DE112020006397T5 - Luftstrommengenmessgerät - Google Patents

Luftstrommengenmessgerät Download PDF

Info

Publication number
DE112020006397T5
DE112020006397T5 DE112020006397.6T DE112020006397T DE112020006397T5 DE 112020006397 T5 DE112020006397 T5 DE 112020006397T5 DE 112020006397 T DE112020006397 T DE 112020006397T DE 112020006397 T5 DE112020006397 T5 DE 112020006397T5
Authority
DE
Germany
Prior art keywords
air flow
thin film
deformation
sealing resin
lead frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112020006397.6T
Other languages
German (de)
English (en)
Inventor
Binti Haridan Fatin Farhanah
Hiroyuki Abe
Takayuki Yogo
Nozomi Yatsumonji
Mizuki Ijuin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Astemo Ltd
Original Assignee
Hitachi Astemo Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Astemo Ltd filed Critical Hitachi Astemo Ltd
Publication of DE112020006397T5 publication Critical patent/DE112020006397T5/de
Granted legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
DE112020006397.6T 2020-03-10 2020-12-25 Luftstrommengenmessgerät Granted DE112020006397T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020040656 2020-03-10
JP2020-040656 2020-03-10
PCT/JP2020/048699 WO2021181827A1 (ja) 2020-03-10 2020-12-25 空気流量測定装置

Publications (1)

Publication Number Publication Date
DE112020006397T5 true DE112020006397T5 (de) 2022-10-20

Family

ID=77671564

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112020006397.6T Granted DE112020006397T5 (de) 2020-03-10 2020-12-25 Luftstrommengenmessgerät

Country Status (5)

Country Link
US (1) US12169137B2 (https=)
JP (1) JP7164282B2 (https=)
CN (1) CN115176130A (https=)
DE (1) DE112020006397T5 (https=)
WO (1) WO2021181827A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013120103A (ja) 2011-12-07 2013-06-17 Hitachi Automotive Systems Ltd 熱式流量計

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597673A (ja) * 1982-07-07 1984-01-14 Kaiyoushiya:Kk 自動巻線機
US8057882B2 (en) * 2006-03-28 2011-11-15 Kobe Steel, Ltd. Membrane structure element and method for manufacturing same
JP5456815B2 (ja) * 2010-10-13 2014-04-02 日立オートモティブシステムズ株式会社 流量センサおよびその製造方法
JP5676527B2 (ja) * 2012-06-15 2015-02-25 日立オートモティブシステムズ株式会社 熱式流量計
JP5755185B2 (ja) * 2012-06-15 2015-07-29 日立オートモティブシステムズ株式会社 熱式流量計
JP6096070B2 (ja) * 2013-06-20 2017-03-15 日立オートモティブシステムズ株式会社 熱式流量計の製造方法
JP6198697B2 (ja) * 2014-08-14 2017-09-20 日立オートモティブシステムズ株式会社 熱式流量計
JP5841211B2 (ja) * 2014-09-01 2016-01-13 日立オートモティブシステムズ株式会社 物理量計測装置及びその製造方法
JP6043833B2 (ja) * 2015-04-27 2016-12-14 日立オートモティブシステムズ株式会社 熱式流量計
JP2017020982A (ja) * 2015-07-15 2017-01-26 日立オートモティブシステムズ株式会社 熱式空気流量計
JP6134840B2 (ja) * 2016-05-16 2017-05-24 日立オートモティブシステムズ株式会社 熱式流量計
JP6215502B2 (ja) * 2017-04-17 2017-10-18 日立オートモティブシステムズ株式会社 熱式流量計
JP6458104B2 (ja) 2017-09-11 2019-01-23 日立オートモティブシステムズ株式会社 熱式流量計
JP2020003440A (ja) * 2018-07-02 2020-01-09 日立オートモティブシステムズ株式会社 熱式流量測定装置
JP2020034508A (ja) * 2018-08-31 2020-03-05 日立オートモティブシステムズ株式会社 物理量検出装置
JP2021131323A (ja) * 2020-02-20 2021-09-09 サーパス工業株式会社 流量計および流量計の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013120103A (ja) 2011-12-07 2013-06-17 Hitachi Automotive Systems Ltd 熱式流量計

Also Published As

Publication number Publication date
WO2021181827A1 (ja) 2021-09-16
US12169137B2 (en) 2024-12-17
JP7164282B2 (ja) 2022-11-01
JPWO2021181827A1 (https=) 2021-09-16
US20230079532A1 (en) 2023-03-16
CN115176130A (zh) 2022-10-11

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R018 Grant decision by examination section/examining division