CN224024422U - A clog-resistant semiconductor waste liquid filtration mechanism - Google Patents

Abstract

This utility model discloses an anti-clogging semiconductor waste liquid filtration mechanism, including a filter tank. A top cover is detachably connected to the top of the filter tank via bolts. An inlet pipe is fixedly connected to one side of the filter tank near the top. A filter cartridge is fixedly connected to the center of the bottom inner wall of the filter tank. An outlet pipe is fixedly connected to the bottom of the filter tank, inside the filter cartridge. Two threaded rods are rotatably connected to the bottom inner wall of the filter tank via bearings, and connecting plates are threaded to the outer sides of both threaded rods. This utility model not only prevents the filter cartridge from clogging and eliminates the need for disassembly and cleaning of the filter cartridge, saving time and improving filtration efficiency, but also prevents solid particles from adhering to the inner wall of the filter tank, improving the effectiveness of the filtration mechanism. Furthermore, it facilitates the removal of solid particles from the filter tank by operators.

Description

Anti-blocking semiconductor waste liquid filtering mechanism

Technical Field

The utility model relates to the technical field of semiconductor waste liquid filtration, in particular to an anti-blocking semiconductor waste liquid filtration mechanism.

Background

The waste liquid produced in the semiconductor industry contains toxic and harmful substances such as gallium arsenide-containing grinding liquid, polishing liquid and the like, and in order to achieve the environmental emission standard, the semiconductor waste liquid needs to be treated, and in order to avoid solid particles (such as grinding fine powder and alumina precipitate) in the waste liquid from being deposited on equipment components such as a pipeline, a valve, a vacuum gauge and the like in the treatment process of the semiconductor waste liquid, the filtration of the semiconductor waste liquid is an indispensable treatment measure.

At present, when the semiconductor waste liquid is filtered, solid particles in the semiconductor waste liquid are filtered by adopting a filter plate, and after the filter plate is used for a long time, the solid particles can block filter holes of the filter plate, so that the using effect of the filter plate is affected, and the filter plate is detached and cleaned at present, so that the filtering efficiency of the semiconductor waste liquid is affected more troublesome.

Disclosure of utility model

The utility model aims to solve the defects in the prior art and provides an anti-blocking semiconductor waste liquid filtering mechanism.

In order to achieve the above purpose, the present utility model adopts the following technical scheme:

The utility model provides a prevent semiconductor waste liquid filtering mechanism of jam, includes the filtration jar, the top of filtration jar is through the bolt detachably connected with the top cap, the one side of filtration jar is close to the position fixedly connected with feed liquor pipe at top, the bottom inner wall of filtration jar is located the position fixedly connected with of center department and strains a section of thick bamboo, the bottom of filtration jar is located the position fixedly connected with drain pipe of straining a section of thick bamboo, the bottom inner wall of filtration jar is connected with two threaded rods through the bearing rotation, two equal threaded connection in the outside of threaded rod has the connecting plate, two fixedly connected with scrapes the ring between the connecting plate, scrape the inner circle of ring and be equipped with the brush hair, strain a section of thick bamboo and pass the inner circle of scraping the ring, make and scrape the ring along straining the outer lane of straining a section of thick bamboo reciprocates, be equipped with the drive threaded rod in the top cap and carry out pivoted power component.

As a still further scheme of the utility model, the power assembly comprises a U-shaped frame, the U-shaped frame is fixedly connected to the outer wall of the top cover, the top of the U-shaped frame is fixedly connected with a gear motor, one end of an output shaft of the gear motor penetrates through a key of the U-shaped frame to be connected with a connecting shaft, the bottom end of the connecting shaft is fixedly connected with the connecting frame, the outer side of the connecting frame is fixedly connected with a toothed ring, and the top ends of the two threaded rods are respectively connected with gears meshed with the toothed ring in a key manner.

As a still further proposal of the utility model, two scraping frames which are symmetrically distributed are fixedly connected with the outer side of the toothed ring, and the scraping frames are attached to the inner wall of the filter tank.

As a still further proposal of the utility model, a drain outlet is arranged at the position of one side of the filter tank, which is close to the bottom, a baffle door is clamped in the drain outlet, two sealing plates are fixedly connected with one side of the baffle door, and the sealing plates are fixed with the filter tank through bolts.

As a still further proposal of the utility model, a sealing gasket is arranged between the baffle door and the sewage outlet, and the sealing gasket is fixed with the baffle door.

As a still further proposal of the utility model, the top of the filter tank is fixedly connected with two symmetrically distributed inserted bars, the bottom of the top cover is provided with two slots, and the inserted bars are inserted with the slots.

As a still further proposal of the utility model, the height of the filter cylinder is equal to the height of the inside of the filter tank, and the liquid inlet pipe is positioned below the scraping ring.

The beneficial effects of the utility model are as follows:

1. Through the cooperation of threaded rod and scraping the ring, the threaded rod drives and scrapes the ring and move downwards along the outer lane of straining the jar, makes scrape the ring and scrape the clearance to straining the solid particle on the outer lane of straining the jar to avoid straining the jar and take place to block up, need not dismantle the clearance to straining the jar simultaneously, saved the time, improved filtration efficiency.

2. Through the setting of scraping the frame, scrape the frame and rotate in the filtration jar, make scrape the frame and scrape the clearance to the solid particle of the inside adhesion of filtration jar to avoid solid particle adhesion on the filtration jar inner wall, improved filtering mechanism's result of use.

3. Through the cooperation of drain and shutter, the drain makes things convenient for the staff to clear up out the filter tank with the inside solid particle of filter tank, and the shutter seals the drain through sealed pad, can avoid liquid to take place to leak, has improved the convenience of solid particle clearance.

Drawings

FIG. 1 is a schematic perspective view of a blocking-preventing semiconductor waste liquid filtering mechanism according to the present utility model;

FIG. 2 is a schematic top view of the structure of the anti-clogging mechanism for filtering semiconductor waste liquid;

fig. 3 is a schematic diagram of a partial cross-sectional structure of an anti-blocking semiconductor waste liquid filtering mechanism according to the present utility model.

The filter comprises a filter tank 1, a top cover 2, a connecting shaft 3, a reduction motor 4, a U-shaped frame 5, a liquid inlet pipe 6, a drain outlet 7, a baffle door 8, a sealing plate 9, a sealing plate 10, a liquid outlet pipe 11, a filter cartridge 12, a threaded rod 13, a scraping ring 14, a connecting plate 15, a gear 17, a connecting frame 18, a toothed ring 19, a scraping frame 20, a plug rod 21 and a slot.

Detailed Description

The technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model, and the described embodiments are only some embodiments, but not all embodiments of the present utility model, based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without making any creative effort are all within the scope of protection of the present utility model.

Referring to fig. 1-3, an anti-blocking semiconductor waste liquid filtering mechanism comprises a filtering tank 1, wherein a top cover 2 is detachably connected to the top of the filtering tank 1 through bolts, a liquid inlet pipe 6 is welded at a position, close to the top, of one side of the filtering tank 1, a filtering cylinder 11 is fixed at a position, located at the center, of the inner wall of the bottom of the filtering tank 1 through bolts, a liquid outlet pipe 10 is welded at a position, located right below the filtering cylinder 11, of the bottom of the filtering tank 1, the height of the filtering cylinder 11 is equal to that of the inside of the filtering tank 1, the liquid inlet pipe 6 is located below a scraping ring 13, semiconductor waste liquid is added into the filtering tank 1 through the liquid inlet pipe 6, and because the liquid outlet pipe 10 is located right below the filtering cylinder 11, the semiconductor waste liquid is discharged through the liquid outlet pipe 10 after solid particles are filtered through the filtering cylinder 11, so that the filtration of the semiconductor waste liquid is realized;

According to the utility model, the bottom inner wall of the filter tank 1 is rotationally connected with two threaded rods 12 through a bearing, the bearing is a waterproof bearing with the model number 6004, the outer sides of the two threaded rods 12 are respectively connected with a connecting plate 14 in a threaded manner, a scraping ring 13 is welded between the two connecting plates 14, bristles are arranged on the inner ring of the scraping ring 13, a filter cylinder 11 penetrates through the inner ring of the scraping ring 13, so that the scraping ring 13 moves up and down along the outer ring of the filter cylinder 11, and in the process of downward movement of the scraping ring 13, the scraping ring 13 and the bristles scrape and clean solid particles on the outer ring of the filter cylinder 11, so that the filter cylinder 11 is prevented from being blocked, meanwhile, the filter cylinder 11 is not required to be disassembled and cleaned, the time is saved, and the filtering efficiency is improved;

In particular, be equipped with the power pack that drive threaded rod 12 rotated in the top cap 2, power pack includes U type frame 5, U type frame 5 passes through the bolt fastening at the top outer wall of top cap 2, the top of U type frame 5 is through the bolt fastening gear motor 4, gear motor 4's model is 5IK180RGN-CF+5GN7.5K, the one end of gear motor 4 output shaft passes U type frame 5 key-type and is connected with connecting axle 3, the bottom of connecting axle 3 is through the bolt fastening link 17, the outside of connecting frame 17 is through the bolt fastening toothed ring 18, the top of two threaded rods 12 all key-type is connected with the gear 15 with toothed ring 18 engaged with, start gear motor 4 corotation, gear motor 4 can drive connecting frame 17 through connecting axle 3 and rotate, the toothed ring 18 can drive gear 15 through the meshing between with the gear 15 and rotate, gear 15 can drive 12 through the screw thread meshing between threaded rod 12 and connecting plate 14 can make connecting plate 14 drive the scraping ring 13 along the outer lane of straining a section 11 and move down, when gear motor 4 reverses, can make scraping ring 13 and reset upward along straining section 11.

The outside welding that needs special explanation has two symmetrical distributions scrapes the frame 19, and scrape the frame 19 and the inner wall of filtration jar 1 laminating mutually, and can drive and scrape the frame 19 and rotate when the ring 18 pivoted, make and scrape the frame 19 and scrape the clearance to the solid particle of adhesion on the filtration jar 1 inner wall, thereby avoid solid particle adhesion on filtration jar 1 inner wall, filter mechanism's result of use has been improved, the drain 7 has been seted up to the position that one side of filtration jar 1 is close to the bottom, the joint has shutter 8 in the drain 7, one side welding of shutter 8 has two shrouding 9, and shrouding 9 is fixed mutually with filtration jar 1 through the bolt, be equipped with sealed pad between shutter 8 and the drain 7, and sealed pad is fixed mutually with shutter 8, through the setting of drain 7, after the filtration of semiconductor waste liquid is accomplished, dismantle shutter 8 from the drain 7, so that can pass through the drain 7 with the solid particle who clears up in the filtration jar 1, make things convenient for the staff to clear up the inside solid particle of filtration jar 1 out filtration jar 1, and drain 7, and the top cap 21 is equipped with two top cap 21 in the top cap 21 when the top cap 20 is installed to the top cap 21, and the top cap 20 is inserted to the top cap is installed to the top cap 2, thereby the top cap is equipped with the top cap 20 and the top cap is inserted in the sealing rod is installed to the top cap 21.

