CN223519822U - Electrostatic chuck film cutting device - Google Patents
Electrostatic chuck film cutting deviceInfo
- Publication number
- CN223519822U CN223519822U CN202422641360.1U CN202422641360U CN223519822U CN 223519822 U CN223519822 U CN 223519822U CN 202422641360 U CN202422641360 U CN 202422641360U CN 223519822 U CN223519822 U CN 223519822U
- Authority
- CN
- China
- Prior art keywords
- double
- cutting
- die
- electrostatic chuck
- cutting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
Abstract
The utility model relates to the technical field of semiconductor devices, in particular to an electrostatic chuck film cutting device, which comprises a cutting machine body, wherein a detachably connected cutting die is arranged on the cutting machine body, the cutting die comprises a mounting plate, the bottom of the cutting die is provided with a placing groove, sliding grooves are formed in the side of the placing groove, a die changing opening is formed in one side of the mounting plate, the die changing opening is communicated with the placing groove, double-sided cutters are arranged in the placing groove, sliding rails are fixedly arranged on the side of the double-sided cutters, each sliding rail is respectively arranged in the sliding grooves in a sliding manner, a baffle plate is detachably connected and arranged at the die changing opening, one side of the baffle plate abuts against one side of the double-sided cutter, so that the double-sided cutters are firmly arranged in the placing groove, the shape is cut through the cutting die, the obtained film has higher precision, the effect is better, the cutting efficiency is higher, the cutting die is separated into the double-sided cutters and the mounting plate, the cost is saved, the cutting precision is improved, and the shape of the film is convenient to change.
Description
Technical Field
The utility model relates to the technical field of semiconductor devices, in particular to an electrostatic chuck film cutting device.
Background
The electrostatic chuck film cutting is an important processing technology for cutting film raw materials into specific shapes through a die cutting machine.
The conventional cutting can only be performed in a simple shape, when a film in a complex shape needs to be cut, the time is long, the obtained shape has insufficient precision, and the cutting of the electrostatic chuck film cannot be satisfied. The knife surface of the knife die can be uneven after long-term die cutting, so that the loss of the knife die is easy to cause, and the cost is increased.
Disclosure of utility model
Accordingly, the present utility model is directed to an electrostatic chuck film cutting device, which solves the above-mentioned problems of the prior art.
Based on the above object, the utility model provides an electrostatic chuck film cutting device, which comprises a cutting machine body, wherein a detachably connected cutting die is arranged on the cutting machine body, and the cutting die comprises:
the mounting plate is provided with a placing groove at the bottom, and sliding grooves are arranged at the side of the placing groove;
the die changing port is arranged on one side of the mounting plate and is communicated with the placing groove;
the double-sided cutters are arranged in the placing grooves, sliding rails are fixedly arranged on the sides of the double-sided cutters, and each sliding rail is respectively arranged in the sliding groove in a sliding manner;
The baffle is detachably connected and arranged at the die changing port, and one side of the baffle is propped against one side of the double-sided cutter, so that the double-sided cutter is stably arranged in the placing groove.
Preferably, the cutter body includes:
An air compressor is fixedly arranged above the workbench;
The pressing plate is arranged at the bottom of the air compressor, the top of the pressing plate is detachably connected with the lifting end of the air compressor, and the bottom of the pressing plate is adhered to the cutting die.
Preferably, control consoles are fixedly arranged on the side of the workbench, each control console is provided with an operation switch, the bottom of the workbench is provided with a pedal, the pedal and the two operation switches synchronously control the air compressor, and one control console is provided with a starting switch.
Preferably, a handle is fixedly arranged on one side of the pressing plate.
Preferably, the top of the die changing port is provided with a slot communicated with the chute, and two ends of the baffle are detachably connected with the die changing port through the slot respectively.
Preferably, one side of the baffle, which is close to the double-sided cutter, is fixedly provided with an extrusion block, the extrusion block is made of elastic materials, and the bottom of the extrusion block is provided with an inclined plane.
Preferably, the two sides of the double-sided cutter are detachably connected with a plurality of spring positioning pins for determining the cutting position of the film.
The utility model has the beneficial effects that:
(1) The shape is cut through the cutting die, so that the obtained film is higher in precision, better in effect and higher in cutting efficiency.
(2) The cutting die is separated into the double-sided cutter and the mounting plate, so that the cost is saved, the cutting precision is improved, and meanwhile, the film cutting shape is convenient to replace.
Drawings
In order to more clearly illustrate the utility model or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only of the utility model and that other drawings can be obtained from them without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of the overall structure of an embodiment of the present utility model;
FIG. 2 is a schematic view of the bottom structure of a cutting die according to an embodiment of the present utility model;
FIG. 3 is a schematic diagram of the top surface structure of a cutting die according to an embodiment of the present utility model;
FIG. 4 is a schematic cross-sectional view of an embodiment of the present utility model at A-A of FIG. 3;
fig. 5 is an enlarged schematic view of the embodiment of the present utility model at B in fig. 4.
Marked in the figure as:
1. The cutting machine comprises a cutting machine body, a workbench, a 12, an air compressor, a 13, a pressing plate, a 14, a console, a 15, an operation switch, a 16, a pedal, a 17, a starting switch, a 18 and a handle;
2. 21 parts of a cutting die, 21 parts of a mounting plate, 22 parts of a placing groove, 23 parts of a sliding groove, 24 parts of a die changing port, 25 parts of a double-sided cutter, 26 parts of a sliding rail, 27 parts of a baffle plate, 28 parts of a slot, 29 parts of an extrusion block, 210 parts of a spring positioning pin.
Detailed Description
The present utility model will be further described in detail with reference to specific embodiments in order to make the objects, technical solutions and advantages of the present utility model more apparent.
It is to be noted that unless otherwise defined, technical or scientific terms used herein should be taken in a general sense as understood by one of ordinary skill in the art to which the present utility model belongs. The terms "first," "second," and the like, as used herein, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", etc. are used merely to indicate relative positional relationships, which may also be changed when the absolute position of the object to be described is changed.
As shown in fig. 1 to 5, an electrostatic chuck film cutting device includes a cutter body 1, a detachably connected cutting die 2 is mounted on the cutter body 1, and the cutting die 2 includes:
The mounting plate 21 is provided with a placing groove 22 at the bottom, and sliding grooves 23 are arranged beside the placing groove 22;
A die changing port 24 disposed at one side of the mounting plate 21, the die changing port 24 being disposed in communication with the placement groove 22;
The double-sided cutters 25 are arranged in the placing grooves 22, sliding rails 26 are fixedly arranged beside the double-sided cutters 25, and each sliding rail 26 is respectively arranged in the sliding groove 23 in a sliding manner;
The baffle 27 is detachably connected with the die changing port 24, and one side of the baffle 27 abuts against one side of the double-sided cutter 25, so that the double-sided cutter 25 is stably placed in the placing groove 22.
By way of example, through designing the double-sided cutter 25, the efficiency of the switching of the cutting shape of the film is improved, through drawing out and feeding corresponding cutters from the die changing port 24, the double-sided cutter 25 is abutted tightly through the baffle 27, so that the double-sided cutter 25 is stabilized in the placing groove 22, and the influence on the cutting of the film due to shaking in the use process is avoided.
As an alternative embodiment, the cutter body 1 includes:
An air compressor 12 is fixedly arranged above the workbench 11;
The clamp plate 13 sets up the bottom of air compressor machine 12, the top of clamp plate 13 with the lift end of air compressor machine 12 is dismantled and is connected, just the bottom of clamp plate 13 with cutting die 2 pastes the setting.
As an alternative embodiment, a console 14 is fixed on the side of the working table 11, each console 14 is provided with an operation switch 15, the bottom of the working table 11 is provided with a pedal 16, the pedal 16 and the two operation switches 15 synchronously operate the air compressor 12, and one of the consoles 14 is provided with a start switch 17.
As an alternative embodiment, a handle 18 is fixed on one side of the pressing plate 13.
For example, through connecting power and air compressor machine 12, ensure that guillootine body 1 normal operating, glue the back of cutting die 2 back and paste on clamp plate 13, place the membrane that needs to cut on workstation 11 after, press start switch 17, then click pedal 16 when two operation switches 15, loosen after a flow is finished, take out the film. After the die cutting is finished, the pressing plate 13 is pulled out by the handle 18, the cutting die 2 is detached, and after the cutting die 2 is replaced by a new one, the pressing plate 13 is pushed back again. The film shape can be obtained rapidly through the die cutting machine.
As an alternative embodiment, a slot 28 is provided at the top of the die changing port 24 and is in communication with the chute 23, and two ends of the baffle 27 are detachably connected to the die changing port 24 through the slot 28.
As an alternative embodiment, a pressing block 29 is fixed on one side of the baffle 27 near the double-sided cutter 25, the pressing block 29 is made of elastic material, and a slope is provided at the bottom of the pressing block 29.
For example, the elastic pressing block 29 is arranged on the baffle 27, and the bottom of the pressing block 29 is designed into an inclined plane, so that the pressing block can be pressed against the double-sided cutter 25 conveniently.
As an alternative embodiment, a plurality of spring positioning pins 210 for determining the cutting position of the film are detachably connected to both sides of the double-sided cutter 25.
It will be appreciated by persons skilled in the art that the above discussion of any embodiment is merely exemplary and is not intended to imply that the scope of the utility model is limited to these examples, that combinations of technical features in the above embodiments or in different embodiments may also be implemented in any order, and that many other variations of the different aspects of the utility model as described above exist, which are not provided in detail for the sake of brevity. Any omission, modification, equivalent replacement, improvement, etc. of the present utility model should be included in the protection scope of the present utility model.
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202422641360.1U CN223519822U (en) | 2024-10-30 | 2024-10-30 | Electrostatic chuck film cutting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202422641360.1U CN223519822U (en) | 2024-10-30 | 2024-10-30 | Electrostatic chuck film cutting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN223519822U true CN223519822U (en) | 2025-11-07 |
Family
ID=97539439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202422641360.1U Active CN223519822U (en) | 2024-10-30 | 2024-10-30 | Electrostatic chuck film cutting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN223519822U (en) |
-
2024
- 2024-10-30 CN CN202422641360.1U patent/CN223519822U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |