CN2929393Y - Inflation overpressure overflow valve for vacuum - Google Patents

Inflation overpressure overflow valve for vacuum Download PDF

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Publication number
CN2929393Y
CN2929393Y CN 200620008180 CN200620008180U CN2929393Y CN 2929393 Y CN2929393 Y CN 2929393Y CN 200620008180 CN200620008180 CN 200620008180 CN 200620008180 U CN200620008180 U CN 200620008180U CN 2929393 Y CN2929393 Y CN 2929393Y
Authority
CN
China
Prior art keywords
interface
cover
overflow
spring
vacuum
Prior art date
Application number
CN 200620008180
Other languages
Chinese (zh)
Inventor
彭立波
姚琛
钟新华
唐景庭
Original Assignee
北京中科信电子装备有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 北京中科信电子装备有限公司 filed Critical 北京中科信电子装备有限公司
Priority to CN 200620008180 priority Critical patent/CN2929393Y/en
Application granted granted Critical
Publication of CN2929393Y publication Critical patent/CN2929393Y/en

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Abstract

The utility model relates to the application of a vacuum system overpressure protection device for an ion implantation apparatus, specifically, an evacuation overpressure fluid valve, which is characterized in that the valve comprises a bale (1), a KF interface (2), a spring (3), a leak-off sealed cover (4), an external cover (5), a socket cap screw (6), an O-shaped seal ring (7), and an O-shaped seal ring (8), a circlip (9), and a cutting sleeve interface (10).When the inner pressure is higher than the setup pressure, automatically spill and discharge gas to prevent the overpressure destroying parts of the system elements or explosion caused by pressure, thereby protecting the safe operation of the vacuum system.

Description

Inflating overpressure spill valve for vacuum
Technical field
The utility model is a kind of vacuum pressure protective gear; be used for when the time toward the vacuum system inflated with nitrogen of ion implantation apparatus; when internal pressure is higher than institute's set pressure; the automatic overflow exhaust; prevent owing to destruction or the generation pressure blast of overvoltage the part system element; play the effect of protection vacuum system safe operation, belong to field of semiconductor devices.
Background technique
Ion implantation apparatus belongs to a kind of of ion accelerator, and the ion of northern doped chemical is from ion source electric power, needs ion in multichannel analyzer screening place, and ion beam is through overscanning and acceleration then, and the target formula is injected in the silicon chip and goes on earth at last.The cavity of ion motion process must remain on do vacuum bad quiet down, when vacuum system is safeguarded, need be in vacuum cavity and vacuum pipe the clean nitrogen of filling, the time that vacuum is set up is again shortened in the cleaning that keeps system.
This filling nitrogen, be pressurized gas, after the vacuum cavity internal pressure reaches atmospheric pressure, still section continues can be higher than outside atmosphere to chamber fills nitrogen inside cavity pressure this moment, form malleation, a little less than do not have the overflow of overvoltage overflow mechanism, cavity pressure can continue to increase, up to the bleed pressure balance, this high pressure easily produce to destroy the part system element, can the blast of initiating system pressure when serious, cause personal injury, similar products are arranged on the market, similar products are arranged on the market, but generally all be not suitable for high vacuum environment.
The model utility content
The purpose of this utility model provides a kind of inflating overpressure spill valve for vacuum.
Vacuum gas filling relief valve device of the present utility model, main composition is: packing ring, KF interface, spring, overflow sealed cover, outer cover, hexagon socket cap head screw, O RunddichtringO and O RunddichtringO, circlip, cutting ferrule joint.
Described packing ring is to fill up between circlip and spring, limits and Regulation spring.
Described KF interface is the structure interface of valve body, and outer cover helps a screw to be connected on the KF interface by interior hexagonal, becomes a seal chamber, stops overflow gas directly to enter external environment condition, dress O RunddichtringO in the sealing faying surface, and outer cover pushes up the bell and spigot joint that is installed.
Described O RunddichtringO sealing KF interface closes the faying surface of outer cover.
Described O RunddichtringO sealing KF interface closes the faying surface of overflow sealed cover.
The circular hole platform is arranged in the KF interface, place spring.
Described spring housing is in sealed cover lower end stock outside, and the flat surface of the circular hole platform of upper end and KF interface contacts, and lower end and pad connect.When inflation pressure during greater than the preset pressure of spring, produce deformation in the spring north compression hand, inflating overpressure spill valve begins overflow.When the pressure at two ends of inflating overpressure spill valve connection reached balance, recoil of spring promoted the sealing of overflow sealed cover.
Described overflow sealed cover plays a part spool in inflating overpressure spill valve.There is the roundlet annular groove at the place near the lower end surface, clamps circlip, and there is the overflow ducts hole at stock center, lower end.
Described hexagon socket cap head screw connects KF interface and outer cover.
Described circlip is installed in the annular groove at stock lower end surface, lower end place of overflow sealed cover, blocks pad.
Fast plug during described cutting ferrule street corner, the interpolation exhaust duct, the cutting ferrule joint is connected to outer the trade and investment promotion with taper pipe thread.Be used to collect the gas that the vacuum cavity overflow is discharged.
The utility model designs the spring filament diameter and the number of turns of spring by pre-setting oil pressure relief, and when inflation pressure exceeded preset pressure, the overflow sealed cover was by jack-up, and gas is with regard to overflow, and spring is compressed; When overflow sealed cover both sides pressure was got back to balance, spring was under the spring-back force effect, and pushing tow withstands on the packing ring on the overflow sealed cover admittedly again, makes the resilience of overflow sealed cover, plays seal action.
The relief valve cutting ferrule adopts vacuum standard interface KF series, interchangeability is strong, O RunddichtringO, O RunddichtringO and hexagon socket cap head screw all are standard piece, only need to select for use according to design size, the package unit cost is low, the safety reliability height, and Installation and Debugging are simple, and be used for different inflation pressures and only need design different compression ratio springs, versatility is good.
Description of drawings
Fig. 1 is the structural representation of inflating overpressure spill valve for vacuum.
Among the figure, packing ring 1, KF interface 2, spring 3, overflow sealed cover 4, outer cover 5, hexagon socket cap head screw 6, O RunddichtringO 7 and O RunddichtringO 8, circlip 9, cutting ferrule joint 10.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described further, but not as to qualification of the present utility model.
With reference to figure 1, vacuum relief valve device main composition is: packing ring 1, KF interface 2, spring 4, overflow sealed cover 4, outer cover 5, hexagon socket cap head screw 6, O RunddichtringO 7 and O RunddichtringO 8, circlip 9, bayonet socket bell and spigot joint 10.
KF interface 2 links to each other with vacuum system, the gas that charges into enter by the lower end through hole of overflow sealed cover 4, gas pressure acts on the overflow sealed cover 4, when pressure during greater than the precompression of spring 3, overflow sealed cover 4 is by jack-up, spring 3 is compressed, overflow.When overflowing to sealed cover 4 two ends air pressure balances, under the spring-back force effect of spring 3, overflow sealed cover 4 moves down, from motive sealing.
Specific embodiment of the present utility model elaborates the utility model, the any conspicuous change that those skilled in the art do it under the prerequisite that does not deviate from model utility spirit, all constitute infringement, with corresponding legal responsibilities to the utility model patent.

Claims (1)

1. inflating overpressure spill valve for vacuum, it is characterized in that, constitute by following parts: packing ring (1), KF interface (2), spring (3), overflow sealed cover (4), outer cover (5), hexagon socket cap head screw (6), O RunddichtringO (7) and O RunddichtringO (8), circlip (9), cutting ferrule joint (10);
Described packing ring (1) is to fill up between circlip (9) and spring (3), limits and Regulation spring (3);
Described KF interface (2) is the structure interface of valve body, and outer cover (5) is connected on the KF interface (2) by hexagon socket cap head screw (6), becomes a seal chamber, stops overflow gas directly to enter external environment condition;
The faying surface of described O RunddichtringO (7) sealing KF interface (2) and outer cover (5); The faying surface of described O RunddichtringO (8) sealing KF interface (2) and overflow sealed cover (4); The KF interface has the circular hole platform in (2), places spring (3);
Described spring (3) is enclosed within stock outside, overflow sealed cover (4) lower end, and the upper end contacts with the flat surface of the circular hole platform of KF interface (2), and the lower end contacts with pad 1;
Described overflow sealed cover (4) plays a part spool in inflating overpressure spill valve, there is the roundlet annular groove at the place near the lower end surface, clamps circlip (9), and there is the overflow ducts hole at stock center, lower end; Described circlip (9) is installed in the annular groove at stock lower end surface, lower end place of overflow sealed cover (4), blocks pad (1); Described cutting ferrule joint (10) is a quick inserting joint, the interpolation exhaust duct, and cutting ferrule joint (10) is connected on the outer cover (5) with taper pipe thread.
CN 200620008180 2006-03-17 2006-03-17 Inflation overpressure overflow valve for vacuum CN2929393Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200620008180 CN2929393Y (en) 2006-03-17 2006-03-17 Inflation overpressure overflow valve for vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200620008180 CN2929393Y (en) 2006-03-17 2006-03-17 Inflation overpressure overflow valve for vacuum

Publications (1)

Publication Number Publication Date
CN2929393Y true CN2929393Y (en) 2007-08-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200620008180 CN2929393Y (en) 2006-03-17 2006-03-17 Inflation overpressure overflow valve for vacuum

Country Status (1)

Country Link
CN (1) CN2929393Y (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102345107A (en) * 2010-08-02 2012-02-08 北京中科信电子装备有限公司 Seal assembly of sliding and rotating shaft

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102345107A (en) * 2010-08-02 2012-02-08 北京中科信电子装备有限公司 Seal assembly of sliding and rotating shaft

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GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee