DE102005053651A1 - Mikrolithographische Projektionsbelichtungsanlage sowie Verfahren zur Herstellung mikrostrukturierter Bauelemente - Google Patents
Mikrolithographische Projektionsbelichtungsanlage sowie Verfahren zur Herstellung mikrostrukturierter Bauelemente Download PDFInfo
- Publication number
- DE102005053651A1 DE102005053651A1 DE102005053651A DE102005053651A DE102005053651A1 DE 102005053651 A1 DE102005053651 A1 DE 102005053651A1 DE 102005053651 A DE102005053651 A DE 102005053651A DE 102005053651 A DE102005053651 A DE 102005053651A DE 102005053651 A1 DE102005053651 A1 DE 102005053651A1
- Authority
- DE
- Germany
- Prior art keywords
- image
- independent
- image plane
- micro
- distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70433—Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors
- G03F7/70441—Optical proximity correction [OPC]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/18—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70083—Non-homogeneous intensity distribution in the mask plane
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/70391—Addressable array sources specially adapted to produce patterns, e.g. addressable LED arrays
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70566—Polarisation control
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70941—Stray fields and charges, e.g. stray light, scattered light, flare, transmission loss
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Epidemiology (AREA)
- Health & Medical Sciences (AREA)
- Public Health (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Bei einem Verfahren zur Herstellung mikrostrukturierter Bauelemente wird in einer mikrolithographischen Projektionsbelichtungsanlage (PEA) ein Muster (M) aus Strukturen (ST1 bis ST6) in eine Bildebene eines Projektionsobjektivs (PL) abgebildet. Erfindungsgemäß wird derart auf die Dosisverteilung von Projektionslicht in der Bildebene eingewirkt, daß das Abbild einer Struktur zumindest im wesentlichen unabhängig von der Topographie von Strukturen ist, die sich innerhalb eines die Struktur umgebenden Bereichs befinden.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005053651A DE102005053651A1 (de) | 2005-11-10 | 2005-11-10 | Mikrolithographische Projektionsbelichtungsanlage sowie Verfahren zur Herstellung mikrostrukturierter Bauelemente |
KR1020087010757A KR101369132B1 (ko) | 2005-11-10 | 2006-11-08 | 마이크로구조화된 구성요소들을 제조하기 위한 마이크로리소그래픽 투사 조명 시스템, 및 방법 |
PCT/IB2006/003878 WO2007066225A2 (de) | 2005-11-10 | 2006-11-08 | Mikrolithographische projektionsbelichtungsanlage sowie verfahren zur herstellung mikrostrukturierter bauelemente |
JP2008539538A JP2009516367A (ja) | 2005-11-10 | 2006-11-08 | 微細構造化部品を製造するためのマイクロリソグラフィ投影露光装置及び方法 |
US12/054,991 US20080204692A1 (en) | 2005-11-10 | 2008-03-25 | Microlithographic projection exposure apparatus and method for producing microstructured components |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005053651A DE102005053651A1 (de) | 2005-11-10 | 2005-11-10 | Mikrolithographische Projektionsbelichtungsanlage sowie Verfahren zur Herstellung mikrostrukturierter Bauelemente |
Publications (1)
Publication Number | Publication Date |
---|---|
DE102005053651A1 true DE102005053651A1 (de) | 2007-05-16 |
Family
ID=37982584
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102005053651A Withdrawn DE102005053651A1 (de) | 2005-11-10 | 2005-11-10 | Mikrolithographische Projektionsbelichtungsanlage sowie Verfahren zur Herstellung mikrostrukturierter Bauelemente |
Country Status (5)
Country | Link |
---|---|
US (1) | US20080204692A1 (de) |
JP (1) | JP2009516367A (de) |
KR (1) | KR101369132B1 (de) |
DE (1) | DE102005053651A1 (de) |
WO (1) | WO2007066225A2 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5438848B2 (ja) * | 2010-02-23 | 2014-03-12 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置及びデバイス製造方法 |
EP2369413B1 (de) | 2010-03-22 | 2021-04-07 | ASML Netherlands BV | Beleuchtungssystem und Lithographievorrichtung |
DE102013213545A1 (de) * | 2013-07-10 | 2015-01-15 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik für die Projektionslithografie |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2902172B2 (ja) * | 1991-09-04 | 1999-06-07 | キヤノン株式会社 | 露光装置 |
US5581324A (en) * | 1993-06-10 | 1996-12-03 | Nikon Corporation | Thermal distortion compensated projection exposure method and apparatus for manufacturing semiconductors |
JP3267414B2 (ja) * | 1993-11-11 | 2002-03-18 | キヤノン株式会社 | 走査型露光装置及び該走査型露光装置を用いるデバイス製造方法 |
JPH08250402A (ja) * | 1995-03-15 | 1996-09-27 | Nikon Corp | 走査型露光方法及び装置 |
JPH1027743A (ja) * | 1996-07-11 | 1998-01-27 | Canon Inc | 投影露光装置、デバイス製造方法及び収差補正光学系 |
US6628370B1 (en) * | 1996-11-25 | 2003-09-30 | Mccullough Andrew W. | Illumination system with spatially controllable partial coherence compensating for line width variances in a photolithographic system |
US6292255B1 (en) * | 1997-03-31 | 2001-09-18 | Svg Lithography Systems, Inc. | Dose correction for along scan linewidth variation |
US6235438B1 (en) * | 1997-10-07 | 2001-05-22 | Nikon Corporation | Projection exposure method and apparatus |
JP3817365B2 (ja) * | 1998-04-30 | 2006-09-06 | キヤノン株式会社 | 投影露光装置及びそれを用いたデバイスの製造方法 |
US6383719B1 (en) * | 1998-05-19 | 2002-05-07 | International Business Machines Corporation | Process for enhanced lithographic imaging |
US6295443B1 (en) * | 1998-11-30 | 2001-09-25 | Scott C Matthew | Automatic tuning AM transmitter |
US6346979B1 (en) * | 1999-03-17 | 2002-02-12 | International Business Machines Corporation | Process and apparatus to adjust exposure dose in lithography systems |
JP2001060546A (ja) * | 1999-08-20 | 2001-03-06 | Nikon Corp | 露光方法及び露光装置 |
JP3705038B2 (ja) * | 1999-09-22 | 2005-10-12 | コニカミノルタホールディングス株式会社 | カラー画像形成装置 |
DE10016176A1 (de) * | 2000-03-31 | 2001-10-04 | Zeiss Carl | Mikrolithographisches Beleuchtungssystem und Mikrolithographische Projektionsbelichtungsanlage damit |
US6704090B2 (en) * | 2000-05-11 | 2004-03-09 | Nikon Corporation | Exposure method and exposure apparatus |
US6509952B1 (en) * | 2000-05-23 | 2003-01-21 | Silicon Valley Group, Inc. | Method and system for selective linewidth optimization during a lithographic process |
JP2002156280A (ja) * | 2000-08-15 | 2002-05-31 | Nikon Corp | 照度計測装置、露光装置、及び露光方法 |
US6573975B2 (en) * | 2001-04-04 | 2003-06-03 | Pradeep K. Govil | DUV scanner linewidth control by mask error factor compensation |
DE10124803A1 (de) * | 2001-05-22 | 2002-11-28 | Zeiss Carl | Polarisator und Mikrolithographie-Projektionsanlage mit Polarisator |
DE10230652A1 (de) * | 2002-07-08 | 2004-01-29 | Carl Zeiss Smt Ag | Optische Vorrichtung mit einer Beleuchtungslichtquelle |
JP4328572B2 (ja) * | 2003-07-10 | 2009-09-09 | キヤノン株式会社 | 投影露光装置、投影露光装置に使用されるレチクル、投影露光方法及び半導体デバイス製造方法 |
US7408616B2 (en) * | 2003-09-26 | 2008-08-05 | Carl Zeiss Smt Ag | Microlithographic exposure method as well as a projection exposure system for carrying out the method |
WO2005040927A2 (en) * | 2003-10-18 | 2005-05-06 | Carl Zeiss Smt Ag | Device and method for illumination dose adjustments in microlithography |
JP4351928B2 (ja) * | 2004-02-23 | 2009-10-28 | 株式会社東芝 | マスクデータの補正方法、フォトマスクの製造方法及びマスクデータの補正プログラム |
US7199861B2 (en) * | 2004-06-01 | 2007-04-03 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7177010B2 (en) * | 2004-11-03 | 2007-02-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
-
2005
- 2005-11-10 DE DE102005053651A patent/DE102005053651A1/de not_active Withdrawn
-
2006
- 2006-11-08 WO PCT/IB2006/003878 patent/WO2007066225A2/de active Application Filing
- 2006-11-08 JP JP2008539538A patent/JP2009516367A/ja active Pending
- 2006-11-08 KR KR1020087010757A patent/KR101369132B1/ko active IP Right Grant
-
2008
- 2008-03-25 US US12/054,991 patent/US20080204692A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2007066225A3 (de) | 2007-10-25 |
US20080204692A1 (en) | 2008-08-28 |
JP2009516367A (ja) | 2009-04-16 |
WO2007066225A2 (de) | 2007-06-14 |
KR101369132B1 (ko) | 2014-03-04 |
KR20080066935A (ko) | 2008-07-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8127 | New person/name/address of the applicant |
Owner name: CARL ZEISS SMT GMBH, 73447 OBERKOCHEN, DE |
|
R005 | Application deemed withdrawn due to failure to request examination |
Effective date: 20121113 |