DE2900724C2 - - Google Patents

Info

Publication number
DE2900724C2
DE2900724C2 DE19792900724 DE2900724A DE2900724C2 DE 2900724 C2 DE2900724 C2 DE 2900724C2 DE 19792900724 DE19792900724 DE 19792900724 DE 2900724 A DE2900724 A DE 2900724A DE 2900724 C2 DE2900724 C2 DE 2900724C2
Authority
DE
Grant status
Grant
Patent type
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19792900724
Other versions
DE2900724A1 (en )
Inventor
Reinhard Dipl.-Phys. Behn
Hermann Dr.-Ing. 8000 Muenchen De Heywang
Horst Dipl.-Phys. 8025 Unterhaching De Pachonik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568Transferring the substrates through a series of coating stations
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54Apparatus specially adapted for continuous coating
DE19792900724 1979-01-10 1979-01-10 Expired DE2900724C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19792900724 DE2900724C2 (en) 1979-01-10 1979-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792900724 DE2900724C2 (en) 1979-01-10 1979-01-10

Publications (2)

Publication Number Publication Date
DE2900724A1 true DE2900724A1 (en) 1980-07-24
DE2900724C2 true DE2900724C2 (en) 1986-05-28

Family

ID=6060285

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19792900724 Expired DE2900724C2 (en) 1979-01-10 1979-01-10

Country Status (1)

Country Link
DE (1) DE2900724C2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0388811A1 (en) * 1989-03-20 1990-09-26 Hitachi, Ltd. Continuous vacuum processing method and apparatus
DE10043526C1 (en) * 2000-09-05 2002-06-06 Fraunhofer Ges Forschung A process for firmly adhering metal coating and metal-coated functional element

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4410558A (en) * 1980-05-19 1983-10-18 Energy Conversion Devices, Inc. Continuous amorphous solar cell production system
EP0057175B1 (en) * 1980-08-04 1984-04-25 Siemens Aktiengesellschaft Device for making superposed metal layers and micaceous polymer layers, laterally off set relative to one another
DE3725571A1 (en) * 1987-08-01 1989-02-09 Leybold Ag Apparatus for the manufacture of layers having gleichmaessigem thickness profile on substrates by sputtering
DE4342463C2 (en) * 1993-12-13 1997-03-27 Leybold Ag Method and apparatus for coating optical lenses with protective layers and with optical layers in vacuo
JP3732250B2 (en) * 1995-03-30 2006-01-05 キヤノンアネルバ株式会社 The in-line film-formation apparatus
EP0801146A1 (en) * 1996-04-17 1997-10-15 Ce.Te.V. Centro Tecnologie Del Vuoto Method for deposition of mixed organic-inorganic film
ES2159084T3 (en) * 1997-01-07 2001-09-16 Siegfried Dr Stramke Device for surface treatment plasma workpieces.
US6251232B1 (en) 1999-03-26 2001-06-26 Anelva Corporation Method of removing accumulated films from the surface of substrate holders in film deposition apparatus, and film deposition apparatus
DE112005003484A5 (en) * 2005-03-31 2008-07-24 Applied Materials Gmbh & Co. Kg Apparatus and method for coating substrates
EP2703302B1 (en) * 2012-08-30 2016-03-09 Zanichelli Meccanica S.p.A. Feeder for feeding lids in vacuum crimping machines

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3288700A (en) * 1963-10-23 1966-11-29 Northern Electric Co Sputtering apparatus including a folded flexible conveyor
DE2415119A1 (en) * 1974-03-28 1975-10-16 Siemens Ag Continuous cathodic sputtering chamber - with conveyor carrying substrates through split cylinder forming anode and cathode
DE2844491C2 (en) * 1978-10-12 1983-04-14 Leybold-Heraeus Gmbh, 5000 Koeln, De

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0388811A1 (en) * 1989-03-20 1990-09-26 Hitachi, Ltd. Continuous vacuum processing method and apparatus
US5088908A (en) * 1989-03-20 1992-02-18 Hitachi, Ltd. Continuous vacuum processing apparatus
DE10043526C1 (en) * 2000-09-05 2002-06-06 Fraunhofer Ges Forschung A process for firmly adhering metal coating and metal-coated functional element

Also Published As

Publication number Publication date Type
DE2900724A1 (en) 1980-07-24 application

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8363 Opposition against the patent
8339 Ceased/non-payment of the annual fee