DE112021003244T5 - Verschiebungserfassungsvorrichtung und Drehmomentsensor - Google Patents

Verschiebungserfassungsvorrichtung und Drehmomentsensor Download PDF

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Publication number
DE112021003244T5
DE112021003244T5 DE112021003244.5T DE112021003244T DE112021003244T5 DE 112021003244 T5 DE112021003244 T5 DE 112021003244T5 DE 112021003244 T DE112021003244 T DE 112021003244T DE 112021003244 T5 DE112021003244 T5 DE 112021003244T5
Authority
DE
Germany
Prior art keywords
displacement
electrode
detection device
gap
predetermined direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112021003244.5T
Other languages
German (de)
English (en)
Inventor
Kazuki WAKABAYASHI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Publication of DE112021003244T5 publication Critical patent/DE112021003244T5/de
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/14—Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/14—Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft
    • G01L3/1407—Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft involving springs
    • G01L3/1428—Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft involving springs using electrical transducers
    • G01L3/1442—Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft involving springs using electrical transducers involving electrostatic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
DE112021003244.5T 2020-06-12 2021-06-07 Verschiebungserfassungsvorrichtung und Drehmomentsensor Pending DE112021003244T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020-102337 2020-06-12
JP2020102337 2020-06-12
PCT/JP2021/021475 WO2021251311A1 (ja) 2020-06-12 2021-06-07 変位検出装置及びトルクセンサ

Publications (1)

Publication Number Publication Date
DE112021003244T5 true DE112021003244T5 (de) 2023-03-30

Family

ID=78846273

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112021003244.5T Pending DE112021003244T5 (de) 2020-06-12 2021-06-07 Verschiebungserfassungsvorrichtung und Drehmomentsensor

Country Status (5)

Country Link
US (1) US11815416B2 (https=)
JP (1) JPWO2021251311A1 (https=)
CN (1) CN115803597B (https=)
DE (1) DE112021003244T5 (https=)
WO (1) WO2021251311A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023105643A1 (ja) * 2021-12-07 2023-06-15 ファナック株式会社 変位検出装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019174477A (ja) 2019-05-09 2019-10-10 株式会社トライフォース・マネジメント トルクセンサ

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Publication number Priority date Publication date Assignee Title
FR2482724A1 (fr) * 1980-05-16 1981-11-20 Testut Aequitas Procede de fixation des armatures dans un instrument de pesage a transducteur capacitif et l'instrument de pesage ainsi obtenu
JPH0634158Y2 (ja) * 1988-06-24 1994-09-07 マックス株式会社 製図機のブレーキ装置
US5024099A (en) * 1989-11-20 1991-06-18 Setra Systems, Inc. Pressure transducer with flow-through measurement capability
JP2001272290A (ja) 2000-03-23 2001-10-05 Autogard Japan:Kk トルク測定装置
US6880408B1 (en) * 2002-04-26 2005-04-19 Bbnt Solutions Llc Mechanical amplifier systems and methods
US6700173B1 (en) * 2002-08-20 2004-03-02 Memx, Inc. Electrically isolated support for overlying MEM structure
JP2012018157A (ja) * 2010-06-10 2012-01-26 Panasonic Electric Works Co Ltd ポジションセンサ
US8739868B2 (en) 2010-11-29 2014-06-03 Schlumberger Technology Corporation System and method of strain measurement amplification
FR2992066B1 (fr) * 2012-06-15 2014-07-11 Commissariat Energie Atomique Capteur de champ magnetique a force de laplace
US10416030B2 (en) * 2015-01-26 2019-09-17 Wacoh-Tech Inc. Force sensor
JP6092326B2 (ja) * 2015-07-29 2017-03-08 株式会社トライフォース・マネジメント トルクセンサ
KR101804297B1 (ko) 2016-02-23 2017-12-04 (주)아이투에이시스템즈 변위증폭 메카니즘을 이용한 힘센서 및 이를 포함하는 중량측정장치
JP6100448B1 (ja) 2016-07-20 2017-03-22 株式会社トライフォース・マネジメント トルクセンサ
CN108088359B (zh) * 2016-11-21 2019-07-26 清华大学 便携式轮廓仪及轮廓扫描显微镜和系统
KR102242625B1 (ko) * 2016-12-27 2021-04-20 아이펙스 가부시키가이샤 토크 센서
JP6532040B2 (ja) 2017-05-29 2019-06-19 株式会社トライフォース・マネジメント トルクセンサ
JP6626075B2 (ja) * 2017-11-28 2019-12-25 ファナック株式会社 変位検出方式の６軸力センサ
JP7031476B2 (ja) * 2018-04-27 2022-03-08 マツダ株式会社 摩擦締結装置
JP6771794B1 (ja) * 2020-02-25 2020-10-21 株式会社トライフォース・マネジメント 力覚センサ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019174477A (ja) 2019-05-09 2019-10-10 株式会社トライフォース・マネジメント トルクセンサ

Also Published As

Publication number Publication date
JPWO2021251311A1 (https=) 2021-12-16
US20230175902A1 (en) 2023-06-08
US11815416B2 (en) 2023-11-14
CN115803597B (zh) 2025-11-07
CN115803597A (zh) 2023-03-14
WO2021251311A1 (ja) 2021-12-16

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