DE2635008C3 - Substratträger für Vakuumbeschichtungsanlagen - Google Patents

Substratträger für Vakuumbeschichtungsanlagen

Info

Publication number
DE2635008C3
DE2635008C3 DE2635008A DE2635008A DE2635008C3 DE 2635008 C3 DE2635008 C3 DE 2635008C3 DE 2635008 A DE2635008 A DE 2635008A DE 2635008 A DE2635008 A DE 2635008A DE 2635008 C3 DE2635008 C3 DE 2635008C3
Authority
DE
Germany
Prior art keywords
carrier head
turning
rotation
shaft
movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2635008A
Other languages
German (de)
English (en)
Other versions
DE2635008B2 (de
DE2635008A1 (de
Inventor
Roman Wolfurt Schertler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Hochvakuum 6200 Wiesbaden De GmbH
Original Assignee
Balzers Hochvakuum 6200 Wiesbaden De GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum 6200 Wiesbaden De GmbH filed Critical Balzers Hochvakuum 6200 Wiesbaden De GmbH
Publication of DE2635008A1 publication Critical patent/DE2635008A1/de
Publication of DE2635008B2 publication Critical patent/DE2635008B2/de
Application granted granted Critical
Publication of DE2635008C3 publication Critical patent/DE2635008C3/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S106/00—Compositions: coating or plastic
    • Y10S106/02—Perlite

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE2635008A 1975-09-02 1976-08-04 Substratträger für Vakuumbeschichtungsanlagen Expired DE2635008C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1135575A CH599982A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-09-02 1975-09-02

Publications (3)

Publication Number Publication Date
DE2635008A1 DE2635008A1 (de) 1977-02-24
DE2635008B2 DE2635008B2 (de) 1980-04-03
DE2635008C3 true DE2635008C3 (de) 1982-05-13

Family

ID=4372692

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2635008A Expired DE2635008C3 (de) 1975-09-02 1976-08-04 Substratträger für Vakuumbeschichtungsanlagen

Country Status (6)

Country Link
US (1) US4034704A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH (1) CH599982A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2635008C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2322936A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1562822A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL168886C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4108107A (en) * 1976-04-01 1978-08-22 Airco, Inc. Rotatable substrate holder for use in vacuum
DE2813180C2 (de) * 1978-03-25 1985-12-19 Leybold-Heraeus GmbH, 5000 Köln Vakuumbeschichtungsanlage zum allseitigen Beschichten von Substraten durch Rotation der Substrate im Materialstrom
US4276855A (en) * 1979-05-02 1981-07-07 Optical Coating Laboratory, Inc. Coating apparatus
DE2951465C2 (de) * 1979-12-20 1982-10-21 Siemens AG, 1000 Berlin und 8000 München Halterung für Substrate in Bedampfungsanlagen
JPH0639358B2 (ja) * 1984-11-27 1994-05-25 ソニー株式会社 有機金属気相成長装置
US4662310A (en) * 1986-07-09 1987-05-05 Deco Tools, Inc. Robotic paint masking machine
US4816133A (en) * 1987-05-14 1989-03-28 Northrop Corporation Apparatus for preparing thin film optical coatings on substrates
CH681308A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-05-22 1993-02-26 Satis Vacuum Ag
DE4025659A1 (de) * 1990-08-14 1992-02-20 Leybold Ag Umlaufraedergetriebe mit einem raedersatz, insbesondere fuer vorrichtungen zum beschichten von substraten
US5558909A (en) * 1996-01-17 1996-09-24 Textron Automotive Interiors, Inc. Apparatus and method for vacuum-metallizing articles with significant deposition onto three-dimensional surfaces
DE19643702B4 (de) * 1996-10-23 2007-11-29 Ald Vacuum Technologies Ag Vakuumbeschichtungsvorrichtung zum allseitigen Beschichten eines Substrats durch Rotation des Substrats im Materialstrom
DE19743904C2 (de) * 1997-10-04 2001-12-13 Deutsch Zentr Luft & Raumfahrt Wärmedämmschichten auf einkristallinen und polykristallinen Metallsubstraten mit einer verbesserten kristallographischen Beziehung zwischen Schicht und Substrat
WO2003083162A1 (en) * 2002-03-28 2003-10-09 Satis Vacuum Industries S.P.A. Vacuum deposition apparatus and method for depositing thin optical films on high curvature substrates
DE102004018435A1 (de) * 2004-04-06 2005-10-27 Carl Zeiss Vorrichtung zum beidseitigen Beschichten von Substraten mit einer hydrophoben Schicht
US7954219B2 (en) * 2004-08-20 2011-06-07 Jds Uniphase Corporation Substrate holder assembly device
EP1630260B1 (en) * 2004-08-20 2011-07-13 JDS Uniphase Inc. Magnetic latch for a vapour deposition system
US7785456B2 (en) * 2004-10-19 2010-08-31 Jds Uniphase Corporation Magnetic latch for a vapour deposition system
DE202005008165U1 (de) * 2005-05-20 2005-10-06 Leybold Optics Gmbh Vorrichtung zum beidseitigen Beschichten von Substraten
US8101055B2 (en) * 2007-12-19 2012-01-24 Kojima Press Industry Co., Ltd. Sputtering apparatus and method for forming coating film by sputtering
US7985296B2 (en) * 2008-11-06 2011-07-26 Ching-Ching Chen Sample fixing device of evaporation machine
CN102021522B (zh) * 2009-09-11 2013-06-05 鸿富锦精密工业（深圳）有限公司 溅镀式镀膜装置
TW201134969A (en) * 2010-04-09 2011-10-16 Hon Hai Prec Ind Co Ltd Coating bracket and coating device using same
US8647437B2 (en) * 2010-05-31 2014-02-11 Ci Systems (Israel) Ltd. Apparatus, tool and methods for depositing annular or circular wedge coatings
JP6019310B1 (ja) * 2015-04-16 2016-11-02 ナルックス株式会社 蒸着装置及び蒸着装置による成膜工程を含む製造方法
CN110331375B (zh) * 2019-07-29 2022-07-01 光驰科技(上海)有限公司 一种镀膜室用基板装载装置
KR102834405B1 (ko) * 2023-06-23 2025-07-14 산텍 홀딩스 코퍼레이션 기판 회전 장치, 가공 시스템 및 가공 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2522272A (en) * 1946-11-02 1950-09-12 Polytechnic Inst Brooklyn Apparatus for forming metallic films on tubular carriers
US3128205A (en) * 1961-09-11 1964-04-07 Optical Coating Laboratory Inc Apparatus for vacuum coating
US3442572A (en) * 1964-08-25 1969-05-06 Optical Coating Laboratory Inc Circular variable filter
US3598083A (en) * 1969-10-27 1971-08-10 Varian Associates Complex motion mechanism for thin film coating apparatuses
US3783821A (en) * 1971-03-02 1974-01-08 K Willmott Planetary workholders
US3749058A (en) * 1971-07-26 1973-07-31 Ion Equipment Corp Rotary substrate holder assembly
NL7205670A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-03-16 1973-09-18
US3777703A (en) * 1972-06-02 1973-12-11 Western Electric Co Apparatus for supporting and rotating a workpiece
CH585675A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-06-13 1977-03-15 Satis Vacuum Ag
US3858547A (en) * 1973-12-14 1975-01-07 Nils H Bergfelt Coating machine having an adjustable rotation system

Also Published As

Publication number Publication date
CH599982A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-06-15
DE2635008B2 (de) 1980-04-03
US4034704A (en) 1977-07-12
GB1562822A (en) 1980-03-19
DE2635008A1 (de) 1977-02-24
FR2322936A1 (fr) 1977-04-01
NL168886C (nl) 1982-05-17
FR2322936B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-04-04
NL7511898A (nl) 1977-03-04
NL168886B (nl) 1981-12-16

Similar Documents

Publication Publication Date Title
DE2635008C3 (de) Substratträger für Vakuumbeschichtungsanlagen
DE3204312A1 (de) Einschleusvorrichtung
DE2558109A1 (de) Hebevorrichtung
DE2033472C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE2306173B2 (de) Vakuumbeschichtungsanlage
DE2806904C2 (de) Schalteinrichtung für ein Mehrwellen- Schieberadgetriebe
DE2917841A1 (de) Verdampfer fuer vakuumaufdampfanlagen
DE4325693C2 (de) Türschließeinrichtung
DE3217255C1 (de) Schalterantriebsvorrichtung für Lasttrennschalter in Mittelspannungsanlagen
DE3338580C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE2533474B2 (de) Zentralverschluß
EP0367026A2 (de) Sicherheits-Türverriegelungsvorrichtung
DE514991C (de) Vorrichtung zum periodischen Schalten von Maschinenteilen
DE1598637C3 (de) Probenwechseleinrichtungfür strahlenoptische Geräte, insbesondere für Röntgenvakuumspektrographen
DE8007933U1 (de) Vorrichtung zur Betätigung von Stromschaltern, insbesondere von Steuerstrom-Endschaltern
DE620986C (de) Zaehlwerk mit Druckvorrichtung und Momentnullstellung
DE697524C (de) Sterndreieck-Walzenschalter
DE1913318C (de) Vakuumverdampfungs- oder Kathodenzerstäubungs- Anlage
DE860748C (de) Kamera mit einem selbsttaetigen Federwerk fuer den Filmtransport und den Verschlussaufzug
DE2453698B2 (de) Verschlussausloeseeinrichtung fuer eine einzelbildkamera mit automatischem filmtransport
DE2025582C3 (de) Programmschalter, insbesondere für Waschmaschinen
DE1538445C (de) Steuervorrichtung fur nach einer zykh sehen Programm arbeitende Maschinen, insbe sondere fur Kuhlanlagen
DE598120C (de) Elektrischer Zugschalter
DE3112678A1 (de) Mechanisches vorwahlzaehlwerk
DE667880C (de) Malschloss

Legal Events

Date Code Title Description
OD Request for examination
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee