DE102012101643A1 - Electromagnetic radiation deflecting device for e.g. laser machining apparatus, for irradiating object such as workpiece, has second beam deflector that deflects turned electromagnetic radiation along second and third directions - Google Patents

Abstract

The electromagnetic radiation deflecting device (10) has a first beam deflector (16) comprising a deflector unit (30) for deflecting electromagnetic radiation (14) along a first direction, and an image field rotator (34) for turning the deflected electromagnetic radiation (32) by a predetermined rotational angle. A second beam deflector (20) deflects turned electromagnetic radiation along second and third directions, such that directional component of second direction is vertical to third direction. An independent claim is included for electromagnetic radiation deflecting method.

Description

The invention relates to a device for deflecting electromagnetic radiation with a first beam deflection unit and with a second beam deflection unit. The first beam deflecting unit has a first deflector for deflecting the electromagnetic radiation along a first direction. The second beam deflection unit deflects the deflected electromagnetic radiation along a second direction and along a third direction, wherein at least one direction component of the second direction is perpendicular to the third direction. Furthermore, the invention relates to a method for deflecting electromagnetic radiation and to a device and a method for irradiating a body.

The device for deflecting electromagnetic radiation can be used, for example, in the device for irradiating the body. Further, the method for deflecting the electromagnetic radiation and / or the method for irradiating the body may be performed by means of the device for deflecting electromagnetic radiation.

The device for irradiating the body may be, for example, a processing device for processing, for example for laser processing, the body, an apparatus for optical scanning, a device for exposing and / or a device for illuminating the body. Furthermore, the device can be used to irradiate the body, for example, for imaging. Furthermore, the apparatus can be used for irradiating the body in microscopy for exciting and / or observing fluorescence effects or in lithography methods for exposing photoresist. The body may be, for example, a workpiece, a sample or a substrate.

A processing device is suitable, for example, for processing a workpiece. The processing device generates as electro-magnetic radiation, a machining laser beam, with the aid of which the workpiece can be edited. The machining of the workpiece includes, for example, cutting the workpiece or treating the surface of the workpiece or a material removal on the surface. The machining of the surface of the workpiece may, for example, also be referred to as writing on the surface. For example, the workpiece can be cut along a predetermined line and / or a predetermined irradiation pattern can be introduced into the surface of the workpiece.

As electro-magnetic radiation, for example, pulsed electromagnetic radiation can be generated. In this context, a radiation source for generating the electromagnetic radiation may be, for example, an ultrashort pulse (UKP) laser. For example, in the excitation or investigation of Fluoreszenzeffekten in a sample or in the material processing of a workpiece with UKP lasers, it may be advantageous or necessary to act on individual laser pulses with sufficient spatial or temporal separation or at least a limited spatial and / or temporal overlap on the workpiece to let, for. B. in order to observe certain effects and / or to avoid harmful thermal effects. A high processing speed (illuminated area per time) can be achieved by a sufficiently high average power of the radiation source. In this case, the approach of using a high repetition rate (pulse rate, pulses per time) proves to be more attractive than the approach of using a high pulse energy in many cases. The reasons for this are that the scaling of the repetition rate is technically more manageable than the scaling of the pulse energy, and that more intense pulses would have to be distributed over a larger area, which would either require more inflexible and more complex parallel processing with several small laser spots or inaccurate processing with larger spots would. A sufficient spatial separation at a high repetition rate can be achieved by a very fast beam deflection takes place.

Even in the case of continuous electro-magnetic radiation, a rapid deflection of the electro-magnetic radiation can help to distribute the irradiation power on a body to be irradiated sufficiently quickly to avoid undesired accumulation effects for the respective application. Thus, the use of powerful radiation sources and thus shortening the processing time can be made possible for the respective application.

Different fast beam deflection units are already known, for example acousto-optical, electro-optical or mechanical, for example piezo-mechanical, deflectors. Such fast deflection systems are expensive and / or not very flexible with regard to the possible scan angles and / or have a poor duty cycle and / or are limited with regard to the maximum possible scan angles. By way of example, the number of optically resolvable dots separated in the scan field may be the decisive factor here, which, in contrast to the scanning angle, may be independent of the aperture and the optics.

One approach to achieving large deflection angles and fast deflection is to have a fast deflection with, for example, a low deflection angle and, for example, a slow deflection to combine large deflection angle. The deflection around the large deflection angle can be achieved for example with the aid of a galvanometer scanner.

The fast deflection is possible for general applications, for example in a vector labeling mode, on the workpiece surface in two dimensions. The implementation of a fast two-dimensional scanner with arbitrarily adjustable scanning direction is more difficult for all of these approaches than the realization of a fast one-dimensional scanner for various reasons. The reasons for this are that in the two-stage design (two scan axes in succession for two scan directions to be overlaid) of a fast two-dimensional scanner, the acceptance angle of the second scanner (second scan axis) must have at least the scan angle of the first scanner (first scan axis) on the input side. This problem can be relocated to the required input aperture by means of intermediate optics, but can not be eliminated. Furthermore, the two scanning axes of a two-stage fast scanner must be operated synchronously despite different and variable scan amplitudes, which is associated with technical difficulties and enormous additional expense at high scanning speeds with high demands on accuracy in practice. Last but not least, in some technologies fast scanners typically show high losses in the laser power (AOD) (approx. 30%) per level / axis and complex and / or expensive drive components are required per axis.

For many applications, especially UKP applications, it may be sufficient to superimpose a fast linear scanning movement with small amplitude with a slow labeling movement, also called feed. However, in the vector labeling mode (lines) there is a need to be able to align the direction of the fast deflection, hereinafter also referred to as the direction of irradiation, relative to the direction of each vector to be written, ie relative to the direction of advance, in order to allow flexible labeling patterns.

Even with a flat inscription in a grid-like inscription mode is a selectability of the direction of the fast linear deflection advantageous u. a. since the timing of the laser pulses can result in unevenness of the inscription results, which can be remedied by multiple inscriptions in different writing directions. This could be achieved by a rotation of the workpiece. A rotation of the workpiece can i. a. but only slowly because of inertia.

Out DE 10 2007 012 815 A1 is the combination of a fast and a slow deflection system for material processing by means of UKP laser known.

US 2009/0045176 A1 describes the use of an image field rotator of mirrors for drilling holes by means of a machining laser beam. When editing the workpiece, and in particular when drilling a hole in the workpiece, the field rotator rotates permanently and continuously about an axis of rotation.

US 6,584,218 B2 shows a combination of an acousto-optical deflector (AOD), an image field rotation and a workpiece movement when machining the workpiece. For the purpose of the examination, the workpiece is scanned flat.

The document Yong-Seok, Eung GI Paek and Xiao Tang, Opt. Eng. "Experimental nonmechanical image rotation to 20 angles using an acousto-optic dove prism". 39 (11) 2909-2914 (Nov 2000) shows a field-rotator comprising a polygon mirror and a set of rapidly adjustable and / or switchable optical elements by which an electro-magnetic beam can be rotated rapidly by a discrete angle of rotation, for example by 90 °.

In various embodiments, a device for deflecting electromagnetic radiation is provided which is simple and compact and which allows a flexible deflection of the electromagnetic radiation in a simple manner.

In various embodiments, an apparatus for irradiating a body is provided, which is simple and compact and which allows a flexible way to easily observe or process a sample or a workpiece. The device for irradiating a body is, for example, a processing device, an exposure device, a lighting device and / or an observation device, for example a microscope.

In various embodiments, there is provided a method of deflecting electromagnetic radiation that is simple in design and that readily allows flexible deflection of the electromagnetic radiation.

In various embodiments, a method of irradiating a body is provided that is simple in design and that allows for easy flexible viewing or manipulation of the body. The body is for example a workpiece, a substrate or a sample.

In various embodiments, an apparatus for deflecting electromagnetic radiation comprises a first beam deflection unit and a second beam deflection unit. The first beam deflecting unit has a first deflector for deflecting the electro-magnetic radiation along a first direction and a field rotator for rotating the deflected electromagnetic radiation by a predetermined angle of rotation, thereby deflecting the electromagnetic radiation in an effective deflecting direction first direction is turned. The second beam deflection unit deflects the rotated electromagnetic radiation along a second direction and along a third direction, wherein at least one direction component of the second direction is perpendicular to the third direction.

Furthermore, the device for deflecting the electro-magnetic radiation may have one, two or more optical elements for influencing the electromagnetic radiation in its beam path. The optical element (s) comprise, for example, filters, mirrors and / or lenses, for example an objective, a polarizing filter, a focusing lens, a diffusing lens, a collimating lens, a beam widening lens which increases a diameter of a collimated beam and / or an imaging beam Intermediate optics (relay optics), for example, a telescope optics, for example, two lenses whose focal point coincides has. The electro-magnetic radiation may be, for example, a processing beam, an illumination beam, an exposure beam, an excitation beam or an observation beam. The fact that the deflection takes place "along" the first, second or third direction may mean, for example, that the deflection takes place in the corresponding direction and exactly in the opposite direction and / or along one direction in an oscillating manner.

The image field rotator enables a simple and cost-effective way to rotate the deflected along the first direction of electromagnetic radiation. In other words, the image field rotator allows rotation of the image field of the deflected along the first direction of electro-magnetic radiation. Immediately after the field rotator, the electromagnetic radiation is thus deflected in the effective deflection direction, which is rotated with respect to the first direction. The predetermined angle of rotation, for example, from a feed. If the feed is discrete and / or stepwise or stepwise, so the rotation angle can be given correspondingly discrete or stepwise or stepwise changing. If the feed is continuous and / or takes place, the angle of rotation can be correspondingly set to be continuously changing.

On a body to be irradiated, the electromagnetic radiation generates a radiation point, which can also be referred to as a projection point, point of impingement or point of light, and / or which can be a focus of the electromagnetic radiation. The radiation point may, for example, be punctiform, circular, elliptical, polygonal or annular. In addition to the radiation point, with the aid of the electro-magnetic radiation and suitable optical means several, for example several adjacent, radiation points can be generated on the body. Furthermore, a beam profile of the radiation impinging on the body can be predetermined, for example flat-top and / or rectangular, so that each of the radiation points has a homogeneous intensity over its entire area. As a result, for example, a possibly necessary overlap between the individual radiation points can be reduced. The distribution of the intensity within a radiation spot on the body may, for example, be Gaussian, rectangular or at least nearly rectangular or annular, wherein the annular intensity distribution can be used, for example, in STET microscopy.

The radiation spot is moved along an irradiation direction due to the deflection of the electro-magnetic radiation along the first direction on the body. The rotation of the effective deflection direction due to the rotation of the image field causes rotation of the irradiation direction on the body. In other words, the radiation points of successive radiation pulses strike the body along the direction of irradiation. The rotatability of the irradiation direction makes it possible to adapt the irradiation direction to a feed direction. The feed direction is predetermined, for example, by the course of an irradiation line or depending on an irradiation pattern according to which a surface of the body is to be irradiated. For example, with the electro-magnetic radiation striking the body, irradiation of the body along a curved irradiation line by rotating the irradiation direction as a function of the course and / or the curvature of the irradiation line or in dependence on a section of the irradiation pattern to be irradiated done precisely. The rotation of the effective deflection direction and a rotation of the irradiation direction coupled thereto can be faster and more precise than an alternative rotation of the workpiece for this purpose.

The deflection along the first direction can be done, for example, oscillating. The radiation spot then oscillates on the body along the direction of irradiation.

The first deflector may also be referred to as a one-dimensional scanner. The second beam deflection unit may also be referred to as a two-dimensional scanner. The image field rotator can also be referred to as an image-rotating element or as an image rotator.

In various embodiments, the first deflector deflects the electromagnetic radiation along the first direction in a predetermined first angular range. The second beam deflection unit deflects the electromagnetic radiation along the second direction in a predetermined second angular range and along the third direction in a predetermined third angular range. The second and / or the third angle range are generally larger than the first angle range. The smaller first angular range allows a particularly rapid deflection of the electromagnetic radiation within the first angular range, and thus, for example, a rapid oscillation of the radiation spot on the body along the irradiation direction. The larger second or third angular range allow a precise approach of a predetermined position on the body with the radiation point.

The approach of a predetermined position on the body with the radiation point and in particular the associated movement of the radiation point on the body can also be referred to as feed. The position of the radiation spot on the body is predetermined with a blur predetermined by the fast deflection substantially by an angle within the second angle range and by an angle within the third angle range. For example, the radiation spot on the body along the machining direction can oscillate about the predetermined position, wherein the predetermined position can be changed by the feed.

In various embodiments, the first deflector deflects the electromagnetic radiation along the first direction at a predetermined first angular velocity. The second beam deflection unit deflects the electromagnetic radiation along the second direction at a predetermined second angular velocity and along the third direction at a predetermined third angular velocity. The predetermined second and the predetermined third angular velocity may be smaller than the first angular velocity. For example, the predetermined first angular velocity may be the maximum first angular velocity, the predetermined second angular velocity the maximum second angular velocity, and / or the predetermined third angular velocity the maximum third angular velocity.

The first angular velocity may vary widely, for example, the first angular velocity may be zero at an inversion motion at the reversal points and become maximum therebetween.

