DE10226370B4 - A substrate for an electronic device using the substrate, method for increasing the charge carrier mobility and organic field-effect transistor (OFET) - Google Patents

A substrate for an electronic device using the substrate, method for increasing the charge carrier mobility and organic field-effect transistor (OFET)

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Publication number
DE10226370B4
DE10226370B4 DE2002126370 DE10226370A DE10226370B4 DE 10226370 B4 DE10226370 B4 DE 10226370B4 DE 2002126370 DE2002126370 DE 2002126370 DE 10226370 A DE10226370 A DE 10226370A DE 10226370 B4 DE10226370 B4 DE 10226370B4
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Prior art keywords
substrate
organic
carrier mobility
ofet
plastic film
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Expired - Fee Related
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DE2002126370
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German (de)
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DE10226370A1 (en
Inventor
Wolfgang Dr. Clemens
Henning Dr. Rost
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PolyIC GmbH and Co KG
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PolyIC GmbH and Co KG
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Priority to DE2002126370 priority Critical patent/DE10226370B4/en
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Publication of DE10226370B4 publication Critical patent/DE10226370B4/en
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Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/05Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential- jump barrier or surface barrier multistep processes for their manufacture
    • H01L51/0504Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential- jump barrier or surface barrier multistep processes for their manufacture the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or swiched, e.g. three-terminal devices
    • H01L51/0508Field-effect devices, e.g. TFTs
    • H01L51/0512Field-effect devices, e.g. TFTs insulated gate field effect transistors
    • H01L51/0541Lateral single gate single channel transistors with non inverted structure, i.e. the organic semiconductor layer is formed before the gate electode
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/0001Processes specially adapted for the manufacture or treatment of devices or of parts thereof
    • H01L51/0002Deposition of organic semiconductor materials on a substrate
    • H01L51/0003Deposition of organic semiconductor materials on a substrate using liquid deposition, e.g. spin coating

Abstract

Substrat (1) eines elektronischen Bauteils, das mit einer organischen Funktionsschicht (3) beschichtet ist, wobei das Substrat (1) eine orientierte, biaxial gestreckte und damit geordnete Kunststofffolie ist und die Kunststofffolie die Ordnung auf die Funktionsschicht (3) überträgt. Substrate (1) of an electronic component, which is coated with an organic functional layer (3), wherein the substrate (1) is an oriented, biaxially stretched, and thus parent plastic film and the plastic film transmits the order to the functional layer (3).

Description

  • Die Erfindung betrifft ein Substrat für ein elektronisches Bauteil, eine Verwendung des Substrates, ein Verfahren zur Erhöhung der Ladungsträgermobilität und einen organischen Feld-Effekt Transistor auf dem ein organisches Funktionsmaterial in geordneter Form abgeschieden ist. The invention relates to a substrate for an electronic component, a use of the substrate, a method for increasing the charge carrier mobility, and an organic field-effect transistor on which an organic function material is deposited in an ordered form.
  • Beim Aufbau von elektrischen Schaltungen, die auf organischen Materialien basieren, wie z. When constructing electrical circuits based on organic materials, such. B. bei organischen Dioden, Kondensatoren und insbesondere organischen Feldeffekt-Transistoren (OFETs), werden dünne Schichten eines organischen Funktionsmaterials auf geeigneten Substraten aus Silizium, Glas oder Kunststoff durch verschiedenartige Verfahren, wie Spin-Coating, Rakeln, Aufsprayen, Plotten, Drucken, Aufdampfen, Sputtern etc. aufgebracht. B. when organic diodes, capacitors, and particularly organic field effect transistors (OFETs), thin layers of an organic functional material on suitable substrates of silicon, glass or plastic by a variety of methods such as spin coating, knife coating, spraying on, plotting, printing, vapor deposition , sputtering, etc. applied. Um für die elektrische Performance günstige Materialeigenschaften wie zum Beispiel hohe elektrische Leitfähigkeit oder auch eine hohe Ladungsträgermobilität zu erhalten, ist es günstig, in dem organischen Funktionsmaterial eine gewisse molekulare Ordnung zu erzeugen. In order to obtain favorable material properties such as high electrical conductivity or a high carrier mobility for the electrical performance, it is advantageous to produce a certain molecular order in the organic functional material.
  • In der Literatur werden neben einfachen Substraten aus Silizium [Z. be in addition to simple substrates made of silicon [Z. in the literature Bao et al., Appl. Bao et al., Appl. Phys. Phys. Lett. Lett. 69 (26) (1996) 4108]; 69 (26) (1996) 4108]; Polycarbonat [GH Gelinck et al., Appl. Polycarbonate [Gelinck GH et al., Appl. Phys. Phys. Lett. Lett. 77 (10) (2000) 1487] oder Polyimid [CJ Drury et al., Appl. 77 (10) (2000) 1487] or polyimide [CJ Drury et al., Appl. Phys. Phys. Lett. Lett. 73 (1) (1998) 108]; 73 (1) (1998) 108]; auch mechanisch vorbehandelte, dh gebürstete Polyimid-Substrate beschrieben, die eine geordnete. mechanically pretreated, ie brushed polyimide substrates described which an ordered. Abscheidung von konjugierten Polymeren als Halbleiter erleichtern und somit zu höheren Feldeffekten in OFETs im Vergleich zu unbehandeltem Polyimid führen [H. facilitate deposition of conjugated polymers as semiconductors and therefore lead to higher field effects in OFETs compared to untreated polyimide [H. Sirringhaus et al., Science 290 (2000) 2123]. Sirringhaus et al., Science 290 (2000) 2123]. Die mechanische Vorbehandlung ist aufwendig, dh stellt einen zusätzlichen Prozessschritt dar und kann dazu führen, dass die Oberfläche des Substrats angegriffen wird. The mechanical pre-treatment is complicated, that represents an additional process step and may result in that the surface of the substrate is attacked.
  • Aus der From the US 2002 041427 Α1 US 2002 041427 Α1 ist ein Verfahren zur Herstellung eines kristallinen, optisch nicht-linearen (NLO) Films bekannt, bei der mit Hilfe einer nur zu diesem Zweck aufgebrachten Zwischenschicht (alignment layer) eine geordnete Aufbringung des NLO-Films erleichtert wird. discloses a process for preparing a crystalline, optically non-linear (NLO) film, wherein with the aid of an applied only to this purpose, intermediate layer (alignment layer) an ordered application of the NLO film is facilitated.
  • Aus der From the US 6326640 Β1 US 6326640 Β1 ist eine Lösung des Problems, die Ladungsträgermobilität einer organischen Funktionsschicht zu erhöhen, bekannt. is a solution to the problem of increasing the carrier mobility of an organic functional layer is known. Dabei wird gelehrt, dass das Strecken in eine bestimmte Vorzugsrichtung die Ladungsträgermobilität verbessert. In this case, it is taught that the stretching improves the carrier mobility in a certain preferred direction.
  • Neben diesen Versuchen, eine geordnete Aufbringung eines Funktionsmaterials zu erleichtern und/oder bis zu einem bestimmten Grad zu garantieren, gibt es bislang noch keine Methode, ein Funktionsmaterial geordnet auf das Substrat aufzubringen. Apart from these attempts to facilitate the proper application of a functional material and / or to guarantee to a certain degree, there is no method so far, a functional material arranged on the substrate to be applied. Die geordnete Aufbringung eines organischen Funktionsmaterials ist jedoch entscheidend für dessen Ladungsträgerbeweglichkeit. However, the overall application of an organic functional material is crucial for the carrier mobility. Es besteht daher ständig der Bedarf, Methoden zur Verfügung zu stellen, mit denen besser geordnete Schichten aus Funktionsmaterial erzeugt werden können. There is a permanent need therefore to provide methods by which ordered layers can be produced from functional material better.
  • Aufgabe der Erfindung ist es daher, ein Substrat zu schaffen, das eine geordnete Oberfläche hat, die eine orientierte und geordnete Aufbringung/Abscheidung eines organischen Funktionsmaterials ermöglicht. The object of the invention is therefore to provide a substrate having an ordered interface that allows an oriented and ordered application / deposition of an organic functional material.
  • Gegenstand der Erfindung ist ein Substrat eines elektronischen Bauteils, das mit einer organischen Funktionsschicht beschichtet ist, wobei das Substrat eine orientierte, gestreckte und damit geordnete Kunststofffolie ist und die Kunststofffolie die Ordnung auf die Funktionsschicht überträgt. The invention relates to a substrate of an electronic component, which is coated with an organic functional layer, wherein the substrate is an oriented, stretched and thus parent plastic film and the plastic film transmits the order to the functional layer.
  • Als Substrat, Untergrund oder untere Schicht wird hier jede Schicht bezeichnet, die als Träger einer Schicht mit organischem Funktionsmaterial dienen kann. As the substrate, substrate or lower layer, each layer is referred to herein, which can serve as a support a layer containing an organic functional material. Es kann sich durchaus auch um eine Folie zur Verkapselung handeln, beispielsweise wenn ein OFET in einem Bottom-up Layout aufgebaut wird. It can also be a film for encapsulation is well, for example when an OFET is built in a bottom-up layout.
  • Der Begriff "organisches Material" oder "Funktionsmaterial" oder "(Funktions-)Polymer" umfasst hier alle Arten von organischen, metallorganischen und/oder organisch-anorganischen Kunststoffen (Hybride), insbesondere die, die im Englischen z. The term "organic material" or "functional material" or "(functional) polymer" as used herein encompasses all types of organic, organometallic and / or organic-inorganic polymers (hybrids), particularly those in English z. B. mit "plastics" bezeichnet werden. B. are called "plastics". Es handelt sich um alle Arten von Stoffen mit Ausnahme der Halbleiter, die die klassischen Dioden bilden (Germanium, Silizium), und der typischen metallischen Leiter. These are all kinds of substances other than the semiconductors, the conventional diodes form (germanium, silicon), and the typical metallic conductors. Eine Beschränkung im dogmatischen Sinn auf organisches Material als Kohlenstoff enthaltendes Material ist demnach nicht vorgesehen, vielmehr ist auch an den breiten Einsatz von z. A restriction in the dogmatic sense to organic material containing as a carbon material is therefore not provided, rather, is also connected to the wide use of z. B. Siliconen gedacht. B. silicones thought. Weiterhin soll der Term keiner Beschränkung im Hinblick auf die Molekülgröße, insbesondere auf polymere und/oder oligomere Materialien unterliegen, sondern es ist durchaus auch der Einsatz von "small molecules" möglich. Furthermore, the term shall not subject to any limitation on the molecular size, particularly to polymeric and / or oligomeric materials, but it is certainly also the use of "small molecules" possible. Der Wortbestandteil "polymer" im Funktionspolymer ist historisch bedingt und enthält insofern keine Aussage über das Vorliegen einer tatsächlich polymeren Verbindung. The "polymer" word component in the functional polymer is historically derived and makes no statement about the presence of an actual polymeric compound.
  • Erfindungsgemäß wird eine biaxial gestreckte orientierte und zumindest teilkristalline Kunststofffolie eingesetzt. According to the invention a biaxially stretched oriented and at least partially crystalline plastic film is used. Beispielsweise eignet sich eine Folie aus isotaktischem Polypropylen, Polyamid, Polyethylen, Polyethylenterephtalat, Polyphthalamid, Polyethylen, Polyetherketonketon (PEKK), Polyetheretherketon (PEEK), syndiotaktisches Polystyrol, Polyvinylidendifluorid, Polytetrafluorethylen etc. For example, is a film of isotactic polypropylene, polyamide, polyethylene, polyethylene terephthalate, polyphthalamide, polyethylene, polyether ketone ketone (PEKK), polyetheretherketone (PEEK), syndiotactic polystyrene, polyvinylidene difluoride, polytetrafluoroethylene, etc.
