DE112021007773A5 - MEMS zum Kontrollieren eines Fluidstroms - Google Patents

MEMS zum Kontrollieren eines Fluidstroms Download PDF

Info

Publication number
DE112021007773A5
DE112021007773A5 DE112021007773.2T DE112021007773T DE112021007773A5 DE 112021007773 A5 DE112021007773 A5 DE 112021007773A5 DE 112021007773 T DE112021007773 T DE 112021007773T DE 112021007773 A5 DE112021007773 A5 DE 112021007773A5
Authority
DE
Germany
Prior art keywords
mems
fluid flow
controlling fluid
controlling
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112021007773.2T
Other languages
English (en)
Inventor
Anton Melnikov
Bert Kaiser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of DE112021007773A5 publication Critical patent/DE112021007773A5/de
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0003Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011Gate valves or sliding valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0034Operating means specially adapted for microvalves
    • F16K99/0042Electric operating means therefor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0034Operating means specially adapted for microvalves
    • F16K99/0055Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K2099/0069Bistable microvalves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0073Fabrication methods specifically adapted for microvalves
    • F16K2099/008Multi-layer fabrications

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
DE112021007773.2T 2021-06-04 2021-06-04 MEMS zum Kontrollieren eines Fluidstroms Pending DE112021007773A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2021/064987 WO2022253443A1 (de) 2021-06-04 2021-06-04 Mems zum kontrollieren eines fluidstroms

Publications (1)

Publication Number Publication Date
DE112021007773A5 true DE112021007773A5 (de) 2024-03-28

Family

ID=76375052

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112021007773.2T Pending DE112021007773A5 (de) 2021-06-04 2021-06-04 MEMS zum Kontrollieren eines Fluidstroms

Country Status (4)

Country Link
US (1) US20240093804A1 (de)
CN (1) CN117651822A (de)
DE (1) DE112021007773A5 (de)
WO (1) WO2022253443A1 (de)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
US6590267B1 (en) 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
US6739576B2 (en) * 2001-12-20 2004-05-25 Nanostream, Inc. Microfluidic flow control device with floating element
EP2664058B1 (de) 2011-01-14 2017-05-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches bauelement
US20150041931A1 (en) 2013-08-12 2015-02-12 Knowles Electronics, Llc Embedded Micro Valve In Microphone
DE102017206766A1 (de) * 2017-04-21 2018-10-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mems-wandler zum interagieren mit einem volumenstrom eines fluids und verfahren zum herstellen desselben
WO2020078541A1 (de) 2018-10-16 2020-04-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Biegewandler als aktor, biegewandler als sensor, biegewandlersystem

Also Published As

Publication number Publication date
US20240093804A1 (en) 2024-03-21
WO2022253443A1 (de) 2022-12-08
CN117651822A (zh) 2024-03-05

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Legal Events

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R012 Request for examination validly filed