DE102007018140A1 - Method and system for the reproducible positioning of a target object in the effective volume of a laser radiation - Google Patents

Method and system for the reproducible positioning of a target object in the effective volume of a laser radiation

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Publication number
DE102007018140A1
DE102007018140A1 DE102007018140A DE102007018140A DE102007018140A1 DE 102007018140 A1 DE102007018140 A1 DE 102007018140A1 DE 102007018140 A DE102007018140 A DE 102007018140A DE 102007018140 A DE102007018140 A DE 102007018140A DE 102007018140 A1 DE102007018140 A1 DE 102007018140A1
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Germany
Prior art keywords
image
optics
particular
target object
effective volume
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102007018140A
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German (de)
Inventor
Ralph Dipl.-Phys. Jung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HEINRICH-HEINE-UNIVERSITAET DUESSELDORF
DUESSELDORF H HEINE, University of
Heinrich-Heine-Universitat Duesseldorf
Original Assignee
HEINRICH-HEINE-UNIVERSITAET DUESSELDORF
DUESSELDORF H HEINE, University of
Heinrich-Heine-Universitat Duesseldorf
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by HEINRICH-HEINE-UNIVERSITAET DUESSELDORF, DUESSELDORF H HEINE, University of, Heinrich-Heine-Universitat Duesseldorf filed Critical HEINRICH-HEINE-UNIVERSITAET DUESSELDORF
Priority to DE102007018140A priority Critical patent/DE102007018140A1/en
Publication of DE102007018140A1 publication Critical patent/DE102007018140A1/en
Application status is Withdrawn legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073Shaping the laser spot

Abstract

The invention relates to a method and a system for the reproducible positioning of a target object in the effective volume of a first, in particular pulsed laser radiation, which is highly reflective for the wavelength of the first laser radiation and transmissive for at least one second wavelength, in particular second laser radiation. can be focused in the effective volume with a focusing optics, characterized in that at the desired position (P) of a target object (4) to be positioned in the effective volume (3) the image of a mask element (5) through the deflection optics (1) with a second particular Laser radiation is projected and determines the degree of defocusing of the image on the target object to be positioned (4), in particular minimized.

Description

  • The The invention relates to a method for reproducible positioning a target object into the effective volume of a first laser radiation, in particular a pulsed laser radiation, which after a deflection optics, which is highly reflective for the wavelength the first laser radiation and transmissive for at least a second laser radiation, can be focused by means of a focusing optics in the effective volume. The Invention further relates to a system having the same features, in particular for carrying out the Process.
  • The invention is based on the fact that it is known in the art with laser pulses, in particular high-intensity laser pulses with powers of terawatts (10 12 watts) or more, to illuminate target objects, the so-called targets, and thus to produce physically desired processes, which are largely dependent on depend on the achieved light intensity in the focus.
  • Thus, it is known that, for example, from light intensities of 10 18 watts per square centimeter, the running processes are highly nonlinear, resulting in a variety of novel physical effects. Examples are the acceleration of electrons to several 100 million electron volts and the acceleration of protons to several 10 million electron volts on an acceleration distance of only a few microns. Likewise, in some cases very strongly directed particle beams with these properties can be generated in an extremely short time, for example less than 10 picoseconds (10 -12 seconds), e.g. B. for medical applications, such as in the radiation therapy of cancer or the production of short-lived radiopharmaceuticals, are of interest.
  • It It is also possible to use ultrashort coherent X-ray pulses with the aid of lasers generate, in addition to an application in medicine, for example also in microchip production, d. H. for lithographic processes, of extremely large Interest are.
  • All essential for the above-described or other desired effects is an accurate one Focusing the laser beam or the laser pulse on the target object or the target. This is usually the bundling the beam with mirror optics of the shortest possible focal length instead of Lenses made to the intensity in the focal spot on the material of the target object, which is used to produce particles or X-rays should be used to maximize, as well as an extension the pulse duration by dispersive effects when passing through the to avoid optical material.
  • in principle is due to the very strong focus of the highest intensity area only in reached a very small effective volume, allowing for a maximum Efficiency of the distance between the focusing optics and the surface of the Target object highest exactly, usually must be adjusted to a few microns accurate.
  • This is all the more problematic, since used focusing optics in these high-intensity pulses can be formed by focusing mirror, in particular parabolic focusing mirrors that have very high masses of several 10 kilos, whereas the targets are typically only a few microns in size form, which consist for example of metal or plastic films.
  • Problematic is it there that a misadjustment of the distance between these Objects squared in a loss of light intensity.
  • Around To prevent this problem, it is known in the art, that permanent lights of the amplifier medium of a used Lasers, the so-called reinforced spontaneous emission or English Amplified Spontaneous Emission, ASE, on the surface focus on a target object and with the help of powerful telescopes to observe. There then takes place an adjustment of the distance between the focusing optics, ie in particular a parabolic concave mirror and the target object until the experimenter has gained the impression to have approached an optimal position. This procedure will for each single laser pulse, for generating the aforementioned particles or X-rays should be used.
  • apparent It is that the above procedure is extremely tedious and inaccurate is because it is personal Impression of the experimenter turns off and beyond that non-destructive expires since already on sensitive targets the focused spontaneous Emission of the non-Q-switched Lasermediums can reach such a high intensity that a sensitive target object, especially plastics o. Ä., Even already affected by this radiation or even destroyed becomes. For High yield production applications are therefore known Procedure unsuitable.
  • The object of the invention is to provide a method of the aforementioned generic type and a system with which a reproducible positioning of a target object can be achieved, in particular to achieve high yields or repetition rates and in particular a shot to shot reproducibility. It is white terhin object of the invention to provide a method and an apparatus with which the focusing of the laser beam on a target object quickly, accurately, quantifiable and beyond even in further delimitation from the prior art nondestructive or without influencing the target object is feasible.
  • The Task is according to the invention solved by that to the desired Position of a target object to be positioned in the effective volume of the first, in particular pulsed laser radiation, the image of a mask element through the deflection optics, in particular with a second laser radiation, is projected and the degree of defocusing the image of the Mask element determined on the target object to be positioned, is minimized in particular.
  • essential The core idea of the invention is to be seen in that to that Position within the effective volume of a focused laser beam, the for the to be performed Experiment is considered optimal, projecting the image of a mask element is positioned so that at one in the focus environment of the laser beam Target object of this target object serves as a projection surface for the image and thus based on the sharpness or the degree of defocusing of the image of the mask element on the target object can be determined whether the target object at the optimal Position is positioned in the effective volume or whether there is still a shift in the Target object or a change the distance between the focusing optics and the target object requires this to set the optimum position.
  • So can be a target object first (roughly) positioned within the effective volume and then in his Position can be optimized, due to the determination of the degree the defocusing and the usual very short focal lengths of the focusing optics are carried out to a highly accurate extent can. It may be provided, the image of the mask object to observe by an appropriate observation optics, so determine the degree of defocusing, both manually as Also particularly preferred can be made automated.
  • It is a particular advantage of the method according to the invention, that the projection of the image of the mask element on the target object, which while the adjustment serves as a projection surface, is made through the deflection optics, the incident an Laser beam or laser pulse directed to the aforementioned focusing optics. Thus, by the method according to the invention or with a inventive system the adjustment of the beam path for focusing the first, in particular pulsed laser radiation completely untouched, Thus, no further influence by the implementation of the inventive method makes noticeable in the experiment setup.
