CN223635420U - A three-way ball valve for slurry supply in a silicon rod multi-wire cutting machine - Google Patents

A three-way ball valve for slurry supply in a silicon rod multi-wire cutting machine

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Publication number
CN223635420U
CN223635420U CN202520058756.5U CN202520058756U CN223635420U CN 223635420 U CN223635420 U CN 223635420U CN 202520058756 U CN202520058756 U CN 202520058756U CN 223635420 U CN223635420 U CN 223635420U
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China
Prior art keywords
valve
valve seat
mortar
way ball
pipeline
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CN202520058756.5U
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Chinese (zh)
Inventor
梁鹏飞
豆志伟
王占滨
潘世林
陈信
邵秋生
肖清华
闫志瑞
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Shandong Youyan Aisi Semiconductor Material Co ltd
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Shandong Youyan Aisi Semiconductor Material Co ltd
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Abstract

The utility model discloses a mortar liquid supply three-way ball valve of a silicon rod multi-wire cutting machine, which comprises a valve body, a blind plate valve seat, a cleaning and draining valve seat and three mortar pipeline valve seats, wherein the blind plate valve seat, the cleaning and draining valve seat and the mortar pipeline valve seat are respectively arranged on the valve body through threads and sealed by a tetrafluoro sealing piece, a T-shaped three-way ball body is arranged in the valve body and connected with a valve rod, the ball body is driven by the valve rod to rotate so as to realize on-off of a mortar supply pipeline, the cleaning and draining valve seat is connected with a draining cavity, the draining cavity is connected with a draining outlet seat through a draining connecting pipe, a hollow cylinder for compressed air circulation is arranged in the middle of the cleaning and draining valve seat, and hollow parts are uniformly arranged on the outer sides of the hollow cylinders and are communicated with the draining cavity. The utility model realizes the on-off of the mortar supply pipeline by utilizing the rotation of the T-shaped tee sphere, keeps the interior of the valve body clean by utilizing the clean pollution discharge component, reduces the loss of the sealing element and prolongs the service life of the ball valve.

Description

Mortar liquid supply three-way ball valve of silicon rod multi-wire saw
Technical Field
The utility model relates to the field of silicon wafer processing, in particular to a mortar liquid supply three-way ball valve of a silicon rod multi-wire cutting machine.
Background
The multi-wire cutting machine is commonly used equipment in a 12-inch silicon rod slicing process, the equipment cutting process is completed by acting steel wires and mortar on the crystal rods, and the mortar needs to be replaced periodically to ensure the cutting quality. At present, the three-way ball valve adopted by the mortar liquid supply pipeline often has the condition that the internal mortar is stacked and solidified to cause abnormal opening and closing, which can lead to the condition that the mortar cannot be supplied or is supplied excessively, and the waste of the mortar is caused. After the piled mortar is solidified, the position of the T-shaped tee joint sphere is slightly changed, the sphere is attached with mortar particles, and the abrasion of the sealing element is aggravated. Meanwhile, the existing ball valve can be replaced completely after the T-shaped tee ball body is detached, and the process is complicated.
Disclosure of Invention
Aiming at the problems of mortar waste and frequent maintenance caused by abnormal opening and closing after internal mortar accumulation and solidification of the three-way ball valve frequently occur, the utility model aims to provide the mortar liquid supply three-way ball valve of the silicon rod multi-wire cutting machine, which has an internal residual mortar cleaning function so as to meet the requirements of normal opening and closing, service life improvement and convenient maintenance of the three-way ball valve.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
The main body structure of the three-way ball valve comprises a valve body, a blind plate valve seat, a cleaning and pollution discharging valve seat and three mortar pipeline valve seats,
The blind plate valve seat, the cleaning and pollution discharging valve seat and the mortar pipeline valve seat are respectively arranged on the valve body through threads and sealed by a tetrafluoro sealing piece;
A T-shaped three-way ball body is arranged in the valve body and is connected with a valve rod, and the valve rod drives the ball body to rotate so as to realize on-off of a mortar supply pipeline;
The cleaning and sewage valve seat is connected with a sewage cavity, the sewage cavity is connected with a sewage outlet seat through a sewage connecting pipe, a hollow cylinder for compressed air circulation is arranged in the middle of the cleaning and sewage valve seat, and hollow cavities are uniformly arranged on the outer side of the hollow cylinder and are communicated with the sewage cavity.
Furthermore, the tetrafluoro sealing piece is respectively embedded into the blind plate valve seat, the cleaning and pollution discharging valve seat and the mortar pipeline valve seat and is contacted with the T-shaped three-way ball body, so that the positioning of the T-shaped three-way ball body is realized.
Further, the T-shaped tee joint ball body and the tetrafluoro sealing piece on the blind plate valve seat are in a floating sealing mode.
Further, the three mortar pipeline valve seats are respectively used for connecting a mortar inlet pipeline, a mortar outlet pipeline and a mortar fluid supplementing pipeline.
The cambered surface of the T-shaped three-way ball body on the opposite side of the valve rod is provided with three grooves along the arc direction, and the grooves respectively correspond to a mortar pipeline valve seat at a mortar inlet pipeline, a mortar pipeline valve seat at a mortar outlet pipeline and a blind plate valve seat.
The utility model has the advantages that:
The mortar liquid supply three-way ball valve of the silicon rod multi-wire cutting machine provided by the utility model has the function of cleaning the cavity of the valve body, can effectively solve the accumulation and solidification of mortar in the valve body, reduce the abrasion of sealing elements, prolong the service life of the ball valve, improve the reliability of opening and closing the valve, effectively solve the phenomenon of mortar waste caused by abnormal closing, has simple disassembly of the sealing elements, can completely replace the sealing rings on the premise of not disassembling the T-shaped three-way ball body, and improves the convenience of maintenance.
Drawings
FIG. 1 is a schematic view of the application of the utility model in the mortar fluid infusion of a multi-wire saw.
Fig. 2 is a schematic structural view of the present utility model.
Fig. 3 is a cross-sectional view of the present utility model.
FIG. 4 is a schematic view of a cleaning and draining member according to the present utility model.
FIG. 5 is a schematic view of a cleaning and draining valve seat according to the present utility model.
Fig. 6 is a schematic structural diagram of a T-shaped three-way ball according to the present utility model.
Reference numerals:
1-three-way ball valve, 2-pneumatic actuator, 3-mortar inlet pipeline, 4-one-way stop valve, 5-mortar outlet pipeline, 6-blow-down pipe, 7-mortar fluid supplementing pipeline, 11-valve body, 12-mortar pipeline valve seat, 13-T-shaped three-way ball, 14-valve rod, 15-blind plate valve seat, 16-cleaning blow-down valve seat, 17-blow-down chamber, 18-blow-down connecting pipe, 19-blow-down outlet seat, 20-tetrafluoro sealing element (1), 21-tetrafluoro sealing element (2), 22-tetrafluoro sealing element (3), 23-oil seal and 24-valve rod nut.
Detailed Description
The present utility model will be described in detail below with reference to the attached drawings, but the examples are only for explaining the present utility model and are not intended to limit the scope of the present utility model.
As shown in fig. 1, the mortar liquid supply three-way ball valve 1 (hereinafter referred to as three-way ball valve) of the silicon rod multi-wire saw provided by the utility model is applied to mortar liquid supplementing of the multi-wire saw. The three-way ball valve 1 is provided with a mortar inlet pipeline 3, a mortar outlet pipeline 5 and a mortar fluid infusion pipeline 7, when fluid infusion is carried out, the three-way ball valve 1 is driven by the pneumatic actuator 2, the intercommunication of the mortar inlet pipeline 3 and the mortar fluid infusion pipeline 7 is realized, after fluid infusion is finished, the three-way ball valve 1 is driven by the pneumatic actuator 2, the intercommunication of the mortar inlet pipeline 3 and the mortar outlet pipeline 5 is realized, and then compressed air is introduced into the one-way stop valve 4 to blow residual mortar in the valve body of the three-way ball valve 1 to the mortar fluid infusion pipeline 7 through the blow-off pipe 6.
As shown in fig. 2, 3 and 4, the three-way ball valve 1 is composed of a valve body 11, a mortar pipe valve seat 12, a T-shaped three-way ball 13, a valve rod 14, a blind plate valve seat 15, a cleaning drain valve seat 16, a drain chamber 17, a drain connecting pipe 18, a drain seat 19, tetrafluoro sealing elements 20, 21 and 22, an oil seal 23, a valve rod nut 24 and the like. The blind plate valve seat 15, the cleaning and pollution discharging valve seat 16 and the mortar pipeline valve seat 12 are respectively arranged on the valve body 11 through threads and sealed by a tetrafluoro sealing piece, the T-shaped three-way ball 13 is arranged inside the valve body 11 and matched with the valve rod 14, the valve rod 14 is arranged on the valve body 11 through the valve rod nut 24, and the valve rod 14 is used for enabling the T-shaped three-way ball 13 to rotate to realize on-off of a mortar supply pipeline. The tetrafluoro sealing piece (1) 20 is embedded into the blind plate valve seat 15, the tetrafluoro sealing piece (2) 21 is embedded into the mortar pipeline valve seat 12, and the tetrafluoro sealing piece (3) 22 is embedded into the cleaning pollution discharge valve seat 16, so that the accurate positioning of the T-shaped tee sphere 13 is realized. Further, the T-shaped three-way ball 13 and the tetrafluoro sealing members 20 and 22 adopt a floating sealing mode, so that the contact area can be reduced, and the rotating friction force can be reduced.
As shown in fig. 4, the cleaning and sewage valve seat 16 is connected with a sewage chamber 17, and the sewage chamber 17 is connected with a sewage outlet seat 19 through a sewage connecting pipe 18 to form a cleaning and sewage component. As shown in fig. 5, a hollow cylinder (air channel cavity) for circulating compressed air is arranged in the middle of the cleaning and pollution discharge valve seat 16, and hollow-out parts are uniformly arranged on the outer side of the cylinder, so that mortar can circulate conveniently. The blowdown chamber 17 is threadably mounted on the wash blowdown valve seat 16 and sealed with an oil seal 23 to prevent spillage of mortar. The sewage connection pipe 18 connects the sewage chamber 17 and the sewage outlet seat 19, and is used for discharging mortar in the sewage chamber 17 from the sewage outlet seat 19.
As shown in fig. 6, the cambered surface of the opposite side of the valve rod of the T-shaped three-way ball 13 is provided with 3 grooves along the arc direction, and the grooves respectively correspond to the mortar pipeline valve seat 12 at the mortar inlet pipeline 3, the mortar pipeline valve seat 12 at the mortar outlet pipeline 5 and the blind plate valve seat 15 according to the installation positions, so that compressed air is directed to a severe mortar accumulation area, the mortar is conveniently and rapidly discharged out of the three-way ball valve 1 through the cleaning and pollution discharge valve seat 16, and the pollution cleaning capacity is improved. The T-shaped three-way ball 13 is provided with 6 azimuth supports in space and comprises a valve rod, 3 mortar pipeline valve seats, a cleaning and pollution discharging valve seat and a blind plate valve seat, so that the running stability of the T-shaped three-way ball is improved, the abrasion influence of a sealing element caused by the position deviation of the T-shaped three-way ball can be reduced, the maintenance convenience is improved, and a tetrafluoro sealing element can be replaced under the condition that the T-shaped three-way ball is not moved.
In practical application, the three-way ball valve of the utility model has the following operation processes:
The three-way ball valve 1 is arranged on a mortar circulating pipeline in the mode shown in fig. 1, when the multi-wire cutting machine needs mortar fluid infusion, the control switch of the pneumatic actuator 2 is pressed, the pneumatic actuator 2 drives the T-shaped three-way ball 13 to rotate 90 degrees through the valve rod 14, and the mortar inlet pipeline 3 is communicated with the mortar fluid infusion pipeline 7, so that the purpose of fluid infusion of the multi-wire cutting machine is achieved. After the fluid infusion is completed, a control switch of the pneumatic actuator 2 is pressed, the T-shaped three-way ball 13 is reset, the mortar inlet pipeline 3 and the mortar outlet pipeline 5 are communicated, and the mortar can continuously and circularly flow in the pipelines. And (3) opening a compressed air valve connected with the one-way stop valve 4, continuously purging, and closing the compressed air valve after residual mortar in the valve body 11 of the three-way ball valve 1 flows completely through the blow-down pipe 6.
The three-way ball valve has the function of cleaning internal leakage mortar, can effectively solve the problem of blocking the normal rotation of the ball valve due to internal leakage of the mortar, improves the reliability of a mortar fluid supplementing system, reduces the waste caused by overflow of the mortar, solves the problem of serious local abrasion of a sealing ring caused by deflection of a T-shaped three-way ball body due to the adoption of an omnibearing fixing mode, and can realize quick replacement and damage of the sealing ring by installing each tetrafluoro sealing piece on a detachable valve seat, thereby saving maintenance time.

