DE112021007773A5 - MEMS zum Kontrollieren eines Fluidstroms - Google Patents
MEMS zum Kontrollieren eines Fluidstroms Download PDFInfo
- Publication number
- DE112021007773A5 DE112021007773A5 DE112021007773.2T DE112021007773T DE112021007773A5 DE 112021007773 A5 DE112021007773 A5 DE 112021007773A5 DE 112021007773 T DE112021007773 T DE 112021007773T DE 112021007773 A5 DE112021007773 A5 DE 112021007773A5
- Authority
- DE
- Germany
- Prior art keywords
- mems
- fluid flow
- controlling fluid
- controlling
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 title 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0011—Gate valves or sliding valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
- F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K2099/0069—Bistable microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/008—Multi-layer fabrications
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Mechanical Engineering (AREA)
- Micromachines (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2021/064987 WO2022253443A1 (de) | 2021-06-04 | 2021-06-04 | Mems zum kontrollieren eines fluidstroms |
Publications (1)
Publication Number | Publication Date |
---|---|
DE112021007773A5 true DE112021007773A5 (de) | 2024-03-28 |
Family
ID=76375052
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE112021007773.2T Pending DE112021007773A5 (de) | 2021-06-04 | 2021-06-04 | MEMS zum Kontrollieren eines Fluidstroms |
Country Status (4)
Country | Link |
---|---|
US (1) | US20240093804A1 (de) |
CN (1) | CN117651822A (de) |
DE (1) | DE112021007773A5 (de) |
WO (1) | WO2022253443A1 (de) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3814150A1 (de) * | 1988-04-27 | 1989-11-09 | Draegerwerk Ag | Ventilanordnung aus mikrostrukturierten komponenten |
US6590267B1 (en) | 2000-09-14 | 2003-07-08 | Mcnc | Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
US6739576B2 (en) * | 2001-12-20 | 2004-05-25 | Nanostream, Inc. | Microfluidic flow control device with floating element |
EP2664058B1 (de) | 2011-01-14 | 2017-05-03 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanisches bauelement |
US20150041931A1 (en) | 2013-08-12 | 2015-02-12 | Knowles Electronics, Llc | Embedded Micro Valve In Microphone |
DE102017206766A1 (de) * | 2017-04-21 | 2018-10-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mems-wandler zum interagieren mit einem volumenstrom eines fluids und verfahren zum herstellen desselben |
WO2020078541A1 (de) | 2018-10-16 | 2020-04-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Biegewandler als aktor, biegewandler als sensor, biegewandlersystem |
-
2021
- 2021-06-04 CN CN202180100027.6A patent/CN117651822A/zh active Pending
- 2021-06-04 WO PCT/EP2021/064987 patent/WO2022253443A1/de active Application Filing
- 2021-06-04 DE DE112021007773.2T patent/DE112021007773A5/de active Pending
-
2023
- 2023-11-30 US US18/525,265 patent/US20240093804A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
US20240093804A1 (en) | 2024-03-21 |
WO2022253443A1 (de) | 2022-12-08 |
CN117651822A (zh) | 2024-03-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R012 | Request for examination validly filed |