  • Around to let the projection through the deflection optics take place it is as mentioned above provided that this deflection optics for those used in the experiment first, in particular pulsed laser radiation is highly reflective, however permeable for one second wavelength, the for the Illustration of the mask element is used, especially for a second Laser radiation with a different laser wavelength.
  • Accordingly can for such Deflection optics are used for example dichroic mirrors, having the corresponding dielectric coatings. Farther are in today's high power lasers, which are usually radiation in the infrared wavelength range emit, the mirror used highly reflective for this Wavelength, however, usually transitive for the visible wavelength range, so that here the proposed method or system no adjustment or change already existing optics required.
  • at The above-mentioned method or system can thus be provided be that to avoid any interference with the beam path of the to be focused first laser radiation, the focusing optics for the first Laser radiation forms part of the imaging optics for the mask element. This For example, can be made such that the imaging optics for the mask element is done by two focusing optics, with one of the optics for the Illustration in the beam path in front of the deflection optics of the first, in particular pulsed laser radiation is arranged and the second focusing Optics formed by the focusing optics of the first laser radiation is, so in this sense, the imaging optics for the mask element mapping to the deflection optics in the beam path of the first, in particular pulsed Laser radiation is arranged around.
  • In a further embodiment of the invention, it may be provided that the image of the mask element generated on the target object to be positioned, ie the temporary projection surface, is again imaged, namely here opposite the original imaging direction through the deflection optics into a second image plane, so that it is according to the invention may be provided, in this embodiment, not to determine the degree of defocusing directly on the target object, but in the second image plane and in particular to minimize. Thus, in particular by the further mapping, an enlargement of the image of the mask element located on the target object can be made so as to achieve yet another simplified adjustment. This also makes it easier to automate the method since it is possible to position a detector, in particular a camera, in the second image plane and thus to enable an apparatus-supported examination of the degree of defocusing.
  • There again with this second figure, however, this figure here in the backward direction through the deflection optics for the first laser radiation takes place, remains for this imaging measure the Beam path of the first laser radiation completely untouched. Here too is preferably the focusing optics for the first laser radiation as part of the imaging optics for used this second figure, especially as one of two focusing optics.
  • According to the invention it can be provided to assess the degree of defocusing, the contrast of the image either on the serving as a projection surface Target object or preferably in the second image plane and thus based of the detector signal, in particular on the basis of a camera image.
  • So will only become the target when the contrast is maximized its optimal position in the effective volume, in particular focus of the first Laser beam have reached. It may be provided for this purpose that from the detector signal, in particular thus from the camera image a contrast function is formed and evaluated, in particular based on the gradient of the contrast function. So can a shift of the target object and thus focusing or defocusing depending on the direction of displacement a clear maximum in the amount of the gradient, for example may be to position the target object where exactly the maximum is reached.
  • Based this consideration There is thus the possibility to build an electronic control system, which the aforementioned Evaluates detector signals and in particular formed gradients and thus an automatic positioning device for modification of the distance between the focusing object and the target object. For example, an iteration process can also automatically take place the optimal position of the target object can be found in the effective volume, especially considering the modulation transfer function of the entire imaging system.
  • For the realization the first image of the mask element on the target object and thus also for the optionally used second figure in a second Image level may be provided, the mask element with a second To illuminate laser radiation while the transmitted light of the mask element to divert by means of a beam splitter and so the mask through the Deflection optics of the first laser radiation through to the desired position Imagine the effective volume, as mentioned above, the Imaging optics from two focusing optics and here in particular the focusing optics of the first laser radiation as one of these to train both optics.
  • By the use of a beam splitter for deflecting the light passing through the mask can thereby be effected that in the optionally provided according to the invention second figure in the second image plane this more illustration in transmission can be done by this beam splitter. So will ensures that the image in the second image plane is not on the Mask itself back, but the second image plane of the object plane of the mask element is disconnected.
  • in this connection it is felt to be particularly advantageous if the mask element by means of collimated laser radiation, possibly after a previous one Widening through a telescope is illuminated, as is the possibility There is an afocal mapping of the mask element on the target object achieve, d. h., it is avoided that to illuminate the Masking element used laser beam also focused on the target is, so that thereby known from the prior art Problems influencing or destroying the target object focused adjustment radiation is completely avoided.
  • So Accordingly, it may be in a preferred embodiment for the implementation of Procedure and realization of the system be provided that the two focusing optics of the imaging optics with the mask element and imaging the mask element in the effective volume into a 4F optic configuration forms, especially in the mask element and the image of Mask element in the effective volume are in mutually conjugate planes.
  • In Similarly, it can thus be provided that the two focusing optics of the imaging optics together with the imaging of the Mask element in the effective volume and the image of the mask image in the second image plane, thus with the detector in the second image plane can be arranged, a 4F optical configuration forms, in particular in the image of the mask object in the effective volume and the detector are in planes conjugate to each other.
  • As mentioned above, just by the realization of the 4F optical configuration for gege if appropriate both images, but at least for the first image of the mask element on the target object, an afocal image in the effective volume are achieved by the telecentric imaging system thus formed, wherein the second laser beam both at the location of the mask and at the location of the image of the mask element on the target object is expanded, so is not focused and thus any destruction or interference risks are eliminated.
