CN223332914U - Detection device and defect detection equipment - Google Patents

Abstract

The application relates to a detection device and defect detection equipment, wherein the detection device comprises a support, a light source assembly and a shooting module, the light source assembly comprises a first light source and a second light source, the first light source and the second light source are arranged on the support in a staggered mode, and the shooting module is movably arranged on the support to move to a position aligned with the first light source and a position aligned with the second light source. In the detection device, the first light source and the second light source respectively provide illumination for the shooting module, so that the shooting module can obtain different shooting effects, and possible defects of the workpiece can be detected sufficiently. And the shooting module can move to the position aligned with the first light source and the shooting module can move to the position aligned with the second light source, so that two shooting modules do not need to be arranged to correspond to different light sources respectively, the structure of the detection device is simplified, and the cost of the detection device is reduced. The detection device comprises the detection device, and is simple in structure and low in cost.

Description

Detection device and defect detection equipment

Technical Field

The present application relates to the field of defect detection technologies, and in particular, to a detection apparatus and a defect detection device.

Background

In the process and production flow, before the semi-finished product is assembled or before the finished product leaves the factory, defect detection is usually performed on the semi-finished product workpiece and the finished product workpiece so as to screen out defective products with defects. Currently, vision detection is mainly performed by a camera or other vision detector in combination with a light source. However, for visual inspection, different types of light sources have different illumination effects, and a single light source is difficult to meet inspection requirements, and improvement is needed.

Disclosure of utility model

Based on this, it is necessary to provide a detection device and a defect detection apparatus for solving the problem that it is difficult to satisfy the detection requirement with a single light source when defect detection is performed by using vision.

The application provides a detection device which comprises a support, a light source assembly and a shooting module, wherein the light source assembly comprises a first light source and a second light source, the first light source and the second light source are arranged on the support in a staggered mode, and the shooting module is movably arranged on the support to move to a position aligned with the first light source and a position aligned with the second light source.

In one embodiment, the first light source and the second light source are sequentially arranged in a first direction, the shooting module is movably arranged on the support along the first direction, the light source assembly further comprises a third light source, the first light source is provided with a hollow light transmission area, and the third light source is movably arranged on the support along the first direction so as to move to a position aligned with and staggered from the hollow light transmission area.

In one embodiment, the first light source comprises a plurality of illumination members which are uniformly arranged at intervals in the circumferential direction around the reference axis and surround to form the hollow light transmission area, and when the shooting module is aligned with the first light source, the optical axis of the shooting module coincides with the reference axis.

In one embodiment, the illumination member is rotatably disposed on the bracket to adjust the light-emitting angle.

In one embodiment, the optical axis of the shooting module extends along a second direction, the second direction intersects with the first direction, and the first light source, the second light source and the third light source are disposed at different positions in the second direction.

In one embodiment, the bracket comprises a connecting plate and supporting pieces, wherein the supporting pieces are arranged on the connecting plate at intervals along the second direction, each supporting piece extends along the first direction, the shooting module, the first light source and the third light source are respectively arranged on different supporting pieces, and the second light source is arranged on the connecting plate.

In one embodiment, the first light source is configured as a combined strip light source, and/or the second light source is configured as a coaxial light source, and/or the third light source is configured as a striped light source.

In one embodiment, the first light source, the second light source, and the third light source are configured as light sources of mutually different types.

In one embodiment, the shooting module and the light source assembly corresponding to the illumination provided by the shooting module are denoted as shooting modules, and a plurality of shooting modules are arranged on the bracket at intervals.

In one embodiment, the support comprises a bearing plate and a portal frame, the light source assembly and the shooting module are arranged on the bearing plate, the portal frame is provided with a containing groove, the portal frame is further provided with first sliding rails, the number of the first sliding rails is at least two and is respectively arranged on two sides of the containing groove, the bearing plate is in sliding fit with the first sliding rails, and the detection device further comprises a first driving unit which is at least partially arranged in the containing groove and is connected with the bearing plate to drive the bearing plate to slide.

In another aspect, the present application further provides a defect detection apparatus, where the defect detection apparatus includes a transfer device and the detection device as described above, where the transfer device is configured to carry a workpiece and move the workpiece to a detection range of the detection device.

In the detection device, the first light source and the second light source respectively provide illumination for the shooting module, so that the shooting module can obtain different shooting effects, and possible defects of the workpiece can be detected sufficiently. And the shooting module can move to the position aligned with the first light source and the shooting module can move to the position aligned with the second light source, so that two shooting modules do not need to be arranged to correspond to different light sources respectively, the structure of the detection device is simplified, and the cost of the detection device is reduced.

Drawings

Fig. 1 is an axial schematic view of a detection device according to an embodiment of the application.

Fig. 2 is an axial schematic view of a bracket, a light source assembly and a shooting module in the detection device shown in fig. 1.

Fig. 3 is a side view of the detection device shown in fig. 2 when the photographing module is aligned with the first light source.

Fig. 4 is a side view of the detection device shown in fig. 2 when the photographing module is aligned with the second light source.

Fig. 5 is an axial schematic view of a first light source in the detection device shown in fig. 2.

Fig. 6 is a side view of the detection device shown in fig. 2 when the photographing module is aligned with the first light source and the third light source is aligned with the hollow transparent area.

Fig. 7 is a side view of the illumination member of the first light source of fig. 5 after adjusting the illumination angle.

Fig. 8 is an isometric view of a holder in the test device of fig. 2.

Fig. 9 is a side view of the bracket shown in fig. 8.

Fig. 10 is a side view of the detection device shown in fig. 1.

Fig. 11 is a front view of the bracket and the first driving unit in the detecting device shown in fig. 1.

Fig. 12 is a front view of the bracket, the first driving unit and the second driving unit in the detecting device shown in fig. 1.

Fig. 13 is an axial side view of the rack and each drive unit in the inspection apparatus shown in fig. 2.

Fig. 14 is an isometric view of the connection plate and purge member of the test device of fig. 2.

Fig. 15 is an axial schematic view of a defect detecting apparatus according to an embodiment of the present application.

Fig. 16 is an axial schematic view of a transfer device in the defect inspection apparatus shown in fig. 15.

Fig. 17 is an axial schematic view of a transfer element in the transfer apparatus shown in fig. 16.

Reference numeral 1, defect detection apparatus; 10, a detection device; 11, shooting module; 100, brackets, 110, connecting plates, 120, supporting members, 121, first supporting members, 121a, second sliding rails, 122, second supporting members, 123, third supporting members, 123a, third sliding rails, 124, fourth supporting members, 124a, vertical plates, 125, fifth supporting members, 130, bearing plates, 140, portal frames, 141, first sliding rails, 142, accommodating grooves, 150, first supporting plates, 160, second supporting plates, 170, mounting frames, 200, light source assemblies, 210, first light sources, 211, hollow light transmission areas, 212, lighting members, 220, second light sources, 230, third light sources, 300, shooting modules, 410, first driving units, 411, first drivers, 412, first lead screws, 413, first connecting seats, 420, second driving units, 421, second drivers, 422, second lead screws, 423, second connecting seats, 430, third driving units, 431, third driving units, 432, third lead screws, third connecting seats, 441, 434, transmission belts, 440, fourth driving units, 440, second driving units, 230, third driving units, 410, second driving units, 420, second driving units, fourth driving units, driving.

Detailed Description

In order that the above objects, features and advantages of the application will be readily understood, a more particular description of the application will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. The present application may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the application, whereby the application is not limited to the specific embodiments disclosed below.

In the description of the present application, it should be understood that, if any, these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., are used herein with respect to the orientation or positional relationship shown in the drawings, these terms refer to the orientation or positional relationship for convenience of description and simplicity of description only, and do not indicate or imply that the apparatus or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the application.

Furthermore, the terms "first," "second," and the like, if any, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the terms "plurality" and "a plurality" if any, mean at least two, such as two, three, etc., unless specifically defined otherwise.

In the present application, unless explicitly stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly. For example, they may be fixedly connected, detachably connected or integrally formed, mechanically connected, electrically connected, directly connected or indirectly connected through an intermediate medium, and communicated between two elements or the interaction relationship between two elements unless clearly defined otherwise. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present application, unless expressly stated or limited otherwise, the meaning of a first feature being "on" or "off" a second feature, and the like, is that the first and second features are either in direct contact or in indirect contact through an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that if an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. If an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein, if any, are for descriptive purposes only and do not represent a unique embodiment.

