CN2756643Y

CN2756643Y - Gas filter

Info

Publication number: CN2756643Y
Application number: CN 200420071824
Authority: CN
Inventors: 翁维襄
Original assignee: Hongfujin Precision Industry Shenzhen Co Ltd; Hon Hai Precision Industry Co Ltd
Current assignee: Hongfujin Precision Industry Shenzhen Co Ltd; Hon Hai Precision Industry Co Ltd
Priority date: 2004-07-16
Filing date: 2004-07-16
Publication date: 2006-02-08
Anticipated expiration: 2014-07-16

Abstract

The utility model provides a gas filter, which comprises a hollow dust collection container, wherein the hollow dust collection container is provided with a gas inlet and a gas output part. The bottom relative to the gas output part is provided with a cooling device with a plurality of grooves at the top; the gas output part forms a plurality of wind resistors with winding and folding structure. The cooling device comprises a capacity sensor; the capacity of liquid nitrogen in the cooling device is monitored through the capacity sensor at any time for replenishing liquid nitrogen in time. A tortuous gas output passage is formed among the wind resistors to increase the detention time of gas stream. The gas filter provided by the utility model has the characteristics of high filtration efficiency, long service period, etc.

Description

Gas-filtering device

[technical field]

The utility model is about a kind of filtration unit, particularly a kind of preceding gas-filtering device of vacuum pump that feeds.

[background technology]

Along with the development of nanosecond science and technology, many preparation methods about nano-powder constantly are developed.As preparation of nanomaterials such as CNT (carbon nano-tube), using method has chemical vapour deposition, arc-over, plasma-assisted chemical vapour deposition etc. usually.A common feature is arranged in all multi-methods, promptly all under high temperature and certain atmosphere, react, therefore adopt to be equipped with a pumped vacuum systems in the device.But, when gas during, because temperature descends, make gas and entrained material thereof fall in the pipeline, thereby reduce the pipeline effective diameter even block pipeline through piping, also will lose more product.These nanometer particles also can pollute vacuum pump then, therefore, often need be before gas enters vacuum pump earlier through dedusting filter, the gas of complete reaction not and belongings thereof are adsorbed among this device.

At present, dedusting filter adopts the netted filtering structure more, disclose a kind of gas trapping equipment as No. 01116826.9 patent application of China, this device utilizes flow through wherein gas of double-deck hollow cylindrical strainer filtering, and adsorbs the not gas or the by product of complete reaction on filter screen.This device has certain adsorption efficiency, but this filter screen because gas must be flowed through, the contained particle of portion gas or gas at first is adsorbed on the filter screen, after using for some time, this filter screen usable floor area descends, and is the assurance device adsorption efficiency, and filter screen must often be changed, so then bring very big inconvenience, and can increase cost to actually operating.

In addition, the U.S. the 6th, 561, No. 769 patent discloses a kind of gas filtration and snubber assembly that directly applies in the vacuum pump, but this device is too complicated, and cost is too high, is unfavorable for being applied in the device of methods such as chemical gas-phase method or arc discharge method.

For obtaining comparatively easy filtration unit, the U.S. the 6th, 254, No. 685 a kind of filtration vessels (Trap Filter Chamber) that are used for chemical Vapor deposition process of patent announcement.See also Fig. 1, this container comprises the inlet mouth 1 of a ligation chamber, the escape pipe 4 that a dust collecting container 3 and connects vacuum pump, end that enters dust collecting container 3 at inlet mouth 1 is provided with taper amplification inlet 2, the bore of this inlet 2 increases gradually along with deepening continuously dust collecting container 3, produce pressure drop thus, make that pressure is less than pressure in the reaction chamber in the dust collecting container 3, thereby can avoid because temperature descends institute to cause the deposition of byproduct particles or accumulate in entering the mouth 2, and make byproduct particles be deposited on dust collecting container 3 bottoms.This kind container can play filtering effect to a certain extent, yet, this structure of container is too simple, to such an extent as to when gas flow rate is big, the time of gas hold-up in container is shorter, causes the filtering efficient of container to descend greatly, is difficult to reach the purpose of byproduct particles in the filtering gas, still can cause pipeline obstruction, and cause vacuum pump to be polluted.And this container bottom usable floor area is limited, thereby causes the life cycle of this device shorter.

In view of this, provide the long gas-filtering device of a kind of filtration efficiency height and life cycle real for necessary.

[utility model content]

Hang down problems such as reaching the life cycle weak point for the filtration efficiency that overcomes gas-filtering device in the prior art, the utility model provides a kind of filtration efficiency height and the long gas-filtering device of life cycle.

For achieving the above object, the utility model provides a kind of gas-filtering device, and it comprises a hollow dust collecting container, and it has an inlet mouth and a position of giving vent to anger, and is provided with the refrigerating unit of a plurality of grooves of a top tool with respect to the bottom at the position of giving vent to anger.

Wherein, this refrigerating unit is a cooling tank, but is filled with the heat-eliminating medium of a plurality of groove outer walls of submergence in the groove, and this heat-eliminating medium comprises liquid nitrogen.This cooling tank top and bottom are respectively equipped with the conduit that a capacity sensor and has valve.

This novel further improvement position that is to give vent to anger is formed with a plurality of windages that have around folded structure.This windage comprises substrate, reaches the right folding sheet that links to each other with last tabs top with the terminal last tabs that links to each other of substrate, and this substrate, last tabs and right folding sheet are straight sheet or crooked sheet structure, and this windage also can further comprise a following tabs that links to each other with right folding sheet end.Be formed with a plurality of crooked outlet passageways between the windage.

Compared with prior art, the gas-filtering device that the utility model provides can form partial drop of pressure by having the refrigerating unit of a plurality of grooves, increases the deposition of byproduct particles in groove, thereby improves filtration efficiency; And increase bottom deposit particulate area by this groove structure, and to increase the life cycle of device, also increase the cooling contact area simultaneously, improve cooling efficiency.In addition, the gas-filtering device that the utility model provides increases air-flow and is trapped in the time in the container, thereby make that gas is fully filtered also by the windage structure, further improves the filtration efficiency of device.

[description of drawings]

Fig. 1 is the filtration filtration vessel sectional view of prior art.

Fig. 2 is a gas-filtering device of the present utility model system framework synoptic diagram of living in.

Fig. 3 is a gas-filtering device structural representation of the present utility model.

Fig. 4 is a gas-filtering device longitudinal profile synoptic diagram of the present utility model.

Fig. 5 is a gas-filtering device windage structural representation of the present utility model.

[embodiment]

Below in conjunction with accompanying drawing the utility model is described in further detail.

See also Fig. 2, the gas-filtering device system framework synoptic diagram of living in that provides for the utility model.This system comprises reaction chamber 20, vacuum pump 30 and the filtration unit 10 between reaction chamber 20 and vacuum pump 30.During the reaction beginning; unstripped gas 41 (generally includes reaction gas; protection gas or carrier gas) be introduced into reaction chamber 20 and react; discharge reaction back gas 42 from reaction chamber; it comprises the not gas of complete reaction; particulate state by product or portion of product; as when preparing CNT (carbon nano-tube); unstripped gas is a carbon source gas; and be protection gas with hydrogen, carbon-source gas reaction back generates multiple carbon nano-particle, and gas will carry these nano particles when discharging; as directly entering vacuum pump 30; certainly will pollute vacuum pump 30, after therefore must filtering, become purified filter back gas 43 through gas-filtering device 10; just can enter vacuum pump 30, carry out with continuing of guaranteeing to react.

See also Fig. 3, the structural representation of gas-filtering device 10 promptly of the present utility model.Gas-filtering device 10 comprises a hollow dust collecting container 11, the one end have one with reaction chamber 20 (referring to Fig. 2) inlet mouth 12 that the mouth of pipe matches of giving vent to anger, the position of giving vent to anger at top has a plurality of windages 13, and is provided with a refrigerating unit 15 with respect to the bottom at the position of giving vent to anger.The cross-sectional shape of this dust collecting container 11 can be semicircle, circle or square, and present embodiment adopts semicircle dust collecting container 11, and at this moment, windage 13 promptly is formed on dust collecting container 11 semicircular shells.

See also Fig. 4, gas-filtering device 10 longitudinal profile synoptic diagram promptly of the present utility model.A plurality of windages 13 are intervally arranged successively on dust collecting container 11 semicircular shells, and a plurality of outlet passageways 16 of the corresponding formation in the gap between the windage 13 are handled the gas of back after filtration and discharged dust collecting container 11 by this passage 16.This refrigerating unit 15 is a cooling tank, fills heat-eliminating medium in it, and heat-eliminating medium comprises liquid nitrogen 151.This cooling tank top is formed with a plurality of grooves 14, its shape of cross section can be circle, square or other Polygons, and side-wall material is selected from copper, aluminium or its alloy, and groove 14 has certain depth and width, make gas can arrive the bottom of groove 14, so that sufficiently cooled.When filling liquid nitrogen 151 in the cooling tank, the outer wall of submergence groove 14 utilizes its low temperature to come the gas of cooling flow through groove 14 fully.In addition, one side is provided with a capacity sensor 152 at the top of cooling tank, be used for monitoring the capacity of liquid nitrogen 151 in the cooling tank, and bottom position connects a conduit 153, and conduit 153 is provided with a valve 154, so that pour into or the interior liquid nitrogen 151 of emptying cooling tank.

See also Fig. 5, be three kinds of optional structure enlarged diagrams of windage 13.Windage 13 is one around folded structure, comprises substrate and tabs around folded structure, tabs opposite with the air-flow approach axis around the folding direction, and the present invention is example with three kinds of differences around folded structure.First kind of manufacture craft around folded structure is comparatively simple, windage 13 comprises a substrate 131, on the terminal upwards folding of substrate tabs 132 and on last tabs 132 tops the flat to the right right folding sheet of rolling over 133, promptly form windage 13 (shown in Fig. 5 A), with two adjacent windages 13, the 13 ' certain distance that staggers, make to form a tortuous outlet passageway 16 between two

adjacent windages

13,13 '.Also can on first kind of structure, be improved, windage 13 comprises a substrate 131, goes up tabs 132 and right folding sheet 133, and roll over a part of downwards in the end of right folding sheet 133, form tabs 134, by further restriction gas discharge of tabs 134 down, reach the purpose (shown in Fig. 5 B) that hinders gas flow, can form tortuous outlet passageway 16 between same two adjacent windages 13 and the windage 13 '.The third windage 13 structures are the structure that circumnutates, shape is similar to the serpentine of a horizontal positioned, windage 13 also comprises substrate 131, goes up tabs 132 and right folding sheet 133, be that with preceding two kinds of structure differences substrate 131, last tabs 132 and right folding sheet 133 are crooked sheet structure (shown in Fig. 5 C), and the central angle of the crooked cambered surface of substrate 131 and right folding sheet 133 is at least greater than 90 °, and the big more obstruction air-flow of central angle effect is good more, can decide according to concrete processing condition and tooling cost.With the bent substrate 131 of adjacent windage 13 and crooked right folding sheet 133 ' the mutual interlock of windage 13 ', and the certain interval of being separated by, this gap promptly forms the curved channel 16 of the third structure, compare with preceding two kinds of structures, it is bigger that this kind structure has certain crooked curvature, therefore has the effect of better obstruction air-flow.Filter back gas is promptly along a plurality of passage 16 tortuous discharges.

Please consult Fig. 4 again, so that the working process of filtration unit 10 provided by the utility model to be described.Before filtration unit 10 work, can pour into liquid nitrogen 151 in cooling tank by conduit 153, valve-off 154 then, and filtration unit 10 can be started working.During work, reaction back gas 42 enters dust collecting container 11 from inlet mouth 12; Because liquid nitrogen 151 cooling grooves 14 in the cooling tank make that dust collecting container 11 bottom temps are lower, cause partial drop of pressure, gas 42 makes gas 42 contained particles promptly deposit sidewall or the bottom attached to groove 14 groove 14 of flowing through earlier; Air-flow rises then, arrive windage 13 positions, because the curved structure of windage 13, force that air communication is out-of-date to lay out along passage 16 curves, thereby prolong the time of gas hold-up in dust collecting container 11, make air-flow in dust collecting container 11, fully be filtered, can further increase the filter effect of filtration unit 10; Be pure gas from passage 16 expellant gas 43 at last, can lead to vacuum pump 30 safely, make that reaction can continue to carry out.

After filtration unit 10 is worked for some time, the capacity of liquid nitrogen 151 will reduce in the cooling tank, top transmitter 152 will show liquid nitrogen 151 off-capacities in the cooling tank at this moment, then open valve 154, in cooling tank, replenish liquid nitrogen 151 by conduit 153, thereby guarantee cooling tank abundant cooling groove 14 all the time, guarantee promptly that also filtration unit 10 continues to work efficiently.And, after filtration unit 10 work, can pass through liquid nitrogen 151 in the conduit 153 emptying cooling tanks equally, and guide in the storage vessel (figure does not show), for future use.In addition, the interface that cooling tank contacts with environment can coat a thermal insulation layer (figure does not show), to increase the duration of service of cooling tank.

Claims

1. gas-filtering device, it comprises a hollow dust collecting container, it has an inlet mouth and a position of giving vent to anger; It is characterized in that being provided with the refrigerating unit of a plurality of grooves of a top tool with respect to the bottom at the position of giving vent to anger.

2. gas-filtering device as claimed in claim 1 is characterized in that this refrigerating unit is a cooling tank.

3. gas-filtering device as claimed in claim 2 is characterized in that being filled with in this cooling tank the heat-eliminating medium of a plurality of groove outer walls of submergence.

4. gas-filtering device as claimed in claim 3 is characterized in that this heat-eliminating medium comprises liquid nitrogen.

5. gas-filtering device as claimed in claim 2 is characterized in that this cooling tank top and bottom are respectively equipped with the conduit that a capacity sensor and has valve.

6. gas-filtering device as claimed in claim 1 is characterized in that this position of giving vent to anger is formed with a plurality of windages that have around folded structure.

7. gas-filtering device as claimed in claim 8 is characterized in that this windage comprises substrate, reaches the right folding sheet that links to each other with last tabs top with the terminal last tabs that links to each other of substrate.

8. gas-filtering device as claimed in claim 9 is characterized in that this substrate, last tabs and right folding sheet are straight sheet or crooked sheet structure.

9. gas-filtering device as claimed in claim 9 is characterized in that this windage also can further comprise a following tabs that links to each other with right folding sheet end.

10. gas-filtering device as claimed in claim 8 is characterized in that being formed with between this windage a plurality of crooked outlet passageways.