The fast, for example, maximum fast, deflection along the first direction makes it possible to use pulsed electromagnetic radiation with a high repetition rate, for example, without individual successive radiation points of the electromagnetic radiation on the body overlapping or too strong when the body is irradiated overlap. For example, an overlap of successive radiation points from 0 to 90% can be specified. This can help to be able to use a radiation source with a high radiation power, without reducing the quality of the irradiation results, for example the processing, exposure, lighting or observation results. The angular velocities can be variable.

In various embodiments, the image field rotator includes a dove prism. The turning prism allows to easily and inexpensively produce the image field rotator. In particular, no adjustment of individual components of the image field rotator is necessary.

In various embodiments, the image field rotator comprises at least three mirrors. This can help to produce the image field rotator easily and with low material costs and / or to support the use in conjunction with an intense and / or pulsed radiation source. For example, a material passage, an occurrence of thermal effects and / or dispersion can be avoided even with a broadband, intense and / or pulsed radiation source. The mirrors may also be elements of a polygon mirror arrangement for rapid image rotation, for example a polygon mirror arrangement as known from the aforementioned prior art. The mirrors may also be formed by reflecting surfaces, for example by surfaces of a prism.

In various embodiments, the first angular range is variably adjustable. The first angle range specifies the maximum deflection of the electromagnetic radiation along the first direction and thus the maximum deflection of the radiation spot on the body along the direction of irradiation. This makes it possible to adjust an amplitude of the movement of the electro-magnetic radiation within the first angle range depending on an irradiation pattern or an irradiation line on the body. For example, at corners, edges, curves, curvatures and / or edges of the irradiation pattern or the irradiation line, the amplitude can be selected to be smaller than at a rectilinear or nearly rectilinear section of the irradiation pattern or the irradiation line. This can contribute to an optimization of the irradiation quality.

In various embodiments, the first deflector includes an acousto-optic deflector, an electro-optic deflector, and / or a fast mechanical deflector, such as a mechanical deflector that is optimized for speed and / or has a particularly small scan field, for example. This can help to ensure that the deflection of the electro-magnetic radiation along the first direction is particularly fast and precise. The mechanical deflector may, for example, have one, two or more mirrors which are, for example, electro-magnetic, electrostatic or piezo-mechanically adjustable. For example, the first deflector has a, for example resonantly operated, galvanometer scanner, a micromechanical scanner, a polygon scanner or a piezo scanner.

The second beam deflection unit has, for example, one, two or more mechanical deflectors, for example one, two or more polygon scanners and / or galvanometer scanners.

In various embodiments, a device for irradiating the body comprises a radiation source for generating the electromagnetic radiation and a device for deflecting the electromagnetic radiation toward the body, for example the device for deflecting the electromagnetic radiation described above. The radiation source can be, for example, a laser radiation source, for example an ultra-short pulse laser (UKP laser). The device for irradiating the body may, for example, be referred to as a processing device, observation device, exposure device or illumination device, depending on its use.

In various embodiments, a method of deflecting the electro-magnetic radiation comprises steps of deflecting the electromagnetic radiation along a first direction, rotating the deflected electromagnetic radiation through a predetermined angle of rotation, thereby reducing the electromagnetic radiation in deflecting an effective deflection direction which is rotated with respect to the first direction, and the rotated electromagnetic radiation is deflected along a second direction and / or along a third direction. The method thus has a change of the deflection angle of the first deflector, the position of the image field rotator and / or the deflection angle of the second beam deflection unit.

The sequence of processing the individual steps of the method may be independent of the order of the elements, for example the deflection units and / or the field rotator, in the beam path of the electromagnetic radiation. By way of example, the sequence of processing of the individual steps of the method may be dependent on a section of the irradiation pattern currently to be irradiated on the body. Furthermore, for example, the deflection along the first direction can be faster than the deflection along the second and third directions and / or be constantly modified, for example oscillating.

The rotation of the field rotator and the associated rotation of the effective deflection of the first beam deflecting unit can be performed by the predetermined rotation angle, the effective deflection can then be maintained until the next rotation, for example, depending on the currently processed portion of the irradiation pattern on the body and thus a feed on the body.

The deflection along the second or third direction can be slower than along the first direction. By way of example, the deflection along the second or third direction may take place such that the advancement of the oscillating radiation point along the irradiation pattern takes place on the body. The deflection along the second direction may be representative of a first advance direction on the body and the deflection along the third direction may be representative of a second advance direction on the body with at least one directional component of the second advance direction perpendicular to the first advance direction. For example, the two feed directions to an X-Y plane, which corresponds for example to an irradiation level. Within the X-Y plane, each feed direction can be realized by superposing the first feed direction and the second feed direction. For example, the deflection along the second direction can cause a feed in the X direction and the deflection in the Y direction can cause a feed in the Y direction. The irradiation plane can also be referred to as a working plane, exposure plane, illumination plane or observation plane. The irradiation direction predetermined by means of the first deflector and the image field rotator can be adjusted stepwise or continuously to the resultant feed direction predetermined by the second beam deflecting unit.

In various embodiments, a method for irradiating the body comprises steps according to which the electro-magnetic radiation is generated prior to the first deflection, the electro-magnetic radiation first deflected and then rotated as explained above and according to which the electromagnetic radiation deflecting the deflection along the second and third directions toward the body. By irradiation, the body can be processed, illuminated, exposed, influenced and / or examined. For example, as the electromagnetic radiation, a machining laser beam can be generated, with the help of which the workpiece is processed. Alternatively, as an electromagnetic radiation, an exposure beam can be generated with the help of z. B. photoresist is exposed. Alternatively, an observation or excitation beam can be generated as electromagnetic radiation, with the aid of which a sample is observed or excited.

In various embodiments, the body is to be irradiated according to a predetermined irradiation pattern. In other words, the deflection and / or rotation of the electro-magnetic radiation in dependence on the predetermined irradiation pattern, for example, in dependence on the currently processed portion of the irradiation pattern. This can help to perform the machining quickly and accurately.

The predetermined irradiation pattern may be, for example, an irradiation pattern on the body. For example, the irradiation pattern may be incorporated into the surface of the workpiece, or the workpiece may be cut according to the irradiation pattern. Alternatively, the irradiation pattern may be representative of a sample to be observed or excited. The irradiation pattern may include a processing line or a processing line. The irradiation pattern can represent, for example, an image, a sectional contour, a polygon, a geometric shape or a lettering. Alternatively, with the aid of the electro-magnetic radiation, a surface can be scanned on the body, for example in a line or meander shape, for example for observation, exposure, illumination or processing purposes.

The irradiation may alternatively or additionally be, for example, a local influencing of the material or of the material properties, for example a discoloration of the material, of the body.

In various embodiments, an order of irradiation is determined in dependence on a shape and / or extension of portions of the irradiation pattern, and the irradiation pattern is processed according to the order of irradiation.

In various embodiments, a maximum deflection in the first direction is chosen as a function of the irradiation pattern, for example as a function of a section of the irradiation pattern currently to be processed.

In various embodiments, the electromagnetic radiation is generated in the form of successive pulses, that is to say as pulsed electromagnetic radiation. The pulses may, for example, be ultra-short pulses, for example ultra-short laser pulses. For example, the pulse durations may be less than 100 ps or less than 10 ps. This can contribute to carrying out different irradiation processes, for example observation, processing, exposure, illumination and / or excitation processes, without and / or with little thermal stress on the material of the body. For example, material of the body can be removed by means of so-called "cold" ablation. In general, an accumulation of disturbing influences can be avoided.

A generation of the pulses of the electro-magnetic radiation and the deflection of the electromagnetic radiation can be coordinated. In other words, the deflection of the electromagnetic radiation can be synchronized with the generation of the pulses. For example, if a radiation source is used in which the generation of the pulses can be controlled, the timing of the pulses on the deflection, for example the oscillating deflection along the first direction, and / or the rotation can be tuned. If, for example, a radiation source is used in which the generation of the pulses is fixed, then the deflection, for example the oscillating or the rotation, can be tuned to the timing of the pulses. The tuning of the pulses to the deflection or rotation of the electro-magnetic radiation can contribute to the fact that individual radiation points can be set exactly to their predetermined positions on the body. In this case, the precise setting of the radiation points relative to the entire body and / or relative to one or more previously irradiated positions on the body can take place.

The vote of the deflection or rotation of the electro-magnetic radiation to the generation of the pulses can be adjusted to an optical clock of the pulses or to an electrical clock of the radiation source. The optical clock of the pulses is representative of the times when the electromagnetic radiation actually the radiation source leaves. The electrical clock of the radiation source is representative of the times at which the radiation source receives or generates an electrical signal for generating the pulses. When setting the radiation spots accurately relative to the entire body, knowledge of the optical clock may be sufficient. By accurately setting the radiation spots relative to one or more previously irradiated positions on the body, a knowledge of the electrical clock may be sufficient.

The precise placement of the individual radiation points on the body can help to improve the quality of the irradiation result. Furthermore, an exposure dose can be evenly distributed, especially with multiple exposures.

The irradiation pattern can be at least partially composed of straight or curved line sections, wherein the line sections do not necessarily have to be connected. For example, a vector inscription according to the irradiation pattern can be carried out with the aid of the irradiation pattern. The line segments may be characterized by a set of locally different line parameters. The line parameters may include, for example, gray levels, line weights, and / or line widths of the line segments.

In various embodiments, an irradiance at which a portion of the radiation pattern is to be currently irradiated and / or a linewidth of the portion may be adjusted by a radiation dose distribution, wherein the radiation dose is by means of the deflection along the first direction and / or by varying the radiation intensity the electro-magnetic radiation can be adjusted.

The invention is explained below on the basis of exemplary embodiments with reference to the accompanying drawings.

In the drawings show:

1 an embodiment of a device for irradiating a body;

2 an embodiment of a device for deflecting electromagnetic radiation;

3 a schematic explanation of a deflection of electromagnetic radiation;

4 an embodiment of a Bildfelddrehers;

5 a further embodiment of a field rotator;

6 an embodiment of a body;

7 a flowchart of an embodiment of a method for irradiating a body.

In the drawings, elements of the same or similar construction or function are denoted by the same reference numerals throughout the figures.

1 shows an embodiment of a device 10 for irradiating a body 24 , The device 10 for irradiating the body 24 has a radiation source 12 on, the electromagnetic radiation 14 generated. The radiation source 12 is a device for deflecting the electromagnetic radiation 14 downstream, which is a first beam deflection unit 16 and a second beam deflecting unit 20 having. The first beam deflection unit 16 deflects the electromagnetic radiation 14 along an effective deflection direction, so that deflected electromagnetic radiation 18 on the second beam deflection unit 20 meets. The second beam deflection unit 20 deflects the deflected electromagnetic radiation 18 again, so that electro-magnetic radiation 22 on the body 24 incident.

The body 24 is on a body holder 26 arranged. The radiation source 12 , the first beam deflecting unit 16 and the second beam deflecting unit 20 are electrical with a control device 28 for controlling and / or regulating the radiation source 12 , the first beam deflection unit 16 and the second beam deflecting unit 20 coupled. The beam deflection units 16 . 20 have optical means for deflecting and / or guiding the electromagnetic radiation 14 . 18 on, wherein the optical means may be coupled with not shown adjusting means. The adjusting means may comprise, for example stepper motors or position-controlled direct drives. Furthermore, acousto-and / or electro-optical deflectors may be provided for deflecting and / or guiding the electro-magnetic radiation, in which the deflection takes place internally and / or non-mechanically.

The device 10 for irradiating the body 24 is, for example, a processing device for processing the body 24 which in this context may be, for example, a workpiece, a substrate or a sample. In the processing device is the electromagnetic radiation 14 , For example, a machining laser beam. Alternatively, the device may 10 for irradiating the body 24 For example, an exposure device for exposing the body 24 be, in this context, for example, may be a substrate on which, for example, photoresist is applied. Alternatively, the device may 10 for irradiating the body 24 For example, a microscope for examining the body 24 may be in this context, for example, a substrate or a sample in which, for example fluorescence effects are observed or excited. The microscope is on the body 24 striking electromagnetic radiation 22 For example, an observation beam and / or an excitation beam.

The electromagnetic radiation 14 For example, it may be pulsed electromagnetic radiation, such as a pulsed laser beam.

The electromagnetic radiation 14 is on the first beam deflection unit 16 directed. The electromagnetic radiation 14 may also be referred to as an electro-magnetic beam, which runs along a beam path, wherein the course of the beam path through the first and the second beam deflection unit 16 . 20 be specified. The first beam deflection unit 16 causes a first, rapid deflection of the electro-magnetic radiation 14 , for example along a first direction. The deflection along the first direction or the first deflection takes place within a first angle range. The first deflection takes place in the first beam deflection unit 16 initially one-dimensional, but with the help of the first beam deflection unit 16 rotatable in an effective deflection direction. Such a one-dimensionally deflected and rotated electromagnetic radiation 18 leaves the first beam deflection unit 16 and is on the second beam deflecting unit 20 directed.

The second beam deflection unit 20 has a two-dimensional scanner that detects the one-dimensionally deflected and rotated electromagnetic radiation 18 deflected along a second and / or along a third direction. The deflection along the second direction occurs within a second angular range and the deflection along the third direction occurs within a third angular range. The following on the body 24 striking deflected and rotated electromagnetic radiation 22 leaves the second beam deflecting unit 20 , In the beam path of the deflected and / or rotated electro-magnetic radiation 18 . 22 can be before or after the second beam deflection unit 20 a lens, not shown, may be arranged on the body 24 impinging electromagnetic radiation 18 . 22 on an irradiation level in or on the body 24 focused.

A current angle within the second angle range is from the on the body 24 meeting electromagnetic radiation 22 in a reference position and on the body 24 striking electro-magnetic radiation 22 trapped in a current position when on the body 24 striking electromagnetic radiation 22 currently only distracted along the second direction. A deflection along the second direction thus causes a deflection within the second angular range.

A current angle within the third angle range is from the on the body 24 striking electro-magnetic radiation 22 in the reference position and on the body 24 striking electro-magnetic radiation 22 trapped in a current position when on the body 24 striking electromagnetic radiation 22 currently only distracted along the third direction. A deflection along the third direction thus causes a deflection within the third angular range.

The control device 28 allows the radiation source 22 , the first beam deflecting unit 16 and / or the second beam deflection unit 20 to control and / or to regulate, for example by driving the adjusting means of the laser guides 16 . 20 , In the case of a control sensors, not shown, are provided which provide a current deflection and / or rotation of the electromagnetic radiation 14 . 18 . 22 to capture. If the radiation source 12 is a pulsed laser, so can a repetition rate of the laser pulses with a deflection and / or rotation of the electro-magnetic radiation 14 or the deflected electromagnetic radiation 18 be reconciled with what is below with respect to 7 is explained in more detail.

2 shows a detailed view of the device 10 according to 1 , The first beam deflection unit 16 has a first deflector 30 and a frame rotator 34 on. The first distractor 30 deflects the electromagnetic radiation 14 along the first direction within the first angular range. Thus, the first deflector causes 30 the first distraction. An actual angle within the first angular range is from the deflected electro-magnetic radiation 18 in a reference position and the deflected electro-magnetic radiation 18 enclosed in a current position. A deflected along the first direction electromagnetic radiation 32 leaves the first deflector 30 and is on the image field turner 34 directed.

The image field rotator 34 turns the deflected along the first direction electromagnetic radiation 32 by a predetermined angle of rotation, whereupon the deflected and rotated in an effective deflection by the predetermined angle of rotation electromagnetic radiation 18 the image field rotator 34 and the first beam deflecting unit 16 leaves. In particular, the image field rotator rotates 34 the effective deflection angle and field of view of the deflected electro-magnetic radiation 32 ,

Because the image field rotator 34 relative to the first deflector 30 is rotatable and the first deflector 30 the electromagnetic radiation 14 deflects variably, is the image field rotator 34 depending on its position and depending on the deflection of the electro-magnetic radiation 14 at a variable angle to a beam path of the deflected electro-magnetic radiation 32 and at a variable angle to the direction of polarization of the deflected electromagnetic radiation 32 , To avoid that the polarization direction has an effect on the effect of the image field rotator 34 has, can the electromagnetic radiation 14 . 32 be polarized before rotation. For example, the electromagnetic radiation 14 . 32 in the beam path in front of the image field rotator 34 be linearly polarized. For example, a rotatably mounted λ / 2 retardation plate in front of the image field rotator 34 rotate the polarization synchronously with its current rotational position (position), so that the polarization relative to the image field rotator 34 always aligned the same. Optionally, after the image field rotator 34 the polarization state can be transformed back by a corresponding arrangement.

Alternatively, the electromagnetic radiation 14 . 32 in front of the image field turner 34 be circularly polarized. The then occurring optical losses would be in each rotational position of the image field rotator 34 equal and thus independent of the rotational position of the image field rotator 34 , In the beam path after the image field rotator 34 then can the rotated electromagnetic radiation 18 have an elliptical polarization, which can be optionally converted by another co-rotated retardation plate in a desired polarization form.

Alternatively or in combination with one of the two aforementioned methods, a power loss dependent on the position of the field-rotation device (eg due to polarization effects) can also be compensated by a suitable adjustment or regulation of the power of the electromagnetic radiation.

With the help of the first beam deflection unit 16 can thus the electromagnetic radiation 14 in one direction, for example, the first direction, are quickly deflected, for example, oscillating, and the deflected along the first direction of electro-magnetic radiation 32 can be rotated, for example, to the predetermined angle of rotation, so that at fast deflection, the effective deflection can be freely selected, adjusted and / or tracked.

3 schematically illustrates the effect of the first deflection in a first sub-figure I, the effect of rotation in a second sub-figure II and the interaction of the deflection in the second and third direction and the rotation in a third sub-figure III and a fourth sub-figure IV.

In 3 the small circles set radiation points on the body 24 by the individual pulses of the radiation on the body 24 striking electro-magnetic radiation 22 be generated. For example, the circles in 3 Representative of processing points generated by individual machining laser pulses on a workpiece.

The solid arrows indicate a direction of irradiation on the body 24 along the the electromagnetic radiation 14 due to the deflection and / or rotation by means of the first beam deflection unit 16 is deflected and along the individual radiation points of successive pulses on the body 24 to meet. In other words, the direction of irradiation on the body 24 the direction resulting from the deflection by means of the first beam deflection unit 16 results. The irradiation direction may also be referred to as a machining direction, observation direction, exposure direction or illumination direction.

The dashed arrows indicate in 3 an irradiation pattern according to the body 24 is irradiated and thus a feed direction in which the irradiation takes place. In other words, the irradiation pattern can be traversed by the feed. In other words, the irradiation pattern predefines the feed direction. For example, in a machining apparatus, the workpiece to be machined is cut along the dashed arrows, or an irradiation pattern having the broken arrows is introduced into the surface of the workpiece. The dashed arrows thus indicate the feed caused by the second beam deflection unit.

The first deflection shown in sub-figure I takes place along the first direction, for example, so fast that in the case of a pulsed radiation source, the individual radiation points on the surface of the workpiece 24 do not overlap or overlap only to a limited extent. For example, an overlap degree may be between 0 and 90%, between 30 and 70%, or about 50%. The first deflection is effected by the deflection along the first direction by means of the first deflector 30 ,

In the case of a continuous radiation source, the illustrated radiation points symbolize in a fast temporal grid consecutive snapshots of the radiation points. The illustrated spatial separation of the radiation points in this respect symbolizes the rapid spatial distribution of the radiation dose due to the rapid deflection along the first direction.

The rotation shown in part II causes a rotation effective deflection direction of the first beam deflection unit 16 and thus a rotation of the irradiation direction on the body 24 , The rotation is effected by the image field rotator 34 ,

With the help of the second distraction and third distraction, the body can 24 be processed according to any irradiation pattern and / or according to any irradiation line. In other words, with the help of the second and third distraction, it can affect the body 24 striking electromagnetic radiation 22 and in particular the corresponding radiation spot to any position within an accessible processing field on the surface of the body 24 be guided. Depending on the position, the irradiation of the body 24 with the help of the rotation at least with a directional component parallel or perpendicular to a section of an irradiation pattern, in Part III and in Part IV two exemplary possible orientations of the irradiation direction and the feed direction to each other, ie the directions of the two superimposed scanning movements of the first beam deflecting unit 16 and the second beam deflecting unit 20 to each other, are shown.

