CS396186A1 - Method of recessed regions formation on semiconductor plate's surface - Google Patents

Method of recessed regions formation on semiconductor plate's surface

Info

Publication number
CS396186A1
CS396186A1 CS863961A CS396186A CS396186A1 CS 396186 A1 CS396186 A1 CS 396186A1 CS 863961 A CS863961 A CS 863961A CS 396186 A CS396186 A CS 396186A CS 396186 A1 CS396186 A1 CS 396186A1
Authority
CS
Czechoslovakia
Prior art keywords
recessed regions
semiconductor plate
regions formation
formation
semiconductor
Prior art date
Application number
CS863961A
Other languages
Czech (cs)
Other versions
CS272157B1 (en
Inventor
Jaroslav Rndr Csc Homola
Ilja Prom Fyz Muller
Pavel Ing Pojman
Jiri Popelik
Jana Rndr Cumpelikova
Jaroslav Rndr Zamastil
Original Assignee
Homola Jaroslav
Muller Ilja
Pojman Pavel
Jiri Popelik
Jana Rndr Cumpelikova
Zamastil Jaroslav
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Homola Jaroslav, Muller Ilja, Pojman Pavel, Jiri Popelik, Jana Rndr Cumpelikova, Zamastil Jaroslav filed Critical Homola Jaroslav
Priority to CS863961A priority Critical patent/CS272157B1/en
Publication of CS396186A1 publication Critical patent/CS396186A1/en
Publication of CS272157B1 publication Critical patent/CS272157B1/en

Links

CS863961A 1986-05-30 1986-05-30 A method of forming recessed areas on a semiconductor wafer surface CS272157B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS863961A CS272157B1 (en) 1986-05-30 1986-05-30 A method of forming recessed areas on a semiconductor wafer surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS863961A CS272157B1 (en) 1986-05-30 1986-05-30 A method of forming recessed areas on a semiconductor wafer surface

Publications (2)

Publication Number Publication Date
CS396186A1 true CS396186A1 (en) 1990-05-14
CS272157B1 CS272157B1 (en) 1991-01-15

Family

ID=5381196

Family Applications (1)

Application Number Title Priority Date Filing Date
CS863961A CS272157B1 (en) 1986-05-30 1986-05-30 A method of forming recessed areas on a semiconductor wafer surface

Country Status (1)

Country Link
CS (1) CS272157B1 (en)

Also Published As

Publication number Publication date
CS272157B1 (en) 1991-01-15

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