CN224057118U - A type of bubble cabinet - Google Patents
A type of bubble cabinetInfo
- Publication number
- CN224057118U CN224057118U CN202520814174.5U CN202520814174U CN224057118U CN 224057118 U CN224057118 U CN 224057118U CN 202520814174 U CN202520814174 U CN 202520814174U CN 224057118 U CN224057118 U CN 224057118U
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- bubbling
- pipeline
- liquid
- weighing device
- bottle
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Abstract
本实用新型涉及一种鼓泡柜,包括鼓泡瓶、鼓气管路、出气管路、吹扫进气管路、吹扫排气管路、补液管路和称重装置；鼓泡瓶设于称重装置上；鼓气管路一端为载气进气口，另一端通过插底管连通至鼓泡瓶底部；出气管路一端为化学品出气口，另一端连通至鼓泡瓶顶部；补液管路一端为补液口，另一端通过插底管连通至鼓泡瓶底部；吹扫进气管路分别通过一隔膜阀连通鼓气管路、出气管路、补液管路和吹扫排气管路的文丘里组件，其另一端为吹扫气体进气口；文丘里组件连通吹扫气体出气口。其优点是：称重装置能够对罐体进行承重，提升TCS溶液液位的精确度，并与补液管路配合实现自动补液。
This utility model relates to a bubbling tank, including a bubbling bottle, a bubbling pipe, a gas outlet pipe, a purge inlet pipe, a purge outlet pipe, a liquid replenishment pipe, and a weighing device. The bubbling bottle is mounted on the weighing device. One end of the bubbling pipe is a carrier gas inlet, and the other end is connected to the bottom of the bubbling bottle via a bottom-inserting tube. One end of the gas outlet pipe is a chemical gas outlet, and the other end is connected to the top of the bubbling bottle. One end of the liquid replenishment pipe is a liquid replenishment port, and the other end is connected to the bottom of the bubbling bottle via a bottom-inserting tube. The purge inlet pipe is connected to the Venturi assembly of the bubbling pipe, the gas outlet pipe, the liquid replenishment pipe, and the purge outlet pipe via a diaphragm valve, and its other end is a purge gas inlet. The Venturi assembly is connected to the purge gas outlet. Its advantages are: the weighing device can support the tank, improving the accuracy of the TCS solution level, and it works in conjunction with the liquid replenishment pipe to achieve automatic liquid replenishment.
Description
Technical Field
The utility model relates to the technical field of photovoltaic silicon wafers/battery pieces in the photovoltaic industry, in particular to a bubbling cabinet.
Background
The bubbling process is to introduce carrier gas into a bubbling bottle containing special chemicals through a bubbling device to carry out bubbling vaporization, form bubbles containing liquid source steam, and then output the bubbles to a process machine. TCS bubbling technology is widely used in the semiconductor and photovoltaic industries for the long film segment of TCS for epitaxial wafers (EPI), i.e., a carrier gas (typically H 2) is bubbled through a specific liquid medium (typically silane or silicon compound) to form bubbles and mix them in the liquid.
In the above-described bubbling process, the liquid medium in the bubbler is continuously consumed as the production proceeds, and therefore, it is necessary to monitor the degree of consumption of the liquid medium in the bubbler and to supplement the liquid medium when the consumption exceeds a set threshold. There are currently two general ways of monitoring in the industry:
1. A floating ball liquid level sensor is arranged in the bubbling bottle to monitor the liquid level of the liquid medium in the bubbling bottle, so that the consumption degree of the liquid medium in the bubbling bottle is judged. However, the floating ball liquid level sensor has poor precision and easy failure, and can not ensure that the liquid level of the bubbling bottle is in an ideal interval, so that the stability of the concentration of TCS steam can not be ensured.
2. The weight of the bubbling bottle is weighed in real time by arranging a weighing device at the bottom of the bubbling bottle, so that the consumption degree of the liquid medium in the bubbling bottle is judged. However, in practice, the liquid level weight determination performed by only the scale is affected by multiple factors such as stress and signal interference, so that the liquid level in the bubbling bottle deviates, and the stability of the concentration of TCS vapor cannot be ensured.
Therefore, there is a need for improvements and optimizations to existing bubbling equipment to better meet user needs.
Disclosure of utility model
The embodiment of the utility model aims at solving the defects in the prior art by providing a bubbling cabinet aiming at the defects in the prior art.
In order to achieve the above purpose, the bubbling cabinet provided by the embodiment of the utility model is realized by the following technical scheme:
The bubbling cabinet is characterized by comprising a bubbling bottle, an air blowing pipeline, an air outlet pipeline, a purging air inlet pipeline, a purging exhaust pipeline, a liquid supplementing pipeline and a weighing device, wherein the bubbling bottle is arranged on the weighing device and is configured to be weighed in real time by the weighing device, a liquid level sensor for monitoring liquid level change of chemicals is arranged in the bubbling bottle, one end of the air blowing pipeline is a carrier gas inlet, the other end of the air blowing pipeline is communicated to the bottom of the bubbling bottle through a bottom inserting pipe, one end of the air outlet pipeline is a chemical air outlet, the other end of the air outlet pipeline is communicated to the top of the bubbling bottle, one end of the liquid supplementing pipeline is a liquid supplementing port, the other end of the liquid supplementing pipeline is communicated to the bottom of the bubbling bottle through a bottom inserting pipe, the purging air inlet pipeline is respectively communicated with a Venturi component in the air blowing pipeline, the air outlet pipeline, the liquid supplementing pipeline and the purging exhaust pipeline, the other end of the Venturi component is a purging gas inlet, the purging gas outlet is communicated with the purging gas outlet, and the purging gas outlet is communicated to the top of the bubbling bottle through a one-way valve.
The bubbling cabinet further comprises a cabinet body, the weighing device is directly or indirectly arranged at the bottom of the cabinet body, and the carrier gas inlet, the chemical gas outlet, the liquid supplementing port, the sweeping gas inlet and the sweeping gas outlet are correspondingly provided with interfaces at the outer side of the cabinet body.
The weighing device is arranged at the bottom of the cabinet body through a bracket, and a cavity capable of containing 110% of chemical with the maximum configuration capacity of the bubbling bottle is formed in the cabinet body below the bottom surface of the weighing device.
The level sensor is a float level gauge and the float level gauge is configured to have at least two level control points.
The air blowing pipeline is provided with a diaphragm valve, a pressure regulating valve, a pressure sensor and a one-way valve, the air outlet pipeline is provided with the diaphragm valve and the pressure sensor, the liquid supplementing pipeline is provided with the diaphragm valve, and the purging air inlet pipeline is provided with the diaphragm valve, the pressure sensor and the one-way valve.
The bubbling bottle comprises an outer container and an inner container for containing chemical substances, an interlayer is arranged between the inner container and the outer container, liquid heat exchange substances are arranged in the interlayer, and a liquid outlet and a liquid inlet are arranged in the interlayer, and the inner container is provided with a liquid inlet.
The bubbling cabinet further comprises a controller, and the controller is in control connection with the pressure sensor, the weighing device, the diaphragm valve and the liquid level sensor.
The venturi assembly comprises a venturi tube, a venturi gas inlet and a micro-leakage valve and a one-way valve which are arranged between the venturi tube and the venturi gas inlet.
Compared with the prior art, the utility model has the beneficial effects that:
1. The weighing device is arranged to bear the weight of the tank body, the liquid level sensor is arranged in the bubbling tank, and the weighing device is calibrated through the liquid level sensor so as to improve the accuracy of monitoring the liquid level of the TCS solution and automatically supplement liquid to the bubbling tank by matching with the liquid supplementing pipeline.
2. The bottom of the cabinet body is provided with the cavity capable of containing 110% of chemical with the maximum configuration capacity of the bubbling bottle, so that the chemical is prevented from overflowing the cabinet body when leaking, and a larger danger is caused.
3. The configuration purge pipeline is used for purging and protecting the pipeline with nitrogen, and the purging nitrogen and the vacuumizing are matched in a reciprocating mode, so that the problem that residual TCS in the pipeline directly enters air during replacement of the liquid tank is avoided, and environmental substances are prevented from entering the pipeline.
Drawings
The above features and advantages of the present utility model will become more apparent and readily appreciated from the following description of exemplary embodiments thereof, taken in conjunction with the accompanying drawings.
FIG. 1 is a front view of a bubbling cabinet according to an embodiment of the utility model;
FIG. 2 is a side view of a bubbling cabinet according to an embodiment of the utility model;
FIG. 3 is a schematic diagram of the internal structure of a bubbling cabinet according to an embodiment of the utility model;
FIG. 4 is a schematic diagram of a system mechanism of a bubbling cabinet according to an embodiment of the utility model;
fig. 5 is a schematic diagram of a pipeline structure of a bubbling cabinet according to an embodiment of the utility model.
Detailed Description
Other advantages and advantages of the present utility model will become apparent to those skilled in the art from the following detailed description, which, by way of illustration, is to be read in connection with certain specific embodiments, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The terms such as "front", "rear", "left", "right", "inner", "outer", and the like, as used in the present specification, are also for descriptive purposes only and are not intended to limit the scope of the utility model in which the utility model may be practiced, but rather the relative relationship of the terms may be altered or modified without materially altering the skill of the art to which the utility model pertains.
In the description of the embodiments below, unless explicitly stated and limited otherwise, the term "coupled" and the like should be construed broadly, e.g., the term "coupled" may be a fixed connection, a removable connection, or an integral body, or may be a mechanical connection, or may be an indirect connection via an intermediary, or may be a communication between two elements or an interaction relationship between two elements, unless explicitly stated otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
Referring to fig. 1-5, an embodiment of the present utility model proposes a bubbling cabinet, which includes a cabinet body 22, a bubbling bottle 23, a bubbling pipe 24, an air outlet pipe 25, a purge air inlet pipe 26, a purge air outlet pipe 27, a liquid supplementing pipe 28, and a weighing device 29.
The weighing device 29 is arranged at the bottom of the cabinet 22, the bubbling bottle 23 is arranged on the weighing device 29 and is configured to be weighed by the weighing device 29 in real time for monitoring the weight of chemicals in the bubbling bottle 23, supplementing the chemicals in the bubbling bottle 23 through the liquid supplementing pipeline 28 when the weight is low, and stopping supplementing the liquid when the weight is low.
In the specific embodiment, the weighing device 29 is disposed at the bottom of the cabinet 22 by a bracket 56, while the interior of the cabinet 22 is surface treated below the bottom surface of the weighing device 29 and forms a cavity capable of containing 110% of the maximum configured volume of chemical in the bubbler. In order to ensure the capacity of the cavity at the lower part of the cabinet body 22, a leakage-holding baffle 49 is further arranged at the lower part of the opening of the cabinet door of the cabinet body 22, the upper edge of the leakage-holding baffle 49 is basically level with the upper end of the bracket 56 or slightly lower than the bracket 56, the cavity is formed by sealing connection of the leakage-holding baffle and the side wall of the cabinet body, and the capacity is calculated and determined based on 1.1 times of the maximum liquid level height of the bubbling bottle. By this construction, it is possible to prevent the chemicals from overflowing the cabinet 22 when they leak, causing a greater risk. Meanwhile, the bottom in the cabinet 22 is also provided with a liquid leakage sensor 48, and when the liquid leakage sensor 48 detects liquid, the equipment stops all actions and gives an audible and visual alarm. Preferably, the number of the liquid leakage sensors is plural, and the liquid leakage sensors are installed at symmetrical positions at the bottom of the cabinet 22, so that the liquid leakage can still be effectively detected when a small amount of liquid leaks.
The bubbler bottle 23 comprises an outer container 30 and an inner container 31 for containing chemical substances, an interlayer is arranged between the inner container 31 and the outer container 30, a liquid heat exchange substance is arranged in the interlayer, in the embodiment, the liquid heat exchange substance is cooling water, a cooling water outlet joint 32 (to pipe) is arranged at the upper part of the outer container 30, a cooling water inlet joint 33 (from pipe) is arranged at the lower part of the outer container 30, the cooling water enters the interlayer through the cooling water inlet joint 33 below the outer container 30 of the bubbler bottle, and is sent out through the cooling water outlet joint 32 above, and is circulated for cooling. Compared with the cooling mode of arranging the cooling pipe, the sandwich cooling structure increases the contact area of heat exchange substances and chemicals, has good temperature control effect on the chemicals of the liner, and can maintain stable vapor pressure. The corresponding cabinet 22 is provided with a cooling water outlet reserved joint 34 and a cooling water inlet reserved joint 35 which are respectively communicated with the cooling water inlet joint 33 and the cooling water outlet joint 32 and are used for connecting an external water source.
