DE1302175B - - Google Patents
Info
- Publication number
- DE1302175B DE1302175B DE19631302175D DE1302175DA DE1302175B DE 1302175 B DE1302175 B DE 1302175B DE 19631302175 D DE19631302175 D DE 19631302175D DE 1302175D A DE1302175D A DE 1302175DA DE 1302175 B DE1302175 B DE 1302175B
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES0087502 | 1963-09-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE1302175B true DE1302175B (de) | 1970-07-23 |
Family
ID=7513808
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19631302175D Pending DE1302175B (de) | 1963-09-25 | 1963-09-25 |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE1302175B (de) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0020935A1 (de) * | 1979-06-29 | 1981-01-07 | International Business Machines Corporation | Gasätzverfahren und Vorrichtung, in der feste Maskiermaterialien zur Veränderung der Ätzgeschwindigkeit Verwendung finden |
EP0536752A2 (de) * | 1991-10-11 | 1993-04-14 | Air Products And Chemicals, Inc. | Verfahren zur Reinigung integrierter Schaltkreise während die Herstellung |
WO1994027315A1 (en) * | 1993-05-13 | 1994-11-24 | Interuniversitair Microelektronica Centrum | Method for semiconductor processing using mixtures of hf and carboxylic acid |
US5922624A (en) * | 1993-05-13 | 1999-07-13 | Imec Vzw | Method for semiconductor processing using mixtures of HF and carboxylic acid |
-
1963
- 1963-09-25 DE DE19631302175D patent/DE1302175B/de active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0020935A1 (de) * | 1979-06-29 | 1981-01-07 | International Business Machines Corporation | Gasätzverfahren und Vorrichtung, in der feste Maskiermaterialien zur Veränderung der Ätzgeschwindigkeit Verwendung finden |
EP0536752A2 (de) * | 1991-10-11 | 1993-04-14 | Air Products And Chemicals, Inc. | Verfahren zur Reinigung integrierter Schaltkreise während die Herstellung |
EP0536752A3 (en) * | 1991-10-11 | 1993-05-26 | Air Products And Chemicals, Inc. | Cleaning agents used during the fabrication of integrated circuits and associated process |
WO1994027315A1 (en) * | 1993-05-13 | 1994-11-24 | Interuniversitair Microelektronica Centrum | Method for semiconductor processing using mixtures of hf and carboxylic acid |
US5922624A (en) * | 1993-05-13 | 1999-07-13 | Imec Vzw | Method for semiconductor processing using mixtures of HF and carboxylic acid |