DE10306669B4 - Method for checking the shaping and apparatus for the shaping of an optically transparent body - Google Patents

Method for checking the shaping and apparatus for the shaping of an optically transparent body

Info

Publication number
DE10306669B4
DE10306669B4 DE2003106669 DE10306669A DE10306669B4 DE 10306669 B4 DE10306669 B4 DE 10306669B4 DE 2003106669 DE2003106669 DE 2003106669 DE 10306669 A DE10306669 A DE 10306669A DE 10306669 B4 DE10306669 B4 DE 10306669B4
Authority
DE
Germany
Prior art keywords
surface
characterized
body
measuring beam
method according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE2003106669
Other languages
German (de)
Other versions
DE10306669A1 (en
Inventor
Michael Dr. Schulz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bundesrepublik Deutschland Vertr D D Bundesministerium fur Wirtschaft und Arbeit Dieses Vertr D D Prasidenten Der Physikalisch-Technischen Bundesanstalt
Bundesrepublik Deutschland
Original Assignee
Bundesrepublik Deutschland Vertr D D Bundesministerium fur Wirtschaft und Arbeit Dieses Vertr D D Prasidenten Der Physikalisch-Technischen Bundesanstalt
Bundesrepublik Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bundesrepublik Deutschland Vertr D D Bundesministerium fur Wirtschaft und Arbeit Dieses Vertr D D Prasidenten Der Physikalisch-Technischen Bundesanstalt, Bundesrepublik Deutschland filed Critical Bundesrepublik Deutschland Vertr D D Bundesministerium fur Wirtschaft und Arbeit Dieses Vertr D D Prasidenten Der Physikalisch-Technischen Bundesanstalt
Priority to DE2003106669 priority Critical patent/DE10306669B4/en
Publication of DE10306669A1 publication Critical patent/DE10306669A1/en
Application granted granted Critical
Publication of DE10306669B4 publication Critical patent/DE10306669B4/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/24Measuring arrangements characterised by the use of optical means for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical means for measuring contours or curvatures using interferometry

Abstract

method to check one by Machining part of its surface (2) made shaping an optically transparent body (1) during the processing, characterized in that one of the respective Processing not affected part of its surface (3) a measuring beam (10) in the interior of the body (1) coupled and on the machined part (4) of the surface (2) is directed that the surface to be checked (4) is scanned with the measuring beam (10) and that by means of the measuring beam (10) Measurements for Places (11, 12) of the surface hit by the measuring beam (10) on a surface associated Reference location (9) are made.