A liquid level sensor 36 is arranged in the liner 31 for monitoring the change of the liquid level of the chemical, in this embodiment, the liquid level sensor is a floating ball liquid level meter with four liquid level control points. In this embodiment, the weighing device 29 is calibrated by means of the level sensor 36 before use of the bubble cabinet. Thereafter, during the production process, each time the liquid in the liner 31 reaches a level control point of the level sensor 36, a signal is sent to the controller, the controller calculates the weight of the chemical based on the signal, compares the weight with the data of the weighing device 29, and sends an alarm signal when the deviation exceeds a threshold value. In short, the weighing of the chemical in this solution is mainly achieved by continuous weight measurement with the weighing device 29, and the level sensor 36 is used as a calibration and redundant safety backup for the weighing device 29.
Of course, the above-described choice of level sensor is not limited to a float gauge, but other types of level sensors, such as magnetostrictive level sensors, etc., may be used.
One end of the air blowing pipeline 24 is a carrier air inlet 37, and a two-way manual diaphragm valve 5, a pressure regulating valve 6, a pressure sensor 7, a one-way valve 8 and a two-way pneumatic diaphragm valve 9 are sequentially arranged on the carrier air inlet 37, and the other end of the air blowing pipeline is communicated to the bottom of the bubbling bottle 23 through a bottom inserting pipe 38. Through the above structure, the bubbling pipe 24 can perform pressure adjustment on the carrier gas, and ensures that the carrier gas pressure input into the bubbling tank is the required pressure.
One end of the air outlet pipeline 25 is provided with a chemical carrier gas outlet 39, and a two-way manual diaphragm valve 10, a pressure sensor 11 and a two-way pneumatic diaphragm valve 12 are sequentially arranged on the chemical carrier gas outlet 39, and the other end of the air outlet pipeline is communicated to the top of the bubbling bottle 23. The output line gas pressure can be monitored by means of the pressure sensor 11.
With the above structure, carrier gas (carrygas) is sent to the bottom of the bubbler bottle 23 through the bubbling pipe 24, the liquid source evaporates and gasifies, and the evaporated gas is sent out through the gas outlet pipe 25.
One end of the fluid infusion pipeline 28 is connected with a fluid infusion port 40, a two-way manual diaphragm valve 13, a two-way pneumatic diaphragm valve 14 and a two-way pneumatic diaphragm valve 15 are sequentially arranged on the fluid infusion port 40, and the other end of the fluid infusion pipeline is communicated to the bottom of the bubbling bottle 23 through a bottom insertion pipe 41 and is used for supplementing chemicals for the bubbling bottle 23 through the fluid infusion port 40. The liquid supplementing pipeline 28 is matched with the weighing device 29 to supplement liquid, and when the liquid is supplemented, diaphragm valves of the air blowing pipeline 24 and the air outlet pipeline 25 are in a closed state.
The purge gas inlet 51 is arranged at one end of the purge gas inlet pipeline 26, and the two-way manual diaphragm valve 1, the one-way valve 2, the two-way pneumatic diaphragm valve 3 and the pressure sensor 4 are sequentially arranged on the purge gas inlet 51. The other end of the purge air inlet pipe 26 is communicated with:
A pipeline between the two-way pneumatic diaphragm valve 9 and the bubbling bottle 23, which is communicated with the bubbling pipeline 24 through the two-way pneumatic diaphragm valve 19;
A pipeline between the two-way pneumatic diaphragm valve 12 and the bubbling bottle 23, which is communicated with the air outlet pipeline 25 through the two-way pneumatic diaphragm valve 18;
a pipeline between the two-way pneumatic diaphragm valve 15 and the bubbling bottle 23, which is communicated with the fluid infusion pipeline 28 through the two-way pneumatic diaphragm valve 17;
Is communicated to the venturi assembly of the purge vent line 27 through the two-way pneumatic diaphragm valve 16.