For example, according to the deflection shown in part III, the feed is perpendicular to the irradiation direction. In other words, the irradiation direction is perpendicular to the feed direction at all times. For example, a broadening of the lines of the irradiation pattern by rapid distribution of the laser light transverse to the slow feed direction.

Alternatively, according to the deflection shown in Part IV, the feed is parallel to the irradiation direction. In other words, the irradiation direction is parallel to the feed direction at all times. For example, there is a multiple exposure of the worn polyline on the body 24 , Regardless of the type of deflection, the direction of irradiation may comprise a directional component resulting from the deflection in the second and / or third direction by means of the second beam deflection unit 20 results. This can be done during the irradiation of the body 24 be considered for example by a corresponding algorithm.

4 shows an embodiment of the image field rotator 34 which in this embodiment is a turning prism 36 having. The turning prism 36 is about a rotation axis 38 rotatably mounted. In 4 is the electromagnetic radiation 32 . 18 shown as a spatially extended beam, wherein a beam axis of the beam is shown by dash-dot lines and wherein the radially outer edges of the beam are shown by solid lines. The one from the first distractor 30 passing electro-magnetic radiation 32 meets an entrance surface of the turning prism 36 and becomes within the turning prism 36 towards a base of the turning prism 36 distracted, with in 4 to simplify the representation of a neutral position of the first deflector 30 is assumed, in which the deflected electromagnetic radiation 32 is only turned in itself. With deflected electromagnetic radiation 32 This results in a more complex beam path in the image field rotator 34 , The deflected electromagnetic radiation 32 becomes from the base of the turning prism 36 to an exit surface of the turning prism 36 reflects and occurs at this as rotated electromagnetic radiation 18 from, wherein also the direction of the deflection is rotated.

The turning prism 36 is coupled to at least one adjusting means, not shown, for example mechanically coupled. The actuating means causes the control device in response to a drive signal 28 the rotation of the turning prism 36 , The rotation of the turning prism 36 causes a rotation of the effective deflection direction of the first beam deflection unit 16 and thus a rotation of the irradiation direction on the body 24 ,

5 shows an embodiment in which the image field rotator 34 has a mirror arrangement. The mirror assembly has a first mirror 40 , a second mirror 42 and a third mirror 44 on. The operation of the mirror assembly basically corresponds to the operation of the turning prism 36 , The deflected electromagnetic radiation 32 meets the first mirror 40 that deflected the electromagnetic radiation 32 towards the second mirror 42 reflected. The second mirror 42 reflects the deflected electromagnetic radiation 32 towards the third mirror 42 , This will cause the deflected electromagnetic radiation 32 turned. The third mirror 42 reflects the deflected and rotated electromagnetic radiation 18 towards the second beam deflection unit 20 , The mirror 40 . 42 . 44 the mirror assembly can be connected to each other via holding means, not shown. The mirror arrangement is according to the turning prism 36 around the axis of rotation 38 rotatably mounted.

The mirror arrangement is mechanically coupled to at least one adjusting means, not shown, for example. The actuating means causes the control device in response to a drive signal 28 a rotation of the mirror assembly. Alternatively or additionally, one or more of the mirrors may be used 40 . 42 . 44 be mechanically coupled with one or more corresponding adjusting means, whereby the or the corresponding mirror 40 . 42 . 44 individually controllable. The rotation of the mirror assembly causes rotation of the effective deflection direction and thus the direction of irradiation on the body 24 , As an alternative to the mirror arrangement shown, for example, an image field rotator may be provided with a further mirror arrangement, for example with a polygon mirror, as is known from the prior art.

6 shows a plan view of an embodiment of the body 24 which is a workpiece to be machined in this embodiment. On the surface of the workpiece is a predetermined irradiation pattern 50 shown. The radiation pattern 50 can also be referred to as a processing pattern in this context. The prescribed irradiation pattern 50 is for example rectangular and / or a rectangular polygon. The prescribed irradiation pattern 50 has, for example, a first and a second page 52 . 54 on, which are parallel to each other, and a third and a fourth page 56 . 58 , which are also formed parallel to each other. The first and the second page 52 . 54 are perpendicular to the third and the fourth page 56 . 58 , Alternatively or additionally, the irradiation pattern 50 any polygon and / or curved or curved lines, such as a lettering or a picture, have.

In 6 the solid arrows are representative of a first feed direction 61 and a second feed direction 63 along which the machining pattern 50 leave and / or can be irradiated. For example, the feed takes place in the first feed direction 61 by a deflection of the rotated electro-magnetic radiation 18 along the second direction and the feed in the second direction 63 takes place by a deflection of the rotated electro-magnetic radiation 18 along the third direction. By superimposing the first and the second feed direction 61 . 63 An actual resulting feed direction can be specified.

In 6 the dashed arrows are representative of a maximum deflection of the rapid movement of the radiation spots on the workpiece, wherein the irradiation direction according to the deflection IIIb from 3 parallel to the feed direction along the machining pattern 50 he follows. For example, takes place from the ends of the fourth page 58 of the irradiation pattern 50 spaced a relatively large deflection 60 the on the body 24 striking electro-magnetic radiation 22 and at the ends of the fourth page 58 There is a relatively small distraction 62 the on the body 24 meeting electromagnetic radiation 22 , In this case, the irradiation direction is in each case exclusively parallel to the second feed direction for simplifying the representation 63 , This can help, for example, a transition from the fourth page 58 to the second page 54 to train precisely. During the transition, the direction of irradiation can then be adapted, for example so that it is still parallel to the current feed direction.

The different sized deflections can be achieved, for example, by setting different sized first angular ranges. For example, the relatively large deflection can be achieved by a relatively large first angular range and the relatively small deflection can be achieved by a relatively small first angular range.

An irradiation intensity and / or an irradiation order with which the irradiation pattern 50 can be irradiated, for example, depending on the irradiation pattern 50 to get voted. For example, first all sections of the irradiation pattern 50 , which are formed parallel to each other, are irradiated successively. For example, first the first page 52 and then the second page 54 be irradiated. Subsequently, a rotation of the irradiation direction can take place and then, for example, the third page 56 and then the fourth page 58 to be edited.

7 shows a flowchart of an embodiment of a method for irradiating a body, for example, to irradiate the body 24 ,

In a step S2, the electromagnetic radiation 14 generated, for example by means of the radiation source 12 , For example, the electromagnetic radiation 14 be generated as a pulsed electromagnetic radiation, for example as a pulsed laser beam. A laser pulse frequency (pulse rate) may, for example, be between 100 kHz and 100 MHz, for example between 1 MHz and 50 MHz. A pulse duration of the pulsed laser radiation may, for example, be less than 100 ps and / or for example between 0.5 and 10 ps or even less. Such short pulse durations enable, for example, a cold ablation during material processing. For example, a laser power can be in the range of 1 W to 5 kW, for example between 10 and 500 W, for example between 20 and 100 W for a micro-machining UKP laser, for example at frequencies between 20 kHz and 50 MHz, for example between 100 kHz and 5 MHz, with electronic magnetic radiation 14 different wavelengths is possible.

In a step S4, the electromagnetic radiation 14 deflected in the first direction, for example with the aid of the first deflector 30 , The electromagnetic radiation 14 is deflected along the first direction at a first angular velocity. The deflection along the first direction occurs within the first angular range. The deflection along the first direction may for example also be referred to as fast deflection or first deflection I. For example, the rapid deflection can take place so rapidly that the radiation points of successive laser pulses on the body 24 do not overlap or at least do not overlap too much, with a degree of overlap, for example, between 0 and 90%, between 30 and 70% or about 50% may be. The first angular velocity, for example, depending on the laser pulse frequency and a diameter of the radiation points of the body 24 meeting electromagnetic radiation 22 selected. The deflection along the first direction takes place, for example, oscillating, for example, triangular or sawtooth-shaped oscillating.

For example, with a radiation spot size of about 50 μm, an overlap of the radiation points of about 50% and a repetition rate of 3 MHz, a scan speed of about 75 m / s can be set. In addition, a number of optically separate resolvable positions on the body 24 A scanner can be set per time to be set. For acousto-optical deflectors, for example, pixel rates from 0 MHz to about 2 MHz are possible with or without jumps from radiation point to radiation point. In addition, with acousto-optical deflectors pixel rates over 10 MHz up to, for example, 50 MHz or more are possible. The technically feasible maximum possible pixel rate may, for example, depend on a desired amplitude, a desired wavelength, a desired pulse duration and / or a desired average radiation power.

In a step S6, the deflected electromagnetic radiation 32 rotated, for example using the image field rotator 34 , During rotation, the direction of irradiation is rotated. The rotation takes place as a function of a section of the irradiation pattern currently to be processed 50 and depending on the processing step to be performed. For example, if the body 24 along the first page 52 the rotation can be made so that the irradiation direction is parallel to the currently processed portion of the irradiation pattern 50 , for example, the first page 52 , and / or the current feed direction. The radiation points of the individual laser pulses of the body 24 striking electro-magnetic radiation 22 then walk along the first page 52 several times back and forth, causing the body 24 along the first page 52 repeatedly exposed and cut.

For example, if the surface of the body 24 along the first page 52 provided with a predetermined surface structure and / or a wide line section to be incorporated, the rotation can be made so that the irradiation direction perpendicular to the currently processed portion of the irradiation pattern 50 , for example, the first page 52 , stands. The radiation spots of the laser pulses then travel perpendicular to the first side 52 several times over the first page 52 and back, causing in the surface of the workpiece 24 along the first page 52 the predetermined surface structure is introduced. At a transition from the first or second page 52 . 54 to the third or fourth page perpendicular thereto 56 . 58 The irradiation direction can then be rotated accordingly, for example by ninety degrees. If the irradiation pattern 50 has a curved or curved line, the irradiation direction can be rotated, for example, such that it is perpendicular or parallel to a tangent to the curved line at any time, for example.

In a step S8, the deflected and rotated electromagnetic radiation 18 deflected in the second or third direction. The electromagnetic radiation 14 is deflected along the second direction at a second angular velocity and along the third direction at a third angular velocity. For example, the maximum first angular velocity is greater than the second and / or third angular velocity. Thus, in step S4, a rapid deflection takes place and in step S8, a slow deflection takes place. The deflection along the second direction occurs within the second angular range and the deflection along the third direction occurs within the third angular range. The deflection along the second or third direction may also be referred to as slow deflection or second and third deflection. For example, the deflection along the second direction causes a deflection of the radiation spots on the body 24 in the X-direction and a deflection along the third direction causes a deflection of the radiation points on the body 24 in the Y direction. Wherein the X-axis and the Y-axis span an irradiation plane, for example parallel to a surface of the body 24 is.

With the help of the second or third distraction, the radiation point of the body 24 striking electro-magnetic radiation 22 to any position on the surface of the workpiece 24 be guided. Thus, via the second and the third deflection, a portion of the body to be irradiated can be irradiated 24 and an irradiation order according to the irradiation pattern 50 is processed, adjusted and via the rotation, the direction of irradiation, along which the radiation points of successive laser pulses on the body 24 to be elected. For example, at first all the mutually parallel sections of the irradiation pattern 50 be processed sequentially without rotating the direction of irradiation. Sections of the irradiation pattern 50 which require the rotation of the irradiation direction can then be subsequently processed. Such a method may help to reduce or optimize the overall time required to process a set of irradiation patterns.

In a step S10, the body becomes 24 with the help of the on the body 24 meeting electromagnetic radiation 22 processed. The generation of the laser pulses and in particular their timing and the deflection and / or rotation of the electromagnetic radiation may be coordinated. For example, the deflection and / or rotation may be adjusted to the timing of the laser pulse events, or the timing of the laser pulse events may be adapted to the deflection and / or rotation. This allows the individual radiation points pinpoint relative to the body 24 and / or relative to each other on the body 24 to position. In particular, individual target positions on the body can be irradiated with pinpoint accuracy. For this purpose, for example, the laser pulses can be detected, controlled and / or regulated.

Furthermore, when processing the method additionally focusing on the body 24 striking electro-magnetic radiation 22 on or in the body 24 respectively. In other words, a focal point of the electromagnetic radiation may be perpendicular to a surface of the body 24 be moved. For example, the focal point may be translated parallel to a Z axis that is perpendicular to the X and Y axes. This can, for example, the surface of the body 24 even if it is irregular and / or has steps or plateaus. Alternatively, for example, a targeted in the body 24 lying area are irradiated. This can be advantageous, for example, in the field of microscopy. Furthermore, a different exposure dose can be set by focusing differently.

Further, when operating the method, a deviation of the orientation of the axes around which the electromagnetic radiation 14 . 32 . 18 deflected or rotated when distracted and / or rotated, be compensated. The deviations of the alignment of the axes may, for example, lead to a deterioration of the precision of the irradiation of the body 24 to lead. For example, the rotation axis of the image field rotator 34 lie outside the plane, that of the different beam paths of the deflected electro-magnetic radiation 32 in front of the image field turner 34 is spanned. The rotation of the image field rotator 34 can then be a rotation of the direction of irradiation on the body 24 to cause a point that is not on the radiation pattern 50 but next to it, for example, next to a line element of the irradiation pattern 50 , These and similar deviations can be measured, for example empirically, for example by test patterns and in parameters for calculating correction values, for example, depending on the position of the image field rotator 34 to be transferred. The correction values can then be used in carrying out the method for irradiating the body 24 be taken into account in order to compensate for the previously resulting in the optical system deviation.

The radiation pattern 50 may have areas to be exposed and those to be less exposed. Depending on the section of the irradiation pattern currently being processed 50 An exposure dose may be adjusted and / or regulated. The exposure dose can be, for example, via an amplitude of the rapid deflection and / or an intensity of the electromagnetic radiation incident on the body 22 respectively. The intensity can, for example, via the radiation source 12 and / or an additional element and / or, if the first deflector 30 An acousto-optic deflector is over the first deflector 30 easily and quickly adjusted and / or adapted.

For example, when irradiated, crooked portions of the irradiation pattern 50 and a direction of irradiation directed tangentially thereto, the amplitude of the rapid deflection and / or the intensity of the radiation on the body 24 incident electro-magnetic radiation 22 be set depending on the local curvature of the section so that in the tangential direction to the section, a predeterminable maximum deviation of the irradiation dose.

For example, when irradiating angular or curved sections of the irradiation pattern 50 and a direction of irradiation oriented perpendicular thereto, for example for widening a line of the section of the irradiation pattern 50 the amplitude of the rapid distraction and / or the intensity of the on the body 24 incident electro-magnetic radiation 22 be adjusted depending on the local curvature or the corner of the section so that, for example, inside the curve or the corner, the irradiation dose is reduced, for example, to avoid overexposure.

In the same or similar way, the adaptation of the amplitude of the rapid deflection or the intensity of the on the body 24 incident electro-magnetic radiation 22 even with other special patterns 50 For example, caption patterns may be helpful in optimizing the irradiation strategy.

The invention is not limited to the specified embodiments. For example, the irradiation direction may be parallel or perpendicular to a section of the irradiation pattern to be processed 50 or to be set at any angle.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 102007012815 A1 [0012]
• US 2009/0045176 A1 [0013]
• US 6584218 B2 [0014]

Cited non-patent literature

• Yong-Seok, Eung GI Paek and Xiao Tang, Opt. Eng. "Experimental nonmechanical image rotation to 20 angles using an acousto-optic dove prism". 39 (11) 2909-2914 (Nov 2000) [0015]

Claims (16)

Device for deflecting electromagnetic radiation ( 14 ), comprising: - a first beam deflection unit ( 16 ) with a first deflector ( 30 ) for deflecting electromagnetic radiation ( 14 ) along a first direction and with an image field rotator ( 34 ) for rotating the deflected electro-magnetic radiation ( 32 ) by a predetermined angle of rotation, whereby the rotated electromagnetic radiation ( 18 ) is deflected in an effective deflection direction which is rotated with respect to the first direction; A second beam deflection unit ( 20 ) for deflecting the rotated electro-magnetic radiation ( 18 ) along a second direction and along a third direction, wherein at least one directional component of the second direction is perpendicular to the third direction. Device according to Claim 1, in which the first deflector ( 30 ) the electromagnetic radiation ( 14 ) deflects along the first direction in a predetermined first angular range and in which the second beam deflection unit ( 20 ) the rotated electromagnetic radiation ( 18 ) deflects along the second direction in a predetermined second angular range and along the third direction in a predetermined third angular range, the second and / or third angular ranges being greater than the first angular range. Device according to one of claims 1 or 2, in which the first deflector ( 30 ) the electromagnetic radiation ( 14 ) deflects along the first direction at a predetermined first angular velocity and at which the second beam deflection unit (14) 20 ) the rotated electromagnetic radiation ( 18 ) along the second direction at a predetermined second angular velocity and along the third direction at a predetermined third angular velocity, the second and third angular velocities being less than the first angular velocity. Device according to one of the preceding claims, wherein the image field rotator ( 34 ) a turning prism ( 36 ) having. Device according to one of the preceding claims, wherein the image field rotator ( 34 ) at least three mirrors ( 40 . 42 . 44 ) having. Device according to one of claims 2 to 5, wherein the first angular range is variably adjustable. Device according to one of the preceding claims, in which the first deflector ( 30 ) has at least one acousto-optical deflector, an electro-optical deflector or a mechanical deflector. Contraption ( 10 ) for irradiating a body ( 24 ) with electro-magnetic radiation ( 14 ), comprising: - a radiation source ( 12 ) for generating the electromagnetic radiation ( 14 ); - A device according to one of the preceding claims for deflecting the electromagnetic radiation ( 14 ) to the body ( 24 ). Method for deflecting electromagnetic radiation ( 14 ), in which - electromagnetic radiation ( 14 ) is deflected along a first direction, - the deflected electromagnetic radiation ( 32 ) is rotated by a predetermined angle of rotation, whereby the rotated electromagnetic radiation ( 18 ) is deflected in an effective deflection direction, which is rotated with respect to the first direction, - the rotated electromagnetic radiation ( 18 ) is deflected along a second direction and / or along a third direction. Method for irradiating a body ( 24 ) with electro-magnetic radiation ( 14 ), in which - before deflecting along the first direction, the electromagnetic radiation ( 14 ), - the electromagnetic radiation ( 14 ) is deflected and rotated by the method according to claim 9, - the rotated electromagnetic radiation ( 18 ) along the second direction and / or along the third direction to the body ( 24 ) is distracted. Method according to one of claims 9 or 10, in which the electromagnetic radiation ( 22 ) according to a predetermined irradiation pattern ( 50 ) over the body ( 24 ) and in which the rotation of the deflected electro-magnetic ( 32 ) Radiation as a function of the prescribed irradiation pattern ( 50 ) he follows. Method according to Claim 11, in which an irradiation order depends on a shape and / or extent of sections of the irradiation pattern ( 50 ) and in which the irradiation pattern ( 50 ) is irradiated according to the determined order of irradiation. Method according to one of Claims 11 or 12, in which a maximum deflection in the first direction depends on a section of the irradiation pattern currently to be irradiated ( 50 ) is selected. Method according to one of Claims 9 to 13, in which the electromagnetic radiation ( 14 ) is generated in pulses. Method according to Claim 14, in which the generation of the pulses and the deflection and / or rotation of the electromagnetic radiation ( 14 . 32 . 18 ) are coordinated. Method according to Claim 15, in which an irradiation intensity with which a section of the irradiation pattern ( 50 ) and / or a line width of the section is set by a distribution of the radiation dose, the radiation dose being adjusted by means of the deflection in the first direction and / or by varying the radiation intensity.

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