Description

  • The The invention relates to a method for checking a by machining part of its surface made shaping of an optically transparent body during the Processing.
  • The The invention further relates to a device for shaping processing a part of the surface an optically transparent body by means of an over the part of the surface out Processing head.
  • A finds such shaping processing optically transparent body in particular in the manufacture of optical components with curved surfaces instead, ie in particular in the production of lenses in the most general Shape.
  • By JP 11-83675 A, it is known, the optical surface of a optical element to verify that over the machined surface optical beam is directed to the interior of the element where the Beam of a flat surface is reflected to then arrive at a curved, machined surface. The reflected beam in the same way is, for example, with an interferometer, evaluated. A procedure for checking the machined surface while The processing is neither revealed nor possible.
  • Of the Present invention therefore an object of the production an optically transparent body to simplify and accelerate.
  • to solution This object is a method according to the invention the aforementioned Art characterized in that one of the respective Processing not affected part of its surface a measuring beam into the interior of the body coupled and on the machined part of the surface is directed that the to be checked with surface is scanned the measuring beam and that by means of the measuring beam Measurements for the locations of the surface hit by the measuring beam at an associated reference location be made.
  • The inventive method allows it while To check the surface finish of the finished surface by: a corresponding measurement is made by means of the measuring beam. The measurement taken can be a distance measurement, but also a measurement of the curvature etc. be.
  • For distance measurement could Running times are determined in a manner known per se. For the determination the shape of the surface can (reflected) Wave fronts are detected.
  • Prefers is a measurement by means of reflected at the struck point of the surface Measuring beam. This measurement can conveniently be done with an interferometer be made.
  • For the scanning the surface it is appropriate, the Measuring beam over a Ankoppelbauelement, not to those of the respective processing affected part of the surface is scheduled in the body couple. Any gaps between the Ankoppelbauelement and The part of the surface not affected by the processing can be replaced by an adaptation fluid, gel, paste or the like filled with a defined refractive index. However, it is advantageous if the surface of the coupling component, with which it is attached to the body becomes, complementary to the part of the surface is formed, takes place at the attachment of the Ankoppelbauelements. In a simple way, this is possible for the production of lenses, which consist of a plane and a curved surface. The Ankoppelbauelement then has a flat surface and gets on the flat surface of the body put on and expediently designed so that the measuring beam perpendicular to the surface of the Ankoppelbauelements is directed. The coupling component should have a refractive index that corresponds to the refractive index of the body. To avoid reflections or to bridge minor differences the refractive index becomes the transition between the coupling component and the body, as mentioned above, with a liquid, a Gel or the like filled with a defined refractive index. On This way succeeds a largely undisturbed and lossless coupling of the measuring beam into the interior of the optically transparent body. For the scanning the curved one surface through the interior of the optically transparent workpiece becomes the radiation source or corresponding deflection elements for the Measuring beam preferably on a spherical surface in the scanning angular range guided. Especially for this it is useful if the Ankoppelbauelement is designed as a spherical segment.
  • Said orientation of the radiation source as well as the corresponding orientation of the detector of the measuring arrangement can be carried out so that the measurement is made at a point on the surface of the body, on which the machining with the machining head is taking place. A desired reflection of the measuring beam at the surface is enhanced by the attached processing head. Disturbing influences of abrasives and Grinding liquid can not be expected in a sustainable form.
  • alternative This can be done during the measurement Machining can be done at a point on the surface of the body, the outside of the area currently being processed. As with circular symmetric or spherically symmetric parts frequently a workpiece movement around the axis of symmetry, the measurement outside the Processing area to take place in a place just before has been processed by the machining head. In support of the Reflection at this measuring point can enter the outside of the surface Component can be placed, which improves the reflection conditions.
  • The inventive method allows for the first time a training of a control circuit for the surface treatment dependent on from the determined measured values. With such a control circuit let yourself the desired Production accuracy reliable and save time.
  • to solution the above mentioned Object is also according to the invention a device the aforementioned Characterized by a to one of the processing head not captured part of the surface of the body Ansetzbarer Ankoppelbauelement, an optical radiation source whose beam over the Coupling element in the body as a measuring beam for scanning at least a part of the processed surface can be coupled and a measuring arrangement for detection at least a parameter of the machined surface by means of the measuring beam.
  • A Such device allows the implementation and achievement of the Advantages of the method according to the invention and lets in particular as a processing device controlled by the measuring arrangement form.
  • The Invention will be described below with reference to in the drawing embodiments be explained in more detail. Show it:
  • 1 A schematic representation of a measuring arrangement on a workpiece machined with a machining head
  • 2 - A schematic representation of a variant of the arrangement according to 1 ,
  • The drawing leaves a workpiece 1 recognize its surface 2 from a (unproblematic to be produced) plane surface 3 and a spherical spatially curved surface 4 consists. A rotating machining head 5 is designed as a grinding head or polishing head and serves the precise shaping of the curved surface 4 , in the sense of the method described here, the machined part of the surface 2 forms.
  • To the plane surface 3 is with a likewise flat surface 6 a coupling device 7 set, which has a spherical arched surface 8th having. To the surface 8th the Ankoppelbauelements 7 around is an interferometer 9 feasible. The interferometer 9 contains an optical radiation source for emitting a measuring beam 10 and a detector for interferometric detection of the from a measurement site 11 the curved surface 4 of the workpiece 1 reflected measuring beam.
  • The measuring beam 10 can at the site 11 be reflected in itself and forms an interference pattern when the radiation source of Interferome age 9 a sufficiently monochromatic and frequency stable light with a sufficient coherence length emits. For this purpose, the light source will be regularly formed as a laser source.
  • The measuring beam 10 comes from the interferometer coming through a perpendicular to him standing surface 8th of the coupling component 7 therethrough. The transition between Einkoppelbauelement 7 and workpiece 1 is formed, preferably with the aid of an index liquid or an index gel, free of refractive index jumps, so that the coupling of the measuring beam 10 into the interior of the workpiece 1 lossless and largely without dispersion.
  • 1 shows the reflection of the measuring beam 10 at the measuring location 11 that of the machining head 5 is being edited. In cases where this type of measurement, especially because of variations in the optical conditions through the machining head 5 , is too disturbed by coolant and abrasive, the measuring arrangement according to 2 be used. It is the one of the interferometer 9 emitted measuring beam 10 to a measuring location 12 directed, which does not match the position of the machining head 5 matches. To achieve good reflection conditions is on the outside of the curved surface 4 a component 13 placed. To produce a defined transition can between the device 13 and the workpiece an index liquid 14 are introduced for a uniform and defined adjustment of the refractive index of the workpiece 1 to the highly different refractive index of the device 13 provides.
  • Almost all known optical measuring methods for measuring distance, curvature etc. can be used for carrying out the invention, so that the most suitable measuring method for the respective application can be selected.

Claims (18)

  1. Method of checking by machining a part of its surface ( 2 ) shaping an optically transparent body ( 1 ) during processing, characterized in that over a not affected by the respective processing part of its surface ( 3 ) a measuring beam ( 10 ) in the interior of the body ( 1 ) and on the machined part ( 4 ) of the surface ( 2 ) that the surface to be checked ( 4 ) with the measuring beam ( 10 ) is scanned and that by means of the measuring beam ( 10 ) Measurements for the measuring beam ( 10 ) Places hit ( 11 . 12 ) of the surface at an associated reference location ( 9 ).
  2. A method according to claim 1, characterized in that the measurement by means of the hit place ( 11 ) of the surface ( 4 ) reflected measuring beam ( 10 ) is made.
  3. Method according to claim 1 or 2, characterized in that the measurement with an interferometer ( 9 ) is made.
  4. Method according to one of claims 1 to 3, characterized that the measurement is made as a distance measurement.
  5. Method according to one of claims 1 to 4, characterized in that the measuring beam ( 10 ) on a part not affected by the respective processing ( 3 ) of the surface ( 2 ) attached Ankoppelbauelement ( 7 ) in the body ( 1 ) is coupled.
  6. Method according to claim 5, characterized in that the measuring beam ( 10 ) perpendicular to the surface ( 8th ) of the coupling component ( 7 ).
  7. Method according to claim 5 or 6, characterized in that the coupling component ( 7 ) with a refractive index of the body ( 1 ) corresponding refractive index is selected.
  8. Method according to one of claims 5 to 7, characterized in that a spherical segment as Ankoppelbauelement ( 7 ) is used.
  9. Method according to one of claims 1 to 8, characterized in that the measurement at a point ( 11 ) of the surface ( 4 ) of the body ( 1 ) is made, at which the processing is currently taking place.
  10. Method according to one of claims 1 to 8, characterized in that the measurement during processing at a point ( 12 ) of the surface ( 4 ) of the body ( 1 ), which is outside the area being processed.
  11. A method according to claim 10, characterized in that in support of the reflection at the point ( 12 ) on the outside of the surface ( 4 ) a component ( 13 ) is placed.
  12. Device for shaping a part ( 4 ) of the surface ( 2 ) of an optically transparent body ( 1 ) by means of one over the part ( 4 ) of the surface ( 2 ) guided machining head ( 5 ), characterized by a to one of the processing head ( 5 ) not covered part ( 3 ) of the surface ( 2 ) of the body ( 1 ) attachable coupling component ( 7 ), an optical radiation source (in 9 ) whose beam is transmitted via the coupling element ( 7 ) in the body ( 1 ) as measuring beam ( 10 ) for scanning at least part of the machined surface ( 4 ) can be coupled and a measuring arrangement (in 9 ) for detecting at least one parameter of the machined surface ( 4 ) by means of the measuring beam ( 10 ).
  13. Device according to claim 12, characterized in that the measuring arrangement is a distance detector.
  14. Apparatus according to claim 12 or 13, characterized in that the measuring arrangement is an interferometer ( 9 ).
  15. Device according to one of claims 12 to 14, characterized in that the measuring arrangement on the one of the surface ( 4 ) reflected measuring beam ( 10 ) alignable detector.
  16. Device according to one of claims 12 to 15, characterized by a control loop, with which the machining head ( 5 ) is controllable in dependence on output signals of the measuring arrangement.
  17. Device according to one of claims 12 to 16, characterized in that the coupling component ( 7 ) one of the surface ( 2 ) of the body ( 1 ), to which it is attachable, having complementary surface.
  18. Device according to Claim 17, characterized in that the surface of the coupling component ( 7 ), with which it is attached to the body ( 1 ) is planable.
DE2003106669 2003-02-13 2003-02-13 Method for checking the shaping and apparatus for the shaping of an optically transparent body Expired - Fee Related DE10306669B4 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE2003106669 DE10306669B4 (en) 2003-02-13 2003-02-13 Method for checking the shaping and apparatus for the shaping of an optically transparent body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2003106669 DE10306669B4 (en) 2003-02-13 2003-02-13 Method for checking the shaping and apparatus for the shaping of an optically transparent body

Publications (2)

Publication Number Publication Date
DE10306669A1 DE10306669A1 (en) 2004-09-09
DE10306669B4 true DE10306669B4 (en) 2005-04-14

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DE2003106669 Expired - Fee Related DE10306669B4 (en) 2003-02-13 2003-02-13 Method for checking the shaping and apparatus for the shaping of an optically transparent body

Country Status (1)

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DE (1) DE10306669B4 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4107299A1 (en) * 1991-03-07 1992-09-10 Olaf Dipl Ing Mollenhauer Contactless detection or adjustment of centering error for lenses - involves positioning surface w.r.t. fibre=optic sensor until received signal caused by surface rotation is sufficiently small
JPH04310836A (en) * 1991-04-10 1992-11-02 Olympus Optical Co Ltd Method for measure distribution of refractive index
JPH06194262A (en) * 1992-12-24 1994-07-15 Ricoh Co Ltd Method and apparatus for meauring radius of curvature of surface
DE4127094C2 (en) * 1991-08-16 1994-09-08 Wernicke & Co Gmbh System for grinding the optical surfaces and / or the peripheral edge of spectacle lenses
JPH1183675A (en) * 1997-09-08 1999-03-26 Ricoh Co Ltd Method for evaluating optical image forming element

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4107299A1 (en) * 1991-03-07 1992-09-10 Olaf Dipl Ing Mollenhauer Contactless detection or adjustment of centering error for lenses - involves positioning surface w.r.t. fibre=optic sensor until received signal caused by surface rotation is sufficiently small
JPH04310836A (en) * 1991-04-10 1992-11-02 Olympus Optical Co Ltd Method for measure distribution of refractive index
DE4127094C2 (en) * 1991-08-16 1994-09-08 Wernicke & Co Gmbh System for grinding the optical surfaces and / or the peripheral edge of spectacle lenses
JPH06194262A (en) * 1992-12-24 1994-07-15 Ricoh Co Ltd Method and apparatus for meauring radius of curvature of surface
JPH1183675A (en) * 1997-09-08 1999-03-26 Ricoh Co Ltd Method for evaluating optical image forming element

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Publication number Publication date
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