DE2341832C3 - Verfahren zur Herstellung eines Magnetkopfes - Google Patents

Verfahren zur Herstellung eines Magnetkopfes

Info

Publication number
DE2341832C3
DE2341832C3 DE2341832A DE2341832A DE2341832C3 DE 2341832 C3 DE2341832 C3 DE 2341832C3 DE 2341832 A DE2341832 A DE 2341832A DE 2341832 A DE2341832 A DE 2341832A DE 2341832 C3 DE2341832 C3 DE 2341832C3
Authority
DE
Germany
Prior art keywords
magnetic head
zone
semiconductor
etching process
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2341832A
Other languages
German (de)
English (en)
Other versions
DE2341832B2 (de
DE2341832A1 (de
Inventor
Theodorus Cornelius Johannes Maria Bertens
Hendrikus Josephus Antonius Van Dijk
Jan T. Gerkema
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE2341832A1 publication Critical patent/DE2341832A1/de
Publication of DE2341832B2 publication Critical patent/DE2341832B2/de
Application granted granted Critical
Publication of DE2341832C3 publication Critical patent/DE2341832C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/61—Electrolytic etching
    • H10P50/613—Electrolytic etching of Group IV materials
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3176—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps
    • G11B5/3179—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes
    • G11B5/3183—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes intersecting the gap plane, e.g. "horizontal head structure"
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041—Printed circuit coils
    • H01F41/046—Printed circuit coils structurally combined with ferromagnetic material

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Weting (AREA)
  • Magnetic Heads (AREA)
DE2341832A 1972-09-01 1973-08-18 Verfahren zur Herstellung eines Magnetkopfes Expired DE2341832C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7211910A NL7211910A (https=) 1972-09-01 1972-09-01

Publications (3)

Publication Number Publication Date
DE2341832A1 DE2341832A1 (de) 1974-03-14
DE2341832B2 DE2341832B2 (de) 1978-04-20
DE2341832C3 true DE2341832C3 (de) 1978-12-21

Family

ID=19816833

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2341832A Expired DE2341832C3 (de) 1972-09-01 1973-08-18 Verfahren zur Herstellung eines Magnetkopfes

Country Status (7)

Country Link
JP (1) JPS5234346B2 (https=)
CA (1) CA991319A (https=)
DE (1) DE2341832C3 (https=)
FR (1) FR2198266B1 (https=)
GB (1) GB1433902A (https=)
IT (1) IT994704B (https=)
NL (1) NL7211910A (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047725B2 (ja) * 1977-06-14 1985-10-23 ソニー株式会社 フエライトの加工法
ATE13460T1 (de) * 1980-07-31 1985-06-15 Anton Braun Hermetische dichtung fuer verdichter oder dergleichen.
US4743988A (en) * 1985-02-01 1988-05-10 Victor Company Of Japan, Ltd. Thin-film magnetic head
JP2943579B2 (ja) 1992-10-20 1999-08-30 三菱電機株式会社 磁気構造体並びにこれを用いた磁気ヘッドおよび磁気記録ヘッド
EP1034534A1 (en) * 1998-07-13 2000-09-13 Koninklijke Philips Electronics N.V. Method of manufacturing a thin-film magnetic head
DE102016120884A1 (de) * 2016-11-02 2018-05-03 Infineon Technologies Ag Integrierte Vorrichtung und Verfahren zum integrieren eines Induktors in ein Halbleitersubstrat

Also Published As

Publication number Publication date
NL7211910A (https=) 1974-03-05
JPS4965785A (https=) 1974-06-26
FR2198266A1 (https=) 1974-03-29
DE2341832B2 (de) 1978-04-20
IT994704B (it) 1975-10-20
CA991319A (en) 1976-06-15
JPS5234346B2 (https=) 1977-09-02
GB1433902A (en) 1976-04-28
DE2341832A1 (de) 1974-03-14
FR2198266B1 (https=) 1980-01-25

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee