 (de) | Mikrokühlkörper | |
| DE3010962A1 (de) | Miniaturisierte tieftemperaturkaelte erzeugende vorrichtung sowie verfahren zu ihrer herstellung | |
| DE19818839B4 (de) | Kühler, insbesondere für elektrische Bauelemente | |
| DE10114207B4 (de) | Regenerator und Kältespeicherkühlanlage, die denselben verwendet | |
| WO2007010005A1 (de) | Anordnung eines elektrischen bauelements und einer zwei-phasen-kühlvorrichtung und verfahren zum herstellen der anordnung | |
| WO2022195020A1 (de) | Vorrichtung mit einem porösen körper zum aufnehmen einer wärmemenge und verfahren zum bereitstellen einer vorrichtung | |
| DE19626125C2 (de) | Vorrichtung zur direkten Kühlung von Objekten, insbesondere supraleitender Strukturen und kryoelektronischen Bauelementen |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8125 | Change of the main classification |
Ipc: F25B 39/02 |
|
| 8131 | Rejection | ||
| 8170 | Reinstatement of the former position | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8328 | Change in the person/name/address of the agent |
Free format text: FUCHS, J., DIPL.-ING. DR.-ING. B.COM. LUDERSCHMIDT, W., DIPL.-CHEM. DR.PHIL.NAT. MEHLER, K., DIPL.-PHYS. DR.RER.NAT. WEISS, C., DIPL.-ING.UNIV., PAT.-ANWAELTE, 65189 WIESBADEN |
|
| 8339 | Ceased/non-payment of the annual fee |