Referring to fig. 1 to 4, an inspection apparatus 10 according to an embodiment of the present application is used for inspecting a workpiece for defects, which may include but are not limited to scratches, grooves, surface irregularities, dirt, etc. The detection device 10 includes a bracket 100, a light source assembly 200, and a shooting module 300, wherein the shooting module 300 is used for shooting an image of a workpiece, and the light source assembly 200 provides illumination for the shooting module 300 so as to improve the accuracy of the shooting module 300 for obtaining the image. The light source assembly 200 includes a first light source 210 and a second light source 220, and the first light source 210 and the second light source 220 are arranged on the bracket 100 in a staggered manner. The photographing module 300 is movably disposed on the bracket 100 to move to a position aligned with the first light source 210 and a position aligned with the second light source 220. It can be appreciated that, as shown in fig. 3, when the photographing module 300 is aligned with the first light source 210, the first light source 210 is used to provide illumination for photographing of the photographing module 300. As shown in fig. 4, when the photographing module 300 is aligned with the second light source 220, the second light source 220 is used to provide illumination for photographing of the photographing module 300.

In the above-mentioned detection device 10, the first light source 210 and the second light source 220 respectively provide illumination for the shooting module 300, so that the shooting module 300 can obtain different shooting effects, so as to sufficiently detect possible defects of the workpiece. In addition, the shooting module 300 can move to a position aligned with the first light source 210 and the shooting module 300 can move to a position aligned with the second light source 220, so that two shooting modules 300 do not need to be arranged to correspond to different light sources respectively, the structure of the detection device 10 is simplified, and the cost of the detection device 10 is reduced. It should be appreciated that the first light source 210 and the second light source 220 may be configured as different types of light sources. It should be noted that, the type of the light source may be differentiated according to the photographing effect obtained by the photographing module 300 when the light source provides illumination. In short, different types of light sources can obtain different photographing effects by the photographing module 300 when used to provide illumination to the photographing module 300.

Further, the first light source 210 and the second light source 220 may be one of a coaxial light source, a bar light source, a stripe light source, a dome light source, a backlight light source, a point light source, a low-angle light source, a surface light source, a line scanning light source, a structured light source, and an AOI special light source, respectively. For example, the first light source 210 may be configured as a combined strip light source, by which irradiation of the combined strip light source, local fine defects (e.g., scratches and knocks, etc.) are facilitated to be displayed. The second light source 220 may be configured as an on-axis light source, and the on-axis light source has the characteristics of uniform illumination and high contrast, so as to clearly display dirt, damage, bubbles, product contours, etc. on the surface of the product. Of course, the first light source 210 and the second light source 220 may be configured as other different types of light sources according to the requirement.

The light source assembly 200 is not limited to only providing two light sources, for example, please continue to refer to fig. 3 and 4, in one embodiment, the light source assembly 200 further includes a third light source 230, and the first light source 210, the second light source 220 and the third light source 230 respectively provide illumination for the photographing module 300, so that the photographing effect of the photographing module 300 can be enriched, and possible defects of the workpiece can be conveniently detected. Further, the third light source 230 may be one of a coaxial light source, a bar light source, a stripe light source, a dome light source, a backlight light source, a point light source, a low-angle light source, a surface light source, a line scan light source, a structured light source, and an AOI special light source. For example, the third light source 230 may be configured as a stripe light source. The fringe light source is capable of providing a high contrast fringe pattern that allows small details of the workpiece surface to be clearly visible, facilitating measurement and identification of surface defects or shape changes. The striped light source may be used for structured light illumination, which is capable of projecting a specific striped pattern. By analyzing the deformation or the offset of the stripes on the surface of the workpiece, the three-dimensional shape and the contour information of the object can be obtained, and the 3D two sides and the detection are facilitated. In one embodiment, the first, second and third light sources 210, 220 and 230 may be configured as light sources of different types from each other.

The first light source 210 and the second light source 220 are sequentially arranged in the first direction S1, and the photographing module 300 is movably disposed on the bracket 100 along the first direction S1, so that the photographing module 300 moves to a position aligned with the first light source 210 and a position aligned with the second light source 220, respectively. The first light source 210 is provided with a hollow light-transmitting region 211. The third light source 230 is movably disposed on the support 100 along the first direction S1 to move to a position aligned with and offset from the hollow transparent region 211. In this embodiment, the third light source 230 and the photographing module 300 may have a substantially parallel motion track, so that the third light source 230 moves to a position aligned with the photographing module 300. Also, the first light source 210 is provided with a hollow light-transmitting region 211, and since the hollow light-transmitting region 211 is substantially hollow, the first light source 210 does not affect the photographing of the photographing module 300 when the first light source 210 is turned off. Thereby, the third light source 230 is allowed to provide illumination at a position aligned with the first light source 210, so that the volume of the detection device 10 can be reduced.

It should be noted that, although a common illumination light source (for example, the above-mentioned coaxial light, combined bar light source, and stripe light source) mostly allows the shooting light of the shooting module 300 to transmit for shooting, if the shooting light of the shooting module 300 passes through two light sources at the same time, there is a problem that the shooting effect is limited. Therefore, in order to avoid the two light sources overlapping longitudinally, the light sources are generally arranged to be staggered, so that the detection device 10 has a large structural size. In the present application, since the third light source 230 can move along the first direction S1, the third light source 230 can avoid the hollow light-transmitting region 211, i.e. avoid the first light source 210 providing illumination, and reduce the negative effect that the third light source 230 blocks the illumination provided to the first light source 210. Further, some light sources (e.g., the first light source 210) allow the photographing light of the photographing module 300 to pass through without obstruction (i.e., have the hollow light-transmitting region 211 described above) when in use, so that this type of light source may be disposed relatively close to one side of the photographing module 300, while this type of light source does not substantially adversely affect another light source overlapping therewith. That is, when the third light source 230 is aligned with the hollow light-transmitting region 211 and the first light source 210 is turned off, the first light source 210 does not substantially affect the illumination of the third light source 230. While the third light source 230 may be removed when the first light source 210 provides illumination to reduce the impact on the illumination of the first light source 210. The arrangement is such that the longitudinally arranged first light source 210 and third light source 230 are capable of providing illumination independently, without affecting each other. It should be further noted that, the light source that allows the photographing light of the photographing module 300 to pass through without obstruction generally has a similar illumination effect, so the third light source 230 does not generally use the light source of this type, and if the third light source 230 is fixed below the first light source 210 in the reference direction, the illumination effect of the first light source 210 will be affected by the third light source 230. Of course, the third light source 230 is not strictly limited to have no hollow light-transmitting area, and can be adjusted according to practical requirements.

For example, referring to fig. 5 and 6, in one embodiment, the first light source 210 includes a plurality of illumination members 212, and the plurality of illumination members 212 are uniformly arranged at intervals in the circumferential direction around the reference axis O and surround to form a hollow light-transmitting region 211 as described above. When the photographing module 300 is aligned with the first light source 210, the optical axis L1 of the photographing module 300 coincides with the reference axis O. The third light source 230 is aligned with the first light source 210, which means that the projection of the third light source 230 along the reference axis O at least partially overlaps the hollow light-transmitting region 211.

To facilitate understanding of illumination of the light source assembly 200, the following description will be given of the case when each light source included in the light source assembly 200 is used to provide illumination, respectively:

Referring to fig. 3, when the first light source 210 is used for providing illumination, the photographing module 300 can be moved to a position aligned with the first light source 210. At this time, the third light source 230 can be moved to a position aligned with the second light source 220 to be staggered with the first light source 210, so as to avoid reflecting, refracting the illumination light and photographing light.

Referring to fig. 4, when the second light source 220 is used for providing illumination, the photographing module 300 can be moved to a position aligned with the second light source 220. Similarly, the third light source 230 can be moved to a position aligned with the first light source 210 to be offset from the second light source 220, so as to avoid reflecting, refracting the illumination light and photographing light.

Referring to fig. 6, when the third light source 230 is used for providing illumination, the photographing module 300 can be moved to a position aligned with the first light source 210. At this time, the projection of the third light source 230 along the reference axis O at least partially overlaps the hollow light-transmitting region 211, the first light source 210 is in the off state, and the hollow light-transmitting region 211 allows the photographing light to pass through without obstruction, so that the third light source 230 can sufficiently and effectively provide illumination.

It should be noted that, the positions of the components when the first light source 210, the second light source 220 and the third light source 230 provide illumination are described briefly, but the embodiments of the present application do not limit the timing of providing illumination by each light source, and may be flexibly set according to actual requirements.

