CN2890011Y - Precise automatic lifting device driven coded motor - Google Patents
Precise automatic lifting device driven coded motor Download PDFInfo
- Publication number
- CN2890011Y CN2890011Y CNU2006200081781U CN200620008178U CN2890011Y CN 2890011 Y CN2890011 Y CN 2890011Y CN U2006200081781 U CNU2006200081781 U CN U2006200081781U CN 200620008178 U CN200620008178 U CN 200620008178U CN 2890011 Y CN2890011 Y CN 2890011Y
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- CN
- China
- Prior art keywords
- guide rod
- screw mandrel
- motor
- chip
- lifting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a precise automatic lifting device driven coded motor, belonging to the semiconductor device manufacture field, the automatic lifting device enables the chip to be in a full automated operation condition in the process of that the chip enters the target chamber, achieving the chip quantity checking and chip automatic handling cooperating with mechanical hand, a guide rod is fixed on a base plate via an end-plate arranged on the guide rod, a coded motor is linked to one end of a screw mandrel via a coupling and fixedly linked to another end of the screw mandrel via a base, the another end of the screw mandrel is linked to the guide rod support via the screw nut copulated with the guide rod, the guide rod support is also fixedly connected with parallel guide rod which can achieve precise up and down displacement with a kinematic accuracy within plus or minus 0.1 mm. The utility model has the advantages of simple structure, smooth movement, and high reliability.
Description
Technical field
The utility model relates to a kind of automatic loading and unloading sheet ion implantation apparatus that has, and particularly relates to the motor-driven accurate apparatus for automatically lifting of a kind of coding in the ion implantation apparatus, belongs to field of manufacturing semiconductor devices.
Background technology
In recent years, along with the development of semi-conductor integrated circuit technology and chip technology, in the semi-conductor integrated circuit manufacturing technology, integrated level is more and more higher, circuit scale is increasing, and the unit component size is more and more littler in the circuit, and various semiconductor manufacturing equipments are had higher requirement.Ion implantation apparatus is as one of key equipment of quartz conductor ion doping processing line, also it has been proposed very high requirement, required ion implantation apparatus to have: multiple function and features such as whole aircraft reliability is good, production efficiency is high, the wide energy range of multiple charge state ion is injected, the accuracy control bundle injects can accuracy of measurement, accuracy control Shu Chundu, low grit pollutions, complete machine full automatic control, notes sheet homogeneity and parallelism are good.Need to solve how accurately to detect number of wafers thus, how accurately automatic lifting and displacement are to realize the purpose of full automaticity loading and unloading wafer.
Summary of the invention
The utility model be a kind ofly be used for the detection of ion implantation apparatus target chamber number of wafers, cooperative mechanical hand loading and unloading wafer, by the motor-driven accurate apparatus for automatically lifting of coding.This apparatus for automatically lifting can make wafer be in the full-automatic operation state in entering the process of target chamber, reaches the detection number of wafers, the high standard requirement of cooperative mechanical hand automatic loading and unloading wafer.
The utility model is achieved through the following technical solutions:
A kind of motor-driven accurate apparatus for automatically lifting of encoding is that guide rod is fixed on the substrate by the end plate that is sleeved on the guide rod, one coding motor links to each other with screw mandrel one end by coupler and is fixedly connected on the opposite side of substrate by pedestal, the described screw mandrel other end is gone back secured in parallel and is connected with guide rod by being connected on the guide rod supports seat with its threaded-fit screw rod nut on the described guide rod supports seat.
The utility model can also be provided with guide rail parallel with guide rod, that play the guiding role by described substrate, in the middle of guide rod and guide rail, also be provided with the guide rail slide block, described guide rail slide block end face is connected with the end face of guide rod supports seat, and described screw mandrel is fixedly supported upon on the pedestal by two ball bearing of main shafts.
The utlity model has following remarkable advantage:
1. guide rod can be realized accurate upper and lower displacement, and kinematic accuracy is within ± 0.1mm.
2. simple in structure, motion steadily, reliability is high.
Description of drawings:
Fig. 1: of expression the utility model a kind of motor-driven accurate apparatus for automatically lifting of encoding
The example structure scheme drawing.
The specific embodiment:
Below in conjunction with the drawings and specific embodiments the utility model is described further, but not as to qualification of the present utility model.
As shown in Figure 1, the motor-driven accurate apparatus for automatically lifting of a kind of coding, one end of guide rod 2 is fixed on the substrate 3 by end plate 5, described end plate 5 is sleeved on the guide rod 2, described substrate 3 is skeletons of whole device, one coding motor 11 is fixedly connected on the opposite side of substrate 3 by pedestal 9, described coding motor 11 links to each other with screw mandrel 7 one ends by coupler 10, described screw mandrel 7 is fixedly supported upon on the pedestal 9 by two ball bearing of main shafts 8, to guarantee that described screw mandrel 7 operates steadily, described screw mandrel 7 other ends are by being connected on the guide rod supports seat 1 with its threaded-fit screw rod nut 6, and described guide rod supports seat 1 is captiveed joint with guide rod 2.Also be provided with on described substrate 3 and guide rod 2 guide rails 4 parallel, that play the guiding role, also be provided with guide rail slide block 12 in the middle of guide rod 2 and guide rail 4, described guide rail slide block 12 end faces are connected with the end face of guide rod supports seat 1.
When coding motor 11 starts, drive screw mandrel 7 rotations, make with screw mandrel 7 threaded-fit screw rod nuts 6 and move, move by the guide rod seat 1 that is connected one with feed screw nut 6, drive with the guide rod 2 of guide rod seat 1 one and do upper and lower displacement, make to be attached thereto the wafer station that connects and can accurately to move, described wafer station is a kind of wafer station that can the automatic loading and unloading sheet in the ion implantation apparatus.In order to prevent that guide rod 2 lower ends from swinging, the guide rail slide block 12 that is fixed on the guide rod supports seat 1 plays directed effect with guide rail 4, and guide rod 2 is not swung.This apparatus for automatically lifting can make wafer be in the full-automatic operation state in entering the process of target chamber, reaches the detection number of wafers, the requirement of cooperative mechanical hand automatic loading and unloading wafer.
Specific embodiment of the present utility model elaborates content of the present utility model.For persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from the utility model spirit it being done all constitutes the infringement to the utility model patent, with corresponding legal responsibilities.
Claims (3)
- One kind the coding motor-driven accurate apparatus for automatically lifting, it is characterized in that: guide rod (2) is fixed on the substrate (3) by the end plate (5) that is sleeved on the described guide rod (2), one coding motor (11) links to each other with screw mandrel (7) one ends by coupler (10), and be fixedly connected on the opposite side of substrate (3) by pedestal (9), described screw mandrel (7) other end is by being connected on the guide rod supports seat (1) with its threaded-fit screw rod nut (6), and described guide rod supports seat (1) is upward gone back secured in parallel and is connected with guide rod (2).
- 2. the motor-driven accurate apparatus for automatically lifting of coding according to claim 1, it is characterized in that: on described substrate (3), also be provided with and described guide rod (2) guide rail parallel, that play the guiding role (4), also be provided with guide rail slide block (12) in the middle of guide rod (2) and guide rail (4), described guide rail slide block (12) end face is connected with the end face of guide rod supports seat (1).
- 3. the motor-driven accurate apparatus for automatically lifting of coding according to claim 2 is characterized in that: described screw mandrel (7) is fixedly supported upon on the pedestal (9) by two ball bearing of main shafts (8) of coaxial setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006200081781U CN2890011Y (en) | 2006-03-17 | 2006-03-17 | Precise automatic lifting device driven coded motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006200081781U CN2890011Y (en) | 2006-03-17 | 2006-03-17 | Precise automatic lifting device driven coded motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2890011Y true CN2890011Y (en) | 2007-04-18 |
Family
ID=38020664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2006200081781U Expired - Fee Related CN2890011Y (en) | 2006-03-17 | 2006-03-17 | Precise automatic lifting device driven coded motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2890011Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101728292B (en) * | 2008-10-31 | 2011-06-01 | 沈阳芯源微电子设备有限公司 | Wafer detection device |
| CN105215681A (en) * | 2014-05-29 | 2016-01-06 | 玉环县新跃机床有限公司 | A kind of multiple operation building-block machine of machining large diesel engine main bearing cover |
| CN106892380A (en) * | 2015-12-17 | 2017-06-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Elastic connecting component and apply its piece box lifting device, semiconductor processing equipment |
| CN107740191A (en) * | 2017-12-01 | 2018-02-27 | 浙江海洋大学 | A kind of annealing device |
-
2006
- 2006-03-17 CN CNU2006200081781U patent/CN2890011Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101728292B (en) * | 2008-10-31 | 2011-06-01 | 沈阳芯源微电子设备有限公司 | Wafer detection device |
| CN105215681A (en) * | 2014-05-29 | 2016-01-06 | 玉环县新跃机床有限公司 | A kind of multiple operation building-block machine of machining large diesel engine main bearing cover |
| CN106892380A (en) * | 2015-12-17 | 2017-06-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Elastic connecting component and apply its piece box lifting device, semiconductor processing equipment |
| CN107740191A (en) * | 2017-12-01 | 2018-02-27 | 浙江海洋大学 | A kind of annealing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |