CN223794978U - A fine-tuning structure for precision equipment - Google Patents
A fine-tuning structure for precision equipmentInfo
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- CN223794978U CN223794978U CN202521105006.5U CN202521105006U CN223794978U CN 223794978 U CN223794978 U CN 223794978U CN 202521105006 U CN202521105006 U CN 202521105006U CN 223794978 U CN223794978 U CN 223794978U
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Abstract
本实用新型揭示一种精密设备的微调结构，包括横向传动机构、两组高度调节机构及执行部件安装机构，横向传动机构包括两组平行的横向传动组件，高度调节机构分设于横向传动机构，执行部件安装机构两端安装于两组高度调节机构，高度调节机构包括第一直线驱动组件、第一斜块及两组滑动组件，第一直线驱动组件设于安装板，第一斜块一端连接于第一直线驱动组件，其外形为正梯形，两组滑动组件分别设置于第一斜块上、下方，且分别安装于安装板及执行部件安装机构。本例中，利用第一斜块横向运动时斜面变化实现涂料执行部件高度的高精度变化，即前后方向变为竖直方向，利于优势空间的转换以达到方向的转换，有效减小设备体积，同时有效提高调整精度。
This utility model discloses a fine-tuning structure for a precision device, including a horizontal transmission mechanism, two sets of height adjustment mechanisms, and an actuator mounting mechanism. The horizontal transmission mechanism includes two sets of parallel horizontal transmission components. The height adjustment mechanisms are located within the horizontal transmission mechanism. The actuator mounting mechanism is mounted on both ends of the two sets of height adjustment mechanisms. Each height adjustment mechanism includes a first linear drive component, a first inclined block, and two sets of sliding components. The first linear drive component is mounted on a mounting plate. One end of the first inclined block is connected to the first linear drive component, and its shape is a regular trapezoid. The two sets of sliding components are respectively located above and below the first inclined block and are respectively mounted on the mounting plate and the actuator mounting mechanism. In this example, the high-precision change of the height of the paint actuator is achieved by utilizing the change of the inclined surface during the horizontal movement of the first inclined block, i.e., the front-to-back direction becomes the vertical direction. This facilitates the conversion of advantageous space to achieve directional conversion, effectively reducing the size of the device while effectively improving adjustment accuracy.
Description
Technical Field
The utility model relates to the technical field of mechanical adjustment, in particular to a fine adjustment structure of precision equipment.
Background
In the fields of precision manufacturing, optical instruments, semiconductor processing, and the like, a fine tuning structure of precision equipment is a core component for realizing high-precision operation, and the performance of the fine tuning structure directly affects the processing precision, reliability and service life of the equipment. For example, in semiconductor chip manufacturing, precision optical element assembly, or high-end machining equipment, fine tuning structures require sub-millimeter or even micrometer positional adjustment of the actuating components (e.g., coating actuating components, cutting tools, optical lenses, etc.) to meet process requirements.
In the existing adjusting structure, the adjusting mode of an executing part is usually adjusted in a lifting mode through a screw transmission mode, the precision is not enough, the size is large, when technological parameters are adjusted or equipment is abnormal, the risk of collision of the parts is easy to occur, and the service life of the equipment and the production safety are influenced.
Disclosure of utility model
Aiming at the defects of the prior art, the utility model provides a fine tuning structure of precision equipment, which comprises a transverse transmission mechanism, a transverse transmission mechanism and a fine tuning mechanism, wherein the transverse transmission mechanism comprises two groups of transverse transmission assemblies which are arranged in parallel, and each group of transverse transmission assemblies is provided with a mounting plate;
Two groups of height adjusting mechanisms which are respectively arranged on the two mounting plates, and
The two ends of the executing component mounting mechanism are respectively mounted on the two groups of height adjusting mechanisms, and the executing component mounting mechanism is used for mounting the paint executing component;
Each group of height adjusting mechanism comprises a first linear driving assembly, a first inclined block and two groups of sliding assemblies, the first linear driving assembly is arranged on the mounting plate and parallel to the transverse transmission assembly, one end of the first inclined block is fixed at the driving end of the first linear driving assembly, the appearance of the first inclined block is in a positive trapezoid shape, and the two groups of sliding assemblies are respectively arranged on and under the first inclined block and are respectively arranged at one ends of the mounting plate and the executing part mounting mechanism.
According to one embodiment of the utility model, the device further comprises two groups of limiting mechanisms, wherein the two groups of limiting mechanisms are arranged on the mounting plate and adjacent to the height adjusting mechanism, are positioned right below the actuating component mounting mechanism, and are provided with abutting blocks, and when the actuating component mounting mechanism moves downwards, the abutting blocks move upwards and are abutted to the bottom of the actuating component mounting mechanism.
According to one embodiment of the utility model, the limiting mechanism comprises a second linear driving assembly and a limiting assembly, the limiting assembly comprises a shell, a second inclined block and an abutting block, the second linear driving assembly and the shell are fixed on the mounting plate, the top surface of the mounting plate is provided with an opening, the second inclined block is slidably arranged in the shell, the top surface of the second inclined block is provided with a first inclined surface, the second linear driving assembly is connected with the second inclined block in a transmission manner, one end of the abutting block is positioned in the shell and provided with a second inclined surface corresponding to the first inclined surface, and the other end of the abutting block penetrates through the opening to be exposed out of the shell.
According to one embodiment of the utility model, the abutting block comprises an abutting joint and a limiting head, the limiting head is located in the shell, the second inclined surface is arranged on the bottom surface of the limiting head, one end of the abutting joint is connected with the limiting head, the other end of the abutting joint penetrates through the opening to be exposed out of the shell, wherein the outer diameter of the cross section of the abutting joint is smaller than the caliber of the opening, and the outer diameter of the cross section of the abutting limiting head is larger than the caliber of the opening.
According to one embodiment of the utility model, the first linear driving assembly comprises a first driving member and a first transmission assembly, the first transmission assembly comprises a coupler and a screw rod assembly, the coupler is arranged at the driving end of the first driving member, the screw rod assembly is in transmission connection with the coupler, and the first inclined block is in transmission connection with the screw rod assembly.
According to one embodiment of the utility model, the screw rod assembly comprises a first screw rod and two mounting seats, wherein the two mounting seats are arranged in opposite directions, a bearing is arranged in each mounting seat, and the first screw rod is arranged on the two mounting seats and is in transmission connection with the bearing.
According to one embodiment of the utility model, the screw assembly further comprises two buffering members, and the two buffering members are respectively arranged on opposite surfaces of the two mounting seats.
According to an embodiment of the utility model, the first drive element is a servo motor.
The utility model has the advantages that the high-precision change of the height of the paint executing component is realized by utilizing the change of the inclined plane when the first inclined block transversely moves, namely, the front-back direction is converted into the vertical direction, the conversion of the dominant space is facilitated to achieve the conversion of the direction, the volume of equipment is effectively reduced, and the adjustment precision is effectively improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute a limitation on the application. In the drawings:
FIG. 1 is a schematic diagram of a fine tuning structure of a precision apparatus according to an embodiment;
FIG. 2 is an enlarged view of portion A of FIG. 1;
fig. 3 is a schematic structural diagram of a limiting mechanism in an embodiment.
Detailed Description
Various embodiments of the utility model are disclosed in the following drawings, in which details of the practice are set forth in the following description for the purpose of clarity. However, it should be understood that these practical details are not to be taken as limiting the utility model. That is, in some embodiments of the utility model, these practical details are unnecessary. Moreover, for the purpose of simplifying the drawings, some conventional structures and components are shown in the drawings in a simplified schematic manner.
In addition, the descriptions of the "first," "second," and the like, herein are for descriptive purposes only and are not intended to be specifically construed as order or sequence, nor are they intended to limit the utility model solely for distinguishing between components or operations described in the same technical term, but are not to be construed as indicating or implying any relative importance or order of such features. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present utility model.
Referring to fig. 1 to 3, fig. 1 is a schematic structural diagram of a fine adjustment structure of a precision apparatus according to an embodiment, fig. 2 is an enlarged view of a portion a in fig. 1, and fig. 3 is a schematic structural diagram of a limit mechanism according to an embodiment. The fine adjustment structure of the precision equipment in the embodiment comprises a transverse transmission mechanism 1, two groups of height adjusting mechanisms 2 and an execution part mounting mechanism 3, wherein the execution part mounting mechanism 3 is used for mounting a paint execution part, the transverse transmission mechanism 1 is used for adjusting the horizontal position of the paint execution part, and the height adjusting mechanism 3 is used for adjusting the height of the paint execution part.
Specifically, the transverse transmission mechanism 1 includes two sets of parallel transverse transmission assemblies 11, each set of transverse transmission assemblies 11 has a mounting plate 111, two sets of height adjustment mechanisms 2 are respectively disposed on the two mounting plates 111, each set of height adjustment mechanisms 2 includes a first linear driving assembly 21, a first inclined block 22 and two sets of sliding assemblies 23, the first linear driving assembly 21 is disposed on the mounting plate 111 and is parallel to the transverse transmission assemblies 11, one end of the first inclined block 22 is fixed on the driving end of the first linear driving assembly 21, the appearance of the first inclined block is in a regular trapezoid shape, and the two sets of sliding assemblies 23 are respectively disposed on and under the first inclined block 22 and are respectively mounted on one ends of the mounting plate 111 and the actuating component mounting mechanism 3. When the device works, the first linear driving assembly 21 drives the first inclined block 22 to move, the height of the executing component is adjusted along with the width change of the inclined block 22, namely, the high-precision change of the height of the paint executing component is realized by utilizing the inclined surface change of the first inclined block 22, so that the volume of the device is effectively reduced, and meanwhile, the adjustment precision is effectively improved.
Further, two sets of positioning mechanisms 4 are further included, the two sets of positioning mechanisms 4 are disposed on the mounting plate 111 and adjacent to the height adjusting mechanism 2, and are located right below the actuator mounting mechanism 3, and are provided with abutting blocks 423, and when the actuator mounting mechanism 3 moves downward, the abutting blocks 423 move upward and abut against the bottom of the actuator mounting mechanism 3.
The limiting mechanism 4 comprises a second linear driving assembly 41 and a limiting assembly 42, the limiting assembly 42 comprises a shell 421, a second inclined block 422 and an abutting block 423, the second linear driving assembly 41 and the shell 421 are fixed on the mounting plate 111, an opening 4211 is formed in the top surface of the mounting plate 111, the second inclined block 422 is slidably arranged in the shell 421, a first inclined surface 4221 is formed in the top surface of the second inclined block 422, the second linear driving assembly 41 is in transmission connection with the second inclined block 422, one end of the abutting block 423 is located in the shell 421, a second inclined surface 4231 is arranged corresponding to the first inclined surface 4221, and the other end of the abutting block 423 penetrates through the opening 4211 and is exposed out of the shell 421. It can be appreciated that when the actuator is adjusted to a specified height, the second inclined block 422 moves linearly under the driving of the second linear driving assembly 41, so that the first inclined surface 4221 presses the second inclined surface 4231, and then the abutment block 423 is lifted up and abuts against the actuator mounting mechanism 3, thereby forming a hard limit on the actuator mounting mechanism 3, limiting the excessive lowering thereof, and avoiding the collision of the components. In this example, the second linear driving assembly 41 is composed of a servo motor (not shown) and a second screw 411.
The abutting block 423 comprises an abutting joint 4232 and a limiting head 4233, the limiting head 4233 is located in the shell 421, the second inclined surface 4231 is arranged on the bottom surface of the limiting head 4233, one end of the abutting joint 4232 is connected with the limiting head 4233, the other end of the abutting joint 4232 penetrates through the opening 4211 to be exposed out of the shell 421, the outer diameter of the cross section of the abutting joint 4232 is smaller than the caliber of the opening 4211, the outer diameter of the cross section of the abutting limiting head 4233 is larger than the caliber of the opening 4211, the abutting block is prevented from being separated from the shell, and limiting reliability is guaranteed.
Specifically, the first linear driving assembly 21 includes a first driving member 211 and a first transmission assembly 212, the first transmission assembly 212 includes a coupling 2121 and a screw assembly 2122, the coupling 2121 is mounted on the driving end of the first driving member 211, the screw assembly 2122 is in transmission connection with the coupling 2121, and the first swash block 22 is in transmission connection with the screw assembly 2122.
The screw assembly 2122 includes a first screw 21221 and two mounting seats 21222, the two mounting seats 21222 are disposed opposite to each other, and each mounting seat 21222 is provided with a bearing therein, and the first screw 21221 is mounted on the two mounting seats 21222 and is in driving connection with the bearings.
The screw assembly 2122 further includes two buffers 21223, where the two buffers 21223 are disposed on opposite sides of the two mounting blocks 21222. In this example, the first driving member 211 is a servo motor, and the buffer member 21223 is a buffer sealant.
In summary, in this example, the high accuracy change of the height of the execution component is realized by utilizing the change of the inclined plane when the first inclined block moves transversely, that is, the front-back direction is changed into the vertical direction, which is favorable for the conversion of the dominant space to achieve the conversion of the direction, thereby not only effectively reducing the volume of the equipment, but also effectively improving the adjustment accuracy.
The foregoing is merely exemplary of the present utility model and is not intended to limit the present utility model. Various modifications and variations of the present utility model will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, or the like, which is within the spirit and principles of the present utility model, should be included in the scope of the claims of the present utility model.
Claims (8)
1. A fine adjustment structure of a precision apparatus, comprising:
The transverse transmission mechanism comprises two groups of transverse transmission assemblies which are arranged in parallel, and each group of transverse transmission assemblies is provided with a mounting plate;
Two groups of height adjusting mechanisms which are respectively arranged on the two mounting plates, and
The two ends of the executing component mounting mechanism are respectively mounted on the two groups of the height adjusting mechanisms, and the executing component mounting mechanism is used for mounting executing components;
Every group the altitude mixture control mechanism all includes first linear drive subassembly, first sloping block and two sets of slip subassembly, and first linear drive subassembly is located the mounting panel sets up parallel to horizontal transmission subassembly, first sloping block one end be fixed in first linear drive subassembly's drive end, its appearance is positive trapezoid, and two sets of slip subassemblies set up respectively in first sloping block upper and lower, and install respectively in mounting panel and executive component installation mechanism's one end.
2. The fine adjustment structure of the precision apparatus according to claim 1, further comprising two sets of limit mechanisms provided on the mounting plate and disposed adjacent to the height adjusting mechanism, and having an abutment block that moves upward and abuts against a bottom of the actuator mounting mechanism when the actuator mounting mechanism moves downward.
3. The fine tuning structure of precision equipment according to claim 2, wherein the limiting mechanism comprises a second linear driving assembly and a limiting assembly, the limiting assembly comprises a housing, a second inclined block and an abutting block, the second linear driving assembly and the housing are fixed on a mounting plate, the top surface of the mounting plate is provided with an opening, the second inclined block is slidably arranged in the housing, the top surface of the second inclined block is provided with a first inclined surface, the second linear driving assembly is in transmission connection with the second inclined block, one end of the abutting block is positioned in the housing and is provided with a second inclined surface corresponding to the first inclined surface, and the other end of the abutting block penetrates through the opening to be exposed out of the housing.
4. The fine tuning structure of the precision equipment according to claim 3, wherein the abutting block comprises an abutting head and a limiting head, the limiting head is located in the shell, the second inclined surface is arranged on the bottom surface of the limiting head, one end of the abutting head is connected with the limiting head, the other end of the abutting head penetrates through the opening to be exposed out of the shell, the outer diameter of the cross section of the abutting head is smaller than the caliber of the opening, and the outer diameter of the cross section of the abutting head is larger than the caliber of the opening.
5. The fine tuning structure of the precision apparatus according to claim 1, wherein the first linear driving assembly comprises a first driving member and a first transmission assembly, the first transmission assembly comprises a coupling and a screw assembly, the coupling is mounted at the driving end of the first driving member, the screw assembly is in transmission connection with the coupling, and the first swash block is in transmission connection with the screw assembly.
6. The fine tuning structure of the precision equipment according to claim 5, wherein the screw assembly comprises a first screw and two mounting seats, the two mounting seats are arranged in opposite directions, a bearing is arranged in each mounting seat, and the first screw is mounted on the two mounting seats and is in transmission connection with the bearing.
7. The fine tuning structure of the precision apparatus according to claim 6, wherein the screw assembly further comprises two buffering members, and the two buffering members are respectively disposed on opposite sides of the two mounting seats.
8. The fine tuning structure of the precision apparatus of claim 5, wherein the first driving member is a servo motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202521105006.5U CN223794978U (en) | 2025-05-30 | 2025-05-30 | A fine-tuning structure for precision equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202521105006.5U CN223794978U (en) | 2025-05-30 | 2025-05-30 | A fine-tuning structure for precision equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN223794978U true CN223794978U (en) | 2026-01-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202521105006.5U Active CN223794978U (en) | 2025-05-30 | 2025-05-30 | A fine-tuning structure for precision equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN223794978U (en) |
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2025
- 2025-05-30 CN CN202521105006.5U patent/CN223794978U/en active Active
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