The purge vent line 27 is provided with a venturi assembly 21, the venturi assembly 21 communicates with a purge gas outlet 42, and the purge gas outlet 42 also communicates to the top of the bubbler bottle 23 through a one-way valve. Specifically, the venturi assembly includes a venturi, a venturi gas inlet 55, and a pneumatic bleed valve and a check valve disposed therebetween. The GN2 fed through the venturi gas inlet 55 provides a gas flow for the venturi effect through which the in-line gas is exhausted through the purge gas outlet 42 and drawn to negative pressure.
Through above-mentioned purge inlet line 26 and purge exhaust line 27, can use PN2 to sweep its pipe valve spare, guarantee that the pipeline is clean pollution-free.
The top of the cabinet 22 is provided with a control box 43, and a PLC of the control box 43 controls the opening and closing of the electromagnetic valve through a PLC program and controls the connection of the pressure sensor and the weighing device. The pneumatic diaphragm valves in the air blowing pipeline 24, the air outlet pipeline 25, the purging air inlet pipeline 26, the purging air exhaust pipeline 27 and the fluid supplementing pipeline 28 can be opened and closed by opening and closing the electromagnetic valves so as to realize the functions of automatic bubbling and automatic fluid supplementing.
A safety assembly is also provided on the cabinet 22. The safety assembly includes safety sensors such as a flame sensor 44, a high temperature sensor 45, a leak sensor, etc., and when the safety device is triggered, the device will cease to operate automatically and alarm.
Wherein, flame sensor 44 installs at the inboard top of main casing for when detecting the flame in the cabinet, the equipment stops automatic operation, and has alarm display. The high temperature sensor 45 is installed at the top of the inner side of the main shell, and is used for stopping automatic operation of the equipment and displaying an alarm when detecting the high temperature in the cabinet. The side of the cabinet 22 is provided with a carbon dioxide fire extinguisher reservation interface 46, and when the safety device at the top of the inner side of the shell detects flame/high temperature, the control box 43 is linked with an external CO2 fire extinguisher to extinguish fire in the cabinet.
In addition, the top of the cabinet 22 is also provided with an air extracting device 50 which can extract air from the interior of the housing and is discharged through a pipeline mounted on an air extracting device interface 51. The exhaust device can maintain micro negative pressure in the shell 1, so that dangerous gas is prevented from overflowing. When the safety device at the top of the inside of the housing detects a flame/high temperature, the control box 43 is linked to the closing of the suction device 50, avoiding sparks from entering the suction duct, causing a greater risk.
The door of the cabinet 22 is provided with a door sensor 52, and if a door opening action is detected in the normal operation process of the equipment, an alarm is triggered to carry out safety prompt, and the alarm can be remotely monitored.
The cabinet door of the cabinet body 22 is also provided with an emergency stop button 53 and a tri-colored lamp 54, and the emergency stop button 53 is placed on the right side of the touch screen on the front of the equipment. After the emergency stop button 53 is pressed, the apparatus stops the automatic operation and has an alarm display. The equipment is provided with a remote turn-off input point, and when a remote turn-off signal is sent to control, the equipment stops liquid supply and has alarm display. A tri-color light 54 is placed on the left side of the front touch screen of the device for visually displaying the device operating status. When the program alarm occurs, the three-color lamp 54 displays according to the alarm level, the green light is on for normal operation, the yellow light is on for equipment alarm to be checked, the red light is on for serious problem, and the operation is stopped immediately.
Compared with the prior art, the utility model has the beneficial effects that:
1. The weighing device is arranged to bear the weight of the tank body, the liquid level sensor is arranged in the bubbling tank, and the weighing device is calibrated through the liquid level sensor so as to improve the accuracy of monitoring the liquid level of the TCS solution and automatically supplement liquid to the bubbling tank by matching with the liquid supplementing pipeline.
2. The bottom of the cabinet body is provided with the cavity capable of containing 110% of chemical with the maximum configuration capacity of the bubbling bottle, so that the chemical is prevented from overflowing the cabinet body when leaking, and a larger danger is caused.
3. The configuration purge pipeline is used for purging and protecting the pipeline with nitrogen, and the purging nitrogen and the vacuumizing are matched in a reciprocating mode, so that the problem that residual TCS in the pipeline directly enters air during replacement of the liquid tank is avoided, and environmental substances are prevented from entering the pipeline.
While the intent and embodiments of the present utility model have been described in detail by way of examples, those skilled in the art to which the utility model pertains will appreciate that the foregoing examples are merely illustrative of the preferred embodiments of the present utility model, and that it is not intended to list all embodiments individually and that any implementation embodying the technical scheme of the present utility model is within the scope of the present utility model.
It should be noted that the above description of the present utility model is further detailed in connection with the specific embodiments, and it should not be construed that the specific embodiments of the present utility model are limited thereto, and those skilled in the art can make various improvements and modifications on the basis of the above-described embodiments while falling within the scope of the present utility model.
Claims (8)
1. The bubbling cabinet is characterized by comprising a bubbling bottle, an air blowing pipeline, an air outlet pipeline, a purging air inlet pipeline, a purging exhaust pipeline, a liquid supplementing pipeline and a weighing device, wherein the bubbling bottle is arranged on the weighing device and is configured to be weighed in real time by the weighing device, a liquid level sensor for monitoring liquid level change of chemicals is arranged in the bubbling bottle, one end of the air blowing pipeline is a carrier gas inlet, the other end of the air blowing pipeline is communicated to the bottom of the bubbling bottle through a bottom inserting pipe, one end of the air outlet pipeline is a chemical air outlet, the other end of the air outlet pipeline is communicated to the top of the bubbling bottle, one end of the liquid supplementing pipeline is a liquid supplementing port, the other end of the liquid supplementing pipeline is communicated to the bottom of the bubbling bottle through a bottom inserting pipe, the purging air inlet pipeline is respectively communicated with a Venturi component in the air blowing pipeline, the air outlet pipeline, the liquid supplementing pipeline and the purging exhaust pipeline, the other end of the Venturi component is a purging gas inlet, the purging gas outlet is communicated with the purging gas outlet, and the purging gas outlet is communicated to the top of the bubbling bottle through a one-way valve.
2. The bubbling cabinet according to claim 1, further comprising a cabinet body, wherein the weighing device is directly or indirectly arranged at the bottom of the cabinet body, and the carrier gas inlet, the chemical gas outlet, the liquid supplementing port, the purge gas inlet and the purge gas outlet are correspondingly provided with interfaces at the outer side of the cabinet body.
3. A bubbling cabinet according to claim 2, wherein the weighing device is arranged at the bottom of the cabinet body through a bracket, and the cabinet body below the bottom surface of the weighing device forms a cavity capable of containing 110% of the maximum configured capacity chemicals of the bubbling bottle.
4. The bubble column of claim 1, wherein the level sensor is a float level gauge and the float level gauge is configured to have at least two level control points.
5. A bubbling cabinet according to any one of claims 1-4 is characterized in that a diaphragm valve, a pressure regulating valve, a pressure sensor and a one-way valve are arranged on the bubbling pipeline, a diaphragm valve and a pressure sensor are arranged on the gas outlet pipeline, a diaphragm valve is arranged on the liquid supplementing pipeline, and a diaphragm valve, a pressure sensor and a one-way valve are arranged on the purging gas inlet pipeline.
6. The bubbling cabinet of claim 5, wherein the bubbling bottle comprises an outer container and an inner container for containing chemical substances, an interlayer is arranged between the inner container and the outer container, a liquid heat exchange substance is arranged in the interlayer, and a liquid outlet and a liquid inlet are arranged.
7. The bubbling cabinet according to claim 6, further comprising a controller in control connection with said pressure sensor, weighing device, diaphragm valve and liquid level sensor.
8. The bubbling cabinet according to claim 7, wherein said venturi assembly comprises a venturi, a venturi gas inlet, and a micro-leakage valve and a one-way valve disposed therebetween.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202520814174.5U CN224057118U (en) | 2025-04-27 | 2025-04-27 | A type of bubble cabinet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202520814174.5U CN224057118U (en) | 2025-04-27 | 2025-04-27 | A type of bubble cabinet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN224057118U true CN224057118U (en) | 2026-03-31 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202520814174.5U Active CN224057118U (en) | 2025-04-27 | 2025-04-27 | A type of bubble cabinet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN224057118U (en) |
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2025
- 2025-04-27 CN CN202520814174.5U patent/CN224057118U/en active Active
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