DE29807926U1 - An apparatus for optical examination of the surface condition of objects - Google Patents

An apparatus for optical examination of the surface condition of objects

Info

Publication number
DE29807926U1
DE29807926U1 DE1998207926 DE29807926U DE29807926U1 DE 29807926 U1 DE29807926 U1 DE 29807926U1 DE 1998207926 DE1998207926 DE 1998207926 DE 29807926 U DE29807926 U DE 29807926U DE 29807926 U1 DE29807926 U1 DE 29807926U1
Authority
DE
Grant status
Grant
Patent type
Prior art keywords
characterized
device according
device
objects
diffuser plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1998207926
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IBEA INGENIEURBUERO fur ELEKTRONIK und AUTOMATION G
IBEA INGENIEURBUERO fur ELEKT
Original Assignee
IBEA INGENIEURBUERO fur ELEKTRONIK und AUTOMATION G
IBEA INGENIEURBUERO fur ELEKT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00Television systems
    • H04N7/18Closed circuit television systems, i.e. systems in which the signal is not broadcast
    • H04N7/183Closed circuit television systems, i.e. systems in which the signal is not broadcast for receiving images from a single remote source
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/30Measuring arrangements characterised by the use of optical means for measuring roughness or irregularity of surfaces
    • G01B11/303Measuring arrangements characterised by the use of optical means for measuring roughness or irregularity of surfaces using photoelectric detection means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • G01N2021/8812Diffuse illumination, e.g. "sky"
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • G01N2021/8812Diffuse illumination, e.g. "sky"
    • G01N2021/8816Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95607Inspecting patterns on the surface of objects using a comparative method
    • G01N2021/95615Inspecting patterns on the surface of objects using a comparative method with stored comparision signal

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Claims (7)

  1. 1. Vorrichtung zur optischen Prüfung der Oberflächenbeschaffenheit von Gegenständen, mit einer mehrere Lichtquellen aufweisenden Beleuchtungsvorrichtung, die oberhalb einer Diffusorplatte angeordnet ist, einer Videokamera, deren Objektiv zu einer Öff nung in der Diffusorplatte ausgerichtet ist und einer einen Rechner enthaltenden Auswertevorrichtung, in der ein Sollbild oder Sollgraubild von vorab definierten Flä chen des Gegenstands gespeichert ist/sind, mit dem das von der Kamera aufgenom mene Bild verglichen wird/werden zwecks Erzeugung eines Auswerfsignals, wenn die Abweichung zwischen Ist- und Sollwert eine vorgegebene Größe aufweist, dadurch gekennzeichnet , daß die Beleuchtungsvorrichtung ständig eingeschaltete Weißlichtlampen ( 28 ) aufweist und die Videokamera ( 10 ) ein Nadelöhrobjektiv ( 12 ) aufweist, das durch eine kleine Öffnung ( 16 ) in der Diffusorplatte ( 14 ) unmittelbar auf den zu prüfenden Gegenstand ( 34 ) ausgerichtet ist. 1. A device for optical examination of the surface quality of objects, comprising a plurality of light sources illuminating device is disposed above a diffuser plate, a video camera whose lens is aligned with a Publ voltage in the diffuser plate, and an evaluating device a computer containing, in a target image or target gray image of predefined FLAE surfaces of the object stored / are, with which the sumption of the camera image is compared / are to generate a Auswerfsignals when the deviation between actual and desired value has a predetermined size, characterized in that the comprises illuminating device constantly has and switched white light lamps (28) the video camera (10) is a pinhole lens (12), which is oriented through a small opening (16) in the diffuser plate (14) directly on the object to be tested (34).
  2. 2. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß die Diffusorplatte ( 14 ) auf einer Blendenplatte ( 18 ) angeordnet ist und eine Blendenöffnung ( 32 ) überdeckt. 2. Device according to claim 1, characterized in that the diffuser plate (14) is arranged on a diaphragm plate (18) and an aperture (32) covers.
  3. 3. Vorrichtung nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die Weißlichtlam pen ( 28 ) auf mehreren konzentrischen Kreisen um die kleine Öffnung ( 16 ) der Diffu sorplatte ( 14 ) als Mittelpunkt angeordnet sind. 3. A device according to claim 1 or 2, characterized in that the Weißlichtlam pen (28) on a plurality of concentric circles around the small opening (16) of Diffu sorplatte (14) are disposed as a center.
  4. 4. Vorrichtung nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß So fitten-Weißlichtlampen ( 28 ) vorgesehen sind. 4. Device according to one of claims 1 to 3, characterized in that as fit-white light lamps (28) are provided.
  5. 5. Vorrichtung nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die Lichtquellen ( 28 ) an einer Platte ( 24 ) angebracht sind, an der auch die Videokamera ( 10 ) befestigt ist. 5. Device according to one of claims 1 to 4, characterized in that the light sources (28) to a plate (24) are attached, in which also the video camera (10) is attached.
  6. 6. Vorrichtung nach Anspruch 5, dadurch gekennzeichnet, daß die Platte ( 26 ) an der Blendenplatte ( 18 ) abgestützt ist. 6. The device according to claim 5, characterized in that the plate (26) on the diaphragm plate (18) is supported.
  7. 7. Vorrichtung nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, daß die Öff nung ( 16 ) in der Diffusorplatte ( 14 ) im Durchmesser etwa dem Durchmesser der Objektiv-Austrittsöffnung entspricht. 7. Device according to one of claims 1 to 6, characterized in that the voltage Publ (16) in diameter corresponds to the diffuser plate (14) approximately to the diameter of the lens exit aperture.
DE1998207926 1998-05-02 1998-05-02 An apparatus for optical examination of the surface condition of objects Expired - Lifetime DE29807926U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE1998207926 DE29807926U1 (en) 1998-05-02 1998-05-02 An apparatus for optical examination of the surface condition of objects

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1998207926 DE29807926U1 (en) 1998-05-02 1998-05-02 An apparatus for optical examination of the surface condition of objects
DE1999111896 DE19911896A1 (en) 1998-05-02 1999-03-17 Optical device for testing surface condition

Publications (1)

Publication Number Publication Date
DE29807926U1 true DE29807926U1 (en) 1999-09-09

Family

ID=8056595

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1998207926 Expired - Lifetime DE29807926U1 (en) 1998-05-02 1998-05-02 An apparatus for optical examination of the surface condition of objects
DE1999111896 Withdrawn DE19911896A1 (en) 1998-05-02 1999-03-17 Optical device for testing surface condition

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE1999111896 Withdrawn DE19911896A1 (en) 1998-05-02 1999-03-17 Optical device for testing surface condition

Country Status (1)

Country Link
DE (2) DE29807926U1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3540288C2 (en) * 1985-06-21 1988-10-20 Matsushita Electric Works, Ltd., Kadoma, Osaka, Jp
DE4413832A1 (en) * 1994-04-20 1995-10-26 Siemens Ag A device for control of semiconductor wafers
DE19623949A1 (en) * 1996-06-15 1997-12-18 Ibea Ingenieurbuero Fuer Elekt Optical testing system for object surface composition using illumination system
DE4123916C2 (en) * 1990-07-19 1998-04-09 Reinhard Malz Method and apparatus for dynamic lighting detection and classification of surface features and defects of an object

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3540288C2 (en) * 1985-06-21 1988-10-20 Matsushita Electric Works, Ltd., Kadoma, Osaka, Jp
DE4123916C2 (en) * 1990-07-19 1998-04-09 Reinhard Malz Method and apparatus for dynamic lighting detection and classification of surface features and defects of an object
DE4413832A1 (en) * 1994-04-20 1995-10-26 Siemens Ag A device for control of semiconductor wafers
DE19623949A1 (en) * 1996-06-15 1997-12-18 Ibea Ingenieurbuero Fuer Elekt Optical testing system for object surface composition using illumination system

Also Published As

Publication number Publication date Type
DE19911896A1 (en) 1999-11-04 application

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Legal Events

Date Code Title Description
R163 Identified publications notified
R207 Utility model specification

Effective date: 19991014

R156 Lapse of ip right after 3 years

Effective date: 20020301