DE102005054833A1 - Method and device for characterizing a sample by means of double-beam laser interferometry - Google Patents

Method and device for characterizing a sample by means of double-beam laser interferometry Download PDF

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Publication number
DE102005054833A1
DE102005054833A1 DE200510054833 DE102005054833A DE102005054833A1 DE 102005054833 A1 DE102005054833 A1 DE 102005054833A1 DE 200510054833 DE200510054833 DE 200510054833 DE 102005054833 A DE102005054833 A DE 102005054833A DE 102005054833 A1 DE102005054833 A1 DE 102005054833A1
Authority
DE
Germany
Prior art keywords
sample
double
beam laser
characterizing
laser interferometry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE200510054833
Other languages
German (de)
Inventor
Thorsten Schmitz-Kempen
Bernd Reichenberg
Klaus Prume
Stephan Tiedke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AIXACCT SYSTEMS GmbH
Original Assignee
AIXACCT SYSTEMS GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AIXACCT SYSTEMS GmbH filed Critical AIXACCT SYSTEMS GmbH
Priority to DE200510054833 priority Critical patent/DE102005054833A1/en
Priority to PCT/EP2006/068501 priority patent/WO2007057414A1/en
Publication of DE102005054833A1 publication Critical patent/DE102005054833A1/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/22—Measuring piezoelectric properties

Abstract

Die Erfindung betrifft ein Verfahren und eine Vorrichtung für die Charakterisierung einer Probe mittels eines Doppelstrahl-Laserinterferometers. Als Probe wird beispielsweise eine dünne piezoelektrische Schicht untersucht, die auf einem Wafer, also auf einer kreisrunden dünnen, selbsttragenden Scheibe, aufgebracht ist.The invention relates to a method and a device for the characterization of a sample by means of a double-beam laser interferometer. As a sample, for example, a thin piezoelectric layer is examined, which is applied to a wafer, ie on a circular thin, self-supporting disc.

DE200510054833 2005-11-15 2005-11-15 Method and device for characterizing a sample by means of double-beam laser interferometry Withdrawn DE102005054833A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE200510054833 DE102005054833A1 (en) 2005-11-15 2005-11-15 Method and device for characterizing a sample by means of double-beam laser interferometry
PCT/EP2006/068501 WO2007057414A1 (en) 2005-11-15 2006-11-15 Method and device for characterizing a sample by means of double-beam laser interferometry

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200510054833 DE102005054833A1 (en) 2005-11-15 2005-11-15 Method and device for characterizing a sample by means of double-beam laser interferometry

Publications (1)

Publication Number Publication Date
DE102005054833A1 true DE102005054833A1 (en) 2007-05-16

Family

ID=37810004

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200510054833 Withdrawn DE102005054833A1 (en) 2005-11-15 2005-11-15 Method and device for characterizing a sample by means of double-beam laser interferometry

Country Status (2)

Country Link
DE (1) DE102005054833A1 (en)
WO (1) WO2007057414A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114034942B (en) * 2021-11-10 2022-11-15 山东大学 High-flux measurement method for piezoelectric coefficient of piezoelectric film

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6690473B1 (en) * 1999-02-01 2004-02-10 Sensys Instruments Corporation Integrated surface metrology

Also Published As

Publication number Publication date
WO2007057414A1 (en) 2007-05-24

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Legal Events

Date Code Title Description
R012 Request for examination validly filed

Effective date: 20120914

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20140603