DE2360197A1 - Method for increasing the depth of field and / or the angular resolution of optical microscopes - Google Patents

Method for increasing the depth of field and / or the angular resolution of optical microscopes

Info

Publication number
DE2360197A1
DE2360197A1 DE19732360197 DE2360197A DE2360197A1 DE 2360197 A1 DE2360197 A1 DE 2360197A1 DE 19732360197 DE19732360197 DE 19732360197 DE 2360197 A DE2360197 A DE 2360197A DE 2360197 A1 DE2360197 A1 DE 2360197A1
Authority
DE
Germany
Prior art keywords
depth
increasing
angular resolution
optical microscopes
microscopes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19732360197
Other languages
German (de)
Inventor
Hans-Erdmann Dipl Phys Korth
Albert Dipl Phys Frosch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IBM Deutschland GmbH
Original Assignee
IBM Deutschland GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IBM Deutschland GmbH filed Critical IBM Deutschland GmbH
Priority to DE19732360197 priority Critical patent/DE2360197A1/en
Publication of DE2360197A1 publication Critical patent/DE2360197A1/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0075Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. increasing, the depth of field or depth of focus
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/40Optical focusing aids
DE19732360197 1973-12-03 1973-12-03 Method for increasing the depth of field and / or the angular resolution of optical microscopes Pending DE2360197A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19732360197 DE2360197A1 (en) 1973-12-03 1973-12-03 Method for increasing the depth of field and / or the angular resolution of optical microscopes

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19732360197 DE2360197A1 (en) 1973-12-03 1973-12-03 Method for increasing the depth of field and / or the angular resolution of optical microscopes
FR7439728A FR2253221B1 (en) 1973-12-03 1974-10-16
JP12560574A JPS5087661A (en) 1973-12-03 1974-11-01

Publications (1)

Publication Number Publication Date
DE2360197A1 true DE2360197A1 (en) 1975-06-05

Family

ID=5899744

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19732360197 Pending DE2360197A1 (en) 1973-12-03 1973-12-03 Method for increasing the depth of field and / or the angular resolution of optical microscopes

Country Status (3)

Country Link
JP (1) JPS5087661A (en)
DE (1) DE2360197A1 (en)
FR (1) FR2253221B1 (en)

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988004438A1 (en) * 1986-12-10 1988-06-16 Realco Müszaki Fejleszto^" Kisszövetkezet Apparatus for the relative increase of depth sharpness and improvement of resolving power of magnifying systems, particularly microscopes
DE3826317C1 (en) * 1988-08-03 1989-07-06 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar, De
US5059011A (en) * 1986-12-10 1991-10-22 Istvan Stuber Apparatus for the relative increase of depth sharpness and improvement of resolving power of magnifying systems, particularly microscopes
EP0466979A1 (en) * 1990-07-21 1992-01-22 Leica Lasertechnik GmbH Arrangement for simultaneous and confocal picture generation
DE4138020A1 (en) * 1991-11-19 1992-04-16 Burkhard Dr Neumann Microscope system for increasing light transmission through grid - has lens raster projecting congruent light source raster in intermediate image raster to improve contrast
USRE34214E (en) * 1984-03-15 1993-04-06 Molecular Dynamics, Inc. Method and apparatus for microphotometering microscope specimens
DE19511937A1 (en) * 1995-03-31 1996-10-02 Zeiss Carl Jena Gmbh Confocal illuminating microscope with inclined shadow mask
US6148114A (en) 1996-11-27 2000-11-14 Ultrapointe Corporation Ring dilation and erosion techniques for digital image processing
US6288782B1 (en) 1993-06-17 2001-09-11 Ultrapointe Corporation Method for characterizing defects on semiconductor wafers
EP1617253A1 (en) 2004-07-16 2006-01-18 CARL ZEISS JENA GmbH Scanning microscope with linear source light distribution and use
EP1617252A1 (en) 2004-07-16 2006-01-18 CARL ZEISS JENA GmbH Scanning microscope with punctiform source light distribution and use
EP1617251A1 (en) 2004-07-16 2006-01-18 CARL ZEISS JENA GmbH Zoom lens for a light scanning microscope having a point light source and its use
EP1617263A1 (en) 2004-07-16 2006-01-18 Carl Zeiss Jena Gmbh Scanning optical microscope and method of using it
US7271382B2 (en) 2004-07-16 2007-09-18 Carl Zeiss Jena Gmbh Process for the observation of at least one sample region with a light raster microscope with light distribution in the form of a point
US7270431B2 (en) 2004-07-16 2007-09-18 Carl Zeiss Jena Gmbh Illumination device and its use
US7304280B2 (en) 2004-07-16 2007-12-04 Carl Zeiss Jena Gmbh Laser line scanning microscope and method of use
US7323679B2 (en) 2004-07-16 2008-01-29 Carl Zeiss Jena Gmbh Procedure for the optical acquisition of objects by means of a light raster microscope with line by line scanning
US7369305B2 (en) 2004-07-16 2008-05-06 Carl Zeiss Jena Gmbh Optical zoom system for a light scanning electron microscope
EP1944642A2 (en) 2004-07-16 2008-07-16 Carl-Zeiss Jena GmbH Light raster microscope
US7459698B2 (en) 2004-07-16 2008-12-02 Carl Zeiss Microimaging Gmbh Process for the observation of at least one sample region with a light raster microscope
US7468834B2 (en) 2004-07-16 2008-12-23 Carl Zeiss Microimaging Gmbh Microscope with heightened resolution and linear scanning
US7488931B2 (en) 2004-07-16 2009-02-10 Carl Zeiss Jena Gmbh Optical zoom system for a light scanning electron microscope
US7561326B2 (en) 2004-07-16 2009-07-14 Carl Zeiss Microimaging Gmbh Light scanning microscope and use
US7593581B2 (en) 2004-07-16 2009-09-22 Carl Zeiss Micro Imaging Gmbh Process for the acquisition of images from a sample with a microscope
US7649683B2 (en) 2004-07-16 2010-01-19 Carl Zeiss Microimaging Gmbh Process for the observation of at least one sample region with a light raster microscope with linear sampling
USRE43702E1 (en) 2004-07-16 2012-10-02 Carl Zeiss Microimaging Gmbh Microscope with heightened resolution and linear scanning

Cited By (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE34214E (en) * 1984-03-15 1993-04-06 Molecular Dynamics, Inc. Method and apparatus for microphotometering microscope specimens
WO1988004438A1 (en) * 1986-12-10 1988-06-16 Realco Müszaki Fejleszto^" Kisszövetkezet Apparatus for the relative increase of depth sharpness and improvement of resolving power of magnifying systems, particularly microscopes
US4927253A (en) * 1986-12-10 1990-05-22 Istvan Stuber Apparatus for the relative increase of depth sharpness and improvement of resolving power of magnifying systems, particularly microscopes
US5059011A (en) * 1986-12-10 1991-10-22 Istvan Stuber Apparatus for the relative increase of depth sharpness and improvement of resolving power of magnifying systems, particularly microscopes
US4963724A (en) * 1988-08-03 1990-10-16 Wild Leitz Gmbh Apparatus for producing an optical image contrast
DE3826317C1 (en) * 1988-08-03 1989-07-06 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar, De
EP0466979A1 (en) * 1990-07-21 1992-01-22 Leica Lasertechnik GmbH Arrangement for simultaneous and confocal picture generation
WO1992001965A2 (en) * 1990-07-21 1992-02-06 Leica Lasertechnik Gmbh Device for the simultaneous generation of confocal images
WO1992001965A3 (en) * 1990-07-21 1992-03-05 Leica Lasertechnik Device for the simultaneous generation of confocal images
DE4138020A1 (en) * 1991-11-19 1992-04-16 Burkhard Dr Neumann Microscope system for increasing light transmission through grid - has lens raster projecting congruent light source raster in intermediate image raster to improve contrast
US6288782B1 (en) 1993-06-17 2001-09-11 Ultrapointe Corporation Method for characterizing defects on semiconductor wafers
US6661515B2 (en) 1993-06-17 2003-12-09 Kla-Tencor Corporation Method for characterizing defects on semiconductor wafers
DE19511937A1 (en) * 1995-03-31 1996-10-02 Zeiss Carl Jena Gmbh Confocal illuminating microscope with inclined shadow mask
US6148114A (en) 1996-11-27 2000-11-14 Ultrapointe Corporation Ring dilation and erosion techniques for digital image processing
EP1617251A1 (en) 2004-07-16 2006-01-18 CARL ZEISS JENA GmbH Zoom lens for a light scanning microscope having a point light source and its use
EP1617252A1 (en) 2004-07-16 2006-01-18 CARL ZEISS JENA GmbH Scanning microscope with punctiform source light distribution and use
EP1617253A1 (en) 2004-07-16 2006-01-18 CARL ZEISS JENA GmbH Scanning microscope with linear source light distribution and use
EP1617263A1 (en) 2004-07-16 2006-01-18 Carl Zeiss Jena Gmbh Scanning optical microscope and method of using it
US7235777B2 (en) 2004-07-16 2007-06-26 Carl Zeiss Jena Gmbh Light scanning microscope and use
US7271382B2 (en) 2004-07-16 2007-09-18 Carl Zeiss Jena Gmbh Process for the observation of at least one sample region with a light raster microscope with light distribution in the form of a point
US7270431B2 (en) 2004-07-16 2007-09-18 Carl Zeiss Jena Gmbh Illumination device and its use
US7304280B2 (en) 2004-07-16 2007-12-04 Carl Zeiss Jena Gmbh Laser line scanning microscope and method of use
US7323679B2 (en) 2004-07-16 2008-01-29 Carl Zeiss Jena Gmbh Procedure for the optical acquisition of objects by means of a light raster microscope with line by line scanning
US7369305B2 (en) 2004-07-16 2008-05-06 Carl Zeiss Jena Gmbh Optical zoom system for a light scanning electron microscope
EP1944642A2 (en) 2004-07-16 2008-07-16 Carl-Zeiss Jena GmbH Light raster microscope
US7459698B2 (en) 2004-07-16 2008-12-02 Carl Zeiss Microimaging Gmbh Process for the observation of at least one sample region with a light raster microscope
US7468834B2 (en) 2004-07-16 2008-12-23 Carl Zeiss Microimaging Gmbh Microscope with heightened resolution and linear scanning
US7488931B2 (en) 2004-07-16 2009-02-10 Carl Zeiss Jena Gmbh Optical zoom system for a light scanning electron microscope
US7561326B2 (en) 2004-07-16 2009-07-14 Carl Zeiss Microimaging Gmbh Light scanning microscope and use
US7593581B2 (en) 2004-07-16 2009-09-22 Carl Zeiss Micro Imaging Gmbh Process for the acquisition of images from a sample with a microscope
US7649683B2 (en) 2004-07-16 2010-01-19 Carl Zeiss Microimaging Gmbh Process for the observation of at least one sample region with a light raster microscope with linear sampling
USRE43702E1 (en) 2004-07-16 2012-10-02 Carl Zeiss Microimaging Gmbh Microscope with heightened resolution and linear scanning

Also Published As

Publication number Publication date
JPS5087661A (en) 1975-07-14
FR2253221B1 (en) 1978-12-29
FR2253221A1 (en) 1975-06-27

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