DE102017213734A1 - Apparatus and method for generating radiation having a given spatial radiation distribution - Google Patents

Apparatus and method for generating radiation having a given spatial radiation distribution

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Publication number
DE102017213734A1
DE102017213734A1 DE102017213734.7A DE102017213734A DE102017213734A1 DE 102017213734 A1 DE102017213734 A1 DE 102017213734A1 DE 102017213734 A DE102017213734 A DE 102017213734A DE 102017213734 A1 DE102017213734 A1 DE 102017213734A1
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Germany
Prior art keywords
beam
radiation
optical elements
optical element
device
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE102017213734.7A
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German (de)
Inventor
Stefanie Mayer
Annette Frederiksen
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Robert Bosch GmbH
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Robert Bosch GmbH
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Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE102017213734.7A priority Critical patent/DE102017213734A1/en
Publication of DE102017213734A1 publication Critical patent/DE102017213734A1/en
Application status is Ceased legal-status Critical

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4817Constructional features, e.g. arrangements of optical elements relating to scanning
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/42Simultaneous measurement of distance and other co-ordinates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • G01S17/93Lidar systems specially adapted for specific applications for anti-collision purposes
    • G01S17/931Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4814Constructional features, e.g. arrangements of optical elements of transmitters alone
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/10Scanning systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/18Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective

Abstract

The invention provides an apparatus (1) for generating radiation having a given spatial radiation distribution, comprising: a radiation source (2) adapted to emit at least one beam (L); a micro-mirror device (3) having at least one oscillatable micromirror (30) which is designed to deflect the at least one emitted beam (L); and a beam-shaping device (4) having at least one optical element (40) comprising holographic-optical elements and / or phase modulators, wherein at least one beam (L) travels along a beam trajectory on the at least one micromirror (30) during oscillatory movement of the at least one micromirror (30) meets at least one optical element, and wherein the at least one optical element (40) is adapted to shape the at least one beam (L) and / or deflect such that radiation is emitted with the predetermined spatial radiation distribution.

