DE2709902A1 - Lagerung fuer turbomolekularpumpe - Google Patents

Lagerung fuer turbomolekularpumpe

Info

Publication number
DE2709902A1
DE2709902A1 DE19772709902 DE2709902A DE2709902A1 DE 2709902 A1 DE2709902 A1 DE 2709902A1 DE 19772709902 DE19772709902 DE 19772709902 DE 2709902 A DE2709902 A DE 2709902A DE 2709902 A1 DE2709902 A1 DE 2709902A1
Authority
DE
Germany
Prior art keywords
bearing
rotor
molecular pump
storage
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19772709902
Other languages
German (de)
English (en)
Inventor
Helmut Bollinger
Werner Dr Ing Fleischer
Harry Dipl Ing Werner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hochvakuum Dresden VEB
Original Assignee
Hochvakuum Dresden VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochvakuum Dresden VEB filed Critical Hochvakuum Dresden VEB
Publication of DE2709902A1 publication Critical patent/DE2709902A1/de
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00—Sliding-contact bearings for exclusively rotary movement
    • F16C17/26—Systems consisting of a plurality of sliding-contact bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE19772709902 1976-03-16 1977-03-08 Lagerung fuer turbomolekularpumpe Pending DE2709902A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD191871A DD124315A1 (enrdf_load_stackoverflow) 1976-03-16 1976-03-16

Publications (1)

Publication Number Publication Date
DE2709902A1 true DE2709902A1 (de) 1977-09-29

Family

ID=5503940

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19772709902 Pending DE2709902A1 (de) 1976-03-16 1977-03-08 Lagerung fuer turbomolekularpumpe

Country Status (4)

Country Link
DD (1) DD124315A1 (enrdf_load_stackoverflow)
DE (1) DE2709902A1 (enrdf_load_stackoverflow)
FR (1) FR2344744A1 (enrdf_load_stackoverflow)
GB (1) GB1571846A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
RU2119698C1 (ru) * 1995-11-15 1998-09-27 Валерий Моисеевич Иоффе Варикап
CN113957768B (zh) * 2021-11-01 2023-07-18 广东丰能环保科技股份有限公司 一种预制型运动面层及其成型工艺

Also Published As

Publication number Publication date
FR2344744A1 (fr) 1977-10-14
DD124315A1 (enrdf_load_stackoverflow) 1977-02-16
FR2344744B3 (enrdf_load_stackoverflow) 1980-01-18
GB1571846A (en) 1980-07-23

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Legal Events

Date Code Title Description
OD Request for examination
OHW Rejection