In one embodiment, the illumination member 212 may be a bar light source, i.e., where the first light source 210 is a combined bar light source as described above, a plurality of bar light sources are combined to illuminate. Referring to fig. 7, the illumination member 212 is rotatably disposed on the bracket 100 to adjust the light emitting angle. For example, illumination light rays provided by the respective illumination members 212 may be adjusted to intersect at the same location on the reference axis O to form a highlighted area to enhance illumination. The illumination direction of the illumination member 212 is referred to by reference numeral L2 in fig. 7. Of course, the illumination members 212 may be adjusted to have different light emitting angles according to the requirement, which is not limited herein. It should be understood that the drawings of the specification show the number of the illumination members 212 as 4, but the number of the illumination members 212 is not limited thereto, and the number of the illumination members 212 may be set as 2, 3, 4, 5, 6, 7, 8, 10, 12, etc. as required.

Referring to fig. 2 again, in one embodiment, the optical axis L1 of the photographing module 300 extends along a second direction S2, and the second direction S2 intersects with the first direction S1. The first light source 210, the second light source 220 and the third light source 230 are disposed at different positions in the second direction S2, so as to make full use of space and make the detection device 10 more compact.

Further, the first direction S1 and the second direction S2 are perpendicular to each other.

Referring to fig. 2, 8 and 9, in one embodiment, the bracket 100 includes a connecting plate 110 and supporting members 120, the supporting members 120 are disposed on the connecting plate 110 along a second direction S2 at intervals, and each supporting member 120 extends along a first direction S1. The photographing module 300, the first light source 210 and the third light source 230 are respectively disposed on different supporting members 120, and the second light source 220 is disposed on the connecting plate 110. The plurality of supporting members 120 are disposed on the connecting plate 110 along the second direction S2, so that the photographing module 300, the first light source 210, the second light source 220 and the third light source 230 can be disposed at intervals in the second direction S2, so as to fully utilize the installation space on the connecting plate 110. Each supporting member 120 extends along the first direction S1, so that the photographing module 300 and the third light source 230 can move along the first direction S1, and the first light source 210 and the second light source 220 can be arranged in a staggered manner along the first direction S1.

Referring to fig. 8 and 9, the plurality of supporting members 120 may be divided into a first supporting member 121, a second supporting member 122 and a third supporting member 123, and the first supporting member 121, the second supporting member 122 and the third supporting member 123 are sequentially arranged along the second direction S2. The photographing module 300 is movably disposed on the first support 121, the first light source 210 is disposed on the second support 122, and the third light source 230 is movably disposed on the third support 123.

Further, as shown in fig. 9, the first support 121 has one end connected to the connection plate 110 and the other end extending in a direction perpendicular to the connection plate 110 in a direction away from the connection plate 110 (i.e., S1 direction). The first supporting member 121 is provided with a second sliding rail 121a, and the second sliding rail 121a is disposed on the top surface of the first supporting member 121 along the first direction S1. The photographing module 300 is slidably engaged with the second slide rail 121 a. The third support 123 has one end connected to the connection plate 110 and the other end extending in a direction perpendicular to the connection plate 110 away from the connection plate 110 (i.e., S1 direction). The third supporting member 123 is provided with a third sliding rail 123a, and the third sliding rail 123a is disposed on the bottom surface of the third supporting member 123 along the first direction S1.

Referring to fig. 8 and 10, in one embodiment, the photographing module 300 and the light source assembly 200 corresponding to the photographing module 300 for providing illumination are denoted as photographing modules 11, and a plurality of photographing modules 11 are disposed on the stand 100 at intervals. That is, the bracket 100 is provided with a plurality of photographing modules 300 and a plurality of light source assemblies 200, and the plurality of light source assemblies 200 respectively provide illumination for the plurality of photographing modules 300. Further, the bracket 100 further includes a first supporting plate 150 and a second supporting plate 160, and the plurality of photographing modules 300 are disposed on the first supporting plate 150. The number of the first supporting pieces 121 is plural, and the first pallet 150 is slidably engaged with the plurality of first supporting pieces 121. The first supporting plate 150 can drive the plurality of shooting modules 300 to synchronously move when sliding relative to the first supporting member 121 so as to move to different stations and simultaneously shoot and detect a plurality of workpieces, so that the detection efficiency is high. Similarly, the number of the second supporting members 122 and the third supporting members 123 may be plural to improve the stability of the support. The plurality of third light sources 230 are disposed on the second supporting plate 160, and the second supporting plate 160 is slidably engaged with the plurality of third supporting members 123.

With continued reference to fig. 8, in one embodiment, the stand 100 further includes a mounting frame 170, where the mounting frame 170 is disposed on the first supporting plate 150, and the photographing module 300 is disposed on the mounting frame 170, and the mounting frame 170 can support the photographing module 300 to be placed in a preset posture, so as to facilitate photographing and detecting the workpiece toward the workpiece.

