DE3137219A1 - Capacitive pressure sensor and method for producing it - Google Patents

Capacitive pressure sensor and method for producing it

Info

Publication number
DE3137219A1
DE3137219A1 DE19813137219 DE3137219A DE3137219A1 DE 3137219 A1 DE3137219 A1 DE 3137219A1 DE 19813137219 DE19813137219 DE 19813137219 DE 3137219 A DE3137219 A DE 3137219A DE 3137219 A1 DE3137219 A1 DE 3137219A1
Authority
DE
Grant status
Application
Patent type
Prior art keywords
pressure
sensor
half
capacitive
shells
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19813137219
Other languages
German (de)
Inventor
Werner Dipl Phys Dr Gruenwald
Prieta Claudio De La
Helmut Reum
Kurt Schmid
Felix Staszak
Erich Dr Zabler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
    • G01L9/0082Transmitting or indicating the displacement of capsules by electric, electro-mechanical, magnetic, or electro-mechanical means
    • G01L9/0086Transmitting or indicating the displacement of capsules by electric, electro-mechanical, magnetic, or electro-mechanical means using variations in capacitance

Abstract

A capacitive pressure sensor and a method for producing it, the capacitive sensor having two half shells (10, 11) which can be deformed as a function of pressure, enclose a preferably cylindrical cavity and are made from glass, ceramic or the like, in which capacitive sensor planar electrodes (14, 15) forming a capacitor are arranged on the inside of the half shells (10, 11). In this arrangement, there is applied to at least one of the half shells (10, 11) for the purpose of fixing the spacing of the half shells (10, 11) a glass ring (12) which for its part is surrounded by a sealing ring (13). This sealing ring is preferably formed from solder (soldering) paste, epoxy resin or a hot melt adhesive film, the pressure sensor being assembled at subatmospheric pressure. <IMAGE>
DE19813137219 1981-09-18 1981-09-18 Capacitive pressure sensor and method for producing it Ceased DE3137219A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19813137219 DE3137219A1 (en) 1981-09-18 1981-09-18 Capacitive pressure sensor and method for producing it

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19813137219 DE3137219A1 (en) 1981-09-18 1981-09-18 Capacitive pressure sensor and method for producing it

Publications (1)

Publication Number Publication Date
DE3137219A1 true true DE3137219A1 (en) 1983-04-07

Family

ID=6142076

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19813137219 Ceased DE3137219A1 (en) 1981-09-18 1981-09-18 Capacitive pressure sensor and method for producing it

Country Status (1)

Country Link
DE (1) DE3137219A1 (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3634742A1 (en) * 1986-10-11 1988-04-21 Bosch Gmbh Robert Load cell
DE3840703A1 (en) * 1987-12-03 1989-06-29 Ngk Insulators Ltd Druckfuehler with an electromagnetic shield member
EP0351701A2 (en) * 1988-07-22 1990-01-24 Endress u. Hauser GmbH u. Co. Pressure transducer and its manufacturing process
EP0373536A2 (en) * 1988-12-12 1990-06-20 Fibronix Sensoren GmbH Overload-proof capacitive pressure sensor
DE3910646A1 (en) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co Capacitive pressure sensor and process for its manufacture
DE4000326A1 (en) * 1990-01-08 1991-07-11 Degussa pressure sensor
US5050035A (en) * 1989-03-21 1991-09-17 Endress U. Hauser Gmbh U. Co. Capacitive pressure sensor and method of manufacturing same
FR2676542A1 (en) * 1991-05-17 1992-11-20 Otic Fischer & Porter Piezometric (piezoelectric measurement) cell and its sealing method
US5174157A (en) * 1990-06-11 1992-12-29 Schoppe & Faeser Gmbh Pressure transducer
DE4211816A1 (en) * 1992-04-08 1993-10-14 Danfoss As Pressure sensor and method for its preparation
US5448444A (en) * 1994-01-28 1995-09-05 United Technologies Corporation Capacitive pressure sensor having a reduced area dielectric spacer
WO1997038291A1 (en) * 1996-04-10 1997-10-16 Samba Sensors Ab Device for measuring pressure
US6252759B1 (en) * 1994-03-18 2001-06-26 Endress + Hauser Gmbh + Co. Capacitive pressure sensors or capacitive differential pressure sensors
CN102426075A (en) * 2011-08-31 2012-04-25 江苏奥力威传感高科股份有限公司 Glass ring sensor packaging structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0002110A1 (en) * 1977-11-11 1979-05-30 Motorola, Inc. Fabrication of capacitive transducers by depositing a uniform glass insulating ring
EP0009313A1 (en) * 1978-09-25 1980-04-02 Motorola, Inc. Improved pressure transducer and assembly
US4287553A (en) * 1980-06-06 1981-09-01 The Bendix Corporation Capacitive pressure transducer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0002110A1 (en) * 1977-11-11 1979-05-30 Motorola, Inc. Fabrication of capacitive transducers by depositing a uniform glass insulating ring
EP0009313A1 (en) * 1978-09-25 1980-04-02 Motorola, Inc. Improved pressure transducer and assembly
US4287553A (en) * 1980-06-06 1981-09-01 The Bendix Corporation Capacitive pressure transducer

