CN223897420U - A semiconductor liquid testing device - Google Patents

A semiconductor liquid testing device

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Publication number
CN223897420U
CN223897420U CN202520395370.3U CN202520395370U CN223897420U CN 223897420 U CN223897420 U CN 223897420U CN 202520395370 U CN202520395370 U CN 202520395370U CN 223897420 U CN223897420 U CN 223897420U
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CN
China
Prior art keywords
liquid
pipeline
pneumatic
valve
manual valve
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Active
Application number
CN202520395370.3U
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Chinese (zh)
Inventor
王金城
李振昌
乔正收
刘猛
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Zhenjiang Runjing High Purity Chemical Technology Co ltd
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Zhenjiang Runjing High Purity Chemical Technology Co ltd
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Priority to CN202520395370.3U priority Critical patent/CN223897420U/en
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Abstract

本实用新型公开了一种半导体液体测试装置,可分为两个状态,供液进行状态下气动泵正常工作配合气动阀A在待抽液体桶内抽取液体输送至测试供应点;另一种供液结束状态:待抽液体桶中液体被抽空后,气动阀B关闭的同时打开手动阀A放出气动泵至待抽液体桶之间管路的液体,同时打开手动阀B排出气动泵至气动阀C之间管路的液体,当然也包括气动泵与气动阀B之间的管路,清空后避免了垂直向上打液时,停止气动泵时由于管道内还残存部分液体,液体回流下来对气动泵产生的冲击;手动阀D的作用在于工作前可对过滤装置进行泄压,手动阀E的作用在于作业结束后可排净过滤装置内液体。

This utility model discloses a semiconductor liquid testing device, which can be divided into two states. In the liquid supply state, the pneumatic pump works normally in conjunction with the pneumatic valve A to draw liquid from the liquid tank and deliver it to the test supply point. In the liquid supply end state, after the liquid in the liquid tank is emptied, the pneumatic valve B is closed and the manual valve A is opened to release the liquid in the pipeline between the pneumatic pump and the liquid tank. At the same time, the manual valve B is opened to discharge the liquid in the pipeline between the pneumatic pump and the pneumatic valve C, including the pipeline between the pneumatic pump and the pneumatic valve B. After emptying, it avoids the impact on the pneumatic pump caused by the liquid flowing back down when the pneumatic pump is stopped due to the remaining liquid in the pipeline when the liquid is pumped vertically upward. The function of the manual valve D is to depressurize the filter device before operation, and the function of the manual valve E is to drain the liquid in the filter device after operation.

Description

Semiconductor liquid testing device
Technical Field
The utility model relates to the field of semiconductor liquid, in particular to a semiconductor liquid testing device.
Background
Semiconductor liquids are one type of liquid that can be used in the manufacture of electronic components. They have the characteristics of semiconductor materials, including adjustable resistance, conductance, capacitance, and the like. The semiconductor liquid is typically an organic or inorganic compound such as a polymer, a silane, a metal organic compound, and the like.
Conventional conditions for semiconductor liquid testing generally use a pneumatic pump for pumping liquid, but the pneumatic pump has fewer pipe fittings and valves arranged on a liquid inlet pipe and a liquid outlet pipe.
The Chinese patent publication No. CN211339749U discloses a liquid supply system of spinning equipment, which comprises a vacuum tank (100), a liquid outlet barrel (200), a solution tank (300), a pressure barrel and a liquid adding barrel (600), wherein the solution tank (300) is connected with the liquid outlet barrel (200), the liquid outlet barrel (200) is connected with the vacuum tank (100), the solution tank (300) is connected with the pressure barrel, and the pressure barrel is connected with the liquid adding barrel (600).
In summary, the conventional semiconductor liquid test has a plurality of defects, which are summarized as follows:
The conventional conditions for semiconductor liquid testing generally use a pneumatic pump to pump liquid, but the pneumatic pump pumps liquid inlet pipes and liquid outlet pipes are provided with less pipes and valves,
The conventional conditions for semiconductor liquid testing generally use a pneumatic pump to pump liquid, but the liquid inlet pipe and the liquid outlet pipe of the pneumatic pump are provided with fewer pipe fittings and valves, when the liquid is pumped vertically upwards, when the pump is stopped, the liquid flows back to generate impact on the pump and damage the pump structure because of residual liquid in the pipeline, the height of the pump is generally fixed, when the position of the liquid inlet pipeline is higher, residual liquid in the pipeline cannot be effectively emptied, and the liquid particles are possibly increased due to a packaging barrel, and the liquid in the increased filter is difficult to drain.
Disclosure of Invention
In order to solve the problems, the utility model provides a semiconductor liquid testing device.
In order to achieve the above object, the present utility model is achieved by the following technical scheme.
A semiconductor liquid testing device comprises a pneumatic pump, a pneumatic valve A, a pneumatic valve B, a pneumatic valve C, a manual valve A, a manual valve B, a manual valve C and a filtering device,
The manual valve A is horizontally connected with the liquid inlet of the pneumatic pump through a pipeline, one end of the pneumatic valve A is vertically connected with the manual valve A from top to bottom through a pipeline, the connecting position is positioned in the middle of the connecting pipeline of the manual valve A and the liquid inlet of the pneumatic pump,
One end of the manual valve C is vertically connected with the manual valve B from top to bottom through a pipeline, the other end of the manual valve C is connected with the filter through a pipeline, the liquid outlet of the pneumatic pump is connected with the pipeline between the manual valve C and the manual valve B through a pipeline,
One ends of the pneumatic valve B and the pneumatic valve C are connected in series through a pipeline and are connected to the filtering device in an extending manner, the testing device can be divided into two states, and the pneumatic pump 1 works normally under the liquid supply state and is matched with the pneumatic valve A to pump liquid in the liquid barrel to be pumped and convey the liquid to the testing supply point;
The other liquid supply end state is that after the liquid in the liquid barrel to be pumped is pumped out, the pneumatic valve B is closed, the manual valve A is opened to discharge the liquid from the pneumatic pump to the pipeline between the liquid barrels to be pumped out, and meanwhile, the manual valve B is opened to discharge the liquid from the pneumatic pump to the pipeline between the pneumatic valve C, and the liquid supply end state also comprises the pipeline between the pneumatic pump and the pneumatic valve B;
The manual valve D is used for releasing pressure on the filter before operation, and the manual valve E is used for draining liquid in the filter after operation;
The flowmeter is convenient to observe the operation condition of the pneumatic pump, ensures that the pneumatic pump is in a normal working range, and prevents pressure from being held back in each pipeline by the pressure gauge, so that accidents occur.
Preferably, the top of the filtering device is provided with a manual valve D in a downward extending connection through a pipeline.
Preferably, the bottom of the filtering device is provided with a manual valve E in a downward extending connection through a pipeline.
Preferably, a flowmeter is arranged on a pipeline connected with the manual valve C and the filtering device.
Preferably, a pressure gauge is arranged on a pipeline connected with the pneumatic valve C and the filtering device.
Preferably, the other end of the pneumatic valve A is connected with the liquid barrel to be pumped through a pipeline.
Preferably, the other end of the pneumatic valve B is connected with the empty liquid barrel through a pipeline.
Preferably, the other end of the pneumatic valve C is connected with a test supply point through a pipeline.
Compared with the prior art, the utility model discloses a semiconductor liquid testing device, which comprises a pneumatic pump, a pneumatic valve A, a pneumatic valve B, a pneumatic valve C, a manual valve A, a manual valve B, a manual valve C and a filtering device, wherein the testing device can be used in combination and acts in two states, and the pneumatic pump 1 can work normally under the liquid supply state and is matched with the pneumatic valve A to pump liquid in a liquid barrel to be pumped to a testing supply point;
The other liquid supply end state is that after the liquid in the liquid barrel to be pumped is pumped out, the pneumatic valve B is closed, the manual valve A is opened to discharge the liquid from the pneumatic pump to the pipeline between the liquid barrels to be pumped out, and meanwhile, the manual valve B is opened to discharge the liquid from the pneumatic pump to the pipeline between the pneumatic valve C, and the liquid supply end state also comprises the pipeline between the pneumatic pump and the pneumatic valve B;
The manual valve D is used for releasing pressure on the filter before operation, and the manual valve E is used for draining liquid in the filter after operation;
The flowmeter is convenient to observe the operation condition of the pneumatic pump, ensures that the pneumatic pump is in a normal working range, and prevents pressure from being held back in each pipeline by the pressure gauge, so that accidents occur.
Drawings
FIG. 1 is a schematic diagram of a semiconductor liquid testing apparatus according to the present utility model.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.
A semiconductor liquid testing device comprises a pneumatic pump 1, a pneumatic valve A2, a pneumatic valve B3, a pneumatic valve C4, a manual valve A5, a manual valve B6, a manual valve C7 and a filtering device 8,
The manual valve A5 is horizontally connected with the liquid inlet of the pneumatic pump 1 through a pipeline, one end of the pneumatic valve A2 is vertically connected with the manual valve A5 from top to bottom through a pipeline, the connecting position is positioned in the middle of the connecting pipeline of the manual valve A5 and the liquid inlet of the pneumatic pump 1,
One end of the manual valve C7 is vertically connected with the manual valve B6 from top to bottom through a pipeline, the other end of the manual valve C7 is connected with the filter through a pipeline, the liquid outlet of the pneumatic pump 1 is connected with the pipeline between the manual valve C7 and the manual valve B6 through a pipeline,
One end of the pneumatic valve B3 and one end of the pneumatic valve C4 are connected in series through a pipeline and are connected to the filtering device 8 in an extending manner.
The top of the filtering device 8 is connected with a manual valve D81 in a downward extending mode through a pipeline, and the manual valve D81 has the function of pressure relief before working.
The bottom of the filtering device 8 is connected with a manual valve E82 in a downward extending way through a pipeline, and the manual valve E82 has the function of draining the liquid in the filtering device 8 after the operation is finished.
The pipeline that manual valve C7 and filter equipment 8 are connected is equipped with flowmeter 11, conveniently observes pneumatic pump 1 running condition, ensures that pneumatic pump 1 is in normal operating range.
The pipeline that pneumatic valve C4 and filter equipment 8 are connected is equipped with manometer 22, and manometer 22 prevents that each pipeline from holding back the pressure, leads to the occurence of failure.
The other end of the pneumatic valve A2 is connected with a liquid barrel to be pumped through a pipeline, the liquid barrel to be pumped is a storage carrier for supplying liquid to a test supply point, namely the prior art, and the key of the scheme is the structural layout characteristics among pipelines, so that the technical scheme is not excessively described herein.
The other end of the pneumatic valve B3 is connected with an empty liquid barrel through a pipeline, the empty liquid barrel is a position where residual liquid flows back after the required quantity of a test supply point is supplied, namely the prior art, and the scheme is characterized by structural layout characteristics among pipelines, so that the empty liquid barrel is not excessively described herein.
The other end of the pneumatic valve C4 is connected to a test supply point through a pipeline, and the test supply point is a test position where liquid needs to be supplied, which is the prior art.
In the liquid supply state, the pneumatic pump 1 starts to work, the pneumatic valve A2 is opened to extract liquid in the liquid barrel to be extracted, the liquid reaches the filter device 8 through the manual valve C7, and the liquid is transmitted to the test supply point through the pneumatic valve C4 after being filtered.
And the liquid supply end state is that based on the valve bodies in the liquid supply progress state, the pneumatic valve C4 is closed, the pneumatic valve B3 is opened, residual liquid in the liquid barrel to be pumped is pumped into the empty liquid barrel, after the liquid in the liquid barrel to be pumped is emptied, the pneumatic valve B3 is closed, the manual valve A5 is opened to discharge the liquid from the pipeline between the pneumatic pump 1 and the liquid barrel to be pumped, and meanwhile, the manual valve B6 is opened to discharge the liquid from the pipeline between the pneumatic pump 1 and the pneumatic valve C4, and the liquid supply end state also comprises the pipeline between the pneumatic pump 1 and the pneumatic valve B3, so that the impact of the residual liquid on the pneumatic pump 1 is avoided after the liquid is emptied.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the application described herein may be implemented in sequences other than those illustrated or otherwise described herein.
The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims (8)

1. The semiconductor liquid testing device is characterized by comprising a pneumatic pump (1), a pneumatic valve A (2), a pneumatic valve B (3), a pneumatic valve C (4), a manual valve A (5), a manual valve B (6), a manual valve C (7) and a filtering device (8),
The manual valve A (5) is horizontally connected with the liquid inlet of the pneumatic pump (1) through a pipeline, one end of the pneumatic valve A (2) is vertically connected with the manual valve A (5) from top to bottom through a pipeline, the connecting position is positioned in the middle of the pipeline connecting the manual valve A (5) with the liquid inlet of the pneumatic pump (1),
One end of the manual valve C (7) is vertically connected with the manual valve B (6) from top to bottom through a pipeline, the other end of the manual valve C is connected with the filter through a pipeline, the liquid outlet of the pneumatic pump (1) is connected with the pipeline between the manual valve C (7) and the manual valve B (6) through a pipeline,
One end of the pneumatic valve B (3) and one end of the pneumatic valve C (4) are connected in series through a pipeline and are connected to the filtering device (8) in an extending mode.
2. The semiconductor liquid testing device according to claim 1, wherein the top of the filtering device (8) is provided with a manual valve D (81) in a downward extending connection through a pipeline.
3. The semiconductor liquid testing device according to claim 1, wherein the bottom of the filtering device (8) is provided with a manual valve E (82) in a downward extending connection through a pipeline.
4. The semiconductor liquid testing device according to claim 1, wherein a flow meter (11) is provided on a pipe connecting the manual valve C (7) and the filtering device (8).
5. The semiconductor liquid testing device according to claim 1, wherein a pressure gauge (22) is arranged on a pipeline connecting the pneumatic valve C (4) and the filtering device (8).
6. The semiconductor liquid testing device according to claim 1, wherein the other end of the pneumatic valve A (2) is connected with the liquid barrel to be pumped through a pipeline.
7. The semiconductor liquid testing device according to claim 1, wherein the other end of the pneumatic valve B (3) is connected with an empty liquid barrel through a pipeline.
8. The semiconductor liquid testing device according to claim 1, wherein the other end of the pneumatic valve C (4) is connected with a test supply point through a pipeline.
CN202520395370.3U 2025-03-07 2025-03-07 A semiconductor liquid testing device Active CN223897420U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202520395370.3U CN223897420U (en) 2025-03-07 2025-03-07 A semiconductor liquid testing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202520395370.3U CN223897420U (en) 2025-03-07 2025-03-07 A semiconductor liquid testing device

Publications (1)

Publication Number Publication Date
CN223897420U true CN223897420U (en) 2026-02-10

Family

ID=98682538

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202520395370.3U Active CN223897420U (en) 2025-03-07 2025-03-07 A semiconductor liquid testing device

Country Status (1)

Country Link
CN (1) CN223897420U (en)

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