  • Durch die bereits bei der Herstellung und der nachfolgenden Prozessierung der Polymerfolien erfolgende Streckung werden im Substrat und damit auch auf seiner Oberfläche teilweise hochgeordnete Kristallite in Form von parallel liegenden Molekülketten bzw. Kettenteilen erzeugt, die es ermöglichen, konjugierte Polymere und auch organische Materialien mit niederem Molekulargewicht (Monomere, Oligomere und/oder "small molecules") in sowohl leitender und nichtleitender Form als auch in halbleitender und nichthalbleitender Form geordnet abzuscheiden. By taking place already during the production and subsequent processing of the polymer films stretching are in the substrate, thus generating on its surface partially highly ordered crystallites in the form of parallel molecular chains and chain parts, which make it possible to conjugated polymers and organic materials of low molecular weight deposit (monomers, oligomers and / or "small molecules") arranged in both conductive and non-conductive form and in semiconducting and non-semiconducting form. Das Aufbringen der besagten organischen Funktionsschicht kann dabei aus Lösung (Spin-Coating, Drucken, Plotten, Rakeln etc.) aber auch aus der Gasphase (Aufdampfen, Sputtern etc.) erfolgen. The application of the said organic functional layer may consist of solution (spin-coating, printing, plotting, knife coating, etc.) but also take place from the gas phase (vapor deposition, sputtering, etc.). Durch die Orientierung des Substrates dient dieses als sogenanntes "alignment template" und führt zur Bildung von hochgeordneten Bereichen im abgeschiedenen Funktionsmaterial, was zu höheren Leitfähigkeiten und/oder höheren Ladungsträgermobilitäten führt. By the orientation of the substrate that serves as a so-called "alignment template" and leads to the formation of highly ordered regions in the deposited functional material, which leads to higher conductivities and / or higher charge carrier mobilities.
  • Im folgenden wird die Erfindung noch anhand einer Figur erläutert: In the following the invention will be explained in reference to a figure:
    Zu sehen ist das Substrat The photo shows the substrate 1 1 , vorzugsweise eine biaxial gestreckte Kunststofffolie, beispielsweise eine Folie aus Polyethylenterephtalat (PET) darauf Source und Drain Elektroden , Preferably a biaxially stretched plastic film, for example a film of polyethylene terephthalate (PET) thereon source and drain electrodes 2 2 (beispielsweise aus leitfähigem Polyanilin (PANI)). ((For example, of conductive polyaniline PANI)). Die Halbleiterschicht The semiconductor layer 3 3 wird so auf das Substrat aufgebracht, dass sie in direktem Kontakt mit der biaxial gestreckten Kunststofffolie is applied to the substrate so that they are in direct contact with the biaxially stretched plastic film 1 1 abgeschieden wird. is deposited. Somit entsteht eine Ordnung innerhalb der Halbleiterschicht, durch die eine besser Beweglichkeit der Ladungsträger erzielt wird. This produces an order within the semiconductor layer, better mobility of the charge carriers is achieved by the a. Dazu wird beispielsweise eine Lösung von Poly(3-hexylthiophen) in Chloroform durch Spin-coating auf das Substrat For this purpose, for example a solution of poly (3-hexylthiophene) in chloroform by spin-coating on the substrate 1 1 aufgeschleudert, so dass eine 100 nm dünne und homogene Polymerschicht entsteht. spin-coated, so that a 100 nm thin and homogeneous polymer layer. Nach einem Trocknungsschritt wird eine elektrisch isolierende Polystyrolschicht After a drying step, an electrically insulating layer of polystyrene 4 4 als Gatedielektrikum aufgeschleudert. spun as gate dielectric.
  • Zur Herstellung der Gate-Elektrode To prepare the gate electrode 5 5 wird in einer dem Fachmann geläufigen Methode (Sputtern etc) verfahren. is moved in a manner familiar to those skilled in method (sputtering, etc.).
  • Ein derartig auf einem durch Verstreckung vororientiertem Substrat aufgebrachter organischer Feldeffekt-Transistor (OFET) zeigt Ladungsträgermobilitäten von μ > 10 –3 cm 2 /Vs. Such a substrate on a preoriented by stretching applied organic field effect transistor (OFET) shows charge-carrier mobilities of μ> 10 -3 cm 2 / Vs. Dieser Wert liegt mehrere Größenordnungen über den Mobilitäten, die in OFETs mit identischem Aufbau, jedoch mit einem nichtorientiertem Substrat (z. B. Silizium oder Siliziumoxid) möglich sind. This value is several orders of magnitude over the mobilities (silicon or silicon oxide z. B.) are possible in OFETs with identical structure, but with a non-oriented substrate.
  • Durch die Erfindung wird es erstmals möglich, mit der Wahl eines geeigneten Substrats die Ladungsträgermobilität in organischen Halbleitern um Größenordnungen zu steigern. The invention makes it is now possible to increase the selection of a suitable substrate, the carrier mobility in organic semiconductors by orders of magnitude.

Claims (6)

  1. Substrat ( substrate ( 1 1 ) eines elektronischen Bauteils, das mit einer organischen Funktionsschicht ( ) Of an electronic component (with an organic functional layer 3 3 ) beschichtet ist, wobei das Substrat ( is coated), wherein the substrate ( 1 1 ) eine orientierte, biaxial gestreckte und damit geordnete Kunststofffolie ist und die Kunststofffolie die Ordnung auf die Funktionsschicht ( ) Is an oriented, biaxially stretched, and thus parent plastic film and the plastic film, the order (on the functional layer 3 3 ) überträgt. ) Transfers.
  2. Substrat ( substrate ( 1 1 ) nach Anspruch 1, wobei die Kunststofffolie aus isotaktischem Polypropylen, Polyamid, Polyethylen, oder Polyethylenterephtalat ist. ) According to claim 1, wherein the plastic film of isotactic polypropylene, polyamide, polyethylene, or polyethylene terephthalate is.
  3. Substrat nach einem der Ansprüche 1 oder 2, wobei die Funktionsschicht ( Substrate according to one of claims 1 or 2, wherein the functional layer ( 3 3 ) aus einem organischen halbleitenden Material besteht. ) Consists of an organic semiconducting material.
  4. Verfahren zur Erhöhung der Ladungsträgermobilität einer leitenden oder halbleitenden Schicht ( A method for increasing the charge carrier mobility of a conductive or semi-conductive layer ( 3 3 ) aus organischem Material, bei dem die leitende oder halbleitende Schicht ( ) Of organic material, in which (the conductive or semi-conductive layer 3 3 ) auf einem Substrat ( ) On a substrate ( 1 1 ) mit einer orientierten, biaxial gestreckten und damit geordneten Kunststofffolie aufgebaut wird. ) Is constructed with an oriented, biaxially stretched, and thus parent plastic film.
  5. Verwendung eines Substrats ( Use of a substrate ( 1 1 ) nach einem der Ansprüche 1 bis 3 zur Herstellung eines OFETs. ) According to one of claims 1 to 3 for the production of an OFET.
  6. Organischer Feld-Effekt-Transistor (OFET) mit einem Substrat ( An organic field-effect transistor (OFET) (with a substrate 1 1 ) nach einem der Ansprüche 1 bis 3, der eine halbleitende organischen Funktionsschicht ( ) According to one of claims 1 to 3, the (a semiconductive organic functional layer 3 3 ) aus organischem Material mit einer Ladungsträgermobilität von μ > 10 –3 cm 2 /Vs hat. ) Has organic material having a carrier mobility of μ> 10 -3 cm 2 / Vs.
DE2002126370 2002-06-13 2002-06-13 A substrate for an electronic device using the substrate, method for increasing the charge carrier mobility and organic field-effect transistor (OFET) Expired - Fee Related DE10226370B4 (en)

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DE2002126370 DE10226370B4 (en) 2002-06-13 2002-06-13 A substrate for an electronic device using the substrate, method for increasing the charge carrier mobility and organic field-effect transistor (OFET)
US10/517,750 US7709865B2 (en) 2002-06-13 2003-06-06 Substrate for an organic field effect transistor, use of said substrate, method of increasing the charge carrier mobility, and organic field effect transistor (OFET)
PCT/DE2003/001899 WO2003107450A1 (en) 2002-06-13 2003-06-06 Substrate for an organic field effect transistor, use of said substrate, method for increasing the charge carrier mobility, and organic field effect transistor (ofet)

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