DE19741697C2 - Chip for monitoring the concentration of mercury in the air - Google Patents

Chip for monitoring the concentration of mercury in the air

Info

Publication number
DE19741697C2
DE19741697C2 DE1997141697 DE19741697A DE19741697C2 DE 19741697 C2 DE19741697 C2 DE 19741697C2 DE 1997141697 DE1997141697 DE 1997141697 DE 19741697 A DE19741697 A DE 19741697A DE 19741697 C2 DE19741697 C2 DE 19741697C2
Authority
DE
Germany
Prior art keywords
web
chip according
air
chip
length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1997141697
Other languages
German (de)
Other versions
DE19741697A1 (en
Inventor
Martin Welp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE1996152412 external-priority patent/DE19652412C1/en
Application filed by Individual filed Critical Individual
Priority to DE1997141697 priority Critical patent/DE19741697C2/en
Priority to DE19781373T priority patent/DE19781373D2/en
Priority to PCT/DE1997/002904 priority patent/WO1998025134A1/en
Priority to AU57478/98A priority patent/AU5747898A/en
Publication of DE19741697A1 publication Critical patent/DE19741697A1/en
Application granted granted Critical
Publication of DE19741697C2 publication Critical patent/DE19741697C2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—Specially adapted to detect a particular component
    • G01N33/0045—Specially adapted to detect a particular component for Hg
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Description

Die Erfindung bezieht sich auf einen Chip zur Überwachung der Quecksilberkonzentration in der Luft, bestehend aus einem elek­ trisch isolierenden Substrat und einer auf diesem befindlichen Bahn, deren elektrischer Widerstand sich bei Einwirkung von Queck­ silberdampf ändert, wobei die Luft weitgehend ungehindert die Bahn beaufschlagen kann und die Bahn eine extrem geringe Dicke hat nach Patent 196 52 412.1.The invention relates to a chip for monitoring the Mercury concentration in the air, consisting of an elec trically insulating substrate and one located thereon Railway whose electrical resistance changes when exposed to mercury silver vapor changes, leaving the air largely unimpeded on the train can act and the web has an extremely small thickness Patent 196 52 412.1.

Im Hauptpatent wird u. a. vorgeschlagen (siehe Anspruch 4), daß die Dicke der Bahn wenige µm ist und (siehe Anspruch 1) die Länge der Bahn größer als 1 m ist.In the main patent u. a. proposed (see claim 4) that the The thickness of the web is a few µm and (see claim 1) the length of the Web is greater than 1 m.

Es hat sich inzwischen herausgestellt, daß es nicht so sehr auf die Länge der Bahn (wie im Hauptpatent angegeben), sondern primär auf die Dicke der Bahn ankommt.It has now turned out that it is not so much the length of the web (as stated in the main patent) but primary depends on the thickness of the web.

Erfindungsgemäß wird nunmehr vorgeschlagen, daß die Dicke der Bahn von 10 nm bis zu einigen Mikrometern beträgt.According to the invention it is now proposed that the thickness of the web is from 10 nm to a few micrometers.

Die Länge der Bahn ist also weitgehend beliebig. Sie kann somit auch kleiner als 1 m sein. The length of the track is therefore largely arbitrary. It can can also be smaller than 1 m.  

Auch diese Lösung unterscheidet sich beträchtlich und damit grund­ sätzlich von der bekannten Lösung nach der DE 22 63 399 C2, bei der für die Dicke der Bahn bei einem Ausführungsbeispiel 0,8 mm angegeben sind.This solution also differs considerably and therefore fundamentally additionally from the known solution according to DE 22 63 399 C2, at that for the thickness of the web in one embodiment 0.8 mm are specified.

Bei der erfindungsgemäß vorgeschlagenen Schichtdicke (wenige µm nach der Erfindung gemäß dem Hauptpatent, kleiner als wenige µm nach der Erfindung vorliegenden Zusatzanmeldung) ist es wie er­ wähnt weitgehend gleichgültig, wie lang die Bahn ist und/oder wie breit die Bahn ist, wenngleich natürlich bevorzugte Werte (siehe die Unteransprüche) bestehen.With the layer thickness proposed according to the invention (a few μm according to the invention according to the main patent, smaller than a few microns according to the invention additional application) it is like him thinks largely indifferent how long the train is and / or how broad the web is, although of course preferred values (see the subclaims) exist.

Dies sehr geringe Dicke der Bahn führt dazu, daß man noch sehr geringe Quecksilberkonzentrationen (qualitativ und quantitativ) erfassen kann.This very small thickness of the web means that it is still very low mercury concentrations (qualitative and quantitative) can capture.

Die Länge der Bahn kann durchaus größenordnungsmäßig im Bereich von 10 cm und die Breite der Bahn bei 1 mm liegen. Solche Extrem­ werte mögen gewisse meßtechnische Probleme aufwerfen, sind aber dennoch geeignet, die Aufgabe der Erfindung zu lösen.The length of the track can be of the order of magnitude in the area of 10 cm and the width of the web is 1 mm. Such extreme Values may pose certain metrological problems, but they are nevertheless suitable to achieve the object of the invention.

Der Widerstand der Bahn liegt, wenn die Dicke 50 nm, die Breite 75 µm und die Länge 70 cm ist, bei einigen KΩ.The resistance of the web is when the thickness is 50 nm, the width is 75 µm and the length is 70 cm at some KΩ.

Die Herstellung solcher Bahnen ist im Wege der Mikrosystemtechnik möglich.The manufacture of such webs is by way of microsystem technology possible.

Natürlich könnte der erfindungsgemäße Chip auch zur Messung der Quecksilberkonzentration in einer anderen Matrix als Luft verwen­ det werden.Of course, the chip according to the invention could also be used to measure the Use mercury concentration in a matrix other than air be det.

Die Bahn besteht vorzugsweise aus einem Metall, das mit Quecksil­ ber ein Amalgam bildet, vorzugsweise Gold, weil dieses sehr inert ist und die höchste Affinität zu Quecksilber hat.The track is preferably made of a metal covered with mercury Forms an amalgam, preferably gold, because it is very inert and has the highest affinity for mercury.

Claims (11)

1. Chip zur Überwachung der Quecksilberkonzentration in der Luft, bestehend aus einem elektrisch isolierenden Substrat und einer auf diesem befindlichen Bahn, deren elektrischer Widerstand sich bei Einwirkung von Quecksilberdampf ändert, wobei die Luft weitgehend ungehindert die Bahn beaufschlagen kann nach Patent 196 52 412, dadurch gekennzeich­ net, daß die Dicke der Bahn von 10 nm bis zu einigen Mikrometern beträgt.1. Chip for monitoring the mercury concentration in the air, consisting of an electrically insulating substrate and a web located thereon, the electrical resistance of which changes when exposed to mercury vapor, the air being able to act largely unhindered on the web according to patent 196 52 412, thereby characterized net that the thickness of the web is from 10 nm to a few micrometers. 2. Chip nach Anspruch 1, dadurch gekennzeichnet, daß die Dicke der Bahn ca. 100 nm ist.2. Chip according to claim 1, characterized in that the thickness of the Path is approximately 100 nm. 3. Chip nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, daß die Bahn mäanderförmig verläuft.3. Chip according to one of claims 1 or 2, characterized in that that the path is meandering. 4. Chip nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, daß die Bahn spiralförmig verläuft.4. Chip according to one of claims 1 or 2, characterized in that that the path is spiral. 5. Chip nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die Länge der Bahn größer als ca. 50 cm ist.5. Chip according to one of claims 1 to 4, characterized in that the length of the web is greater than about 50 cm. 6. Chip nach Anspruch 5, dadurch gekennzeichnet, daß die Länge der Bahn ca. 70 cm ist.6. Chip according to claim 5, characterized in that the length of the Web is about 70 cm. 7. Chip nach Anspruch 5, dadurch gekennzeichnet, daß die Länge der Bahn kleiner als 10 m ist.7. Chip according to claim 5, characterized in that the length of the Track is less than 10 m. 8. Chip nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, daß die Breite der Bahn kleiner als 100 µm ist.8. Chip according to one of claims 1 to 7, characterized in that the width of the web is less than 100 microns. 9. Chip nach Anspruch 8, dadurch gekennzeichnet, daß die Breite der Bahn ca. 75 µm ist.9. Chip according to claim 8, characterized in that the width the web is approx. 75 µm. 10. Chip nach Anspruch 8, dadurch gekennzeichnet, daß die Breite der Bahn größer als ca. 1 µm ist. 10. Chip according to claim 8, characterized in that the width the web is larger than approx. 1 µm.   11. Verfahren zum Auswerten der Chips gemäß einem der Ansprüche 1 bis 10, dadurch gekennzeichnet, daß die der Luft ausgesetzten Chips zahlreicher Einsatzfälle einer Zentralstation zugeführt wer­ den und dort automatisch durchgemessen werden, wobei eine automa­ tische Temperatur-Kompensation vorgenommen wird.11. A method for evaluating the chips according to one of claims 1 to 10, characterized in that those exposed to air Chips of numerous applications are fed to a central station and measured there automatically, whereby an automa table temperature compensation is made.
DE1997141697 1996-12-06 1997-09-18 Chip for monitoring the concentration of mercury in the air Expired - Lifetime DE19741697C2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE1997141697 DE19741697C2 (en) 1996-12-06 1997-09-18 Chip for monitoring the concentration of mercury in the air
DE19781373T DE19781373D2 (en) 1996-12-06 1997-12-05 Chip for monitoring the concentration of mercury in the air
PCT/DE1997/002904 WO1998025134A1 (en) 1996-12-06 1997-12-05 Chip for monitoring air mercury concentration
AU57478/98A AU5747898A (en) 1996-12-06 1997-12-05 Chip for monitoring air mercury concentration

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1996152412 DE19652412C1 (en) 1996-12-06 1996-12-06 Chip for monitoring mercury concentration in air
DE1997141697 DE19741697C2 (en) 1996-12-06 1997-09-18 Chip for monitoring the concentration of mercury in the air

Publications (2)

Publication Number Publication Date
DE19741697A1 DE19741697A1 (en) 1999-04-01
DE19741697C2 true DE19741697C2 (en) 2002-02-21

Family

ID=26032302

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1997141697 Expired - Lifetime DE19741697C2 (en) 1996-12-06 1997-09-18 Chip for monitoring the concentration of mercury in the air
DE19781373T Ceased DE19781373D2 (en) 1996-12-06 1997-12-05 Chip for monitoring the concentration of mercury in the air

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE19781373T Ceased DE19781373D2 (en) 1996-12-06 1997-12-05 Chip for monitoring the concentration of mercury in the air

Country Status (3)

Country Link
AU (1) AU5747898A (en)
DE (2) DE19741697C2 (en)
WO (1) WO1998025134A1 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2263399C2 (en) * 1971-12-22 1982-01-14 Minnesota Mining and Manufacturing Co., 55101 Saint Paul, Minn. Dosimeter for mercury vapor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3714562A (en) * 1971-04-23 1973-01-30 Selco Mining Corp Ltd Method and apparatus for the detection of selected components in fluids
US3950980A (en) * 1974-03-27 1976-04-20 Minnesota Mining And Manufacturing Company Vapor sampling device
US4208194A (en) * 1977-09-26 1980-06-17 Minnesota Mining And Manufacturing Company Monitoring device
CN1019331B (en) * 1989-08-11 1992-12-02 法国煤矿公司 Manufacture of self-sustainings film filament type sensor and application of same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2263399C2 (en) * 1971-12-22 1982-01-14 Minnesota Mining and Manufacturing Co., 55101 Saint Paul, Minn. Dosimeter for mercury vapor

Also Published As

Publication number Publication date
WO1998025134A1 (en) 1998-06-11
DE19781373D2 (en) 1999-11-11
DE19741697A1 (en) 1999-04-01
AU5747898A (en) 1998-06-29

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