  • For the inventive method or system, it is further advantageous that a positioning the mask image in the effective volume to a desired position, ie in particular the optimal position of the focus of the first laser radiation a shift of the mask can be achieved, causing the Object level of the mask in the imaging system changes and thus the image plane is shifted in the effective volume.
  • at another image in said second image plane, in the a detector can be arranged, it can then be provided in addition be that same with the displacement of the mask as well the detector distance changed what can be, as the imaging system for both pictures is identical can be done with the same displacement. This can be, for example by an automatic coupling of two displacement units both the mask element as well as the detector done.
  • For a basic adjustment a possible detector, such as a camera in the second image plane, it can be provided in addition, behind the aforementioned beam splitter within the two imaging systems and the beam path in front of the deflection optics for the first laser beam a Arrange autocorrelation optics, with the mask image directly is reproducible in the second image plane, so that by such a Correlation optics first the optimal distance of the detector to the beam splitter and thus the optimal position in the second image plane can be adjusted. Again, this can be fully automatic according to the invention respectively.
  • The aforementioned method or the system used in the same way can therefore be used particularly advantageously according to the invention for positioning a target object, such as metal or plastic foils in the focus of a laser pulse, for example a pico (10 -12 ) or femto (10 ). 15 ) seconds high-energy laser pulse, which can achieve more than 10 18 watts per square centimeter in the focus area.
  • There the method and the system regarding the Beam path, the for the deflection and focusing of the laser pulse is provided, not completely invasive, there are no changed experimental conditions and a system for implementation of the method can thus be complete externally coupled to this without influencing the experiment become.
  • It arise in particular automatically and in particular objective options for assessing an optimal adjustment position of the target object in the effective volume. It can also be considered that the Focus on a high-intensity laser pulse, possibly outside the geometric focal length used the focusing concave mirror, z. B. due to notable non-linear properties, because the mask image at each desired Position can also be set differently from the geometric focus can.
  • So especially after finding the optimal position once of a target object (target) within the effective volume, the mask image in exactly this optimal position can be placed and as an adjustment aid for future positioning of target objects, in particular as part of an automated procedure, be used.
  • One embodiment The invention is explained in the following figure.
  • The single FIGURE shows a first beam path in this embodiment of the method according to the invention I , which with reference to the representation coming from above via a deflection mirror 1 is deflected by about 90 degrees to the right. At the mirror 1 it may be a dichroic mirror that is highly reflective for the wavelength of laser used in the experiment and transmissive for an alignment laser beam. Instead of a Justagelasers can also be used in general, any other. Also not incoherent light source.
  • In the beam path 1 , followed by the deflecting a focusing element 2 , which is shown here symbolically and is usually formed in practice as a parabolic concave mirror. These concave mirrors can be specially designed, in particular in ultrashort pulses in the femtosecond range, in order to avoid temporal pulse extension due to dispersion effects of the dielectric coatings.
  • It is clear here that by the focusing element 2 in particular a parabolic concave mirror in the beam path 1 a focus 3 is generated around the center of which an effective volume is formed, in which to perform an experiment, a target object 4 is to be positioned accurately.
  • In order to mark this position P, it is provided according to the invention, the image of a mask element 5 by an imaging optics, by a focusing optics 6 , For example, a first lens or a first concave mirror, and the focusing optics 2 is formed.
  • So it is provided here, the mask element 5 by a telescopically arranged by two particular focusing elements 7 and 8th , in particular lenses, to illuminate with a laser beam of a second wavelength, for which the deflection mirror 1 is transmissive. Through the focusing elements 7 and 8th The laser beam is both expanded and collimated, so that between mask element 5 , focusing element 6 , focusing element 2 and the image of the mask element 3 a 4F configuration and thus a telecentric afocal image results, which means that an image of the mask 5 arises at the position P, while the collimation, ie, the parallel beam path of the laser beam of the second wavelength is maintained and thereby no destructive increase in intensity of the laser beam of the second wavelength is carried out on the target.
  • Here it is provided that of the mask element 5 outgoing light through a second beam path II Imaged by a beam splitter 9 is deflected and after passing through the deflection 1 with the beam path I of the first laser beam coincides.
  • This results from the beam splitter 9 both an excellent adjustment of the beam path II as well as the possibility of a backward image of the projected mask image of a target object inserted into the effective volume 4 in a second image plane B make in which a detector, such as a camera can be positioned.
  • In this second image, the light of the mask image backscattered by the target object passes through the beam splitter 9 so that the image does not fall back on itself and thus the second image can be used for evaluation by means of a detector. Here, for the second image, as well as for the first image, as the imaging system, the focusing optics 6 and 2 used, with the focusing optics 2 with the focusing optics in the beam path 1 of the experimental laser beam.
  • It is clear here that by the construction of the adjustment system no interference with the beam path of the adjusted laser beam I is made.
  • Thus, an inventive adjustment system can also be used later on an existing experimental arrangement without having to make an intervention in the arrangement. Furthermore, it may be provided here, an autocorrelation optics 10 provided, which is not shown here and which is a part of the mask element 5 outgoing light, which through the beam splitter 9 has gone through, thrown back into itself, so that by the reflection at the beam splitter 9 an immediate mapping of the mask element into the image plane B can take place.
  • So can by this autocorrelation optics first for the implementation of the inventive method made an optimal adjustment of the detector in the image plane B. become. Sources of error due to misalignment of the detector within the Image plane B, focusing on an unsatisfactory positioning of the target object, can Thus, be avoided because it is first ensured that the adjustment aid system is optimally adjusted in itself.
  • Regarding all versions It should be noted that those mentioned in connection with an execution technical features not only used in the specific execution can be but also in the other versions. All disclosed technical Features of this invention description are essential to the invention be classified and combined with each other or in isolation used.

Claims (15)

  1. Method for the reproducible positioning of a target object in the effective volume of a first, in particular pulsed laser radiation, which can be focused into the effective volume by means of a focusing optic according to a deflecting optics which is highly reflective for the wavelength of the first laser radiation and transmissive for at least one second wavelength is, characterized in that at the desired position (P) of a target object to be positioned ( 4 ) in the effective volume ( 3 ) the image of a mask element ( 5 ) by the deflection optics ( 1 ) is projected through with a second, in particular laser radiation and the degree of defocusing of the image on the target object to be positioned ( 4 ), in particular minimized.
  2. Method according to claim 1, characterized in that the target object to be positioned ( 4 ) generated image of the mask element ( 5 ) by the deflection optics ( 1 ) is imaged through into a second image plane (B) in which the degree of defocusing is determined, in particular minimized.
  3. Method according to one of the preceding claims, characterized in that the focusing optics ( 2 ) for the first laser radiation part of the imaging optics ( 6 . 2 ) for the mask element ( 5 ), in particular such that the imaging optics ( 6 . 2 ) around the deflection optics ( 1 ) is arranged around.
  4. Method according to one of the preceding claims, characterized in that a mask element ( 5 ) with a second laser radiation, in particular after a widening ( 7 ) and collimation ( 8th ) and the transmitted light of the mask element ( 5 ) by means of a beam splitter ( 9 ) and the mask element ( 5 ) by the deflection optics ( 1 ) of the first laser radiation to the desired position (P) in the effective volume ( 3 ) is imaged with an imaging optics ( 6 . 2 ) of two focusing optics ( 6 . 2 ) around the deflection optics ( 1 ) are arranged.
  5. A method according to claim 4, characterized in that the image of the mask image from the effective volume ( 3 ) out into the second image plane (B) through the beam splitter ( 1 ) he follows.
  6. Method according to one of the preceding claims 4 or 5, characterized in that in the second image plane (B) a detector, in particular a camera is positioned, in particular their distance from the beam splitter ( 9 ) the distance of the mask element ( 5 ) to the beam splitter ( 1 ) corresponds.
  7. Method according to claim 6, characterized in that an automatic positioning of a target object ( 4 ) in the effective volume ( 3 ) or the focusing optics ( 2 ) takes place by evaluation of the detector signal and dependent control of a positioning mechanism.
  8. Method according to claim 6 or 7, characterized that from the detector signal, the gradient of a contrast function is formed and evaluated.
  9. Method according to one of the preceding claims 7 to 8, characterized in that automatically the position (P) of the target object ( 4 ) in the effective volume ( 3 ) is iterated, in particular taking into account the modulation transfer function of the imaging system ( 6 . 2 ).
  10. Method according to one of the preceding claims, characterized in that the two focusing optics ( 6 . 2 ) of the imaging optics ( 6 . 2 ) together with the mask element ( 5 ) and the image of the mask element ( 5 ) in the effective volume ( 3 ) form a 4f optic configuration.
  11. Method according to one of the preceding claims, characterized in that the two focusing optics ( 6 . 2 ) of the imaging optics ( 6 . 2 ) together with the image of the mask element ( 5 ) in the effective volume ( 3 ) and the image of the mask image ( 5 ) in the second image plane (B) form a 4f optical configuration.
  12. Method according to one of the preceding claims, characterized in that a positioning of the mask image in the effective volume ( 3 ) to a desired position (P) is effected by a displacement of the mask ( 5 ), in particular with a change in the detector spacing.
  13. Method according to one of the preceding claims, characterized in that behind the beam splitter ( 9 ) an autocorrelation optics is arranged, by means of which the mask image can be imaged directly into the second image plane (B), in particular for an automatic calibration of the detector.
  14. Method according to one of the preceding claims, characterized in that it is used for positioning a target object ( 4 ) in focus ( 3 ) a laser pulse with a power of more than one, in particular more than one hundred tera watts.
  15. System for the reproducible positioning of a target object in the effective volume of a first, in particular pulsed laser radiation, which after a deflection optics, which is highly reflective for the wavelength of the first laser radiation and transmissive for at least a second laser radiation, can be focused by means of a focusing optics in the effective volume, characterized in that the desired position (P) of a target object to be positioned (P) 4 ) in the effective volume ( 3 ) the image of a mask element ( 5 ) by the deflection optics ( 1 ) is projected with a second laser radiation and the degree of defocusing of the image on the target object to be positioned ( 4 ) determinable, in particular for the automatic positioning of the target object ( 4 ) is minimizable.
DE102007018140A 2007-04-16 2007-04-16 Method and system for the reproducible positioning of a target object in the effective volume of a laser radiation Withdrawn DE102007018140A1 (en)

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PCT/EP2008/002956 WO2008125327A1 (en) 2007-04-16 2008-04-14 Method and system for the reproducible positioning of a target object in the effective volume of a laser beam

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000021475A1 (en) * 1998-10-14 2000-04-20 Irvision, Inc. Laser system with projected reference pattern
DE10250012A1 (en) * 2002-10-25 2004-05-13 Universität Kassel Plasma microscopy with ultra-short laser pulses
US20050191771A1 (en) * 2004-03-01 2005-09-01 Ming Li Ultrafast laser direct writing method for modifying existing microstructures on a submicron scale
WO2006014595A1 (en) * 2004-07-08 2006-02-09 Coherent, Inc. Method and apparatus for maintaining focus and magnification of a projected image
US20060093265A1 (en) * 2004-10-29 2006-05-04 Matsushita Electric Industrial Co., Ltd. Ultrafast laser machining system and method for forming diffractive structures in optical fibers

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6099522A (en) * 1989-02-06 2000-08-08 Visx Inc. Automated laser workstation for high precision surgical and industrial interventions
JP3209641B2 (en) * 1994-06-02 2001-09-17 三菱電機株式会社 Optical processing apparatus and method
US6621060B1 (en) * 2002-03-29 2003-09-16 Photonics Research Ontario Autofocus feedback positioning system for laser processing
JP2006040949A (en) * 2004-07-22 2006-02-09 Advanced Lcd Technologies Development Center Co Ltd Laser crystallization device and laser crystallization method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000021475A1 (en) * 1998-10-14 2000-04-20 Irvision, Inc. Laser system with projected reference pattern
DE10250012A1 (en) * 2002-10-25 2004-05-13 Universität Kassel Plasma microscopy with ultra-short laser pulses
US20050191771A1 (en) * 2004-03-01 2005-09-01 Ming Li Ultrafast laser direct writing method for modifying existing microstructures on a submicron scale
WO2006014595A1 (en) * 2004-07-08 2006-02-09 Coherent, Inc. Method and apparatus for maintaining focus and magnification of a projected image
US20060093265A1 (en) * 2004-10-29 2006-05-04 Matsushita Electric Industrial Co., Ltd. Ultrafast laser machining system and method for forming diffractive structures in optical fibers

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