DE20300167U1 - Widerstandsbeheiztes Verdampferschiffchen - Google Patents
Widerstandsbeheiztes VerdampferschiffchenInfo
- Publication number
- DE20300167U1 DE20300167U1 DE20300167U DE20300167U DE20300167U1 DE 20300167 U1 DE20300167 U1 DE 20300167U1 DE 20300167 U DE20300167 U DE 20300167U DE 20300167 U DE20300167 U DE 20300167U DE 20300167 U1 DE20300167 U1 DE 20300167U1
- Authority
- DE
- Germany
- Prior art keywords
- resistance
- evaporator
- evaporator boat
- heated ceramic
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 13
- 230000008016 vaporization Effects 0.000 title abstract 3
- 238000009834 vaporization Methods 0.000 title abstract 2
- 229910052751 metal Inorganic materials 0.000 title description 8
- 239000002184 metal Substances 0.000 title description 8
- 150000002739 metals Chemical class 0.000 title description 2
- 238000001704 evaporation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 5
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Description
30
25
Claims (5)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE20300167U DE20300167U1 (de) | 2003-01-08 | 2003-01-08 | Widerstandsbeheiztes Verdampferschiffchen |
DE60334409T DE60334409D1 (de) | 2003-01-08 | 2003-12-19 | Widerstandsbeheiztes verdampferschiffchen |
PT03789368T PT1585846E (pt) | 2003-01-08 | 2003-12-19 | Recipiente vaporizador aquecido por resistência |
US10/541,329 US7471884B2 (en) | 2003-01-08 | 2003-12-19 | Resistance-heated vaporizer boat |
AT03789368T ATE483041T1 (de) | 2003-01-08 | 2003-12-19 | Widerstandsbeheiztes verdampferschiffchen |
PCT/EP2003/014676 WO2004063419A1 (en) | 2003-01-08 | 2003-12-19 | Resistance-heated vaporizer boat |
ES03789368T ES2352433T3 (es) | 2003-01-08 | 2003-12-19 | Cápsulas de vaporización calentada por resistencia. |
EP03789368A EP1585846B1 (de) | 2003-01-08 | 2003-12-19 | Widerstandsbeheiztes verdampferschiffchen |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE20300167U DE20300167U1 (de) | 2003-01-08 | 2003-01-08 | Widerstandsbeheiztes Verdampferschiffchen |
Publications (1)
Publication Number | Publication Date |
---|---|
DE20300167U1 true DE20300167U1 (de) | 2003-04-03 |
Family
ID=7978875
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE20300167U Expired - Lifetime DE20300167U1 (de) | 2003-01-08 | 2003-01-08 | Widerstandsbeheiztes Verdampferschiffchen |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE20300167U1 (de) |
ES (1) | ES2352433T3 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3470545A1 (de) | 2017-10-10 | 2019-04-17 | 3M Innovative Properties Company | Verdampferschiffchen zum verdampfen von metallen |
EP3767004A1 (de) | 2019-07-17 | 2021-01-20 | 3M Innovative Properties Company | Verdampferschiff zum verdampfen von metallen |
-
2003
- 2003-01-08 DE DE20300167U patent/DE20300167U1/de not_active Expired - Lifetime
- 2003-12-19 ES ES03789368T patent/ES2352433T3/es not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3470545A1 (de) | 2017-10-10 | 2019-04-17 | 3M Innovative Properties Company | Verdampferschiffchen zum verdampfen von metallen |
EP3767004A1 (de) | 2019-07-17 | 2021-01-20 | 3M Innovative Properties Company | Verdampferschiff zum verdampfen von metallen |
WO2021009711A1 (en) | 2019-07-17 | 2021-01-21 | 3M Innovative Properties Company | Evaporation boat for evaporation of metals |
Also Published As
Publication number | Publication date |
---|---|
ES2352433T3 (es) | 2011-02-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R207 | Utility model specification |
Effective date: 20030508 |
|
R150 | Utility model maintained after payment of first maintenance fee after three years |
Effective date: 20060220 |
|
R081 | Change of applicant/patentee |
Owner name: SINTEC KERAMIK GMBH, DE Free format text: FORMER OWNER: SINTEC KERAMIK GMBH & CO. KG, 87642 HALBLECH, DE Effective date: 20060726 |
|
R081 | Change of applicant/patentee |
Owner name: SINTEC KERAMIK GMBH, DE Free format text: FORMER OWNER: SINTEC KERAMIK GMBH, 87642 HALBLECH, DE Effective date: 20090128 |
|
R151 | Utility model maintained after payment of second maintenance fee after six years |
Effective date: 20090223 |
|
R152 | Utility model maintained after payment of third maintenance fee after eight years |
Effective date: 20110209 |
|
R071 | Expiry of right | ||
R071 | Expiry of right |