DD97977A5 - - Google Patents

Info

Publication number
DD97977A5
DD97977A5 DD164863A DD16486372A DD97977A5 DD 97977 A5 DD97977 A5 DD 97977A5 DD 164863 A DD164863 A DD 164863A DD 16486372 A DD16486372 A DD 16486372A DD 97977 A5 DD97977 A5 DD 97977A5
Authority
DD
German Democratic Republic
Application number
DD164863A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DD97977A5 publication Critical patent/DD97977A5/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/12Lenses electrostatic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DD164863A 1971-08-16 1972-08-04 DD97977A5 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17181571A 1971-08-16 1971-08-16

Publications (1)

Publication Number Publication Date
DD97977A5 true DD97977A5 (enrdf_load_stackoverflow) 1973-05-20

Family

ID=22625237

Family Applications (1)

Application Number Title Priority Date Filing Date
DD164863A DD97977A5 (enrdf_load_stackoverflow) 1971-08-16 1972-08-04

Country Status (4)

Country Link
JP (1) JPS568465B2 (enrdf_load_stackoverflow)
DD (1) DD97977A5 (enrdf_load_stackoverflow)
IT (1) IT960799B (enrdf_load_stackoverflow)
SE (1) SE377861B (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444552B2 (enrdf_load_stackoverflow) * 1974-09-20 1979-12-26
SE427738B (sv) * 1981-02-11 1983-05-02 Siporex Int Ab Forfarande vid bortforslande av i vatten uppslamningsbart material fran en yta, jemte anordning for anvendnig vid forfarandet
JPS58169855A (ja) * 1982-03-31 1983-10-06 Jeol Ltd イオン銃

Also Published As

Publication number Publication date
JPS4829368A (enrdf_load_stackoverflow) 1973-04-18
JPS568465B2 (enrdf_load_stackoverflow) 1981-02-24
IT960799B (it) 1973-11-30
SE377861B (enrdf_load_stackoverflow) 1975-07-28

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