DE29707686U1 - Magnethalterung für Folienmasken - Google Patents

Magnethalterung für Folienmasken

Info

Publication number
DE29707686U1
DE29707686U1 DE29707686U DE29707686U DE29707686U1 DE 29707686 U1 DE29707686 U1 DE 29707686U1 DE 29707686 U DE29707686 U DE 29707686U DE 29707686 U DE29707686 U DE 29707686U DE 29707686 U1 DE29707686 U1 DE 29707686U1
Authority
DE
Germany
Prior art keywords
magnetic holder
foil masks
masks
foil
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29707686U
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evatec Europe GmbH
Original Assignee
Balzers Prozess Systeme Vertriebs- und Service 81245 Muenchen De GmbH
Balzers Prozess Systeme Vertriebs und Service GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Prozess Systeme Vertriebs- und Service 81245 Muenchen De GmbH, Balzers Prozess Systeme Vertriebs und Service GmbH filed Critical Balzers Prozess Systeme Vertriebs- und Service 81245 Muenchen De GmbH
Priority to DE29707686U priority Critical patent/DE29707686U1/de
Publication of DE29707686U1 publication Critical patent/DE29707686U1/de
Priority to JP10747898A priority patent/JPH10317139A/ja
Priority to TW087105880A priority patent/TW376332B/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
DE29707686U 1997-04-28 1997-04-28 Magnethalterung für Folienmasken Expired - Lifetime DE29707686U1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE29707686U DE29707686U1 (de) 1997-04-28 1997-04-28 Magnethalterung für Folienmasken
JP10747898A JPH10317139A (ja) 1997-04-28 1998-04-17 金属箔マスク用磁力保持装置
TW087105880A TW376332B (en) 1997-04-28 1998-04-17 Magnet supporter for the foil mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE29707686U DE29707686U1 (de) 1997-04-28 1997-04-28 Magnethalterung für Folienmasken

Publications (1)

Publication Number Publication Date
DE29707686U1 true DE29707686U1 (de) 1997-06-26

Family

ID=8039673

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29707686U Expired - Lifetime DE29707686U1 (de) 1997-04-28 1997-04-28 Magnethalterung für Folienmasken

Country Status (3)

Country Link
JP (1) JPH10317139A (de)
DE (1) DE29707686U1 (de)
TW (1) TW376332B (de)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000037707A1 (de) * 1998-12-21 2000-06-29 Uhp Corporation Ortsselektive oberflächenbehandlung mit magnetischer maskenhalterung
EP1209522A2 (de) 2000-11-28 2002-05-29 Lg Electronics Inc. Maske zur herstellung von Bildschirmen
DE10232821A1 (de) * 2002-07-12 2004-01-29 Domorazek, Gottfried, Dr.-Ing.habil. Verfahren zum Herstellen von Sensoren zum elektrischen Messsen der Füllstandshöhe sowie Einrichtung zum Herstellen solcher Sensoren
DE102004034418A1 (de) * 2004-07-15 2006-02-16 Schott Ag Verfahren zur Herstellung struktuierter optischer Filterschichten auf Substraten
WO2006020006A1 (en) * 2004-07-16 2006-02-23 Applied Materials, Inc. Shadow frame with mask panels
EP2159303A2 (de) * 2002-02-14 2010-03-03 3M Innovative Properties Company Lochmasken zur Herstellung von Schaltungen
DE102008037387A1 (de) * 2008-09-24 2010-03-25 Aixtron Ag Verfahren sowie Vorrichtung zum Abscheiden lateral strukturierter Schichten mittels einer magnetisch auf einem Substrathalter gehaltenen Schattenmaske
US8361230B2 (en) 2005-04-20 2013-01-29 Applied Materials Gmbh & Co. Kg Magnetic mask holder
WO2016109975A1 (en) * 2015-01-09 2016-07-14 Applied Materials,Inc. Method for coating thin metal substrates using pulsed or combustion coating processes
US10916464B1 (en) 2019-07-26 2021-02-09 Applied Materials, Inc. Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
US11196360B2 (en) 2019-07-26 2021-12-07 Applied Materials, Inc. System and method for electrostatically chucking a substrate to a carrier
US11756816B2 (en) 2019-07-26 2023-09-12 Applied Materials, Inc. Carrier FOUP and a method of placing a carrier

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW490714B (en) * 1999-12-27 2002-06-11 Semiconductor Energy Lab Film formation apparatus and method for forming a film
JP3651432B2 (ja) * 2001-09-25 2005-05-25 セイコーエプソン株式会社 マスク及びその製造方法並びにエレクトロルミネッセンス装置の製造方法
KR100463532B1 (ko) * 2002-10-22 2004-12-29 엘지전자 주식회사 대면적 풀-컬러 디스플레이 패널의 제작방법
JP4795842B2 (ja) * 2006-04-26 2011-10-19 日本冶金工業株式会社 蒸着用治具
JP5157700B2 (ja) * 2007-07-25 2013-03-06 セイコーエプソン株式会社 時計用文字板、時計用文字板の製造方法、および、時計
JP5941971B2 (ja) * 2014-12-10 2016-06-29 東京エレクトロン株式会社 リング状シールド部材及びリング状シールド部材を備えた基板載置台
WO2019082868A1 (ja) 2017-10-24 2019-05-02 株式会社アルバック 基板処理装置、支持ピン

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000037707A1 (de) * 1998-12-21 2000-06-29 Uhp Corporation Ortsselektive oberflächenbehandlung mit magnetischer maskenhalterung
EP1209522A2 (de) 2000-11-28 2002-05-29 Lg Electronics Inc. Maske zur herstellung von Bildschirmen
EP2159303A2 (de) * 2002-02-14 2010-03-03 3M Innovative Properties Company Lochmasken zur Herstellung von Schaltungen
EP2159303A3 (de) * 2002-02-14 2010-09-29 3M Innovative Properties Company Lochmasken zur Herstellung von Schaltungen
DE10232821A1 (de) * 2002-07-12 2004-01-29 Domorazek, Gottfried, Dr.-Ing.habil. Verfahren zum Herstellen von Sensoren zum elektrischen Messsen der Füllstandshöhe sowie Einrichtung zum Herstellen solcher Sensoren
DE10232821B4 (de) * 2002-07-12 2006-06-14 Domorazek, Gottfried, Dr.-Ing.habil. Verfahren zum Herstellen von Sensoren zum elektrischen Messen der Füllstandshöhe sowie Einrichtung zum Herstellen solcher Sensoren
DE102004034418A1 (de) * 2004-07-15 2006-02-16 Schott Ag Verfahren zur Herstellung struktuierter optischer Filterschichten auf Substraten
DE102004034418B4 (de) * 2004-07-15 2009-06-25 Schott Ag Verfahren zur Herstellung struktuierter optischer Filterschichten auf Substraten
WO2006020006A1 (en) * 2004-07-16 2006-02-23 Applied Materials, Inc. Shadow frame with mask panels
US8361230B2 (en) 2005-04-20 2013-01-29 Applied Materials Gmbh & Co. Kg Magnetic mask holder
DE102008037387A1 (de) * 2008-09-24 2010-03-25 Aixtron Ag Verfahren sowie Vorrichtung zum Abscheiden lateral strukturierter Schichten mittels einer magnetisch auf einem Substrathalter gehaltenen Schattenmaske
US20110174217A1 (en) * 2008-09-24 2011-07-21 Markus Gersdorff Shadow mask held magnetically on a substrate support
US9045818B2 (en) * 2008-09-24 2015-06-02 Aixtron Se Shadow mask held magnetically on a substrate support
WO2016109975A1 (en) * 2015-01-09 2016-07-14 Applied Materials,Inc. Method for coating thin metal substrates using pulsed or combustion coating processes
US10916464B1 (en) 2019-07-26 2021-02-09 Applied Materials, Inc. Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
US11183411B2 (en) 2019-07-26 2021-11-23 Applied Materials, Inc. Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
US11196360B2 (en) 2019-07-26 2021-12-07 Applied Materials, Inc. System and method for electrostatically chucking a substrate to a carrier
US11756816B2 (en) 2019-07-26 2023-09-12 Applied Materials, Inc. Carrier FOUP and a method of placing a carrier

Also Published As

Publication number Publication date
TW376332B (en) 1999-12-11
JPH10317139A (ja) 1998-12-02

Similar Documents

Publication Publication Date Title
DE69929778D1 (de) Ringhalter für anuloplastik
DE29707686U1 (de) Magnethalterung für Folienmasken
DE69823544D1 (de) Umhüllung für datenträger
DE69809595D1 (de) Wicklung für planartransformator
DE69715180D1 (de) Magnetanordnung für magnetrone
DE59808785D1 (de) Haltevorrichtung für Taschen
DE29708752U1 (de) Haltemagnet für Metalltafeln
DE29611171U1 (de) Magnethalter
ATA92597A (de) Halter für müllsäcke
DE29613153U1 (de) Magnetischer Halter für Kleinteile
DE29703582U1 (de) Halterung für handelsübliche Beinbeutel
DE9406998U1 (de) Halterung für Baukastenstempel
DE29708602U1 (de) Haltevorrichtung für Tauchgalvanisierung
DE29717544U1 (de) Mehrfach-Halterung für Magnetfeldsensoren
DE29820728U1 (de) Halterung für film- oder folienartige Gegenstände
DE29619989U1 (de) Magnetische Haltevorrichtung für Zahnprothesen
DE29801881U1 (de) Halterung für CD-Hüllen
DE9418735U1 (de) Stempelhalter
DE29812914U1 (de) Haltevorrichtung für Zeitschriften
DE29709919U1 (de) Hülle für CD
DE9403816U1 (de) Spulenträger
DE29813285U1 (de) Halterung für Nadeln
DE29506602U1 (de) Magnetischer Halter für Kleinteile
DE29517240U1 (de) Magnethalterung
DE9421673U1 (de) Grundmasse für Brotaufstriche

Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19970807

R150 Term of protection extended to 6 years

Effective date: 20000623

R081 Change of applicant/patentee

Owner name: UNAXIS DEUTSCHLAND VERTRIEBS GMBH, DE

Free format text: FORMER OWNER: BALZERS PROZESS SYSTEME VERTRIEBS- UND SERVICE GMBH, 81476 MUENCHEN, DE

Effective date: 20001219

R151 Term of protection extended to 8 years

Effective date: 20030522

R081 Change of applicant/patentee

Owner name: UNAXIS DEUTSCHLAND VERTRIEBS GMBH, DE

Free format text: FORMER OWNER: UNAXIS DEUTSCHLAND VERTRIEBS GMBH, 81476 MUENCHEN, DE

Effective date: 20040506

R152 Term of protection extended to 10 years

Effective date: 20050506

R071 Expiry of right