DE3132919A1 - Servo-drive - Google Patents

Abstract

The invention relates to a servo-drive as used for testing semiconductor wafers on wafer samplers. It is used for making contact with the probe needle system by means of a rapid and bounce-free stroke movement, and for rotating the semiconductor wafer by any angle desired. In addition, the servo-drive has a further, continuous drive in the direction of said stroke movement, which drive is independent of the stroke movement. Thus it is possible to compensate for wafer thickness tolerances, as a result of which the measuring accuracy is improved.

Description

Actuator

Field of application of the invention The invention relates to an actuator, as he used to measure Ili conductor disks up to 150 mm in diameter on wafer probes can be used. The semiconductor wafer can have thickness tolerances.

Characteristics of the known technical solutions for positioning of semiconductor wafers under the probe system of a wafer prober are different Stellsystete known.

In the DD-WS 137 037 a bounce-free lifting device is described, in the case of the stop surfaces of a lifting anchor via evenly distributed nozzles Compressed air is blown in, causing the movements from the lower to the upper Altitude and vice versa.

The guides for the axial movements also have air bearings equipped, whereby a wear resistance is achieved.

The disadvantage here is that there is no direct rotation of the disk plate and no compensation for thickness tolerances of the semiconductor wafers are provided.

In U.S. Patents 4,066,943 and 3,936,743 a fast clamping head is for Semiconductor wafers for use on wafer probes described. Eggs is made Height adjustment via a stepper motor that has a eccentric wearing. By turning the eccentric through a certain angle, the clamping head moved by suitable means between two end positions. The movement takes place on a bounce-free sinusoidal curve.

The clamping head can be rotated about its axis by manually operated means.

The disadvantage here is that the rotary movement takes place manually, as a result of which automation is made more difficult. infestation is also not a possibility of measurement of thick semiconductor wafers subject to tolerances without changing the conditions given for the rapid lifting movement.

Object of the invention The object of the invention is to provide an actuator for testing integrated circuits on a semiconductor wafer, with which the semiconductor wafer is mechanically rotated through any angle as well as between two altitudes can be moved back and forth quickly and without bouncing. Thickness tolerances the Iilblelterscholbe should be compensated without the conditions for to change the bounce-free stroke movement.

Statement of the essence of the invention The object of the invention is in creating an actuator with which an automatic rotation of a disk plate around the vertical axis as well as a fast, bounce-free and wear-free lifting movement takes place between two heights using a rotatable lifter. A drive turns the lifter and a second drive are used to compensate for thickness tolerances by an additional height shoot.

Features of the Invention The invention includes an actuator for Testing of integrated circuits on a semiconductor wafer, which on a Disc support is arranged, the disc support in the x- and in the y-direction is positioned and means for adjusting the disc support between two stable Layers in the z-direction and a drive for rotation about the z-axis are provided.

According to the invention, the means for adjusting the disk support are thereby between the two stable layers a rotationally symmetrical lifting magnet and a, the Rotationally symmetrical sliding frame comprising lifting magnets. The drive for rotation the disk support around the z-axis consists of a bearing ring arranged in it Poland as well as the sliding frame. The actuator has a further drive for a Movement of the disc support in the z-direction, independent of the said lifting movement to compensate for thickness tolerances of the semiconductor wafers.

In an embodiment of the invention, the first stable stretcher is the sliding frame with respect to the solenoid, a first air bearing assigned, which is supported by an upper Air bearing surface of the solenoid and an upper plate of the sliding frame formed is. The second stable position is assigned a second air bearing, which is supported by a lower air bearing surface and a lower plate is formed. In the air storage areas nozzles supplied with compressed air are evenly distributed.

The plates are attached to the sliding frame.

Furthermore, the poles are fastened in recesses in the bearing ring and in the areas between the recesses there are nozzles fed with compressed air arranged. The sliding frame is a movable part of both the rub magnet as well as the drive for the rotary movement of the disk plate in the first air bearing or stored in the second air bearing in the z-direction and in the air bearing between the Surfaces of the bearing ring and the outer surface of the sliding frame in the radial direction stored. Furthermore, there is the drive for the constant, independent of the lifting movement z-movement from at least one stator and one gear with teeth made of magnetizable Material.

The gear is connected to a nut on the external thread a spindle sleeve is movably arranged. There are preferably two stators of the type described below in the actuator.

The stator consists of two pole carriers with two poles each, with the poles are each provided with a coil and have teeth that have the same pitch as the teeth of the gear have and the teeth of the poles in the pitch of Are appropriately offset from pole to pole.

When suitable voltages are applied to the poles, the gear rotates and is at the same time opened or closed via the nut in the z-direction depending on the direction of rotation moving downwards.

Furthermore, the drive for the z-movement enters the nut Axial bearing on which the sub magnet is attached by means of a socket. The lifting magnet cannot be drilled and is secured by connecting pieces that pass through the ') pinclel.-socket are held in its position.

The axial bearing consists of a bearing ring attached to the nut, two ball rings and two bearing shells connected to one another. On the upper bearing shell the socket for the solenoid is attached to a shoulder.

Furthermore, the spindle bushing has an outer one in its upper part bearing surface and the socket of the lifting magnet on an inner bearing surface. Between A ball cage with balls for vertical guidance is arranged on the bearing surfaces, with the balls touch the bearing surfaces.

Furthermore, the iTubmagnet points to the achievement of power loss-free One or more permanent magnets were placed on the stable ones. Two coils operate in Cooperation with; the permanent magnet that the enclosing sliding frame either remains stable in the upper or lower layer.

Furthermore, on the upper plate of the sliding frame by means of threaded bushings and adjusting screws attached to a support ring of the disk support insulated. These are the threaded sockets in the top plate are embedded in plastic.

Furthermore, the disc support has a rotatable relative to it Sealing piston.

There is a disc plate on the support ring of the disc support arranged. A first channel system leads from a vacuum supply via the sealing piston to a radial hole in the disc plate. The canal system is by means of bores connected to the surface of the disc plate. In the radial bore are im Course evenly arranged valves that connect in the open position to ring grooves on the surface of the disc plate and the further course of the possess radial bore. The mouths of the holes on the surface of the disk plate lie within a circle with a diameter of 37 mm and the diameter the ring grooves are each smaller than d = (50 + n.25) mm with n # # fo (1) 45 thereby semiconductor wafers with a diameter of 37 mm to 150 mm can be inserted into the the usual sizes.

The disc plate is equipped with an electrical one for rear contacting the disc Connection conductively connected.

The electrical connection is fastened in the sealing piston and between the rotatable sealing piston and the disc plate is the electrical Connection via a rule and a compression spring as well as an insert and a screw, with which the disc plate is attached to the insert.

T-Jeiterhin is the bearing ring via attached feet and lockable Adjusted the sockets on the base plate of the actuator.

furthermore, a first stop screw is in the base plate and in a second stop screw is attached to the gear. With downward movement of the toothed wheel The two stop screws work together on the spindle socket and impede further turning and thus tightening of the nut or the z-drive.

Furthermore, the actuator has a first light barrier that the Gear is assigned, with a Spiegelflä surface between two teeth of the gear is attached.

This determines the angular position of the gear and thus the altitude determined down to the pitch.

Furthermore, a second light barrier is assigned to the sliding frame, wherein a web with a reflective end face is attached to the sliding frame.

This determines the angular position of the sliding frame, which in its rotary movements is guided and tied up by magnetic forces.

In one embodiment, the second light barrier is located inside the lowest rotation of the nut relative to the spindle bushing in operative engagement, whereby the angular position of the sliding frame and the height adjustment of the pane support are clearly determined.

Exemplary embodiment The invention is based on four drawings and explained in more detail in an exemplary embodiment. They show: Fig. 1 the actuator in a perspective view Fig. 2 the section along the line A - A SigX 3 die Representation of two poles in the bearing ring Fig. 4 shows a stator of the drive for the Height adjustment Fig. 5 the attachment of the stator for the height adjustment Fig. 6 the first light barrier, FIG. 7 the second light barrier, FIG. 8 the connection block The actuator 10 shown in FIG. 1 is fastened on a base plate 11. It is provided with a cover 1? Which is fastened to the base plate 11 by means of screws 13 is covered.

In FIG. 2, the section along the line A - A in FIG. 1 is shown. The base plate 11 contains four adjusting screws, not shown, to the actuator 10 to be able to attach to other assemblies. The base plate also has 11 a central bore which is surrounded by a centering collar 11.1.

A spindle bushing 15 is placed on the centering collar 11.1 and is by means of Screws attached to the base plate 11 #.

For the sake of the graphic overview, they are only through a dash-dot line indicated, as well as in the cases where not drawn Screw connections are available.

Furthermore, there are in the base plate 11 threaded sockets 16, the are used to attach components to be described later, as well as a first stop screw 17, the stop pin 17.1 of which protrudes above the level of the base plate 11.

The spindle bushing 15 has an external thread 15.1 in the lower part, while the upper part forms a cylindrical bearing surface 1E.2. The upper part is still pierced by several, vertically standing elongated holes 15.3.

The external thread 15.1 is assigned a nut 18 on which a gearwheel 19 is made of soft iron, a second stop screw 21 is so in the gear 19 fastened that the stop pin 21.1 with a certain downward movement of the gear 19 via the nut 18 relative to the spindle bushing 15 with the stop pin 17.1 cooperates and prevents further turning.

The nut 18 has a shoulder on which a bearing ring 22 is attached is. The bearing ring 22 has an upper and a lower bearing surface on which a ball ring 23 rests in each case.

An upper and lower, interconnected bearing shell 24 form with the bearing ring 22 and the ball rings 23, an axial bearing.

A bushing 25 is seated on the upper bearing shell 24 and has an inner bore is designed as a storage area 25.1.

A ball cage is located between the bearing surfaces 15.2 and 25.1 26 with balls 27. In the socket 25 there are holes 25.2 and in the Ball cage 26 long rather 26.1, which are assigned to the elongated holes 15.3 and through the electrical and pneumatic lines described later are routed.

A shoulder of the socket 25 carries a lifting magnet 30. The inner ring 31 of the solenoid 30 is by means of screw ben through a collar of the socket 25 attached to the upper bearing scale 24. These screws are not shown, but symbolized by a dash-dot line. The inner ring 31 contains in Bores 31.1 assigned to the height of the bores 25.2 and a bore 31.2 with an internal thread.

In the bore 31.2 a connecting piece 32 is screwed, the by jo a rler: Rohrullfren 25.2 and the elongated holes 26.1 and 15.3 in the interior the Spindelbueh se 15 protrudes where a hose connector 33 is attached.

On the outside, the inner ring 31 is surrounded by a magnetic trough 34 with permanent magnets 35.

The magnet carrier 34 has a channel system 34.1 that the bore 31.2 with concentrically distributed nozzles 36 verb in det, the nozzles 36 at the The top and bottom of the magnet carrier 34 end. The magnet carrier 34 is of two Outer rings 37 enclosed. In each of an outer ring 37 and the permanent magnet 35 formed space is a coil 38 and an insulating ring 39 accommodated. The spools 38 are isolated in a suitable manner. The four cradle ends of the two reels 38 are connected to three soldered connections 41, each of which has sockets 42 in bores 34.2 are glued in. The part of the solder connection protruding into the bores 31.1 41 is provided with a thread onto which an adapter 43 is screwed, the protrudes into the interior of the spindle sleeve 15.

The inner ring 31, the magnet carrier 34 and an outer ring 37 each form upper and lower air bearing surfaces 44; 45.

The shape of the solenoid 30 is rotationally symmetrical and is of a likewise rotationally symmetrical sliding frame 50 enclosed. The sliding frame 50 consists of a toothed ring 51, on which an annular upper and lower Plate 52; 53 are attached. The upper plate 52 also has threaded sockets 54.

There is an air gap between the toothed ring 51 and the permanent magnets 35 of 0.2 mm.

In the plates 52; 53 are still not shown Entliif.tungsb honors.

The spacing of the plates 52; 53 of the sliding frame 50 is 0.4 mm larger as the distance between the air bearing surfaces 44; 45 which, in cooperation with the Permanent magnets 35 two stable layers of the sliding frame 50 to the Eubmagne th 30 result, namely an upper and a lower layer.

By pulses on the coils 38, the sliding frame 50 is between the switched to both positions.

When compressed air is applied to the hose connector 33, each is formed after the selected stable position between the air bearing surface 44 and the plate 52 or between the air bearing surface 4-5 and the plate 53 via the nozzles 36 Air bearing with a gap of 10 ... 20 / um.

When switching over the coils 38, the sliding frame 50 jumps out of a Position in the other; the air bearing that builds up acts as a cushion, whereby the Switch over with low bounce to bounce-free.

The sliding frame 50 with the toothed ring 51 forms a rotor, which in a bearing ring 60 is rotatably arranged. A flange 61 of the bearing ring 60 comprises the toothed ring 51.

The flange 61 has eight cutouts on the circumference, as a result of which eight surfaces 61.1 stop. Between the flange 61 and the toothed ring 51 there is a Gap of 10 ... 20 »tm for the air bearing. Nozzles 62 are arranged in surfaces 61.1, which connect the gap with a distribution space 63.

The Verbellerrnum 63 is sealed with a plate 64.

Each of the eight distribution rooms 63 has a channel system in the flange 61 61.2, which is connected to a hose connector 65.

Due to the rotationally symmetrical design of the sliding frame 50 the sliding frame 50 can rotate around the lifting magnet 30, the sliding frame 50 in the eight air bearings between the toothed ring 51 and the surfaces 61.1 radially and in each case an air bearing between the air bearing surface 44 and the plate 52 or the air bearing surface 45 and the plate 53 is held axially.

Four feet 66 are attached to the flange 61, one in each Bushing 67 is screwed in. The Einohraubhöhe of the bearing ring 60 is through the sockets 67 adjustable and lockable. After centering the bearing ring 60 through the air bearings is the bearing ring 60 via the bushings 67 by means of screws 68 and dome washers 69 are fastened in the threaded sockets 16.

In the milled-out portions of the flange 61 there are poles 70, which are fixed with pins 71 in the flange 61, as shown in FIG. Everyone Pole 70 has two tooth areas 72. Two poles 70 each have a permanent magnet 73 connected. A coil 74 is wound around each pole 70, the winding ends of which with solder lugs 75 are connected. The soldering lugs 75 are located on a bar 76, which is attached to the poles 70.

The tooth areas 72 and the toothed ring 51 have teeth with the same Division made of magnetizable material, which are not shown. It is the gap filled with non-magnetic material. The four tooth areas 72 of two magnetically connected, poles 70 are offset in the division, so that at Suitable control of the coils 74 creates a tangential force between the poles 70 and the toothed ring 51 results, whereby the sliding frame 50 in the above-described air bearings rotates.

The gear 19 forms a further drive with two stators 80 for height adjustment. A stator 80 is shown in FIG.

The stator 80 has two pole carriers 81, between which there is a permanent magnet 82 is located. On each pole carrier 81 two poles 83 are attached, each one Coil 84 wear. The pole carrier 81 and the permanent magnet 82 are connected by a bracket 85. Solder lugs 86 are fastened in an insulated manner on the bracket 85, which are connected to the winding ends of the coils 84.

The gear 1.9 has teeth 19.1, like the pole 83, the teeth 83.1, 'between which there is a gap of 0.15 mm. The teeth 83.1 are from Pol 83 to pole 83 so offset in the division that with suitable control of the coils 84 the gear 19 rotates and about the nut 18 and the spindle sleeve 15 the Lifting magnet 30 with the sliding frame 50 upwards or downwards. The sliding frame 50 does not perform any rotational movements, as it is through the magnet system between the Toothed ring 51 and the poles 70 is held in the angular position.

Two brackets 87 are attached to each stator 80 with screws 88, which establish the connection to the base plate 11 by means of screws 89, as shown in Fig. 5 is shown.

Next is in Pig. 2 shown that the sliding frame 50 is a Jcheibenauflage 100 carries. The pane support 100 is seated on a support ring 101 on its circumference adjusting screws 102 are located. The support ring 101 is in the Threaded sockets 54 attached. The adjusting screws 102 are used for adjustment a rotation of the disk support without wobble.

The support ring 101 has an axial bore. Located in the hole a bush 103 and a sealing piston 104 therein. The sealing piston 104 has a hose connector 105 for vacuum, a hose connector 106 for compressed air and an electrical connection 107 for the Scheibenkontak benefits.

A stud screw 108, which is fastened in the support ring 101, also protrudes its pin through the socket 103 into an annular groove 104.1 of the sealing piston 104.

The bush 103 and the sealing piston 104 are thus axial in the bore locked and the support ring 101 can rotate around the sealing piston 104.

There is also an insert 109 in the bore of the Support ring 101. Between the insert 109 and the sealing piston 104 is a cone 111 with a Compression spring 112 arranged, which the electrical contact from the terminal 107 Guaranteed via the sealing piston 104 up to the insert 109.

The support ring 101 carries a disk plate centered by the insert 109 113, which is fastened to the insert 109 with a screw 114. This screw 114 serves at the same time as an electrical connection from the disk plate 113 to use 109 and thus to connection 107.

In the disk plate 113 there are radial bores 113.1 and 113.2, which are closed by sealing screws 115.

A first channel system 116 connects the hose connector 106 with the Bores 113.1, of which inclined bores 113.3, all in one transport direction show up to the surface of the disk plate 113 lead. When applying compressed air to the hose connector 106 is a non-illustrated half plate of the Disk plate 113 moved on an air cushion in the transport direction.

A second channel system 117 leads from the hose connector 105 to the Hole 113.2.

The bore 113.2 has several valves 118 in its course. The valves 118 can be locked in two positions by means of screws 119 and are open Depending on the position, the further course of the vacuum supply in the bore 113.2 and a connection to annular grooves 113.4 free or not. Continue to lead from that Channel system 117 eight inclined bores 113.5 up to the surface of the disk plate 113. Thus, when a vacuum is applied to the hose connector 105 and at the same time Switching off the compressed air at the hose connector 106 via the bores 113.5 semiconductor wafers of 37 mm or 1 1/2 ?? Diameter and by connecting the annular grooves 113.4 Ealbleitersebeiben from 50 mm or 2 "to 150 mm or 6" diameter fes-D.

The pane support 100 continues to guide all movements of the sliding frame 50 like turning around any angle, constant height adjustment to compensate for Thickness tolerances of the semiconductor wafers and quick lifting for contacting the semiconductor wafers with the probes of a wafer prober.

According to FIG. 6, a first light barrier 120 is on the flange 61 attached. A mirror surface 121 is glued in between two teeth 19.1, over which the light is reflected. This is a basic position of the gear 19 Are defined.

A second light barrier 125 is assigned to the sliding frame 50, such as is shown in Fig. 7 For this purpose, a web 126 with a reflective is on the toothed ring 51 Front face 126.1 attached, which defines the light path at a certain angular position of the Sliding frame 50 in the lower position of the gear 19 closes.

If both light barriers 120; 125 have a closed light path, are the angular position and height of the sliding frame 50 and thus the disk support 100 clearly determined.

On the circumference of the base plate 11 is a connection block in a recess 11.2 130 as shown in FIG. Hose connectors are located in a base body 131 132 attached, from which hoses, not shown, to the hose connector 65 lead.

A further hose connector 133 is connected to the hose connector 33.

The hose connections 132 and 133 are via channels in the interior of the base body 131 connected to a first main connection 134 for the compressed air of the air bearings. A second main connection 135 is connected via a hose connector 136 and hose connected to the hose connector 105 and forms the vacuum supply. A third The main connection 137 is connected to the hose connector 106 via a hose connector 138 connected-and forms the transport air supply.

On the top of the base body 131 is a plate 139 with a Connector 141 attached. The connector 141 is provided with a cover 142.

The plug 141 is with the soldering lugs 75, the soldering lugs 86, the adapters 43, the connection 107 and the light barriers 120; 125 connected.

The connection block 130 thus enables a simple connection of the Actuator 10 to an external control not described here.

List of the reference numbers used for the patent application ~ actuator 10 actuator 27 balls 11 base plate 30 solenoid 11.1 centering collar 31 inner ring 11.2 Recess 31.1 Bore 12 Cover 31.2 Bore 13 Screws 32 Connection piece 14 Adjusting screw 33 Hose connector 15 Spindle socket 34 Magnetic carrier 151 External thread 34.1 Channel system 15.2 Bearing surface 34.2 Bore 15.3 Long hole 35 Permanent magnet 16 Threaded bushings 36 Nozzle 17 Soldering tube 37 Outer ring 17.1 Stop pin 38 Coil 18 nut 39 insulating ring 19 gear 41 solder joint 19.1 tooth 42 socket 21 Stop screw 43 adapter 21.1 stop pin 44 air bearing surface 22 bearing ring 45 Air bearing surface 23 ball ring 50 sliding frame 24 bearing shell 51 toothed ring 25 bushing 52 Plate 25.1 Bearing surface 53 Plate 25.2 Bore 54 Threaded bush 26 Ball cage 2d elongated hole 60 bearing ring 100 washer support 61 flange 101 support ring 61.1 Surface 102 Adjustment Screws 61.2 Duct System 103 Socket 62 Nozzle 104 Sealing Piston 63 Distribution area 104.1 Ring groove 64 Plate 105 Hose connector 65 Hose connector 106 hose connector 66 socket 107 connection 67 socket 108 stud screw 68 screw 109 Insert 69 Dome washer 111 Cone 70 Pole 112 Compression spring 71 Pin 113 Disc plate 72 Counting range 113.1 Bore 73 Permanent magnet 113.2 Bore 74 Coil 113.3 Bore 75 Ldtöse 113.4 Ring groove 76 Strip 113.5 Bore 80 Stator 114 Screw 81 Pole carrier 115 Sealing screw 82 Permanent magnet 116 Duct system 83 Pole 117 Duct system 83. # Tooth 118 valve 84 coil 119 screw 85 bracket 120 light barrier 86 solder lug 121 mirror surface 87 Bock 125 light barrier 88 screw 126 web 89 screw 126.1 face 130 Connection block 131 Base body 132 Hose connector 133 Hose connector 134 Main connection 135 Main connection 136 Hose connection 137 Main connection 138 Hose connection 139 Plate 140 connector 142 cover

Claims (21)

