DE2133687A1 - Anordnung zur stabilisierung der optischen weglaengendifferenz - Google Patents

Anordnung zur stabilisierung der optischen weglaengendifferenz

Info

Publication number
DE2133687A1
DE2133687A1 DE19712133687 DE2133687A DE2133687A1 DE 2133687 A1 DE2133687 A1 DE 2133687A1 DE 19712133687 DE19712133687 DE 19712133687 DE 2133687 A DE2133687 A DE 2133687A DE 2133687 A1 DE2133687 A1 DE 2133687A1
Authority
DE
Germany
Prior art keywords
arrangement
bundle
optical path
path length
stabilizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712133687
Other languages
German (de)
English (en)
Inventor
Franz Dipl Phys Dr Schedewie
Dietmar Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IBM Deutschland GmbH
Original Assignee
IBM Deutschland GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IBM Deutschland GmbH filed Critical IBM Deutschland GmbH
Priority to DE19712133687 priority Critical patent/DE2133687A1/de
Priority to JP6414472A priority patent/JPS5434347B1/ja
Priority to FR7224821A priority patent/FR2145345A5/fr
Priority to GB3133972A priority patent/GB1392395A/en
Publication of DE2133687A1 publication Critical patent/DE2133687A1/de
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062Active error reduction, i.e. varying with time
    • G01B9/02067Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062Active error reduction, i.e. varying with time
    • G01B9/02067Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02068Auto-alignment of optical elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Holo Graphy (AREA)
DE19712133687 1971-07-07 1971-07-07 Anordnung zur stabilisierung der optischen weglaengendifferenz Pending DE2133687A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19712133687 DE2133687A1 (de) 1971-07-07 1971-07-07 Anordnung zur stabilisierung der optischen weglaengendifferenz
JP6414472A JPS5434347B1 (https=) 1971-07-07 1972-06-28
FR7224821A FR2145345A5 (https=) 1971-07-07 1972-06-30
GB3133972A GB1392395A (en) 1971-07-07 1972-07-05 Stabilization of optical path length differences

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712133687 DE2133687A1 (de) 1971-07-07 1971-07-07 Anordnung zur stabilisierung der optischen weglaengendifferenz

Publications (1)

Publication Number Publication Date
DE2133687A1 true DE2133687A1 (de) 1973-01-25

Family

ID=5812868

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712133687 Pending DE2133687A1 (de) 1971-07-07 1971-07-07 Anordnung zur stabilisierung der optischen weglaengendifferenz

Country Status (4)

Country Link
JP (1) JPS5434347B1 (https=)
DE (1) DE2133687A1 (https=)
FR (1) FR2145345A5 (https=)
GB (1) GB1392395A (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2634210A1 (de) * 1976-07-30 1978-02-02 Atomic Energy Authority Uk Interferometer
DE3404963A1 (de) * 1984-02-11 1985-08-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Interferometer mit integriertem laengennormal
DE4108062A1 (de) * 1991-03-13 1992-09-17 Man Technologie Gmbh Vorrichtung zur interferometrischen messung von objekten
DE4224744A1 (de) * 1992-07-27 1994-02-03 Abb Research Ltd Vorrichtung zur Detektion loser Metallteilchen in gasisolierten Hochspannungs-Schaltanlagen

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5469259A (en) * 1994-01-03 1995-11-21 International Business Machines Corporation Inspection interferometer with scanning autofocus, and phase angle control features
US5926266A (en) * 1996-09-23 1999-07-20 International Business Machines Corporation Optical apparatus for rapid defect analysis
US5703684A (en) * 1996-09-23 1997-12-30 International Business Machines Corporation Apparatus for optical differential measurement of glide height above a magnetic disk
US5784163A (en) * 1996-09-23 1998-07-21 International Business Machines Corporation Optical differential profile measurement apparatus and process
CN104897272B (zh) * 2015-06-12 2018-01-05 哈尔滨工业大学 双路圆偏振干涉和双渥拉斯特棱镜分光式零差激光测振仪
CN111982267A (zh) * 2020-08-12 2020-11-24 重庆邮电大学 一种用于声波和振动测量的光纤传感器及其工作方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2634210A1 (de) * 1976-07-30 1978-02-02 Atomic Energy Authority Uk Interferometer
DE3404963A1 (de) * 1984-02-11 1985-08-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Interferometer mit integriertem laengennormal
DE4108062A1 (de) * 1991-03-13 1992-09-17 Man Technologie Gmbh Vorrichtung zur interferometrischen messung von objekten
DE4224744A1 (de) * 1992-07-27 1994-02-03 Abb Research Ltd Vorrichtung zur Detektion loser Metallteilchen in gasisolierten Hochspannungs-Schaltanlagen

Also Published As

Publication number Publication date
GB1392395A (en) 1975-04-30
FR2145345A5 (https=) 1973-02-16
JPS5434347B1 (https=) 1979-10-26

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Legal Events

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