DE2324502A1 - Polarisationsinterferometer mit strahlpolarisierungs- und -verzoegerungseinrichtung - Google Patents

Polarisationsinterferometer mit strahlpolarisierungs- und -verzoegerungseinrichtung

Info

Publication number
DE2324502A1
DE2324502A1 DE19732324502 DE2324502A DE2324502A1 DE 2324502 A1 DE2324502 A1 DE 2324502A1 DE 19732324502 DE19732324502 DE 19732324502 DE 2324502 A DE2324502 A DE 2324502A DE 2324502 A1 DE2324502 A1 DE 2324502A1
Authority
DE
Germany
Prior art keywords
sample
polarization
changes
wavelength
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19732324502
Other languages
German (de)
English (en)
Inventor
Jack Jay Duffield
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of DE2324502A1 publication Critical patent/DE2324502A1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02071—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by measuring path difference independently from interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02011—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal polarization variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/19—Dichroism
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
DE19732324502 1972-05-15 1973-05-15 Polarisationsinterferometer mit strahlpolarisierungs- und -verzoegerungseinrichtung Pending DE2324502A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US25330372A 1972-05-15 1972-05-15

Publications (1)

Publication Number Publication Date
DE2324502A1 true DE2324502A1 (de) 1973-11-29

Family

ID=22959706

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19732324502 Pending DE2324502A1 (de) 1972-05-15 1973-05-15 Polarisationsinterferometer mit strahlpolarisierungs- und -verzoegerungseinrichtung

Country Status (5)

Country Link
JP (1) JPS4956645A (fi)
CA (1) CA979638A (fi)
DE (1) DE2324502A1 (fi)
FR (1) FR2184829B1 (fi)
GB (1) GB1428813A (fi)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124834A (ja) * 1984-11-21 1986-06-12 Sharp Corp 光応用センサ
WO1986006481A1 (en) * 1985-04-24 1986-11-06 Nauchno-Tekhnicheskoe Obiedinenie Akademii Nauk Ss Interference polarization refractometer
FR2685763B1 (fr) * 1991-12-27 1994-03-25 Aime Vareille Procede et dispositif optiques de mesure de distance et leur application au positionnement relatif de pieces.
US5867271A (en) * 1993-11-17 1999-02-02 Advantest Corporation Michelson interferometer including a non-polarizing beam splitter
JP6533632B1 (ja) * 2019-03-15 2019-06-19 日本分光株式会社 円二色性測定装置および円二色性測定方法

Also Published As

Publication number Publication date
CA979638A (en) 1975-12-16
JPS4956645A (fi) 1974-06-01
FR2184829B1 (fi) 1974-05-17
GB1428813A (en) 1976-03-17
FR2184829A1 (fi) 1973-12-28

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Legal Events

Date Code Title Description
OGA New person/name/address of the applicant
OHJ Non-payment of the annual fee