Referring to fig. 12, in one embodiment, the stand 100 further includes a carrier 130 and a gantry 140, and the light source assembly 200 and the photographing module 300 are disposed on the carrier 130. The gantry 140 is provided with a receiving groove 142, and the gantry 140 is further provided with a first sliding rail 141. The number of the first sliding rails 141 is at least two, and the first sliding rails 141 are respectively arranged at two sides of the accommodating groove 142, and the bearing plate 130 is in sliding fit with the first sliding rails 141. The detecting device 10 further includes a first driving unit 410, where the first driving unit 410 is at least partially disposed in the accommodating groove 142 and connected to the carrier 130, so as to drive the carrier 130 to slide. By providing the first slide rails 141 on both sides of the receiving groove 142, the stability of the movement of the carrier 130 can be improved. It can be understood that the plurality of photographing modules 11 are disposed on the carrying plate 130, so that the carrying plate 130 has a higher load, and thus the stability of the movement of the carrying plate 130 can be improved. Further, the first driving unit 410 is disposed in the accommodating groove 142, which can reduce the structural size of the detecting device 10.

The first slide rail 141 may be extended along the third direction S3, that is, the first driving unit 410 drives the carrier 130 and the photographing module 300 and the light source assembly 200 disposed on the carrier 130 to move along the third direction S3. The third direction S3 intersects both the first direction S1 and the second direction S2. Further, the first direction S1, the second direction S2, and the third direction S3 are perpendicular to each other.

As shown in fig. 10, a plurality of photographing modules 11 are disposed on opposite sides of the gantry 140. Further, the detection device 10 may include two carrying plates 130 and two first driving units 410, where the two carrying plates 130 are respectively disposed on opposite sides of the gantry 140, and the two first driving units 410 may be respectively disposed in the receiving slots 142 and respectively drive the two carrying plates 130 to move along the third direction S3.

Referring to fig. 2 and 12, in one embodiment, the connection plate 110 is movably disposed on the carrier plate 130 along the second direction S2. Further, the detection device 10 further includes a second driving unit 420, where the second driving unit 420 is disposed on the carrier 130 and connected to the connecting plate 110, so as to drive the connecting plate 110 and the photographing module 300 and the light source assembly 200 disposed on the connecting plate 110 to move along the second direction S2.

Referring to fig. 2, in one embodiment, the detecting device 10 further includes a third driving unit 430 and a fourth driving unit 440, the stand 100 further includes a fourth supporting member 124 and a fifth supporting member 125, the third driving unit 430 is disposed on the fourth supporting member 124, and the fourth driving unit 440 is disposed on the fifth supporting member 125. The third driving unit 430 is connected to the first support plate 150 to drive the first support plate 150 and the plurality of photographing modules 300 disposed on the first support plate 150 to move along the first direction S1. The fourth driving unit 440 is connected to the second supporting plate 160 to drive the second supporting plate 160 and the plurality of third light sources 230 disposed on the second supporting plate 160 to move along the first direction S1.

Referring to fig. 11, in one embodiment, the first driving unit 410 may drive the carrier 130 to move by using a lead screw nut. Further, the first driving unit 410 includes a first driver 411, a first screw rod 412, and a first connecting seat 413, wherein the first driver 411 and the first screw rod 412 are disposed in the accommodating groove 142, and a portion of the first connecting seat 413 extends out of the accommodating groove 142 to be connected with the carrier 130. The first driver 411 is connected to an end of the first screw 412 to drive the first screw 412 to rotate about its own axis. The first screw 412 penetrates through the first connecting seat 413 and is engaged with the first connecting seat 413, and the first connecting seat 413 is connected with the bearing plate 130. Thus, the first screw 412 can drive the first connecting seat 413 to axially move when rotating. The first screw rod 412 may extend along the third direction S3, and the first screw rod 412 is used to drive the first connecting seat 413 to move along the third direction S3.

Referring to fig. 12, similar to the first driving unit 410, the second driving unit 420 includes a second driver 421, a second screw 422, and a second connecting seat 423, where the second driver 421 and the second screw 422 are disposed on the carrier 130, and the second connecting seat 423 is connected to the connecting plate 110. The second driver 421 is connected to an end of the second screw 422 to drive the second screw 422 to rotate around its own axis. And, the second screw 422 penetrates the second connection seat 423 and is engaged with the second connection seat 423. Therefore, the second screw 422 can drive the second connecting seat 423 to axially move when rotating. The second screw rod 422 may extend along the second direction S2, and the second screw rod 422 is configured to drive the second connecting seat 423 to move along the third direction.

