DE102011120328A1 - Ätzverfahren für Metall-Mischoxide - Google Patents

Ätzverfahren für Metall-Mischoxide Download PDF

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Publication number
DE102011120328A1
DE102011120328A1 DE201110120328 DE102011120328A DE102011120328A1 DE 102011120328 A1 DE102011120328 A1 DE 102011120328A1 DE 201110120328 DE201110120328 DE 201110120328 DE 102011120328 A DE102011120328 A DE 102011120328A DE 102011120328 A1 DE102011120328 A1 DE 102011120328A1
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DE
Germany
Prior art keywords
metal
etchant
mixed oxide
oxide
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE201110120328
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English (en)
Inventor
Dieter Weber
Róza Vöfély
Yuehua Chen
Ulrich Poppe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Forschungszentrum Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Juelich GmbH filed Critical Forschungszentrum Juelich GmbH
Priority to DE201110120328 priority Critical patent/DE102011120328A1/de
Publication of DE102011120328A1 publication Critical patent/DE102011120328A1/de
Withdrawn legal-status Critical Current

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