Description

  • The present invention relates to an apparatus and a method for generating radiation having a predetermined spatial radiation distribution.
  • State of the art
  • Micromirrors or microscanners for deflecting laser light are used by way of example in projection displays, cameras, for distance measurement or in bar code readers. A micromechanical component with a micromirror is approximately from the document DE 10 2013 220 787 A1 known. Further, the document discloses DE 102015217908 A1 a lidar sensor with a movable micromirror. For deflecting the laser light, a single micromirror may be provided, which oscillates about two mutually perpendicular axes. Here, the oscillation frequency is higher by one of the axes than the oscillation frequency about the other axis, so that a sinusoidal pattern is formed. Such a pattern thus differs from a line scan at least in the vicinity of the turning points of the beam at the oscillation around the fast axis. In addition, in such a swinging movement, the residence time of the micromirror in the vicinity of these reversal points is higher than in the vicinity of the rest position. Thus, the radiation distribution achieved is not completely homogeneous and isotropic. Instead of a single micromirror, it is also possible to use two micromirrors, which are pivotable about mutually perpendicular axes.
  • Disclosure of the invention
  • The invention provides an apparatus for generating radiation with a predetermined spatial radiation distribution with the features of claim 1 and a corresponding method for generating radiation with a predetermined spatial radiation distribution with the features of claim 8. According to a first aspect, the invention therefore relates to a device for generating electromagnetic radiation having a predetermined spatial radiation distribution, which has a radiation source, a micromirror device and a beam shaping device. The radiation source is designed to emit at least one beam. The micromirror device has at least one oscillatable micromirror, which is designed to deflect the emitted beam. By "swingable" is meant a periodic deflection about one or more axes. The beam shaping device has at least one optical element which comprises holographic-optical elements (HOE) and / or phase modulators. In the case of an oscillatory movement of the at least one micromirror, the at least one beam strikes the at least one optical element along a beam trajectory, wherein the at least one optical element is designed to shape and / or divert the at least one beam in such a way that radiation with the predetermined spatial Radiation distribution is emitted.
  • According to a second aspect, the invention accordingly relates to a method for generating electromagnetic radiation having a predetermined spatial radiation distribution. A beam is emitted and the beam is deflected by means of at least one oscillatable micromirror. During an oscillatory movement of the at least one micromirror, the beam impinges on at least one optical element along a beam trajectory, wherein the at least one optical element comprises holographic-optical elements and / or phase modulators. The at least one optical element forms the beam and / or deflects it in such a way that radiation with the prescribed spatial radiation distribution is emitted.
  • Preferred embodiments are the subject of the respective subclaims.
  • Advantages of the invention
  • The device according to the invention advantageously makes it possible to generate radiation with a radiation distribution which can be predetermined essentially freely. In particular, the device can be designed to generate radiation with a substantially homogeneous and isotropic spatial distribution. By a suitable choice of the at least one optical element, the above-mentioned influences of the oscillatory movements of the micromirror or the plurality of micromirrors can be compensated. Thus, by a suitable choice of the optical elements, the substantially sinusoidal beam trajectory can be converted into a predetermined, preferably symmetric solid angle distribution. Further, an isotropic, d. H. Radiation distribution independent of the solid angle can be achieved by arranging and forming the optical elements in such a way that the different residence times of the micromirrors are compensated in certain oscillatory positions. This aspect is of particular relevance in terms of eye safety, as it can reduce the maximum radiation intensity.
  • Preferably, the device comprises a plurality of optical elements comprising holographic-optical elements and / or phase modulators.
  • According to a preferred development of the device, the at least one optical element is designed to generate radiation with an array-shaped or line-shaped radiation distribution. When using a continuous beam, it can be achieved, for example, that instead of a sine pattern, individual lines that are substantially parallel to one another are emitted. In the case of a pulsed beam, for example, instead of the light pulses or radiation pulses lying on the sinusoidal trajectory, corresponding light pulses or radiation pulses aligned with a grid can be emitted. In particular, the light pulses can be emitted in a uniformly distributed array-shaped raster. As a result, a pixel-shaped scanning is possible. In particular, an evaluation of reflections in lidar sensors is simplified by the use of equidistant or equiangular radiation distributions.
  • According to a preferred development of the device, the at least one optical element is designed to generate radiation having a radiation distribution which has a higher intensity in a central solid angle range than in a peripheral solid angle range. In general, the at least one optical element can be designed such that the radiation distribution has a higher intensity in any solid angle range. A different intensity distribution can be advantageous in many fields of application, for example in vehicle headlights or for the targeted illumination of objects in a lidar system.
  • According to a preferred development of the device, the beam shaping device has a first plane with first optical elements arranged array-like and a second plane with second optical elements arranged array-like. The optical elements of the first plane are designed to deflect the beam incident along the beam trajectory onto predetermined optical elements of the second plane. The second-level optical elements deflect the beam such that respective deflection directions are parallel to each other. The first plane thus serves to generate a specific radiation distribution, while the second-level optical elements serve for collimation. Preferably, the second plane is parallel to the first plane. According to further embodiments, both the first level optical elements and the second level optical elements are configured to deflect the beam.
  • According to a preferred development, the phase modulators comprise spatial light modulators (SLM). In particular, active phase modulators can be used. As a result, different phase patterns or optical functions can be used in different segments of the beam shaping device. By driving the phase modulators, the area scanned with the radiation can be dynamically adaptively adjusted. In particular, only relevant areas can be illuminated.
  • According to a preferred development, the device has a microlens array with a multiplicity of microlenses, wherein the at least one optical element forms and / or deflects the beam in such a way that it respectively strikes the microlenses substantially centrally. The microlens array allows additional beam shaping depending on the desired application. By aligning the beam with the microlens array, optimal light output and light distribution can be achieved. In particular, a beam expansion can be achieved. The device may advantageously be used coaxially. The microlens array may be constructed as that of the document DE 102015217908 A1 known field of micro-optical elements.
  • According to a preferred embodiment of the device, the at least one optical element is further configured to correct distortions by shaping and / or deflecting the beam. Optical aberrations, especially in peripheral solid angle ranges can be compensated by suitably chosen optical elements.
  • According to a preferred development of the method, the beam impinging along the beam trajectory is deflected by array-shaped first optical elements of a first plane onto corresponding second optical elements of a second plane arranged array-like. The second optical elements deflect the beam such that respective deflection directions are parallel to each other.
  • According to a preferred development of the method, the at least one optical element forms the beam and / or deflects it in such a way that it respectively strikes central substantially on microlenses of a microlens array.
  • list of figures
  • Show it:
    • 1 a schematic oblique view of an apparatus for generating radiation with a given spatial radiation distribution according to an embodiment of the invention;
    • 2 a schematic cross-sectional view of in 1 shown device along the plane X1 ;
    • 3 a schematic cross-sectional view of in 1 shown device along the plane X2 ;
    • 4 an exemplary radiation distribution;
    • 5 a schematic cross-sectional view of the device with a further possible radiation distribution; and
    • 6 a flowchart of a method for generating radiation with a predetermined spatial radiation distribution according to an embodiment of the invention.
  • In all figures, the same or functionally identical elements and devices are provided with the same reference numerals. Various embodiments can be combined as desired, if appropriate.
  • Description of the embodiments
  • In 1 is a device 1 for generating radiation with a given spatial radiation distribution. The device 1 includes a radiation source 2 , which comprises a laser source, which forms a beam L emits, for example, a light beam in the visible range or a beam in the infrared range. The radiation source 2 can the beam L send out continuously or pulsed. The radiation source 2 can also have multiple rays L or combine multiple beams into a single beam. For example, the radiation source 2 a first laser which emits light in the red wavelength range, a second laser which emits light in the blue wavelength range, and a third laser which emits light in the green wavelength range. The beams of the first, second and third lasers can be combined by means of optical elements.
  • In the beam path of the radiation source 2 is a micromirror device 3 arranged, which has a vibrating micromirror 30 includes, around a first axis A1 swings at a faster first frequency and one to the first axis A1 vertical second axis A2 vibrates at a slower second frequency. If the micromirror 30 around one of the axes A1 . A2 resonantly oscillates, thereby creating a sinusoidal pattern, which exemplifies in a virtual plane E1 is drawn. Instead of a 2D micromirror, the micromirror device can 3 also have two or more 1D micromirror vibratable about mutually perpendicular axes.
  • In the beam path behind the micromirror device 3 there is a beam shaping device 4 with a variety of optical elements 40 , The optical elements 40 are in the 2 and 3 shown in more detail.
  • The 2 shows a cross-sectional view of the device along a central cutting plane X1 and the 3 shows a cross-sectional view of 1 along a peripheral cutting plane X2 ,
  • The beam shaping device 4 therefore comprises a first level 41 and a second level 42 , which each have a plurality of arrayed optical elements 40 exhibit. According to one embodiment, the optical elements are 40 holographic-optical elements. For example, the holographic-optical elements may comprise Fresnel zone plates. According to one embodiment, each holographic-optical element can be assigned its own Fresnel zone plate. Preferably, the holographic-optical elements comprise volume holograms, wherein the beam deflection is realized by diffraction at the volume grating. While in the 1 to 5 optical elements 40 Illustrated are the beam L can also transmit reflective optical elements 40 be used. The holographic-optical elements 40 are preferably prepared by exposure of a thin film.
  • In addition to the diffraction of the beam L, the optical elements 40 be configured for wavelength selection or angle selection. In particular, in the case of holographic-optical elements, the diffraction of the beam L results in a wavelength and angle selectivity. The selectivity of the holographic-optical elements can be adjusted by a suitable choice of the thickness of the holographic material and by the refractive index modulation.
  • Next, the optical elements 40 filter specific wavelength ranges. Preferably, therefore, only one beam L from a defined direction with a defined wavelength from the optical elements 40 distracted.
  • According to a further embodiment, the optical elements 40 Phase modulators and more preferably SLMs include. According to further embodiments, the optical elements 40 Both holographic-optical elements and phase modulators include. The optical elements 40 are designed, depending on a direction of impact of the beam L on the optical elements 40 the beam L to reshape or divert such that he into a predetermined radiation direction is deflected. By suitable choice of the optical elements 40 can be generated by a substantially arbitrary radiation distribution.
  • The optical elements 40 Thus, it is generally possible for the shaping of the light beam, which, for example, is understood to be the bending of the light beam, or for deflecting or deflecting the light beam, that is to say for changing direction.
  • In the in the 1 to 3 Illustrated construction are the first optical elements 40a the first level 41 adapted to be along the sinusoidal beam trajectory on the first optical elements 40a incident beam to corresponding second optical elements 40b the second level 42 distract. The deflected beam passes over the second plane 42 linearly. The optical elements 40a the first level 41 thus convert the sinusoidal radiation distribution or radiation distribution into a line-shaped radiation distribution or light distribution when hitting the second plane 42 around. When using pulsed laser light, the light pulses located on the sinusoidal trajectory are transmitted through the optical elements 40a the first level 41 on equally arrayed arranged impingement points of the second level 42 distracted.
  • According to one embodiment, a first optical element 40a the first level 41 the beam L to the nearest second optical element 40b the second level 42 distracted. However, the invention is not limited thereto. Thus, the deflection can also be performed in such a way that the light output is optimized or maximized. The beam L can thus with the highest possible efficiency and imaging quality through the optical elements 40 to get distracted.
  • The second optical elements 40b the second level 42 are adapted to receive the beam incident at a different angle of incidence, generally 0 degrees relative to the optical file L to collapse. Preferably, therefore, the beam L is substantially perpendicular to the second plane 42 sent out. The beam shaping device 4 is thus designed to be the beam L into radiation having a substantially array-shaped or line-shaped radiation distribution, as in a virtual plane E2 illustrated. This creates a pixel-shaped, equidistant grid.
  • While the first level 41 and the second level 42 in the 2 and 3 are shown as spaced apart from each other, according to further embodiments, the second level 42 also directly on the first level 41 be arranged.
  • According to further embodiments, instead of two different levels 41 and 42 Also, a single plane may be provided for generating a predetermined radiation distribution.
  • Optionally, in the beam path behind the beam shaping device 4 further a microlens array 5 formed, which has a plurality of arrayed microlenses 51 having. The microlenses 51 For example, they may be formed as diverging lenses and may be configured to receive the incident beam L aufzubächern and thereby illuminate a given solid angle range or raster. As described above, the beam-forming device generates 4 Radiation with an array-shaped radiation distribution, which is preferably aligned such that the beam L in each case centrally through a center of the microlenses 51 runs.
  • According to further embodiments, the beam shaping device comprises 4 an F-theta lens, which is adapted to the beam L telecentric on the microlens array 5 align. The microlens array 5 can from the beam shaping device 4 but may also be directly into the beam shaping device 4 be integrated or arranged on this.
  • In 4 a further exemplary radiation distribution is illustrated. In this case, the radiation intensity is higher in a central solid angle range than in a peripheral solid angle range. This can preferably be achieved by having a larger number of optical elements 40 the beam L divert into the central solid angle range.
  • A higher intensity in certain solid angle ranges can, according to further embodiments, also be achieved by having a plurality of first optical elements 40a the beam L on the same optical element 40b distracted. The beam L meets in this case at different angles of incidence on the optical element 40b , so that the optical elements of the second level 42 different behavior. For example, the optical elements 40b be formed of the second level as multiplex holograms.
  • To improve eye safety, the optical elements can 40 be arranged such that the emission of the beam L time and place is distributed as evenly as possible. In particular, the beam L not diverted directly in time into adjacent solid angle ranges.
  • As in 5 As shown, a radiation distribution can also be generated in which the beam L essentially in two spatial terms separate solid angle ranges 6 . 7 is sent out. Such a radiation distribution can be provided for an autostereoscopic system, in particular for a head-up display. Through the system, a stereo display can be generated, with a first solid angle range 6 corresponds to the left eye and a second solid angle range 7 corresponds to the right eye. By driving the radiation signals, different image information can be provided to the eyes. The imager unit takes into account the pixel arrangement of the holographic elements in the beam shaping device 4 ,
  • By replacement of the beam shaping device 4 it is also possible, according to a modular principle, the device 1 to adapt to the appropriate application.
  • In 6 FIG. 3 illustrates a flow chart of a method for generating radiation with a given spatial radiation distribution.
  • In one process step S1 a beam is emitted. This can be done in particular by a laser source described above.
  • In a further process step S2 becomes the beam L rejected with a swiveling micromirror. Here, the beam L along a beam trajectory to optical elements 40 directed. The optical elements 40 include, in particular, holographic-optical elements described above and / or phase modulators, in particular SLMs. The optical elements 40 Shape the beam Lund / or deflect it so that light is emitted with the given spatial radiation distribution. The method is preferably with a device described above 1 carried out.
  • QUOTES INCLUDE IN THE DESCRIPTION
  • This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.
  • Cited patent literature
    • DE 102013220787 A1 [0002]
    • DE 102015217908 A1 [0002, 0012]

Claims (10)

  1. Device (1) for generating radiation with a given spatial radiation distribution, comprising: a radiation source (2) which is designed to emit at least one beam (L); a micro-mirror device (3) having at least one oscillatable micromirror (30) which is designed to deflect the at least one emitted beam (L); and a beam shaping device (4), comprising at least one optical element (40) comprising holographic-optical elements and / or phase modulators, wherein at least one beam (L) along at least one beam trajectory during at least one micro-mirror (30) during oscillating motion of the at least one micromirror an optical element strikes, and wherein the at least one optical element (40) is adapted to shape and / or deflect the at least one beam (L) such that radiation having the predetermined spatial radiation distribution is emitted.
  2. Device (1) according to Claim 1 wherein the at least one optical element (40) is adapted to generate radiation having an array-shaped or line-shaped radiation distribution.
  3. Device (1) according to Claim 1 or 2 wherein the at least one optical element (40) is adapted to generate radiation having a radiation distribution which has a higher intensity in a central solid angle range than in a peripheral solid angle range.
  4. Device (1) according to one of the preceding claims, wherein the beam-shaping device (4) has a first plane (41) with arrayed first optical elements (40a) and a second plane (42) with array-shaped second optical elements (40b), wherein the optical elements (40a) of the first plane (41) are designed to deflect the beam (L) impinging along the beam trajectory onto predetermined optical elements (40b) of the second plane (42), and wherein the optical elements (40b) of the second plane (42) deflect the beam (L) such that respective deflection directions are parallel to each other.
  5. Device (1) according to one of the preceding claims, wherein the phase modulators comprise SLMs.
  6. Device (1) according to one of the preceding claims, further comprising a microlens array (5) having a multiplicity of microlenses, wherein the at least one optical element (40) shapes and / or deflects the at least one beam (L) in such a way that it respectively Essentially centrally on the microlenses.
  7. Device (1) according to one of the preceding claims, wherein the at least one optical element (40) is further adapted to correct distortions by shaping and / or deflecting the beam (L).
  8. A method of generating radiation having a predetermined spatial radiation distribution, comprising the steps of: Emitting (S1) at least one beam (L); and Deflecting (S2) the at least one beam (L) by at least one oscillatable micromirror (30); wherein at least one beam (L) strikes at least one optical element (40) along a beam trajectory when the at least one micromirror (30) oscillates, the at least one optical element (40) comprising holographic-optical elements and / or phase modulators, and wherein the at least one optical element (40) shapes and / or deflects the at least one beam (L) in such a way that radiation with the predetermined spatial radiation distribution is emitted.
  9. Method according to Claim 8 in which the at least one beam (L) impinging along the beam trajectory is deflected by arrayed first optical elements (40a) of a first plane (41) onto corresponding second optical elements (40b) of a second plane (42) arranged in an array, and wherein second optical elements (40b) deflect the at least one beam (L) such that respective deflection directions are parallel to each other.
  10. Method according to one of Claims 8 or 9 wherein the at least one optical element (40) forms and / or deflects the at least one beam (L) in such a way that it respectively strikes central substantially on microlenses of a microlens array (5).
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US20150277137A1 (en) * 2012-10-17 2015-10-01 Optotune Ag Speckle free laser projection
DE102015217908A1 (en) 2015-09-18 2017-03-23 Robert Bosch Gmbh lidar
US20170205495A1 (en) * 2014-03-10 2017-07-20 Cognex Corporation Spatially self-similar patterned illumination for depth imaging

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US20020162825A1 (en) * 1999-10-08 2002-11-07 Lizotte Todd E. Control system for ablating high-density array of vias or indentation in surface of object
DE102005037435A1 (en) * 2005-08-04 2007-02-08 Eads Deutschland Gmbh Device for switchable image projection with diffractive optical elements
WO2012062681A1 (en) * 2010-11-08 2012-05-18 Seereal Technologies S.A. Display device, in particular a head-mounted display, based on temporal and spatial multiplexing of hologram tiles
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