CN223101807U - Rotary feeding structure and sintering equipment - Google Patents
Rotary feeding structure and sintering equipmentInfo
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- CN223101807U CN223101807U CN202422473007.7U CN202422473007U CN223101807U CN 223101807 U CN223101807 U CN 223101807U CN 202422473007 U CN202422473007 U CN 202422473007U CN 223101807 U CN223101807 U CN 223101807U
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- feeding structure
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Abstract
本实用新型属于半导体烧结设备领域，尤其涉及一种旋转送料结构及烧结设备。旋转送料结构，用于将预定位置的料盘输送至热压工位，其特征在于，旋转送料结构包括：旋转组件，包括转动设置的旋转料板以及用于驱动旋转料板转动的旋转驱动机构，热压工位位于旋转料板的转动路径；以及输送组件，包括第一夹取机构、移送机构以及相对第一夹取机构间隔设置的第二夹取机构，第一夹取机构于预定位置抓取料盘，第二夹取机构设置于旋转料板的转动路径上，移送机构滑动设置于第一夹取机构和第二夹取机构之间。本实用新型能够实现料盘从预定位置到热压工位的自动化输送，提高了生产效率。
The utility model belongs to the field of semiconductor sintering equipment, and in particular, relates to a rotary feeding structure and sintering equipment. The rotary feeding structure is used to transport a material tray at a predetermined position to a hot pressing station, and is characterized in that the rotary feeding structure includes: a rotating assembly, including a rotating material plate that is rotatably arranged and a rotary driving mechanism for driving the rotating material plate to rotate, and the hot pressing station is located on the rotation path of the rotating material plate; and a conveying assembly, including a first clamping mechanism, a transfer mechanism, and a second clamping mechanism that is spaced relative to the first clamping mechanism, the first clamping mechanism grabs the material tray at a predetermined position, the second clamping mechanism is arranged on the rotation path of the rotating material plate, and the transfer mechanism is slidably arranged between the first clamping mechanism and the second clamping mechanism. The utility model can realize the automatic transportation of the material tray from the predetermined position to the hot pressing station, thereby improving production efficiency.
Description
Technical Field
The utility model belongs to the field of semiconductor sintering equipment, and particularly relates to a rotary feeding structure and sintering equipment.
Background
Currently, power semiconductor devices are required to withstand high currents, high voltages and high energy densities, which require package interconnect materials with excellent electrical conductivity, thermal conductivity and mechanical properties. With the improvement of the integration level of devices and the gradual commercialization of third-generation semiconductors represented by silicon carbide, the conventional connection method cannot meet the requirements of power devices on heat dissipation, conductivity and mechanical properties. In this background, a new packaging method typified by a silver sintering process is becoming a mainstream technology for power device packaging.
In the currently applied sintering technique, a sintering apparatus is indispensable. In general, a tray is placed on a sintering mold by a worker, and semiconductor devices on the tray are sintered by the sintering mold. However, this manual feeding method is not only inefficient in transferring the trays, and is likely to cause fatigue of workers, but also is not suitable for automated continuous production.
Disclosure of utility model
The embodiment of the application aims to provide a rotary feeding structure, which aims to solve the problem of how to convey a material tray to a hot pressing station.
In order to achieve the above purpose, the application adopts the following technical scheme:
In a first aspect, a rotary feed structure is provided for conveying a tray at a predetermined position to a hot press station, the rotary feed structure comprising:
The rotary assembly comprises a rotary material plate which is arranged in a rotary way and a rotary driving mechanism for driving the rotary material plate to rotate, the hot pressing station is positioned in the rotary path of the rotary material plate, and
The conveying assembly comprises a first clamping mechanism, a transfer mechanism and a second clamping mechanism which is arranged at intervals relative to the first clamping mechanism, the first clamping mechanism clamps the tray at the preset position, the second clamping mechanism is arranged on the rotating path of the rotating tray, and the transfer mechanism is arranged between the first clamping mechanism and the second clamping mechanism in a sliding manner;
the transfer mechanism receives the tray from the first clamping mechanism and transfers the tray to the second clamping mechanism, the second clamping mechanism grabs the tray and releases the tray to the rotary material plate, and the rotary material plate rotates by a preset angle and moves the tray to the hot-pressing station.
In some embodiments, the rotary feeding structure further comprises a feeding table with a feeding groove, two ends of the feeding table respectively extend towards the first clamping mechanism and the second clamping mechanism, and the transfer mechanism is slidably arranged in the feeding groove.
In some embodiments, the transfer mechanism includes two opposite supporting frames, two supporting frames are respectively connected with two side groove walls of the feeding groove in a sliding manner, and two supporting frames are respectively used for supporting two ends of the tray.
In some embodiments, the rotary feeding structure further comprises a synchronous belt rotatably arranged in the feeding groove, a transmission shaft rotatably arranged along the groove width direction of the feeding groove, and a synchronous driver for driving the synchronous belt to rotate, wherein two synchronous belts are arranged, two supporting frames are respectively connected with two synchronous belts, and two ends of the transmission shaft are respectively connected with two synchronous belts in a transmission manner.
In some embodiments, the first clamping mechanism comprises a supporting seat fixedly arranged, a lifter arranged on the supporting seat, a first finger cylinder connected with the lifter, and first clamping jaws connected with the first finger cylinder, wherein the first clamping jaws are arranged at two ends of the first finger cylinder, and the first finger cylinder is used for driving the two first clamping jaws to clamp the tray.
In some embodiments, the first jaw includes a first clamping plate connected to the first finger cylinder and a first clamping head disposed on the first clamping plate, the first clamping head being disposed two apart.
In some embodiments, the second clamping mechanism comprises a preheating template positioned above the rotating material plate, a second finger cylinder arranged on the preheating template and second clamping jaws connected with the second finger cylinder, the second clamping jaws are arranged at two ends of the second finger cylinder and used for driving the two second clamping jaws to clamp the material plate, the second clamping jaws comprise second clamping plates connected with the second finger cylinder and second clamping heads arranged on the second clamping plates, and the second clamping heads are arranged at intervals.
In some embodiments, the rotary material plate is provided with a plurality of feeding grooves for placing the material trays, the feeding grooves are arranged at intervals around the rotation center of the rotary material plate, and the rotary material plate rotates so that the feeding grooves sequentially pass through the hot pressing station.
In some embodiments, the rotary feed structure further comprises an electrical slip ring disposed at a center of rotation of the rotary flitch, the electrical slip ring rotating in synchronization with the rotary flitch.
In a second aspect, a sintering device is provided, which includes the rotary feeding structure, and further includes a hot pressing die disposed at the hot pressing station.
The rotary feeding structure has the beneficial effects that the rotary feeding structure comprises the rotary component and the conveying component, so that the automatic conveying from the preset position to the hot pressing station of the material tray can be realized, and the production efficiency is improved. The rotation of the rotary material plate can accurately convey the material tray to the hot-pressing station, and complicated steps and errors of manual operation are reduced. The automatic conveying mode reduces the labor intensity of worker operation, reduces potential safety hazards caused by human factors, is suitable for a large-scale automatic production process, and improves the continuity and stability of production.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments or exemplary technical descriptions will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained according to these drawings without inventive effort for a person of ordinary skill in the art.
Fig. 1 is a schematic perspective view of a rotary feeding structure according to an embodiment of the present application;
FIG. 2 is a schematic perspective view of the conveyor assembly of FIG. 1;
FIG. 3 is a schematic perspective view of the first gripping mechanism of FIG. 1;
FIG. 4 is a schematic perspective view of the second gripping mechanism of FIG. 1;
FIG. 5 is a schematic perspective view of the rotating assembly of FIG. 1;
fig. 6 is a schematic perspective view of a sintering apparatus according to another embodiment of the present application.
Wherein, each reference sign in the figure:
300. The device comprises a rotary feeding structure, 30, a conveying assembly, 31, a first clamping mechanism, 32, a second clamping mechanism, 33, a transfer mechanism, 200, a material tray, 50, a sintering die, 44, a hot pressing station, 40, a rotary assembly, 41, a rotary material plate, 42, a rotary driving mechanism, 311, a first clamping jaw, 312, a first finger cylinder, 313, a lifter, 314, a supporting seat, 34, a feeding table, 341, a feeding groove, 342, a synchronous belt, 343, a synchronous driver, 344, a transmission shaft, 331, a supporting frame, 3111, a first clamping plate, 3112, a first clamping head, 208, a limiting groove, 321, a preheating template, 322, a second finger cylinder, 323, a second clamping jaw, 3231, a second clamping plate, 3232, a second clamping head, 411, an upper groove, 35, a blanking structure, 203, a bin, 412 and an electric slip ring;
Detailed Description
The present application will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present application more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application.
It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly or indirectly connected to the other element. The orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", etc. are based on the orientation or positional relationship shown in the drawings, are for convenience of description only, and are not intended to indicate or imply that the apparatus or element in question must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the application, and the specific meaning of the terms described above will be understood by those of ordinary skill in the art as appropriate. The terms "first," "second," and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features. The meaning of "a plurality of" is two or more, unless specifically defined otherwise.
Referring to fig. 1 to 3, an embodiment of the present application provides a rotary feeding structure 300 and a sintering apparatus having the same, wherein the rotary feeding structure 300 is used for conveying a tray 200 carrying semiconductor devices to be sintered to a hot pressing station 44, so that a sintering mold 50 located at the hot pressing station 44 can sinter the semiconductor devices on the tray 200.
Referring to fig. 1 to 3, a rotary feeding structure 300 is used for conveying a tray 200 at a predetermined position to a hot pressing station 44, and the rotary feeding structure 300 includes a rotary assembly 40 and a conveying assembly 30.
Referring to fig. 1 to 3, the rotating assembly 40 includes a rotating material plate 41 and a rotating driving mechanism 42 for driving the rotating material plate 41 to rotate, the hot pressing station 44 is located in a rotating path of the rotating material plate 41, it is understood that the rotating material plate 41 is used for placing the material plate 200, when the driving mechanism 42 drives the rotating material plate 41 to rotate, the material plate 200 located on the rotating material plate 41 can be rotationally conveyed to the hot pressing station 44, and the sintering mold 50 is located in the hot pressing station 44.
Referring to fig. 2 to 4, the conveying assembly 30 includes a first gripping mechanism 31, a transfer mechanism 33, and a second gripping mechanism 32 disposed at a distance from the first gripping mechanism 31, the first gripping mechanism 31 grips the tray 200 at a predetermined position, the second gripping mechanism 32 is disposed on a rotation path of the rotating tray 41, the transfer mechanism 33 is slidably disposed between the first gripping mechanism 31 and the second gripping mechanism 32, and the transfer mechanism 33 can reciprocate along a horizontal direction, so that the tray 200 can be continuously moved from the first gripping mechanism 31 to the second gripping mechanism 32.
Referring to fig. 2 to 4, the transfer mechanism 33 receives the tray 200 from the first clamping mechanism 31 and transfers the tray 200 to the second clamping mechanism 32, the second clamping mechanism 32 grabs the tray 200 and releases the tray 200 to the rotating plate 41, and the rotating plate 41 rotates a predetermined angle and moves the tray 200 to the hot pressing station 44. The predetermined angle may be 30 degrees, 45 degrees or 90 degrees, and is not limited herein, and may be selected according to practical situations. In this embodiment, the tray 200 is located on a carrier, and the first clamping mechanism 31 clamps the tray 200 to be sintered from the carrier.
The rotary feeding structure 300 of the embodiment of the application comprises the rotary assembly 40 and the conveying assembly 30, can realize automatic conveying of the tray 200 from a preset position to the hot pressing station 44, and improves production efficiency. The rotation of the rotary tray 41 can accurately convey the tray 200 to the hot press station 44, reducing cumbersome steps and errors of manual operations. The automatic conveying mode reduces the labor intensity of worker operation, reduces potential safety hazards caused by human factors, is suitable for a large-scale automatic production process, and improves the continuity and stability of production.
Alternatively, the rotary drive mechanism 42 may be a combination of a motor and a gear assembly that can transmit the rotational power of the motor to the rotary table 41.
Referring to fig. 2 to 4, in some embodiments, the rotary feeding structure 300 further includes a feeding table 34 having a feeding groove 341, two ends of the feeding table 34 extend toward the first gripping mechanism 31 and the second gripping mechanism 32, and the transfer mechanism 33 is slidably disposed in the feeding groove 341.
Alternatively, the first clamping mechanism 31 is fixed on the feeding table 34, and the predetermined position is set in the feeding groove 341, and by providing the feeding table 34 with the feeding groove 341, two ends of the feeding table 34 extend toward the first clamping mechanism 31 and the second clamping mechanism 32, respectively, so that the tray 200 can be kept stable in the feeding groove 341 during the transferring process. The transfer mechanism 33 is slidably arranged in the feeding groove 341, so that shaking and tilting of the tray 200 in the moving process can be effectively avoided, and the stability and reliability of transferring the tray 200 are improved.
Optionally, a bottom template is provided on the transfer mechanism 33, and the tray 200 can be placed on the bottom template, so that the tray 200 can be transferred by the support of the bottom template.
Referring to fig. 2 to 4, in some embodiments, the transfer mechanism includes two opposite supporting frames 331, the two supporting frames 331 are respectively slidably connected to two side walls of the feeding groove 341, and the two supporting frames 331 are respectively used for supporting two ends of the tray 200.
Optionally, a guide rail sliding block mechanism may be disposed on the groove wall of the feeding groove 341, and the two supporting frames 331 are respectively connected with the two side groove walls of the feeding groove 341 in a sliding manner by guiding the sliding of the supporting frames 331 through the guide rail sliding block mechanism, so that the stability and the supporting force of the tray 200 in the transferring process are ensured. The two support frames 331 can support the two ends of the bottom template respectively, and the material tray 200 is placed on the bottom template, so that the material tray 200 is not easy to incline or drop in the conveying process, and the operation safety is improved.
Referring to fig. 2 to 4, in some embodiments, the rotary feeding structure 300 further includes a synchronous belt 342 rotatably disposed in the feeding groove 341, a transmission shaft 344 rotatably disposed along the groove width direction of the feeding groove 341, and a synchronous driver 343 for driving the synchronous belt 342 to rotate, wherein two synchronous belts 342 are disposed, two supporting frames 331 are respectively connected to the two synchronous belts 342, and two ends of the transmission shaft 344 are respectively connected to the two synchronous belts 342 in a transmission manner. The synchronous drive 343 may be a servo motor.
Optionally, by arranging two synchronous belts 342, and the two synchronous belts 342 are in transmission connection through a transmission shaft 344, when one synchronous belt 342 is driven to rotate by the synchronous driver 343, the other synchronous belt 342 can also synchronously rotate through the transmission of the transmission shaft 344, and the two synchronous rotating synchronous belts 342 can respectively drive the two supporting frames 331 to synchronously slide, so that synchronous movement of the two supporting frames 331 is ensured, and the problem of tilting and shifting of the material tray 200 caused by asynchronous movement is avoided. The arrangement of the transmission shaft 344 further enhances the transmission efficiency of the timing belt 342, so that the tray 200 can move smoothly on a predetermined path, improving the working efficiency and accuracy of the entire feeding structure.
Referring to fig. 2 to 4, in some embodiments, the first clamping mechanism 31 includes a supporting seat 314 fixedly disposed, a lifter 313 disposed on the supporting seat 314, a first finger cylinder 312 connected to the lifter 313, and first clamping jaws 311 connected to the first finger cylinder 312, wherein two ends of the first finger cylinder 312 are respectively provided with the first clamping jaws 311, and the first finger cylinder 312 is used for driving the two first clamping jaws 311 to clamp the tray 200. The lifter 313 can drive the first finger cylinder 312 to ascend or descend in the vertical direction, and after the tray 200 is held by the two first clamping jaws 311, the lifter 313 drives the first finger cylinder 312 to ascend, the tray 200 ascends synchronously, the transfer mechanism 33 moves to the lower side of the tray 200, and the lifter 313 drives the first finger cylinder 312 to descend again until the tray 200 is released on the transfer mechanism 33.
The first finger cylinder 312 can drive the two first clamping jaws 311 to be close to each other or to be far away from each other along the horizontal direction.
Optionally, the heights of the two first clamping jaws 311 can be adjusted through the lifter 313, so that the two first clamping jaws can adapt to the trays 200 with different heights, and accurate positioning and clamping of the trays 200 are achieved. The first finger cylinder 312 drives the first clamping jaw 311 to clamp the tray 200, so that stability and safety in the clamping process are ensured, manual operation errors can be effectively reduced, and reliability and production efficiency of automatic operation are improved.
Alternatively, the lifter 313 may be a cylinder or a synchronous belt 342, which is a prior art structure and will not be described herein.
Referring to fig. 2 to 4, in some embodiments, the first clamping jaw 311 includes a first clamping plate 3111 connected to the first finger cylinder 312 and a first clamping head 3112 disposed on the first clamping plate 3111, the first clamping heads 3112 being disposed two apart.
Optionally, a limiting groove 208 is disposed on the tray 200 at a position corresponding to each first clamping head 3112, and each first clamping head 3112 is respectively clamped in each limiting groove 208, so as to stably clamp the tray 200 and provide a more stable clamping force. The spaced arrangement of the first clamping heads 3112 ensures a multi-point support and clamping of the tray 200, avoiding tilting and sliding of the tray 200 caused by single-point clamping. The first clamping plate 3111 is connected to the first finger cylinder 312, so that the first clamping head 3112 can flexibly adjust positions to accommodate different-sized trays 200, stability and safety of the clamping process are improved, and the trays 200 are prevented from slipping or shifting.
Referring to fig. 2 to 4, in some embodiments, the second clamping mechanism 32 includes a preheating template 321 located above the rotating material plate 41, a second finger cylinder 322 disposed on the preheating template 321, and a second clamping jaw 323 connected to the second finger cylinder 322, where two ends of the second finger cylinder 322 are respectively provided with a second clamping jaw 323, and the second finger cylinder 322 is used for driving the two second clamping jaws 323 to clamp the material tray 200.
Optionally, the preheating template 321 can slide along the vertical direction under the driving of the external force, so that the second finger air cylinder 322 is convenient to drive the two second clamping jaws 323 to clamp the material taking tray 200 from the transfer mechanism 33, and release the material taking tray 200 on the rotating material plate 41 after the transfer mechanism 33 leaves, and the preheating mold is arranged below the preheating template 321, so that the material taking tray 200 can be preheated before being transferred to the hot pressing station 44, the temperature uniformity of the material taking tray 200 at the hot pressing station 44 is ensured, and the sintering quality is improved.
Referring to fig. 2 to 4, in some embodiments, the second clamping jaw 323 includes a second clamping plate 3231 connected to the second finger cylinder 322 and second clamping heads 3232 disposed on the second clamping plate 3231, the second clamping heads 3232 being disposed at a distance from each other.
Optionally, the tray 200 is provided with a limiting groove 208 at a position corresponding to each second clamping head 3232, and each second clamping head 3232 is respectively clamped in each limiting groove 208, so as to stably clamp the tray 200 and provide a more stable clamping force. The spaced arrangement of the second clamping heads 3232 ensures multi-point support and clamping of the tray 200, avoiding tilting and sliding of the tray 200 caused by single-point clamping. The second clamping plate 3231 is connected with the second finger cylinder 322, so that the second clamping head 3232 can flexibly adjust the position to adapt to the trays 200 with different sizes, stability and safety of the clamping process are improved, and the trays 200 are prevented from sliding down or shifting.
Alternatively, the clamping direction of the two first clamping jaws 311 is perpendicular to the clamping direction of the two second clamping jaws 323.
Referring to fig. 5, in some embodiments, the rotary material plate 41 is provided with a plurality of feeding slots 411 for placing the material tray 200, and each feeding slot 411 is arranged at intervals around the rotation center of the rotary material plate 41, and the rotary material plate 41 rotates, so that each feeding slot 411 sequentially passes through the hot pressing station.
Referring to fig. 5, alternatively, in the present embodiment, four feeding slots 411 are provided, and the four feeding slots 411 are arranged in an equal arc.
Referring to fig. 5, alternatively, by providing a plurality of loading slots 411 on the rotary tray 41, each loading slot 411 is arranged at intervals around the rotation center of the rotary tray 41, it is possible to accommodate and convey a plurality of trays 200 at the same time. The interval arrangement of the feeding grooves 411 enables the rotary material plates 41 to simultaneously perform feeding, hot pressing and discharging operations in the rotation process, namely, one feeding groove 411 is in a feeding preheating state, one feeding groove 411 is in a hot pressing state, one feeding groove 411 is in a discharging state, and the other feeding groove 411 is in a state to be fed, so that the material tray 200 can be continuously processed, and sintering efficiency is improved.
In some embodiments, the rotary feeding structure 300 further includes an electrical slip ring 412 disposed at the rotation center of the rotary table 41, and the electrical slip ring 412 rotates in synchronization with the rotary table 41.
It will be appreciated that electrical slip ring 412 is capable of communicating the outer tube air path, electrical components delivering electrical power and signals to rotating web 41. By providing electrical slip ring 412, wires connected to rotary feed structure 300 can be prevented from winding and knotting. The electrical slip ring 412 includes a rotor installed at the rotation center of the material selecting plate and a stator connected to the rotor, on which a plurality of gas path lines and a plurality of circuit lines are arranged, the gas path lines being capable of delivering nitrogen or inert gas to each of the material feeding slots 411 to make each of the material feeding slots 411 in an inert gas environment, or the gas path lines absorbing gas from each of the material feeding slots 411 to make each of the material feeding slots 411 in a vacuum environment. The gas line may also be configured to deliver formic acid atomizing gas having a reducing function to each of the feed slots 411. The circuit lines can provide electrical power, such as sensors and controllers, to the various electrical components of the rotary feed structure 300.
Referring to fig. 6, the present utility model further provides a sintering device, which includes a rotary feeding structure 300, and the specific structure of the rotary feeding structure 300 refers to the above embodiment, and since the sintering device adopts all the technical solutions of all the embodiments, the sintering device also has all the beneficial effects brought by the technical solutions of the embodiments, which are not described in detail herein.
In some embodiments, the sintering apparatus further comprises a hot press die disposed at the hot press station 44. The sintering device further comprises a blanking structure 35, wherein the blanking structure 35 is used for blanking the sintered tray 200.
Referring to fig. 6, the discharging structure 35 includes a conveying assembly 30 and a bin 203, the second clamping mechanism 32 in the conveying assembly 30 can clamp the tray 200 that is located at one of the loading slots 411 and is sintered, the transferring mechanism 33 moves the tray 200 to the first clamping mechanism 31, and the first clamping mechanism 31 clamps the sintered tray 200 and releases the sintered tray 200 to a predetermined position so as to collect the sintered tray 200 to the bin 203.
Alternatively, two bins 203 are provided, one bin 203 storing trays 200 to be sintered and the other bin 203 storing trays 200 that have been sintered.
The foregoing is merely an alternative embodiment of the present application and is not intended to limit the present application. Various modifications and variations of the present application will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202422473007.7U CN223101807U (en) | 2024-10-12 | 2024-10-12 | Rotary feeding structure and sintering equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202422473007.7U CN223101807U (en) | 2024-10-12 | 2024-10-12 | Rotary feeding structure and sintering equipment |
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| CN223101807U true CN223101807U (en) | 2025-07-15 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119509168A (en) * | 2024-10-12 | 2025-02-25 | 先连半导体(深圳)有限公司 | A rotary sintering equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119509168A (en) * | 2024-10-12 | 2025-02-25 | 先连半导体(深圳)有限公司 | A rotary sintering equipment |
| CN119509168B (en) * | 2024-10-12 | 2025-11-07 | 先连半导体(深圳)有限公司 | Rotary sintering equipment |
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Effective date of registration: 20251118 Address after: 518000 Guangdong province Shenzhen Baoan District Sha Jing Street Post Pavilion community Post Pavilion Maoshan Industrial Park Arts crafts emporium, all science and Technology Innovation Park, Chuang Chuang building 20 story F Patentee after: SHENZHEN XIANJIN CONNECTION TECHNOLOGY Co.,Ltd. Country or region after: China Address before: 518000 Guangdong Province Shenzhen City Bao'an District Shajing Street Houting Community Maozhou Mountain Industrial Park Quanzhi Science and Technology Innovation Park Building 1 1st Floor H 1st Floor J 1st Floor K Patentee before: Xianlian Semiconductor (Shenzhen) Co.,Ltd. Country or region before: China |
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