DE1564208A1 - Verfahren zur Herstellung magnetischer Duennschicht-Film-Speicher - Google Patents
Verfahren zur Herstellung magnetischer Duennschicht-Film-SpeicherInfo
- Publication number
- DE1564208A1 DE1564208A1 DE19661564208 DE1564208A DE1564208A1 DE 1564208 A1 DE1564208 A1 DE 1564208A1 DE 19661564208 DE19661564208 DE 19661564208 DE 1564208 A DE1564208 A DE 1564208A DE 1564208 A1 DE1564208 A1 DE 1564208A1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- film
- layer
- thin film
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 50
- 239000010409 thin film Substances 0.000 title claims description 50
- 238000000034 method Methods 0.000 title claims description 20
- 230000008569 process Effects 0.000 title claims description 10
- 230000015654 memory Effects 0.000 title claims description 7
- 239000010408 film Substances 0.000 title description 22
- 239000000758 substrate Substances 0.000 claims description 52
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 43
- 230000008021 deposition Effects 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 230000003647 oxidation Effects 0.000 claims description 6
- 238000007254 oxidation reaction Methods 0.000 claims description 6
- 230000001590 oxidative effect Effects 0.000 claims description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 3
- 238000002604 ultrasonography Methods 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 34
- 230000005415 magnetization Effects 0.000 description 15
- 238000003860 storage Methods 0.000 description 9
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000006911 nucleation Effects 0.000 description 3
- 238000010899 nucleation Methods 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 229910000531 Co alloy Inorganic materials 0.000 description 2
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000003197 gene knockdown Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical class [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- NEIHULKJZQTQKJ-UHFFFAOYSA-N [Cu].[Ag] Chemical compound [Cu].[Ag] NEIHULKJZQTQKJ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/26—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers
- H01F10/28—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers characterised by the composition of the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/26—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers
- H01F10/30—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers characterised by the composition of the intermediate layers, e.g. seed, buffer, template, diffusion preventing, cap layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thin Magnetic Films (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US51511865A | 1965-12-20 | 1965-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1564208A1 true DE1564208A1 (de) | 1970-04-09 |
Family
ID=24050044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19661564208 Pending DE1564208A1 (de) | 1965-12-20 | 1966-12-08 | Verfahren zur Herstellung magnetischer Duennschicht-Film-Speicher |
Country Status (8)
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3857734A (en) * | 1972-05-04 | 1974-12-31 | Honeywell Inc | Manganese bismuth thin films on reactive substrates |
| DE2451276C2 (de) * | 1974-10-29 | 1982-12-30 | Basf Ag, 6700 Ludwigshafen | Verfahren zur Herstellung starrer magnetischer Aufzeichnungsträger |
| JPS5151908A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1974-11-01 | 1976-05-07 | Fuji Photo Film Co Ltd | |
| JPS5924958A (ja) * | 1982-07-27 | 1984-02-08 | Sumitomo Special Metals Co Ltd | 薄膜磁気ヘッド用基板の製造方法 |
| JPS60229233A (ja) * | 1984-04-27 | 1985-11-14 | Sumitomo Special Metals Co Ltd | 磁気ディスク用基板の製造方法 |
| DE3426201A1 (de) * | 1984-07-17 | 1986-01-23 | BBC Aktiengesellschaft Brown, Boveri & Cie., Baden, Aargau | Verfahren zum aufbringen von schutzschichten |
| JPS6288137A (ja) * | 1985-10-14 | 1987-04-22 | Sumitomo Special Metals Co Ltd | 磁気ディスク用基板の製造方法 |
| US4977021A (en) * | 1988-08-05 | 1990-12-11 | Hoechst Celanese Corporation | Methods for forming magnetic coatings using trioxane recording media having such coatings |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3161946A (en) * | 1964-12-22 | permalloy | ||
| US2641954A (en) * | 1950-05-06 | 1953-06-16 | Eastman Kodak Co | Protective coatings for optical elements and methods for applying them |
| US2904450A (en) * | 1958-05-14 | 1959-09-15 | Ford Motor Co | Transparent coating |
| US2907672A (en) * | 1958-08-25 | 1959-10-06 | Ford Motor Co | Aurous coating on an optical element |
| US3303116A (en) * | 1964-10-09 | 1967-02-07 | Ibm | Process for cathodically sputtering magnetic thin films |
-
1965
- 1965-12-20 US US515118A patent/US3470020A/en not_active Expired - Lifetime
-
1966
- 1966-11-15 GB GB51032/66A patent/GB1136618A/en not_active Expired
- 1966-12-05 FR FR8178A patent/FR1504299A/fr not_active Expired
- 1966-12-08 DE DE19661564208 patent/DE1564208A1/de active Pending
- 1966-12-14 BE BE691196D patent/BE691196A/xx unknown
- 1966-12-16 CH CH1810366A patent/CH455073A/de unknown
- 1966-12-16 SE SE6617262A patent/SE375179B/xx unknown
- 1966-12-19 NL NL6617764A patent/NL6617764A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CH455073A (de) | 1968-04-30 |
| GB1136618A (en) | 1968-12-11 |
| US3470020A (en) | 1969-09-30 |
| NL6617764A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1967-06-21 |
| BE691196A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1967-05-16 |
| FR1504299A (fr) | 1967-12-01 |
| SE375179B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-04-07 |
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