DE2700252C2 - - Google Patents

Info

Publication number
DE2700252C2
DE2700252C2 DE19772700252 DE2700252A DE2700252C2 DE 2700252 C2 DE2700252 C2 DE 2700252C2 DE 19772700252 DE19772700252 DE 19772700252 DE 2700252 A DE2700252 A DE 2700252A DE 2700252 C2 DE2700252 C2 DE 2700252C2
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19772700252
Other versions
DE2700252A1 (en
Inventor
Thomas Dr.Rer.Nat. Ricker
Juergen Dr.-Ing. 7900 Ulm De Schuermann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Licentia Patent Verwaltungs-GmbH
Original Assignee
Licentia Patent Verwaltungs-GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Licentia Patent Verwaltungs-GmbH filed Critical Licentia Patent Verwaltungs-GmbH
Priority to DE19772700252 priority Critical patent/DE2700252C2/de
Publication of DE2700252A1 publication Critical patent/DE2700252A1/en
Application granted granted Critical
Publication of DE2700252C2 publication Critical patent/DE2700252C2/de
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/24Measuring arrangements characterised by the use of optical means for measuring contours or curvatures
    • GPHYSICS
    • G06COMPUTING; CALCULATING; COUNTING
    • G06KRECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K9/00Methods or arrangements for reading or recognising printed or written characters or for recognising patterns, e.g. fingerprints
    • G06K9/36Image preprocessing, i.e. processing the image information without deciding about the identity of the image
    • G06K9/54Combinations of preprocessing functions
    • G06K9/56Combinations of preprocessing functions using a local operator, i.e. means to operate on an elementary image point in terms of the immediate surroundings of this point
DE19772700252 1977-01-05 1977-01-05 Expired DE2700252C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19772700252 DE2700252C2 (en) 1977-01-05 1977-01-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19772700252 DE2700252C2 (en) 1977-01-05 1977-01-05

Publications (2)

Publication Number Publication Date
DE2700252A1 DE2700252A1 (en) 1978-07-06
DE2700252C2 true DE2700252C2 (en) 1985-03-14

Family

ID=5998154

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19772700252 Expired DE2700252C2 (en) 1977-01-05 1977-01-05

Country Status (1)

Country Link
DE (1) DE2700252C2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3440473A1 (en) * 1984-11-06 1986-05-07 Deutsch Pruef Messgeraete Method and device for determining fractures on the surface of workpieces

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4167728A (en) * 1976-11-15 1979-09-11 Environmental Research Institute Of Michigan Automatic image processor
JPS5915381B2 (en) * 1978-10-16 1984-04-09 Nippon Telegraph & Telephone
JPS593681B2 (en) * 1978-10-30 1984-01-25 Fujitsu Ltd
DE2916862C2 (en) * 1979-04-26 1984-12-20 Robert Bosch Gmbh, 7000 Stuttgart, De
DE2929846A1 (en) * 1979-07-23 1981-03-12 Siemens Ag Opto-electronic testing system for automatic checking of characteristics, their intermediate products and printing tools
DE2937741C2 (en) * 1979-09-18 1987-03-12 Siemens Ag, 1000 Berlin Und 8000 Muenchen, De
SE449531B (en) * 1980-12-11 1987-05-04 Gerhard Westerberg Method and device for the control of micro-masks
EP0095517B1 (en) * 1982-05-28 1985-11-21 Ibm Deutschland Gmbh Process and device for an automatic optical inspection
JPS59501649A (en) * 1982-09-20 1984-09-13
IL68568D0 (en) * 1983-05-04 1983-09-30 Optrotech Ltd Apparatus and method for automatic inspection of printed circuitboards
GB8320016D0 (en) * 1983-07-25 1983-08-24 Lloyd Doyle Ltd Apparatus for inspecting printed wiring boards
DE3427981C2 (en) * 1984-07-28 1988-05-19 Telefunken Electronic Gmbh, 7100 Heilbronn, De
DE4410603C1 (en) * 1994-03-26 1995-06-14 Jenoptik Technologie Gmbh Detecting faults during inspection of masks, LCDs, circuit boards and semiconductor wafers
JPH09312318A (en) * 1996-05-21 1997-12-02 Hitachi Ltd Pattern defect inspection device
US6373053B1 (en) * 2000-01-31 2002-04-16 Advanced Micro Devices, Inc. Analysis of CD-SEM signal to detect scummed/closed contact holes and lines

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3916439A (en) * 1974-03-08 1975-10-28 Westinghouse Electric Corp Inspection system employing differential imaging
NL7409850A (en) * 1974-07-22 1976-01-26 Philips Nv Method and device for testing a two-dimensional pattern.
US3987241A (en) * 1974-10-17 1976-10-19 Westinghouse Electric Corporation Sampled differential analyzer
DE2514930A1 (en) * 1975-04-05 1976-10-14 Opto Produkte Ag Method for the optical determination and comparison of shapes and positions of objects

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3440473A1 (en) * 1984-11-06 1986-05-07 Deutsch Pruef Messgeraete Method and device for determining fractures on the surface of workpieces

Also Published As

Publication number Publication date
DE2700252A1 (en) 1978-07-06

Similar Documents

Publication Publication Date Title
BG28545A3 (en)
BG25937A1 (en)
CH604164A5 (en)
CH612565B (en)
BG28234A3 (en)
CH599872A5 (en)
BG26074A1 (en)
AU3353778A (en)
BG25850A1 (en)
CH596532A5 (en)
BG25837A1 (en)
BG25868A1 (en)
BG25847A1 (en)
BG26089A1 (en)
BG26348A1 (en)
BG25878A1 (en)
BG26232A1 (en)
BG25861A1 (en)
BG26167A1 (en)
BG26043A1 (en)
CH611734A5 (en)
BG25942A1 (en)
BG25904A1 (en)
BG25938A1 (en)
BG25935A1 (en)

Legal Events

Date Code Title Description
OAM Search report available
OC Search report available
OD Request for examination
OF Willingness to grant licenses before publication of examined application
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee