DE19635907C2 - Verfahren zur Messung der Phasendifferenz zwischen zwei orthogonal polarisierten Komponenten eines Prüfstrahls sowie Homodyn-Interferometer-Empfängervorrichtung zur Durchführung des Verfahrens - Google Patents

Verfahren zur Messung der Phasendifferenz zwischen zwei orthogonal polarisierten Komponenten eines Prüfstrahls sowie Homodyn-Interferometer-Empfängervorrichtung zur Durchführung des Verfahrens

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Publication number
DE19635907C2
DE19635907C2 DE19635907A DE19635907A DE19635907C2 DE 19635907 C2 DE19635907 C2 DE 19635907C2 DE 19635907 A DE19635907 A DE 19635907A DE 19635907 A DE19635907 A DE 19635907A DE 19635907 C2 DE19635907 C2 DE 19635907C2
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Germany
Prior art keywords
spatially separated
phase
pair
electrical signals
beams
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Expired - Fee Related
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DE19635907A
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German (de)
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DE19635907A1 (de
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Peter De Groot
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Zygo Corp
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Zygo Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J2009/0261—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods polarised

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Communication System (AREA)
DE19635907A 1995-09-05 1996-09-04 Verfahren zur Messung der Phasendifferenz zwischen zwei orthogonal polarisierten Komponenten eines Prüfstrahls sowie Homodyn-Interferometer-Empfängervorrichtung zur Durchführung des Verfahrens Expired - Fee Related DE19635907C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/523,559 US5663793A (en) 1995-09-05 1995-09-05 Homodyne interferometric receiver and calibration method having improved accuracy and functionality

Publications (2)

Publication Number Publication Date
DE19635907A1 DE19635907A1 (de) 1997-03-06
DE19635907C2 true DE19635907C2 (de) 1999-02-18

Family

ID=24085499

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19635907A Expired - Fee Related DE19635907C2 (de) 1995-09-05 1996-09-04 Verfahren zur Messung der Phasendifferenz zwischen zwei orthogonal polarisierten Komponenten eines Prüfstrahls sowie Homodyn-Interferometer-Empfängervorrichtung zur Durchführung des Verfahrens

Country Status (3)

Country Link
US (1) US5663793A (https=)
JP (1) JP3791975B2 (https=)
DE (1) DE19635907C2 (https=)

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DE102007025037B3 (de) * 2007-05-29 2008-12-18 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zum Ermitteln eines Frequenz- und/oder Phasenunterschieds

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US7030994B2 (en) * 2002-02-12 2006-04-18 Zygo Corporation Method and apparatus to measure fiber optic pickup errors in interferometry systems
US6906784B2 (en) * 2002-03-04 2005-06-14 Zygo Corporation Spatial filtering in interferometry
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US7262860B2 (en) * 2002-07-29 2007-08-28 Zygo Corporation Compensation for errors in off-axis interferometric measurements
US7274462B2 (en) * 2002-09-09 2007-09-25 Zygo Corporation In SITU measurement and compensation of errors due to imperfections in interferometer optics in displacement measuring interferometry systems
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US7075619B2 (en) * 2002-12-12 2006-07-11 Zygo Corporation In-process correction of stage mirror deformations during a photolithography exposure cycle
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US7057737B2 (en) * 2003-08-29 2006-06-06 4D Technology Corporation Common optical-path testing of high-numerical-aperture wavefronts
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US7508527B2 (en) 2005-04-11 2009-03-24 Zetetic Institute Apparatus and method of in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry
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US7821647B2 (en) * 2008-02-21 2010-10-26 Corning Incorporated Apparatus and method for measuring surface topography of an object
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US11262191B1 (en) 2018-07-12 2022-03-01 Onto Innovation Inc. On-axis dynamic interferometer and optical imaging systems employing the same
US12216051B2 (en) 2022-01-21 2025-02-04 Onto Innovation Inc. Dynamic phase-shift interferometer utilizing a synchronous optical frequency-shift
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007025037B3 (de) * 2007-05-29 2008-12-18 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zum Ermitteln eines Frequenz- und/oder Phasenunterschieds

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JPH09126900A (ja) 1997-05-16
JP3791975B2 (ja) 2006-06-28
US5663793A (en) 1997-09-02
DE19635907A1 (de) 1997-03-06

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