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3634742A1 (en) * 1986-10-11 1988-04-21 Bosch Gmbh Robert Load cell
DE3840703A1 (en) * 1987-12-03 1989-06-29 Ngk Insulators Ltd Druckfuehler with an electromagnetic shield member
EP0351701A2 (en) * 1988-07-22 1990-01-24 Endress u. Hauser GmbH u. Co. Pressure transducer and its manufacturing process
EP0351701A3 (en) * 1988-07-22 1991-06-26 Endress u. Hauser GmbH u. Co. Pressure transducer and its manufacturing process
US5005421A (en) * 1988-07-22 1991-04-09 Endress U. Hauser Gmbh U. Co. Pressure sensor and method for the manufacture thereof
EP0373536A3 (en) * 1988-12-12 1991-03-06 Fibronix Sensoren GmbH Overload-proof capacitive pressure sensor
EP0373536A2 (en) * 1988-12-12 1990-06-20 Fibronix Sensoren GmbH Overload-proof capacitive pressure sensor
US5050035A (en) * 1989-03-21 1991-09-17 Endress U. Hauser Gmbh U. Co. Capacitive pressure sensor and method of manufacturing same
WO1990012299A1 (en) * 1989-04-01 1990-10-18 Endress U. Hauser Gmbh U. Co. A capacitive pressure sensor and a process for its manufacture
US5001595A (en) * 1989-04-01 1991-03-19 Gerhard Dittrich Capacitive pressure sensor and method of manufacturing same
DE3910646A1 (en) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co Capacitive pressure sensor and process for its manufacture
DE4000326A1 (en) * 1990-01-08 1991-07-11 Degussa pressure sensor
US5174157A (en) * 1990-06-11 1992-12-29 Schoppe & Faeser Gmbh Pressure transducer
FR2676542A1 (en) * 1991-05-17 1992-11-20 Otic Fischer & Porter Piezometric (piezoelectric measurement) cell and its sealing method
DE4211816A1 (en) * 1992-04-08 1993-10-14 Danfoss As Pressure sensor and method for its preparation
US5448444A (en) * 1994-01-28 1995-09-05 United Technologies Corporation Capacitive pressure sensor having a reduced area dielectric spacer
US6252759B1 (en) * 1994-03-18 2001-06-26 Endress + Hauser Gmbh + Co. Capacitive pressure sensors or capacitive differential pressure sensors
WO1997038291A1 (en) * 1996-04-10 1997-10-16 Samba Sensors Ab Device for measuring pressure
CN102426075A (en) * 2011-08-31 2012-04-25 江苏奥力威传感高科股份有限公司 Glass ring sensor packaging structure
CN102426075B (en) 2011-08-31 2013-07-10 江苏奥力威传感高科股份有限公司 Glass ring sensor package structure

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8131 Rejection
8178 Suspension cancelled