CS665288A1 - Membrane chuck - Google Patents

Membrane chuck

Info

Publication number
CS665288A1
CS665288A1 CS886652A CS665288A CS665288A1 CS 665288 A1 CS665288 A1 CS 665288A1 CS 886652 A CS886652 A CS 886652A CS 665288 A CS665288 A CS 665288A CS 665288 A1 CS665288 A1 CS 665288A1
Authority
CS
Czechoslovakia
Prior art keywords
membrane chuck
chuck
membrane
Prior art date
Application number
CS886652A
Other languages
English (en)
Other versions
CS270092B1 (cs
Inventor
Imrich Ing Toth
Original Assignee
Toth Imrich
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toth Imrich filed Critical Toth Imrich
Priority to CS886652A priority Critical patent/CS270092B1/cs
Publication of CS665288A1 publication Critical patent/CS665288A1/cs
Publication of CS270092B1 publication Critical patent/CS270092B1/cs

Links

CS886652A 1988-10-06 1988-10-06 Membránové skíučovadlo CS270092B1 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS886652A CS270092B1 (cs) 1988-10-06 1988-10-06 Membránové skíučovadlo

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS886652A CS270092B1 (cs) 1988-10-06 1988-10-06 Membránové skíučovadlo

Publications (2)

Publication Number Publication Date
CS665288A1 true CS665288A1 (en) 1989-10-13
CS270092B1 CS270092B1 (cs) 1990-06-13

Family

ID=5414093

Family Applications (1)

Application Number Title Priority Date Filing Date
CS886652A CS270092B1 (cs) 1988-10-06 1988-10-06 Membránové skíučovadlo

Country Status (1)

Country Link
CS (1) CS270092B1 (cs)

Also Published As

Publication number Publication date
CS270092B1 (cs) 1990-06-13

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