DE2641280A1 - Stromzufuehrung - Google Patents

Stromzufuehrung

Info

Publication number
DE2641280A1
DE2641280A1 DE19762641280 DE2641280A DE2641280A1 DE 2641280 A1 DE2641280 A1 DE 2641280A1 DE 19762641280 DE19762641280 DE 19762641280 DE 2641280 A DE2641280 A DE 2641280A DE 2641280 A1 DE2641280 A1 DE 2641280A1
Authority
DE
Germany
Prior art keywords
workpieces
conductor
rod
recipient
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19762641280
Other languages
German (de)
English (en)
Inventor
Jan Elwart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IONIT ANSTALT BERNHARD BERGHAUS
Original Assignee
IONIT ANSTALT BERNHARD BERGHAUS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IONIT ANSTALT BERNHARD BERGHAUS filed Critical IONIT ANSTALT BERNHARD BERGHAUS
Priority to DE19762641280 priority Critical patent/DE2641280A1/de
Priority to JP11117277A priority patent/JPS5335638A/ja
Publication of DE2641280A1 publication Critical patent/DE2641280A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/338—Changing chemical properties of treated surfaces
    • H01J2237/3385—Carburising
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/338—Changing chemical properties of treated surfaces
    • H01J2237/3387—Nitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Connections By Means Of Piercing Elements, Nuts, Or Screws (AREA)
  • Discharge Heating (AREA)
DE19762641280 1976-09-14 1976-09-14 Stromzufuehrung Pending DE2641280A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19762641280 DE2641280A1 (de) 1976-09-14 1976-09-14 Stromzufuehrung
JP11117277A JPS5335638A (en) 1976-09-14 1977-09-14 Electric power source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762641280 DE2641280A1 (de) 1976-09-14 1976-09-14 Stromzufuehrung

Publications (1)

Publication Number Publication Date
DE2641280A1 true DE2641280A1 (de) 1978-03-16

Family

ID=5987857

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19762641280 Pending DE2641280A1 (de) 1976-09-14 1976-09-14 Stromzufuehrung

Country Status (2)

Country Link
JP (1) JPS5335638A (cs)
DE (1) DE2641280A1 (cs)

Also Published As

Publication number Publication date
JPS5335638A (en) 1978-04-03
JPS5637680B2 (cs) 1981-09-01

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Legal Events

Date Code Title Description
OAP Request for examination filed
OD Request for examination
OHW Rejection