Claims (5)

1.一种硅棒多线切割机砂浆供液三通球阀,其特征在于,该三通球阀主体结构具备阀体、盲板阀座、清洗排污阀座、三个砂浆管路阀座;其中,1. A three-way ball valve for slurry supply in a silicon rod multi-wire cutting machine, characterized in that the main structure of the three-way ball valve comprises a valve body, a blind flange valve seat, a cleaning and drain valve seat, and three slurry pipeline valve seats; wherein, 盲板阀座、清洗排污阀座、砂浆管路阀座分别通过螺纹安装于阀体并由四氟密封件密封;The blind flange valve seat, the cleaning and drain valve seat, and the mortar pipeline valve seat are respectively installed on the valve body by threads and sealed by PTFE seals. 阀体内部安装有T型三通球体,该球体连接阀杆,通过阀杆驱动球体转动实现砂浆供给管路的通断;The valve body is equipped with a T-shaped three-way ball, which is connected to the valve stem. The valve stem drives the ball to rotate to open or close the mortar supply pipeline. 清洗排污阀座连接有排污腔室,排污腔室通过排污连接管连接排污口座,清洗排污阀座中间设有用于压缩空气流通的中空柱体,中空柱体外侧均匀设有镂空,该些镂空与排污腔室连通。The cleaning and drain valve seat is connected to a drain chamber, which is connected to a drain outlet seat via a drain connection pipe. The cleaning and drain valve seat has a hollow column in the middle for compressed air circulation, and the hollow column has evenly spaced perforations on its outer side, which are connected to the drain chamber. 2.根据权利要求1所述的硅棒多线切割机砂浆供液三通球阀,其特征在于,所述四氟密封件分别嵌入盲板阀座、清洗排污阀座、砂浆管路阀座,并与T型三通球体接触,实现T型三通球体的定位。2. The silicon rod multi-wire cutting machine slurry supply three-way ball valve according to claim 1, characterized in that the PTFE sealing element is respectively embedded in the blind plate valve seat, the cleaning and drain valve seat, and the slurry pipeline valve seat, and contacts the T-type three-way ball to realize the positioning of the T-type three-way ball. 3.根据权利要求2所述的硅棒多线切割机砂浆供液三通球阀,其特征在于,所述T型三通球体与盲板阀座上的四氟密封件以及清洗排污阀座上的四氟密封件采用浮动密封的方式。3. The slurry supply three-way ball valve for silicon rod multi-wire cutting machine according to claim 2, characterized in that the T-shaped three-way ball and the PTFE seal on the blind valve seat and the PTFE seal on the cleaning and drain valve seat adopt a floating sealing method. 4.根据权利要求1所述的硅棒多线切割机砂浆供液三通球阀,其特征在于,所述三个砂浆管路阀座分别用于连接砂浆进口管路、砂浆出口管路以及砂浆补液管路。4. The three-way ball valve for slurry supply of a silicon rod multi-wire cutting machine according to claim 1, characterized in that the three slurry pipeline valve seats are respectively used to connect the slurry inlet pipeline, the slurry outlet pipeline and the slurry replenishment pipeline. 5.根据权利要求1所述的硅棒多线切割机砂浆供液三通球阀,其特征在于,所述T型三通球体在阀杆对侧的弧面沿弧线方向开有三个凹槽,该些凹槽分别对应砂浆进口管路处的砂浆管路阀座、砂浆出口管路处的砂浆管路阀座以及盲板阀座。5. The mortar supply three-way ball valve for a silicon rod multi-wire cutting machine according to claim 1, characterized in that the T-shaped three-way ball has three grooves along the arc direction on the arc surface opposite the valve stem, and these grooves respectively correspond to the mortar pipeline valve seat at the mortar inlet pipe, the mortar pipeline valve seat at the mortar outlet pipe, and the blind plate valve seat.
CN202520058756.5U 2025-01-10 2025-01-10 A three-way ball valve for slurry supply in a silicon rod multi-wire cutting machine Active CN223635420U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202520058756.5U CN223635420U (en) 2025-01-10 2025-01-10 A three-way ball valve for slurry supply in a silicon rod multi-wire cutting machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202520058756.5U CN223635420U (en) 2025-01-10 2025-01-10 A three-way ball valve for slurry supply in a silicon rod multi-wire cutting machine

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CN223635420U true CN223635420U (en) 2025-12-05

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ID=97865683

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