Invention claim 1. Actuator for testing integrated circuits on a semiconductor wafer which is arranged on a wafer support, wbei the disc support is positioned in the x and y directions and means for adjustment the disk support between two stable layers in the z-direction and a drive are provided for rotating the disc support around the z-axis, characterized in that that the means for adjusting the disc support (100) between tween two stable consisted of a rotationally symmetrical lifting magnet (30) and one, the Rubmagne th (30) comprehensive, rotationally symmetrical sliding frame (50) exist that the Drive for rotating the disk support (ion) around the z-axis from a bearing ring (60) and the sliding frame (50) and that the actuator (10) has another Drive for a continuous movement of the Has disk support (ion) in the z-direction. 2. Actuator according to item 1, characterized in that the first stable position of the sliding frame (50) with respect to the lifting magnet (30) a first air bearing assigned by a top plate (52) and an upper air bearing surface (44) is formed that the second stable position of the sliding frame (50) a second associated with air bearing, which is provided by a lower plate (53) and a lower air bearing surface (45) is formed, wherein in the air bearing surfaces (44; 45) fed with compressed air Nozzles (36) are arranged evenly distributed and the plates (53) on the sliding frame (50) are attached. 3. Actuator according to item 1, characterized in that azole (70) are arranged in recesses of the bearing ring (60) and that in the surfaces (61.1) nozzles (62) fed with compressed air are arranged between the recesses. 4. actuator according to item 2 and 3, characterized in that the Sliding frame (50) in the first air bearing or in the second air bearing in the z-direction is stored and in the air bearing between the surfaces (61.1) and the sliding frame (50) is mounted in the radial direction. 5. Actuator according to item 1, characterized in that the drive for the continuous z-evaluation from at least one stator (80) and one gearwheel (19) with teeth (19.1), the gear (19) being connected to a nut (18) is movably arranged on the external thread (15.1) of a spindle bushing (15) is. 6. Actuator according to item 5, characterized in that. that the stator (80) consists of two pole carriers (81) each with two poles (83) consists, the poles (83) each being provided with a coil (84) and teeth (83.1) au9-have the same pitch as the teeth (19.1) and that the pitch is offset from pole (83) to pole (83). 7. Actuator according to item 5, characterized in that the drive for the z-movement on the nut (18) carries a thrust bearing on which a bushing (25) the lifting magnet (30) is attached. 8. Actuator according to item 7, characterized in that the axial bearing from a bearing ring (22) attached to the nut (18), two ball rings (23) and two interconnected bearing shells (24). 9. Actuator according to item 7, characterized in that between a bearing surface (15.2) of the spindle bushing (15) and a bearing surface (25.1) of the Bush (25) a EugelkäSig (26) with balls (27) is arranged, wherein the balls (27) touch the bearing surfaces (15.2; 25.1). 10. Actuator according to item 2, characterized in that the lifting magnet (30) has one or more permanent magnets (35). 11. Actuator according to item 1, characterized in that on the upper plate (52) of the sliding frame (50) by means of threaded bushings (54) and adjusting screws (102) a support ring (101) of the pane support (100) is secured in an insulated manner. 12. Actuator according to item 1, characterized in that the disc support (100) has a sealing piston (104) rotatable relative to it. 13. Actuator according to item 12, characterized in that on the Support ring (101) a disc plate (113) is arranged that a first channel system (117) consists of a vacuum supply via the sealing piston (104) to a radial bore (113.2) in the disk plate (113) that the channel system (117) connected to the surface of the disk plate (113) by means of bores (113.5) is. and that in the bore (113.2) valves (118) are arranged in a Position a connection to Ring grooves (113.4) on the surface of the disc plate (113) and the further course of the bore (113.2). 14. Actuator according to item 13, characterized in that the mouths of the bores (113.2) on the surface of the disk plate (113) within a Circle with a diameter of 37 mm and that the diameter of the annular grooves each smaller than 50 mm + n ~ 25 mm with n 6i0 (1) 4. 15. Actuator according to item 13, characterized in that the disc plate (113) is conductively connected to an electrical connection (107). 16. Actuator according to item 15, characterized in that the electrical Connection (107) is attached in the sealing piston (104) that between the sealing piston (104) and the disc plate (113) the electrical connection via a cone (111) and a compression spring (112) as well as an insert (109) and a screw (114). 17. Actuator according to claim 3, characterized in that the Bearing ring (60) over feet (66) and lockable bushes (67) on the base plate (11) of the actuator (10) is adjusted. 18. Actuator according to item 5, characterized in that in the Base plate (11) has a stop screw (17) and in the gear (19) one with the Stop screw (17) interacting stop screw (21) is attached. 19. Actuator according to item 5, characterized in that a first Light barrier (120) is assigned to the gear (19), with a mirror surface (121) is attached between two teeth (19.1). 20. Actuator according to item 1, characterized in that a second light barrier (125) is assigned to the sliding frame (50), on the sliding frame (see above) a web (126) with a reflective end face (126.1) is attached. 21. Actuator according to items 5, 7 and 20, characterized in that the second light barrier (125) is within the lowest turn of the nut (18) is in operative engagement relative to the spindle bushing (15).