When cleaning is needed, the gear motor 4 is started to rotate positively, the gear motor 4 drives the connecting frame 17 to rotate through the connecting shaft 3, the connecting frame 17 drives the toothed ring 18 to rotate, the toothed ring 18 drives the gear 15 to rotate through meshing with the gear 15, the gear 15 drives the threaded rod 12 to rotate, the threaded rod 12 drives the connecting plate 14 to drive the scraping ring 13 to move downwards along the outer ring of the filter cylinder 11 through meshing with threads between the connecting plate 14, so that the scraping ring 13 and bristles scrape and clean solid particles on the outer ring of the filter cylinder 11, the filter cylinder 11 is prevented from being blocked, meanwhile, the filter cylinder 11 is not required to be disassembled and cleaned, the time is saved, the filtering efficiency is improved, the scraping frame 19 is driven to rotate while the toothed ring 18 rotates, the solid particles adhered on the inner wall of the filter cylinder 1 are scraped and cleaned by the scraping frame 19, the solid particles are prevented from adhering to the inner wall of the filter cylinder 1, and the using effect of the filtering mechanism is improved.

Further, although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations may be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. A clogging-resistant semiconductor waste liquid filtration mechanism, comprising a filter tank (1), characterized in that a top cover (2) is detachably connected to the top of the filter tank (1) by bolts, an inlet pipe (6) is fixedly connected to one side of the filter tank (1) near the top, a filter cartridge (11) is fixedly connected to the bottom inner wall of the filter tank (1) at the center, and an outlet pipe (10) is fixedly connected to the bottom of the filter tank (1) inside the filter cartridge (11). 1) The bottom inner wall is rotatably connected to two threaded rods (12) by bearings. The outer sides of the two threaded rods (12) are threaded with connecting plates (14). A scraper ring (13) is fixedly connected between the two connecting plates (14). The inner ring of the scraper ring (13) is provided with bristles. The filter cylinder (11) passes through the inner ring of the scraper ring (13), so that the scraper ring (13) moves up and down along the outer ring of the filter cylinder (11). The top cover (2) is provided with a power component that drives the threaded rods (12) to rotate. 2. The anti-clogging semiconductor waste liquid filtration mechanism according to claim 1, characterized in that the power component includes a U-shaped frame (5), the U-shaped frame (5) is fixedly connected to the top outer wall of the top cover (2), a reduction motor (4) is fixedly connected to the top of the U-shaped frame (5), one end of the output shaft of the reduction motor (4) passes through the U-shaped frame (5) and is keyed to a connecting shaft (3), a connecting frame (17) is fixedly connected to the bottom end of the connecting shaft (3), a gear ring (18) is fixedly connected to the outer side of the connecting frame (17), and a gear (15) meshing with the gear ring (18) is keyed to the top ends of the two threaded rods (12). 3. The anti-clogging semiconductor waste liquid filtration mechanism according to claim 2, characterized in that two symmetrically distributed scrapers (19) are fixedly connected to the outer side of the toothed ring (18), and the scrapers (19) are in contact with the inner wall of the filter tank (1). 4. The anti-clogging semiconductor waste liquid filtration mechanism according to claim 1, characterized in that a drain port (7) is provided on one side of the filter tank (1) near the bottom, a baffle (8) is snapped into the drain port (7), and two sealing plates (9) are fixedly connected to one side of the baffle (8), and the sealing plates (9) are fixed to the filter tank (1) by bolts. 5. A semiconductor waste liquid filtration mechanism for preventing clogging according to claim 4, characterized in that a sealing gasket is provided between the baffle (8) and the drain (7), and the sealing gasket is fixed to the baffle (8). 6. The anti-clogging semiconductor waste liquid filtration mechanism according to claim 1, characterized in that two symmetrically distributed insert rods (20) are fixedly connected to the top of the filter tank (1), and two slots (21) are opened at the bottom of the top cover (2), and the insert rods (20) are inserted into the slots (21). 7. A semiconductor waste liquid filtration mechanism for preventing clogging according to claim 1, characterized in that the height of the filter cylinder (11) is equal to the height inside the filter tank (1), and the liquid inlet pipe (6) is located below the scraper ring (13).