Referring to fig. 13, in an embodiment, the third driving unit 430 may also adopt a driving mode of a lead screw nut. That is, the third driving unit 430 includes a third driving unit 430 including a third driver 431, a third screw 432, and a third connection seat 433, the third connection seat 433 is connected with the first pallet 150, and the third screw 432 penetrates the third connection seat 433 and is engaged with the third connection seat 433. The third driver 431 is connected to an end of the third screw 432 to drive the third screw 432 to rotate around its own axis. Therefore, the third screw rod 432 can drive the third connecting seat 433 to axially move when rotating. The third screw rod 432 may extend along the first direction S1, and the third screw rod 432 is configured to drive the third connecting seat 433 to move along the first direction S1.

In connection with fig. 9, further, to simplify the dimensions of the detection device 10 in the first direction S1, a driving connection between the third driver 431 and the third screw 432 via a driving belt 434 may be provided, so that the third drivers 431 may be arranged side by side without being arranged coaxially. Further, the fourth supporting member 124 is provided with a standing plate 124a, and the standing plate 124a extends along the second direction S2 to support the third driver 431.

With continued reference to fig. 13, in one embodiment, the fourth driving unit 440 may be directly driven by a linear driver, for example, the fourth driving unit 440 may be driven by a cylinder or an electric push rod. Further, the fourth driving unit 440 includes a cylinder 441 and a slider 442, wherein the cylinder 441 is disposed to extend along the first direction S1, and the cylinder 441 is capable of driving the slider 442 to slide along the first direction S1. The slider 442 is connected to the second supporting plate 160 to drive the second supporting plate 160 to move along the first direction S1.

Referring to fig. 14, in one embodiment, the detecting device 10 further includes a purge member 500, where the purge member 500 is disposed on the connection plate 110. The purge piece 500 is provided with a purge hole 510, and the purge hole 510 faces to a workpiece to be inspected. The purge piece 500 is further connected to a positive pressure generator (not shown, and the following is the same), the positive pressure generator is used for inputting positive pressure purge air to the purge piece 500, and the purge hole 510 guides the purge air to blow to the workpiece to be inspected, so that impurities such as dust on the surface of the workpiece are removed, and accuracy of shooting detection is improved.

Referring to fig. 15, an embodiment of the present application further provides a defect detecting apparatus, which includes a transferring device 20 and a detecting device 10, wherein the transferring device is used for carrying a workpiece and moving the carried workpiece within a detecting range of the detecting device 10. Further, the transfer device can also adjust the position according to the movement of the photographing module 300. For example, when the photographing module 300 moves to a position aligned with the first light source 210, the transfer device may carry the workpiece to a position aligned with the first light source 210. When the photographing module 300 moves to a position aligned with the second light source 220, the transferring device can carry the workpiece to move to a position aligned with the second light source 220.

Further, the defect detecting apparatus 1 further includes a base 30, and the detecting device 10 and the transferring device are both disposed on the base 30, wherein the detecting device 10 can be mounted on the transferring device so as to detect the workpiece carried by the transferring device.

Referring to fig. 16 and 17, in one embodiment, the transfer device 20 includes a driving platform 21 and a transfer member 22, the transfer member 22 is used for carrying a workpiece, the driving platform 21 is connected to the transfer member 22, the driving platform 21 can drive the transfer member 22 to move along a first direction S1, that is, the driving platform 21 can drive the transfer member 22 to move along the first direction S1 to convey the workpiece along the first direction S1. Thus, when the shooting module 300 moves along the first direction S1 to switch the light sources, the transfer device 20 can correspondingly drive the workpiece to move according to the movement of the shooting module 300, so that the workpiece can always be within the field of view of the shooting module 300.

Referring to fig. 17, further, the transfer member 22 includes a frame 22a, a connecting beam 22b, and a plurality of jigs 22c. The rack 22a is connected to the driving platform 21, and the driving platform 21 drives the transfer member 22 to move along the first direction S1 by driving the rack 22a to move. The connection beam 22b is rotatably connected to the frame 22a about a first axis O1, each jig 22c is rotatably connected to the connection beam 22b about a second axis O2, and the first axis O1 intersects the second axis O2. Thus, the workpieces fixed by the fixture 22c can synchronously rotate around the first axis O1, so that the angle positions of the workpieces in the field of view of the shooting module 300 are enriched, and the detection effect is improved. In addition, each jig 22c rotates around the second axis O2 and the connecting beam 22b, that is, each jig 22c can also rotate around the second axis O2, so as to further enrich the posture of the workpiece in the field of view of the shooting module 300 and improve the detection effect.

In one embodiment, the angular position of the connecting beam 22b and/or the jig 22c may also be adjusted according to different positions of the photographing module 300 to perform targeted detection on the detailed area of the workpiece.

Further, the first axis O1 may be perpendicular to the second axis O2, and the first axis O1 may be parallel to the third direction S3. The second axis O2 may be parallel to a plane formed by the first direction S1 and the second direction S2.

As shown in fig. 16, in one embodiment, the transferring device 20 may include a plurality of transferring elements 22, where each of the plurality of transferring elements 22 is connected to the driving platform 21 to move in the same direction (i.e., the first direction S1) under the driving of the driving platform 21. The frame 22a of each transfer member can be rotated to a face-to-face posture of the jigs 22c, and at this time, the two jigs 22c facing each other transfer the work pieces to each other. For example, taking the fixture 22c to vacuum-adsorb the workpiece for fixing, when the two fixtures 22c face to face, the two fixtures 22c can adsorb two opposite sides of the workpiece respectively, and at this time, one fixture 22c can transfer the workpiece to the other fixture 22c by loosening the workpiece.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.

Claims (11)

1. A detection device, characterized in that the detection device comprises:

A bracket;

The light source assembly comprises a first light source and a second light source, and the first light source and the second light source are arranged on the bracket in a staggered manner;

and the shooting module is movably arranged on the bracket so as to move to a position aligned with the first light source and a position aligned with the second light source.

2. The apparatus according to claim 1, wherein the first light source and the second light source are sequentially arranged in a first direction, and the photographing module is movably provided to the bracket in the first direction;

The light source assembly further comprises a third light source, the first light source is provided with a hollow light transmission area, and the third light source is movably arranged on the support along the first direction so as to move to a position aligned and staggered with the hollow light transmission area.

3. The apparatus according to claim 2, wherein the first light source includes a plurality of illumination members which are arranged at regular intervals in a circumferential direction around a reference axis and surround to form the hollow light-transmitting region, and wherein an optical axis of the photographing module coincides with the reference axis when the photographing module is aligned with the first light source.

4. A detection device according to claim 3, wherein the illumination member is rotatably provided to the holder to adjust the light-emitting angle.

5. The apparatus according to claim 2, wherein an optical axis of the photographing module extends along a second direction intersecting the first direction, and the first light source, the second light source, and the third light source are disposed at different positions in the second direction.

6. The device according to claim 5, wherein the bracket comprises a connection plate and a support member, a plurality of the support members are arranged on the connection plate at intervals along the second direction, and each support member extends along the first direction;

The shooting module, the first light source and the third light source are respectively arranged on different supporting pieces, and the second light source is arranged on the connecting plate.

7. The detecting device according to claim 2, wherein,

The first light source is configured as a combined strip light source, and/or

The second light source is configured as a coaxial light source, and/or

The third light source is configured as a stripe light source.

8. The detection apparatus according to any one of claims 2 to 7, wherein the first light source, the second light source, and the third light source are configured as light sources of mutually different types.

9. The apparatus according to any one of claims 1 to 7, wherein the photographing module and the light source module corresponding to the illumination provided to the photographing module are referred to as photographing modules, and a plurality of the photographing modules are provided at intervals to the stand.

10. The detection device according to claim 1, wherein the bracket comprises a bearing plate and a portal frame, the light source assembly and the shooting module are both arranged on the bearing plate, the portal frame is provided with a containing groove, the portal frame is also provided with first sliding rails, the number of the first sliding rails is at least two and is respectively arranged on two sides of the containing groove, and the bearing plate is in sliding fit with the first sliding rails;

The detection device further comprises a first driving unit which is at least partially arranged in the accommodating groove and connected with the bearing plate so as to drive the bearing plate to slide.

11. A defect inspection apparatus comprising a transfer device for carrying a workpiece and moving the workpiece within the inspection range of the inspection device, and an inspection device according to any one of claims 1 to 10.