CN2390053Y - Superhigh vacuum coaxial rotating, translation differential feed-in device - Google Patents
Superhigh vacuum coaxial rotating, translation differential feed-in device Download PDFInfo
- Publication number
- CN2390053Y CN2390053Y CN 98214994 CN98214994U CN2390053Y CN 2390053 Y CN2390053 Y CN 2390053Y CN 98214994 CN98214994 CN 98214994 CN 98214994 U CN98214994 U CN 98214994U CN 2390053 Y CN2390053 Y CN 2390053Y
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- outer shaft
- vacuum
- ring
- tube wall
- interior axle
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Abstract
The utility model belongs to the technical field of vacuum technique, relates to the improvement of a superhigh vacuum feed-in device, and solves the problems of the prior art of more vacuum air leakage sections, complex system, large volume, and high cost. The utility model is composed of a vacuum chamber 1, a vacuum pipe wall 2, an inner dense ball bearings 3, an outer dense ball bearings 4, an inner shaft 5, an outer shaft 6, an inner fixing ring 7, an outer fixing ring 8, an inner sealing ring 9, an outer sealing ring 10, an outer blocking ring 11, an outer locking ring 12, a low vacuum pumping opening 13, and a high vacuum pumping opening 14. The utility model is mainly applied to synchrotron radiation and a feed-in system of the superhigh vacuum device, can ensure the rigidity transmission of the feed-in system, has little transferring error, simplifies the structure of the system, and reduces the air leakage sections.
Description
The invention belongs to the vacuum technique field, relate to a kind of improvement the ultrahigh vacuum feedthrough.
Prior art: Rev.Sci.Instrum., Vol.66, No.2, February 1995,2248-2250 D.Fuchs, M.Krumrey, P.Miiller, F.Scholze, and G.Ulm, " High precisionsoft x-ray reflectometer " interior as shown in Figure 1 axle 5 places straight line roating sphere to support 4 endoporus, place on the outer garden of straight line roating sphere supporting 4 at outer shaft 6 inwalls and two ends thereof, outer wall at outer shaft 6 places straight line roating sphere to support 3 endoporus, support 3 externally-arranged vacuum tube walls 2 in straight line roating sphere, one end of vacuum tube wall 2 and an end of metal bellows 11 are fixedly connected, the other end of vacuum tube wall 2 and vacuum chamber 1 are fixedly connected, the rotary seal 7 of bleeding of the other end of metal bellows 11 and difference is fixedly connected, difference the bleed end of rotary seal 8 of the input end of the other end of rotary seal 7 and outer shaft 6 and another difference of bleeding is fixedly connected, the output terminal of outer shaft 6 places vacuum chamber 1, the bleed the other end of rotary seal 8 and an end of another metal bellows 10 of difference is fixedly connected, a bleed end of rotary seal 9 of the other end of metal bellows 10 and the 3rd difference is fixedly connected, the bleed the other end of rotary seal 9 and the input end of interior axle 5 of difference is fixedly connected, and the output terminal of interior axle 5 places vacuum 1.Its working procedure is as follows: when the input end of interior axle 5 is rotated in outer shaft 6 by external force, the output terminal of axle 5 in will rotating in the transmission vacuum chamber 1 by straight line roating sphere supporting 4 supportings, this moment, the motive sealing of system was guaranteed by the difference rotary seal 9 and 8 of bleeding, all the other sealings are the static seal state, outer shaft 6 keeps motionless, when the input end of interior axle 5 is subjected to external force to produce translation, the output terminal of axle 5 in passing to translation in the vacuum chamber 1 by straight line roating sphere supporting 4 supportings, the displacement amount that difference was bled and produced between rotary seal 8 and 9 this moment, compression or tensile buckling by metal bellows 10 compensate, all sealings all are in the static seal state, outer shaft 6 keeps motionless, when the input end of outer shaft 6 is rotated in vacuum tube wall 2 by external force, rotation is passed to the output terminal of outer shaft 6 in the vacuum chamber 1 by straight line roating sphere supporting 3 supportings, this moment, the motive sealing of system guaranteed that by the difference rotary seal 7 and 8 of bleeding all the other sealings are the static seal state, and interior axle 5 keeps motionless.When the input end of outer shaft 6 is subjected to external force to produce translation, by straight line roating sphere supporting 3 supportings, translation is passed to the output terminal of outer shaft 6 in the vacuum chamber 1, the displacement amount that vacuum tube wall 2 and difference were bled and produced between the rotary seal 7 this moment, compression or tensile buckling by metal bellows 10 and 11 compensate, all sealings all are in the static seal state, and interior axle 5 keeps motionless.
The problem that exists: rotary seal and two cover metal bellowss because employing three cover difference are bled, make that the link that easily produces vacuum gas leakage is more, and the difference extract system also produces mobile when inside and outside translation, because system complex, volume is big, Heavy Weight is made troubles to use, and involves great expense.
The objective of the invention is to overcome prior art, adopt bleed rotary seal and metal bellows of many cover difference to bring vacuum gas leakage link many, produce during inside and outside translation and move the problem that the beginning use is made troubles, a kind of ultrahigh vacuum coaxial rotation, translation difference feedthrough are provided.
Detailed content of the present invention: it includes vacuum chamber 1, vacuum tube wall 2, outer sealed bead bearing 3, interior sealed bead bearing 4, interior axle 5, outer shaft 6, internal fixation ring 7, outer fixing ring 8, inner seal ring 9, exterior seal ring 10, inner step ring 11, outer stop ring 12, rough vacuum bleeding point 13, fine pumping mouth 14.The endoporus of sealed bead bearing 4 in the outer garden of interior axle 5 places, in the inwall of outer shaft 6 and two ends thereof place on the outer garden of sealed bead bearing 4, the outer wall of outer shaft 6 places the endoporus of outer sealed bead bearing 3, the externally-arranged vacuum tube wall 2 of sealed bead bearing 3 outside, one end of vacuum tube wall 2 and an end of vacuum chamber 1 are fixedly connected, internal fixation ring 7 is fixed on the interior axle 5, inner seal ring 9 be placed on the outer garden of outer shaft 6 and two internal fixation rings 7 between, radially contacting of inner seal ring 9 with the outer garden of interior axle 5 and the inwall of outer shaft 6, inner step ring 11 is fixed on the outer shaft 6, outer fixing ring 8 is fixed on the outer shaft 6, exterior seal ring 10 be placed on the outer garden line of outer shaft 6 and two outer fixing rings 8 between, radially contacting of exterior seal ring 10 with the outer garden of outer shaft 6 and the inwall of vacuum tube wall 2, outer stop ring 12 is fixed on the outer shaft 6, rough vacuum bleeding point 13, fine pumping mouth 14 all is fixed on the vacuum tube wall 2.
Outer sealed bead bearing 3 among the present invention and interior sealed bead bearing 4 are made up of steel ball 15 and retainer 16, retainer 16 with each steel ball 15 separately, arrange by a graded, steel ball 15 directly contacts with vacuum tube wall 2 with outer shaft 6 and outer shaft 6 with interior 5, and for interior axle 5 and outer shaft 6 provide supporting and guiding, thereby they are integrated axle system with guide rail, and axle 5, outer shaft 6 rotate respectively and translation in realizing.
Dynamic process of the present invention:
When the input end of interior axle 5 is rotated by external force or during translation, by 4 supportings of interior sealed bead bearing and guiding will be rotated or translation pass in the vacuum chamber 1 in spools 5 output terminal, three inner seal rings 9 and interior axle 5, outer shaft 6 closely contacts, be two spaces that are separated from each other with the space sealing between interior axle 5 and the outer shaft 6 vertically, by through hole separately on the outer shaft 6 and the rough vacuum bleeding point 13 on the vacuum tube wall 2, fine pumping mouth 14 communicates, thereby realize the difference motive sealing, all the other sealings are static seal at this moment, when the input end of outer shaft 6 is rotated by external force or during translation, by outer sealed bead bearing 3 supportings and guiding, to rotate or the output terminal of outer shaft 6 in the vacuum chamber 1 is passed in translation, three inner seal rings 9 and interior axle 5, outer shaft 6 closely contacts, be two spaces that are separated from each other with the space sealing between interior axle 5 and the outer shaft 6 vertically, by through hole separately on the outer shaft 6 and the rough vacuum bleeding point 13 on the vacuum tube wall 2, fine pumping mouth 14 communicates, three exterior seal rings 10 and outer shaft 6, vacuum tube wall 2 closely contacts, be two spaces that are separated from each other with the space sealing between outer shaft 6 and the vacuum tube wall 2 vertically, by the rough vacuum bleeding point 13 on the vacuum tube wall 2, fine pumping mouth 14 is realized the difference motive sealing.At this moment, inside and outside seal ring 9,10 is motive sealing.
Good effect of the present invention:
The present invention is divided into two high vacuum region and rough vacuum district with the three seals circle respectively with inside and outside axle respectively vertically on inside and outside axle, only be distributed with a cover difference extract system at vacuum tube wall 1, reduces the link that produces gas leakage.The present invention directly is fixedly connected with the vacuum tube wall with high and low vacuum pumping opening, produces the problem that moves when then overcoming the translation of the inside and outside axle of prior art, and the beginning use brings convenience.Adopt the close pearl airframe bearing of steel ball, realization is rotated, the translation supporting is saved usage space for the design of one.The present invention is applied to the feedthrough system of Synchrotron Radiation and ultrahigh vacuum device, the present invention can guarantee the positive drive of feedthrough system, can simultaneously coaxial rotation, translational motion be delivered in the ultra-high vacuum system, but and the error that produces in the transmittance process can be reduced to the minimum also structure of simplified system, system bulk is reduced, weight saving has reduced cost.
Description of drawings:
Fig. 1 is the prior art structural representation;
Fig. 2 is a structural front view of the present invention;
Fig. 3 is the steel ball distribution schematic diagram of the inside and outside sealed bead bearing 3,4 of the present invention.
Embodiments of the invention: according to Fig. 2 and shown in Figure 3, it includes vacuum chamber 1, vacuum tube wall 2, outer sealed bead bearing 3, interior sealed bead bearing 4, interior axle 5, outer shaft 6, internal fixation ring 7, outer fixing ring 8, inner seal ring 9, exterior seal ring 10, inner step ring 11, outer stop ring 12, rough vacuum bleeding point 13, fine pumping mouth 14.The endoporus of sealed bead bearing 4 in the outer garden of interior axle 5 places, in the inwall of outer shaft 6 and two ends thereof place on the outer garden of sealed bead bearing 4, the outer wall of outer shaft 6 places the endoporus of outer sealed bead bearing 3, the externally-arranged vacuum tube wall 2 of sealed bead bearing 3 outside, one end of vacuum tube wall 2 and an end of vacuum chamber 1 are fixedly connected, internal fixation ring 7 is fixed on the interior axle 5, inner seal ring 9 be placed on the outer garden of outer shaft 6 and two internal fixation rings 7 between, radially contacting of inner seal ring 9 with the outer garden of interior axle 5 and the inwall of outer shaft 6, inner step ring 11 is fixed on the outer shaft 6, outer fixing ring 8 is fixed on the outer shaft 6, exterior seal ring 10 be placed on the outer garden line of outer shaft 6 and two outer fixing rings 8 between, radially contacting of exterior seal ring 10 with the outer garden of outer shaft 6 and the inwall of vacuum tube wall 2, outer stop ring 12 is fixed on the outer shaft 6, rough vacuum bleeding point 13, fine pumping mouth 14 all is fixed on the vacuum tube wall 2.
Outer sealed bead bearing 3 among the present invention and interior sealed bead bearing 4 are made up of steel ball 15 and retainer 16, retainer 16 with each steel ball 15 separately, arrange by a graded, steel ball 15 directly contacts with vacuum tube wall 2 with outer shaft 6 and outer shaft 6 with interior 5, and for interior axle 5 and outer shaft 6 provide supporting and guiding, thereby they are integrated axle system with guide rail, and axle 5, outer shaft 6 rotate respectively and translation in realizing.
The present invention is rotated by external force or during translation when the input end of interior axle 5, by 4 supportings of interior sealed bead bearing and guiding will be rotated or translation pass in the vacuum chamber 1 in spools 5 output terminal, three inner seal rings 9 and interior axle 5, outer shaft 6 closely contacts, be two spaces that are separated from each other with the space sealing between interior axle 5 and the outer shaft 6 vertically, by through hole separately on the outer shaft 6 and the rough vacuum bleeding point 13 on the vacuum tube wall 2, fine pumping mouth 14 communicates, thereby realize the difference motive sealing, all the other sealings are static seal at this moment, when the input end of outer shaft 6 is rotated by external force or during translation, by outer sealed bead bearing 3 supportings and guiding, to rotate or the output terminal of outer shaft 6 in the vacuum chamber 1 is passed in translation, three inner seal rings 9 and interior axle 5, outer shaft 6 closely contacts, be two spaces that are separated from each other with the space sealing between interior axle 5 and the outer shaft 6 vertically, by through hole separately on the outer shaft 6 and the rough vacuum bleeding point 13 on the vacuum tube wall 2, fine pumping mouth 14 communicates, three exterior seal rings 10 and outer shaft 6, vacuum tube wall 2 closely contacts, be two spaces that are separated from each other with the space sealing between outer shaft 6 and the vacuum tube wall 2 vertically, by the rough vacuum bleeding point 13 on the vacuum tube wall 2, fine pumping mouth 14 is realized the difference motive sealing.At this moment, inside and outside seal ring 9,10 is motive sealing.
Vacuum chamber 1 usefulness 1Cr18Ni9Ti welding is made, and vacuum tube wall 2 usefulness 4Cr13 welding is made.Inside and outside sealed bead bearing 3 becomes with copper with 4 usefulness 4Cr13.Inside and outside axle 5 and 6 usefulness 4CrB make.Inside and outside retaining ring 7 and 8 usefulness 1Cr18Ni9Ti or duralumin Ly12 make.Inside and outside seal ring 9 and 10 is selected elastic load seal ring or viton seal ring for use.Inside and outside shelves ring 11 and 12 usefulness duralumin Ly12 make.High and low vacuum pumping opening 13 and 14 usefulness 1Cr18Ni9Ti make.Steel ball 15 adopts the GB308-89 standard piece.Retainer 16 adopts bronze or brass to make.
Claims (1)
1, a kind of ultrahigh vacuum coaxial rotation, translation difference feedthrough, it comprises vacuum chamber 1, vacuum tube wall 2, interior axle 5, outer shaft 6, it is characterized in that: the endoporus of sealed bead bearing 4 in the outer garden of interior axle 5 places, in the inwall of outer shaft 6 and two ends thereof place on the outer garden of sealed bead bearing 4, the outer wall of outer shaft 6 places the endoporus of outer close bearing 3, the externally-arranged vacuum tube wall 2 of close outside bearing 3, internal fixation ring 7 is fixed on the interior axle 5, inner seal ring 9 be placed on the outer garden of outer shaft 6 and two internal fixation rings 7 between, radially contacting of inner seal ring 9 with the outer garden of interior axle 5 and the inwall of outer shaft 6, inner step ring 11 is fixed on the outer shaft 6, outer fixing ring 8 is fixed on the outer shaft 6, exterior seal ring 10 be placed on the outer garden line of outer shaft 6 and two outer fixing rings 8 between, radially contacting of exterior seal ring 10 with the outer garden of outer shaft 6 and the inwall of vacuum tube wall 2, outer stop ring 12 is fixed on the outer shaft 6, rough vacuum bleeding point 13, fine pumping mouth 14 all is fixed on the vacuum tube wall 2, outer sealed bead bearing 3 and interior sealed bead bearing 4 are made up of steel ball 15 and retainer 16, retainer 16 with each steel ball 15 separately, arrange by a graded, steel ball 15 directly contact with vacuum tube wall 2 with outer shaft 6 and outer shaft 6 with interior axle 5, and supports and lead for interior axle 5 and outer shaft 6 provide.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 98214994 CN2390053Y (en) | 1998-06-01 | 1998-06-01 | Superhigh vacuum coaxial rotating, translation differential feed-in device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 98214994 CN2390053Y (en) | 1998-06-01 | 1998-06-01 | Superhigh vacuum coaxial rotating, translation differential feed-in device |
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CN2390053Y true CN2390053Y (en) | 2000-08-02 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN 98214994 Expired - Fee Related CN2390053Y (en) | 1998-06-01 | 1998-06-01 | Superhigh vacuum coaxial rotating, translation differential feed-in device |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102345107A (en) * | 2010-08-02 | 2012-02-08 | 北京中科信电子装备有限公司 | Seal assembly of sliding and rotating shaft |
CN107833822A (en) * | 2017-11-02 | 2018-03-23 | 中国科学院合肥物质科学研究院 | A kind of narrow space-closed ultrahigh vacuum chamber system |
CN109114222A (en) * | 2018-10-10 | 2019-01-01 | 桂林实创真空数控设备有限公司 | A kind of flexible sealing conducting wire rigid-connecting device eliminating vacuum chamber deformation and influencing |
-
1998
- 1998-06-01 CN CN 98214994 patent/CN2390053Y/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102345107A (en) * | 2010-08-02 | 2012-02-08 | 北京中科信电子装备有限公司 | Seal assembly of sliding and rotating shaft |
CN107833822A (en) * | 2017-11-02 | 2018-03-23 | 中国科学院合肥物质科学研究院 | A kind of narrow space-closed ultrahigh vacuum chamber system |
CN109114222A (en) * | 2018-10-10 | 2019-01-01 | 桂林实创真空数控设备有限公司 | A kind of flexible sealing conducting wire rigid-connecting device eliminating vacuum chamber deformation and influencing |
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C57 | Notification of unclear or unknown address | ||
DD01 | Delivery of document by public notice |
Addressee: Beijing bridge of Light Trade Co. Ltd. Document name: Notice of conformity |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C19 | Lapse of patent right due to non-payment of the annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |